CN109870597A - A kind of heavy load wafer card overturning levelling mechanism - Google Patents
A kind of heavy load wafer card overturning levelling mechanism Download PDFInfo
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- CN109870597A CN109870597A CN201910190485.8A CN201910190485A CN109870597A CN 109870597 A CN109870597 A CN 109870597A CN 201910190485 A CN201910190485 A CN 201910190485A CN 109870597 A CN109870597 A CN 109870597A
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- gas spring
- risers
- support arm
- supporting arm
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- 230000007246 mechanism Effects 0.000 title claims abstract description 100
- 230000007306 turnover Effects 0.000 claims description 15
- 229910000831 Steel Inorganic materials 0.000 claims description 7
- 239000010959 steel Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 3
- 230000000712 assembly Effects 0.000 abstract description 2
- 238000000429 assembly Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Levelling mechanism is overturn more particularly to a kind of heavy load wafer card, it is related to semiconductor detection field, it is of the existing technology in order to solve the problems, such as comprising left risers, right risers, four gas spring assemblies, right rotation supporting arm mechanism, anticlockwise supporting arm mechanism, thread drawing mechanism, two adjustment mechanisms, upper cover plate and needle card fixation kit；Right rotation supporting arm mechanism is fixed in right risers, and anticlockwise supporting arm mechanism is screwed in left risers；Two gas spring assembly upper ends are connect with right rotation supporting arm mechanism, and lower end is connected with right risers；Other two gas spring assembly upper ends are connected with anticlockwise supporting arm mechanism, and lower end is connected with left risers；Thread drawing mechanism is fixed in right risers；Two adjustment mechanisms are separately fixed in left risers and right risers；Upper cover plate is fixed on two adjustment mechanisms, right rotation supporting arm mechanism and anticlockwise supporting arm mechanism；Needle card fixation kit is fixed on upper cover plate.The mechanism can be reliable and stable overturn upper cover plate, realize needle card high accuracy positioning.
Description
Technical field
The present invention relates to semiconductor detection fields, and in particular to a kind of heavy load wafer card overturning levelling mechanism.
Background technique
Turnover mechanism is easy to appear precision the case where not can guarantee after overturning, and the precision after guaranteeing overturning will appear and hold
The poor problem of loading capability.Semiconductor testing requirements precision is high, and required precision is at 2-5 μm, and its load of Zhen Ka bearing is opposite
Larger, load proposes very high requirement in 100 ㎏ or more, to the turnover mechanism of fixed pin card.Therefore it is big to design a kind of high-precision
Wafer card turnover mechanism is loaded, it is very necessary for wafer detection equipment.
Summary of the invention
The present invention is high in order to solve semiconductor testing requirements precision of the existing technology, and required precision is at 2-5 μm, and needle
It is relatively large to block its load of bearing, load proposes very high requirement in 100 ㎏ or more, to the turnover mechanism of fixed pin card.It mentions
Overturn levelling mechanism for a kind of heavy load wafer card, the mechanism can be reliable and stable overturn upper cover plate, realize that needle card is high
Precision positioning.
The scheme that the present invention solves technical problem is:
High-accuracy heavy-load wafer card turnover mechanism, characterized in that it includes left risers, right risers, four gas springs
The fixed group of component, right rotation supporting arm mechanism, anticlockwise supporting arm mechanism, thread drawing mechanism, two adjustment mechanisms, upper cover plate and needle card
Part；Right rotation supporting arm mechanism is fixed in right risers, and anticlockwise supporting arm mechanism is screwed in left risers；Two gas springs
Component upper end is connect with right rotation supporting arm mechanism, and lower end is connected with right risers；Other two gas spring assembly upper ends and anticlockwise
Supporting arm mechanism is connected, and lower end is connected with left risers；Thread drawing mechanism is fixed in right risers；Two adjustment mechanisms are separately fixed at a left side
On vertical plate and right risers；Upper cover plate is fixed on two adjustment mechanisms, right rotation supporting arm mechanism and anticlockwise supporting arm mechanism；Needle card
Fixation kit is fixed on upper cover plate.
Beneficial effects of the present invention: the mechanism can be reliable and stable overturn upper cover plate, realize needle card high accuracy positioning.
Fixed support arm can realize that upper cover plate vertical position is adjusted by screwdriver.By thread spindle in fixing seat on
Lower movement adjusts upper cover plate, adjusts upper cover plate, locking screw axis.To realize 4 points of upper cover plate leveling.
Lock card supports right rotating arm, is equivalent to two power bars, bearing capacity and lock card and right rotation support arm material is anti-crowded
Pressure energy power is related.
Needle card fixation kit is suitable for the needle card of different size model.
Detailed description of the invention
Invention is further described in detail with reference to the accompanying drawings and detailed description.
Fig. 1 is High-accuracy heavy-load wafer card turnover mechanism schematic diagram of the invention.
Fig. 2 is gas spring assembly structural schematic diagram of the present invention.
Fig. 3 is the structural schematic diagram of right rotation supporting arm mechanism of the present invention.
Fig. 4 is the diagrammatic cross-section of right rotation supporting arm mechanism of the present invention.
Fig. 5 is the structural schematic diagram of anticlockwise supporting arm mechanism of the present invention.
Fig. 6 is the diagrammatic cross-section of anticlockwise supporting arm mechanism of the present invention
Fig. 7 is thread drawing mechanism schematic diagram of the present invention.
Fig. 8 is the schematic diagram of adjustment mechanism of the present invention.
Wherein: 1, left risers；2, right risers；3, gas spring assembly；4, right rotation supporting arm mechanism；5, anticlockwise support arm machine
Structure；6, thread drawing mechanism；7, adjustment mechanism；8, upper cover plate；9, needle card fixation kit.
3-1, pin shaft one；3-2, gas spring connection one；3-3, gas spring；3-4 gas spring connection two；3-5, pin shaft two；3-
6, gas spring fixing piece.
4-1, right frame linking seat；4-2, right fixed support arm；4-3, screw one；4-4, lock card locating part；4-5, pin shaft three；4-6,
Screw two；4-7, lock card；4-8, bearing cap one；4-9, gas spring connector one；4-10, right rotation support arm；4-11, bearing one.
5-1, left frame linking seat；5-2, left fixed support arm；5-3, screw three；5-4, screw four；5-5, bearing cap two；5-6, a left side
Rotating arm；5-7, gas spring connector two；5-8, bearing two.
6-1, bracing wire；6-2, threading fixing seat；6-3, mounting angle plate one；6-4, handle；6-5, limited block；6-6, handle are solid
Determine block；6-7, handle limited block；6-8, mounting angle plate two.
7-1, thread spindle；7-2, support ring；7-3 fixing seat.
Specific embodiment
The present invention is described in further details with reference to the accompanying drawing.
As depicted in figs. 1 and 2, High-accuracy heavy-load wafer card turnover mechanism of the present invention comprising left risers 1, the right side are vertical
2, four gas spring assemblies 3 of plate, right rotation supporting arm mechanism 4, anticlockwise supporting arm mechanism 5,6, two adjustment mechanisms 7 of thread drawing mechanism,
Upper cover plate 8 and needle card fixation kit 9.
Right rotation supporting arm mechanism 4 is screwed in right risers 2, and anticlockwise supporting arm mechanism 5 is screwed vertical on a left side
On plate 1.
Two 3 upper ends of gas spring assembly are connect with right rotation supporting arm mechanism 4, and lower end is connected with right risers 2 with screw.In addition
Two 3 upper ends of gas spring assembly are connected with anticlockwise supporting arm mechanism 5, and lower end is connected with left risers 1 with screw.Thread drawing mechanism 6 is used
Screw is fixed in right risers 2.Two adjustment mechanisms 7 are separately fixed in left risers 1 and right risers 2 with screw.Upper cover plate 8 is used
Screw is fixed on two adjustment mechanisms 7, right rotation supporting arm mechanism 4 and anticlockwise supporting arm mechanism 5.Needle card fixation kit 9 uses spiral shell
Nail is fixed on upper cover plate 8.
As shown in Fig. 2, gas spring assembly 3 includes following components, one 3-1 of pin shaft, gas spring connect a 3-2, gas bullet
Spring 3-3, gas spring connect two 3-4, the gentle spring mountings 3-6 of two 3-5 of pin shaft.
Right rotation supporting arm mechanism 4 or anticlockwise supporting arm mechanism 5 are connected by one 3-1 of pin shaft and gas spring assembly 3.Gas spring
3-3, which is connected through a screw thread, to be fixed between two 3-4 of gas spring one 3-2 of connection and gas spring connection.Gas spring connects two 3-4 and passes through
Two 3-5 of pin shaft is fixed on gas spring fixing piece 3-6.Gas spring fixing piece 3-6 is fixed by screws in left risers 1 or right risers
Above 2.
As shown in Figure 3, Figure 4, right rotation supporting arm mechanism 4 is to consist of the following parts, right frame linking seat 4-1, right fixed support arm
4-2, two one 4-3 of screw, lock card locating part 4-4, three 4-5 of pin shaft, two two 4-6 of screw, lock card 4-7, one 4-8 of bearing cap,
One 4-9 of gas spring connector, right rotation support arm 4-10 and one 4-11 of bearing.
Right frame linking seat 4-1 is fixed by screws in right risers 2.Right fixed support arm 4-2 is fixed on the right side by one 4-3 of screw
On frame linking seat 4-1.Three 4-5 of pin shaft passes through lock card locating part 4-4 and lock card 4-7, they are fixed on right fixed support arm 4-2.
One 4-3 of screw is unclamped, right fixed support arm 4-2 relies on two 4-6 turn up and down adjustment of screw.One 4-11 of bearing is located at right fixed support arm
In 4-2.Right rotation support arm 4-10 is connected by one 4-11 of bearing with right fixed support arm 4-2, one 4-11 of bearing, one 4-8 of bearing cap
Limit.One 4-9 of gas spring connector is connected to the lower end right rotation support arm 4-10 with screw.The right rotation top support arm 4-10 and upper cover
Plate 8 is connected with screw.
As shown in Figure 5, Figure 6, anticlockwise supporting arm mechanism 4 is to consist of the following parts, left frame linking seat 5-1, left fixed support arm
5-2, two three 5-3 of screw, two four 5-4 of screw, two 5-5 of bearing cap, anticlockwise support arm 5-6, two 5-7 of gas spring connector and
Two 5-8 of bearing.
Left frame linking seat 5-1 is fixed by screws in left risers 1.Left fixed support arm 5-2 is fixed on a left side by four 5-4 of screw
On frame linking seat 5-1.Four 5-4 of screw is unclamped, left fixed support arm 5-2 relies on three 5-3 turn up and down adjustment of screw.Two 5-8, bearing
In left fixed support arm 5-2.Anticlockwise support arm 5-6 is connected by two 5-8 of bearing with left fixed support arm 5-2, two 5-8 axis of bearing
Hold two 5-5 of lid limit.Two 5-7 of gas spring connector is connected on anticlockwise support arm 5-6 with screw.The top anticlockwise support arm 5-6
It is connected with upper cover plate 8 with screw.
As shown in fig. 7, thread drawing mechanism 6 is to consist of the following parts, bracing wire 6-1, threading fixing seat 6-2, mounting angle plate one
6-3, handle 6-4, limited block 6-5, handle fixed block 6-6, handle limited block 6-7, two 6-8 of mounting angle plate.
It is steel wire on the inside of bracing wire 6-1, outside is plastic casing.Bracing wire 6-1 wirerope one end is fixed on the end lock card 4-7,
The wirerope other end is scheduled in handle limited block 6-7.The plastic casing of bracing wire 6-1 is fixed on threading fixing seat 6-2.Bracing wire 6-
1 steel wire can in plastic casing play.Handle 6-4 passes through handle fixed block 6-6 and handle limited block 6-7 and passes through screw thread phase
Even.Limited block 6-5 is threadedly attached on handle 6-4.Two threading fixing seat 6-2 respectively with one 6-3 of mounting angle plate and solid
Determine two 6-8 of bent plate to be connected by screw thread.Thread drawing mechanism 6 is by one 6-3 of mounting angle plate, handle fixed block 6-6 and mounting angle plate
Two 6-8 are connected by screw in right risers 2.
As shown in figure 8, levelling mechanism 7 includes thread spindle 7-1, support ring 7-2 and fixing seat 7-3.
Thread spindle 7-1, which is connected through a screw thread, is fixed by screws in fixing seat 7-3 across support ring 7-2, support ring 7-2
On.There is screw hole on fixing seat 7-3, is connect by screw with right risers 2 or left risers 1.Upper end passes through screw and 8 phase of upper cover plate
Even.
Turnover mechanism of the present invention is using preceding needing to be leveled.One 4-3 of screw is unclamped, right fixed support arm 4-2 can be according to
By two 4-6 turn up and down adjustment of screw；Four 5-4 of screw is unclamped, left fixed support arm 5-2 is rested against in three 5-3 turn of screw
Lower adjusting；Support ring 7-2 screwing is unclamped, thread spindle 7-1 can turn up and down adjustment.So as to 4 points of leveling upper cover plates 8.
Upper cover plate 8 is opened, the screw between upper cover plate 8 and levelling mechanism 7 need to be unclamped, upper cover plate 8 relies on gas spring 3-3
The power of generation turns over.At this point, the bearing in right rotation support arm 4-10 and right fixed support arm 4-2, anticlockwise support arm 5-6 and left fixation
Bearing rotary in support arm 5-2.Right rotation support arm 4-10 and anticlockwise support arm 5-6 with upper cover plate 8 because, to connection, also and then rotating
It turns over.Upper cover plate 8 is flared to maximum angular, and lock card 4-7 blocks right rotation support arm 4-10 at this time, prevents upper cover plate 8 in gas spring 3-3
It is fallen when failure.Lock card 4-7 supports right rotating arm 4-10 is equivalent to two power bars, bearing capacity and lock card 4-7 and right rotation
The anti-extrusion ability of support arm 4-10 material is related.
Upper cover plate 8 is closed, should first be lifted handle 6-4, handle limited block 6-7 drives the steel wire in bracing wire 6-1 by lock card
4-7 is pulled downward on, and downwards around three 4-5 of pin shaft rotation, right rotation support arm 4-10 is unlocked lock card 4-7.Gas spring is overcome by external force
3-3 pressure pushes upper cover plate 8.Screw after upper cover plate 8 closes, between locking and levelling mechanism 7.
The invention also includes needle card fixation kit 9, there is different-diameter step on needle card fixation kit 9, different rule can be met
Lattice needle fixes provisioning request.
Claims (7)
1. High-accuracy heavy-load wafer card turnover mechanism, characterized in that it includes left risers (1), right risers (2), four gas
Spring assembly (3), right rotation supporting arm mechanism (4), anticlockwise supporting arm mechanism (5), thread drawing mechanism (6), two adjustment mechanisms (7),
Upper cover plate (8) and needle card fixation kit (9)；
Right rotation supporting arm mechanism (4) is fixed on right risers (2), and anticlockwise supporting arm mechanism (5) is screwed in left risers (1)
On；
Two gas spring assembly (3) upper ends are connect with right rotation supporting arm mechanism (4), and lower end is connected with right risers (2)；Other two
Gas spring assembly (3) upper end is connected with anticlockwise supporting arm mechanism (5), and lower end is connected with left risers (1)；Thread drawing mechanism (6) is fixed
On right risers (2)；
Two adjustment mechanisms (7) are separately fixed in left risers (1) and right risers (2)；
Upper cover plate (8) is fixed on two adjustment mechanisms (7), right rotation supporting arm mechanism (4) and anticlockwise supporting arm mechanism (5)；
Needle card fixation kit (9) is fixed on upper cover plate (8).
2. High-accuracy heavy-load wafer card turnover mechanism according to claim 1, which is characterized in that the gas spring group
Part (3) includes pin shaft one (3-1), one (3-2) of gas spring connection, gas spring (3-3), gas spring connection two (3-4), pin shaft two
(3-5) gentle spring mountings (3-6)；
Pin shaft one (3-1) setting gas spring connect one (3-2) on, gas spring (3-3) be fixed on gas spring connect one (3-2) and
Gas spring connects between two (3-4)；Gas spring connects two (3-4) and is fixed on gas spring fixing piece (3-6) by pin shaft two (3-5)
On；
Gas spring fixing piece (3-6) is fixed on left risers (1) or right risers (2) above；
Right rotation supporting arm mechanism (4) or anticlockwise supporting arm mechanism (5) are connected by pin shaft one (3-1) and gas spring assembly (3).
3. High-accuracy heavy-load wafer card turnover mechanism according to claim 1, which is characterized in that the right rotation branch
Arm mechanism (4) includes right frame linking seat (4-1), right fixed support arm (4-2), two screws one (4-3), lock card locating part (4-4), pin
Axis three (4-5), two screws two (4-6), lock card (4-7), bearing cap one (4-8), gas spring connector one (4-9), right rotation
Support arm (4-10) and bearing one (4-11)；
Right frame linking seat (4-1) is fixed on right risers (2)；
Right fixed support arm (4-2) is fixed on right frame linking seat (4-1) by screw one (4-3)；Pin shaft three (4-5) is limited across lock card
Position part (4-4) and lock card (4-7), the two is fixed on right fixed support arm (4-2)；It unclamps screw one (4-3), right fixed support arm
(4-2) relies on screw two (4-6) turn up and down adjustment；
Bearing one (4-11) is located in right fixed support arm (4-2)；Right rotation support arm (4-10) is solid by bearing one (4-11) and the right side
Determine support arm (4-2) to be connected, bearing one (4-11) is limited with bearing cap one (4-8)；Gas spring connector one (4-9) is connected to dextrorotation
Turn the lower end support arm (4-10)；The right rotation support arm top (4-10) is connected with upper cover plate (8).
4. High-accuracy heavy-load wafer card turnover mechanism according to claim 1, which is characterized in that the anticlockwise branch
Arm mechanism (5) includes left frame linking seat (5-1), left fixed support arm (5-2), two screws three (5-3), two screws four (5-4), axis
Hold lid two (5-5), anticlockwise support arm (5-6), gas spring connector two (5-7) and bearing two (5-8)；
Left frame linking seat (5-1) is fixed on left risers (1)；
Left fixed support arm (5-2) is fixed on left frame linking seat (5-1) by screw four (5-4)；It unclamps screw four (5-4), Zuo Gu
Support arm (5-2) is determined by screw three (5-3) turn up and down adjustment；
Bearing two (5-8) is located in left fixed support arm (5-2)；Anticlockwise support arm (5-6) is by bearing two (5-8) and left fixed branch
Arm (5-2) is connected, and bearing two (5-8) is limited with bearing cap two (5-5)；Gas spring connector two (5-7) is connected to anticlockwise branch
On arm (5-6)；The anticlockwise support arm top (5-6) is connected with upper cover plate (8) with screw.
5. High-accuracy heavy-load wafer card turnover mechanism according to claim 3, which is characterized in that the thread drawing mechanism
It (6) include that bracing wire (6-1), threading fixing seat (6-2), mounting angle plate one (6-3), handle (6-4), limited block (6-5), handle are solid
Determine block (6-6), handle limited block (6-7) and mounting angle plate two (6-8)；
The one end bracing wire (6-1) is fixed on the end lock card (4-7), and the other end is scheduled in handle limited block (6-7)；Bracing wire (6-1) is solid
It is scheduled on threading fixing seat (6-2)；Handle (6-4) passes through handle fixed block (6-6) and is connected with handle limited block (6-7)；Limit
Block (6-5) is connected on handle (6-4)；Two threading fixing seats (6-2) respectively with mounting angle plate one (6-3) and mounting angle plate two
(6-8) is connected；Thread drawing mechanism (6) passes through mounting angle plate one (6-3), handle fixed block (6-6) and mounting angle plate two (6-8) connection
On right risers (2).
6. High-accuracy heavy-load wafer card turnover mechanism according to claim 5, which is characterized in that the bracing wire (6-
1) inside is steel wire, and outside is plastic casing, and bracing wire (6-1) steel wire one end is fixed on the end lock card (4-7), and the steel wire other end is fixed
In handle limited block (6-7)；The plastic casing of bracing wire (6-1) is fixed on threading fixing seat (6-2), the steel of bracing wire (6-1)
Silk can in plastic casing play.
7. High-accuracy heavy-load wafer card turnover mechanism according to claim 1, which is characterized in that the levelling mechanism
It (7) include thread spindle (7-1), support ring (7-2) and fixing seat (7-3)；
Thread spindle (7-1) is attached across support ring (7-2), and support ring (7-2) is fixed on fixing seat (7-3)；Fixing seat (7-3)
It is connect with right risers (2) or left risers (1)；The thread spindle upper end (7-1) is connected by screw with upper cover plate (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910190485.8A CN109870597B (en) | 2019-03-13 | 2019-03-13 | Large-load wafer needle clamp overturning and leveling mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910190485.8A CN109870597B (en) | 2019-03-13 | 2019-03-13 | Large-load wafer needle clamp overturning and leveling mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109870597A true CN109870597A (en) | 2019-06-11 |
| CN109870597B CN109870597B (en) | 2021-03-26 |
Family
ID=66920365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910190485.8A Active CN109870597B (en) | 2019-03-13 | 2019-03-13 | Large-load wafer needle clamp overturning and leveling mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109870597B (en) |
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-
2019
- 2019-03-13 CN CN201910190485.8A patent/CN109870597B/en active Active
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| TWI220171B (en) * | 2003-06-27 | 2004-08-11 | Macronix Int Co Ltd | Lift type probe card reverse-side probe adjustment tool |
| CN101490575A (en) * | 2006-09-28 | 2009-07-22 | 思科技术公司 | Single event upset test circuit and methodology |
| CN101614784A (en) * | 2008-06-26 | 2009-12-30 | 陈石矶 | Semiconductor element testing device |
| US20120139573A1 (en) * | 2010-12-04 | 2012-06-07 | Hon Hai Precision Industry Co., Ltd. | Test bracket for circuit board |
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| CN109870597B (en) | 2021-03-26 |
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