CN109870556A - Glass substrate support platform and glass substrate macro inspection apparatus - Google Patents
Glass substrate support platform and glass substrate macro inspection apparatus Download PDFInfo
- Publication number
- CN109870556A CN109870556A CN201811603603.5A CN201811603603A CN109870556A CN 109870556 A CN109870556 A CN 109870556A CN 201811603603 A CN201811603603 A CN 201811603603A CN 109870556 A CN109870556 A CN 109870556A
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- Prior art keywords
- glass substrate
- crossbeam
- support platform
- substrate support
- pressure source
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Abstract
This disclosure relates to a kind of glass substrate support platform and glass substrate macro inspection apparatus, wherein, multiple suckers that glass substrate support platform includes: frame, more crossbeams on said frame are arranged side by side and are connected on the crossbeam, the crossbeam has the cavity being connected to the sucker, and the crossbeam has been selectively connected positive pressure source or negative pressure source.Through the above technical solutions, connecting positive pressure source and negative pressure source with the crossbeam property of can choose of sucker connection.When connecting positive pressure source, sucker can blow outward, and support platform can be used as air floating platform use, can be scratched to avoid the surface of glass substrate；When connecting negative pressure source, sucker can inside air-breathing glass substrate can be made to be steadily placed on platform to adsorb glass substrate.That is, the glass substrate support platform that the disclosure provides can switch between both of which, meet different applications.
Description
Technical field
This disclosure relates to glass substrate manufacturing field, and in particular, to a kind of glass substrate support platform and glass substrate
Macro inspection apparatus.
Background technique
In the production process of glass substrate, it is often necessary to be placed in support platform and the behaviour such as be processed, cleaned, checked
Make.
In the related technology, support platform is usually formed as one or more platen surfaces, or has been support and transmission effect
Idler wheel, glass substrate is directly placed on supporting surface.In order to avoid being scratched when glass substrate is with support face contact, some improvement
In scheme, air-floating apparatus is set in support platform, supports glass substrate by constantly blowing.But use air-floating apparatus
Platform has the shortcomings that stability is poor, is not suitable for applying the feelings more demanding in the positional stability of some pairs of glass substrates
Condition.
Summary of the invention
Purpose of this disclosure is to provide a kind of glass substrate support platform, which can select according to use environment
Adjust supporting way to property.
Another object of the present disclosure is to provide a kind of glass substrate macro inspection apparatus, glass substrate macro -graph dress
The glass substrate support platform provided including the disclosure is provided.
To achieve the goals above, the disclosure provides a kind of glass substrate support platform, comprising: frame is disposed side by side on
More crossbeams on the frame and the multiple suckers being connected on the crossbeam, the crossbeam has and the sucker connects
Logical cavity, the crossbeam have been selectively connected positive pressure source or negative pressure source.
Optionally, the side wall protrusion of the crossbeam is formed with hollow boss, and the sucker includes oral area and neck, described
It is inserted into the boss to neck interference fit.
Optionally, the internal diameter of the oral area is greater than the internal diameter of the neck.
Optionally, protrusion is formed on the outside of the neck, the protrusion is supported in the end face of the boss.
Optionally, the ratio between internal diameter of the internal diameter of the neck and the crossbeam is 1:6-1:10.
Optionally, the frame is configured to rectangle rack, and the crossbeam is configured to tee girder, and the two sides of the crossbeam are overlapped on
On the frame.
Optionally, the crossbeam is removably mounted on the frame.
Optionally, the more crossbeams are arranged at equal intervals, and multiple suckers on the every crossbeam are arranged at equal intervals.
Optionally, the both ends of the crossbeam are provided with gas-tpe fitting.
According to the second aspect of the disclosure, a kind of glass substrate macro inspection apparatus is provided, including is used for bearing glass
The support platform of substrate, the support platform are according to above-described glass substrate support device.
Through the above technical solutions, connecting positive pressure source and negative pressure source with the crossbeam property of can choose of sucker connection.When even
When connecing positive pressure source, sucker can blow outward, and support platform can be used as air floating platform use, can be to avoid the table of glass substrate
Face is scratched；When connecting negative pressure source, sucker can inside air-breathing to adsorb glass substrate can make glass substrate steadily
It is placed on platform.That is, the glass substrate support platform that the disclosure provides can switch between both of which, meet different answer
Use occasion.
Other feature and advantage of the disclosure will the following detailed description will be given in the detailed implementation section.
Detailed description of the invention
Attached drawing is and to constitute part of specification for providing further understanding of the disclosure, with following tool
Body embodiment is used to explain the disclosure together, but does not constitute the limitation to the disclosure.In the accompanying drawings:
Fig. 1 is the schematic diagram of glass substrate support platform in accordance with one embodiment of the present disclosure；
Fig. 2 is schematic diagram of the glass substrate support platform shown in fig. 1 when supporting glass substrate；
Fig. 3 is the schematic diagram of the crossbeam for being connected with nozzle in glass substrate support platform shown in fig. 1；
Fig. 4 is gas flow signal of the crossbeam in a working condition in glass substrate support platform shown in fig. 1
Figure, wherein arrow is oriented gas flow；
Fig. 5 is that gas flow of the crossbeam in another working condition in glass substrate support platform shown in fig. 1 is shown
It is intended to, wherein arrow is oriented gas flow；
Fig. 6 is the schematic diagram of the nozzle in glass substrate support platform shown in fig. 1.
Description of symbols
1 frame, 2 crossbeam
21 boss, 22 gas-tpe fitting
3 sucker, 31 oral area
32 neck, 321 protrusion
4 glass substrates
Specific embodiment
It is described in detail below in conjunction with specific embodiment of the attached drawing to the disclosure.It should be understood that this place is retouched
The specific embodiment stated is only used for describing and explaining the disclosure, is not limited to the disclosure.
In the disclosure, in the absence of explanation to the contrary, noun of locality "upper", the "lower" used refers to support platform just
It is often used the upper and lower of state, specifically can refer to the page of Fig. 4 and Fig. 5；"inner", "outside" are the sheets for corresponding components
For body profile.When being related to attached drawing, the unified appended drawing reference in different attached drawings indicates identical element for following description.
As depicted in figs. 1 and 2, the disclosure provides a kind of glass substrate support platform, is used for bearing glass substrate 4, the branch
Supportting platform includes frame 1, more crossbeams 2 being disposed side by side on frame 1 and the multiple suckers 3 being connected on crossbeam 2.Such as
Shown in Fig. 4 and Fig. 5, crossbeam 2 has the cavity being connected to sucker 3, and crossbeam 2 has been selectively connected positive pressure source or negative pressure source (figure
In be not shown).Here, every crossbeam 2 can be configured with one group of positive pressure source and negative pressure source, and more crossbeams 2 can also share one group
Positive pressure source and negative pressure source.In this way, when crossbeam 2 connects positive pressure source, sucker 3 can blow outward, and support platform can referring to Fig. 4
To be used as air floating platform, can be scratched to avoid the surface of glass substrate 4；Referring to Fig. 5, when crossbeam 2 connects negative pressure source,
Sucker 3 can inside air-breathing glass substrate 4 can be made to be steadily placed on platform to adsorb glass substrate 4.That is, the disclosure mentions
The glass substrate support platform of confession can switch between both of which, meet different application environments.
In order to facilitate replacing or clearing up sucker 3, sucker 3 can be connected on crossbeam 2 in the form of dismountable, such as can be with
Using the forms such as be clamped or be spirally connected.In accordance with one embodiment of the present disclosure, as shown in Figures 3 to 5, the side wall of crossbeam 2 is convex
Be formed with hollow boss 21 out, the opening of the boss 21 upward so that gas when passing through opening straight up, hang down
Directly in the surface of glass substrate 4, so as to avoid the air-flow for favouring surface from scratching glass substrate 4.Sucker 3 may include with
The oral area 31 that outside is connected to and the neck 32 for being connected in boss 21, specifically, outer peripheral surface and the boss 21 of neck 32
The cooperation of inner peripheral surface shape, and neck 32 is inserted into boss 21 with being interference fitted, to improve between neck 32 and boss 21
Sealing effect avoids gas from flowing from gap between the two, influences the support effect of support platform.
Further, the internal diameter of oral area 31 can be greater than the internal diameter of neck 32.In this way, since oral area 31 directly connects with outside
Logical, i.e., closer to glass substrate 4, internal diameter is larger can to generate relatively large adsorption capacity in air-breathing, generate when blowing
Relatively large support force.What needs to be explained here is that the internal diameter of oral area 31 and neck 32 can not be isometrical cylinder, such as
Oral area 31 can be structured as the gas nozzle shape of taper, can improve when adsorbing glass substrate 4 and the contact area of glass substrate 4.
The internal diameter of oral area 31 above-mentioned is greater than the comparison that the internal diameter of neck 32 is to the internal diameter on the two overall construction, such as is scheming
In embodiment shown in 3, the internal diameter of neck 32 is configured to isometrical cylinder, and the internal diameter of oral area 31 is configured to the variable diameter of multisection type
Structure, every section of internal diameter are all larger than the internal diameter of neck 32.
Referring to Fig. 3 to Fig. 5, the outside of neck 32 could be formed with protrusion 321, and protrusion 321 is supported in the end face of boss 21,
That is the radially protruding part of the neck 32 can be locked on the end face of boss 21, be limited by the end face.Further, protrusion 321
Sealing ring (not shown) can be set between the end face of boss 21, which can be arranged over the neck 32, energy
The sealing effect between neck 32 and boss 21 is enough improved, gas is avoided to flow from gap between the two, it is flat to influence support
The support effect of platform.
In order to maintain the support force generated at sucker 3 and adsorption capacity to stablize, the internal diameter of crossbeam 2 can be much larger than sucker 3
Internal diameter.In this way, when negative pressure works, since 3 internal diameter of sucker is smaller, by flow be far smaller than and stored in the cavity of crossbeam 2
Flow, such 3 surface of sucker will generate stable suction, and the fluctuation generated to the variation of external negative pressure source is smaller.Positive pressure
When work, since the internal diameter of sucker 3 is smaller, consumed flow of being blown upwards by sucker 3 is much smaller than in the cavity of crossbeam 2 and stores up
The flow deposited, such 3 surface of sucker will generate stable air blowing i.e. buoyancy, the fluctuation generated to the variation of external positive pressure source
It is smaller, it can steadily support glass substrate 4.For example, including 31 He of oral area in above-mentioned sucker 3 according to one embodiment
In the embodiment of neck 32, crossbeam 2 and neck 32 are diameter identical latus rectum everywhere, internal diameter and the crossbeam 2 of neck 32
The ratio between internal diameter can be 1:6-1:10.It is further to note that the internal structure of crossbeam 2 is not necessarily round, such as when it
When internal structure formation is square, internal diameter can refer to the side length of a line.
As shown in Figure 1 to Figure 3, according to one embodiment, frame 1 is it is so structured that rectangle rack, crossbeam 2 are configured to T shape
Beam, the two sides of crossbeam 2 are overlapped on crossbeam 1.Thus it is possible, on the one hand, the step part at the both ends of T-shaped structure can be in installation crossbeam
It plays the role of positioning when 2；On the other hand, a part of crossbeam 2 is located at the inside of frame 1, and non-integral is overlapped on frame 1, should
The non-bulging upper surface and lower end surface in frame 1 in part, can save the vertical space of support platform.In addition, the bottom of crossbeam 2
Can be concordant with the bottom of frame 1, in such manner, it is possible to while the bottom for ensuring support platform is stablized and placed, so that crossbeam 2
Cavity is sufficiently large, as set forth above, it is possible to stablize the adsorption capacity generated at sucker 3 or support force.
According to some embodiments, crossbeam 2 can be removably mounted on frame 1, on the one hand convenient for safeguarding and replacement, separately
On the one hand the installation site convenient for the size adjustment crossbeam 2 of the power according to needed for support platform on frame 1.
As shown in Figure 1, more crossbeams 2 can be disposed at equal intervals, multiple suckers 3 on every crossbeam 2 can also be at equal intervals
Setting can provide uniformly glass substrate 4 by sucker 3 in this way, no matter crossbeam 2 connects positive pressure source or negative pressure source
Power.
In addition, as shown in Figures 1 to 5, gas-tpe fitting 22 has can be set in the both ends of crossbeam 2, that is, can be from crossbeam 2
Two sides blow or air-breathing, to avoid unilateral blow or the power of the sucker 3 on same crossbeam 2 that when air-breathing generates is uneven
The problem of weighing apparatus.
According to another reverse side of the disclosure, a kind of glass substrate macro inspection apparatus is provided, including is used for bearing glass
The support platform of substrate, the support platform are above-mentioned glass substrate support platform.The macro inspection apparatus that the disclosure provides
Whole beneficial effects with above-mentioned support platform, details are not described herein again.
The preferred embodiment of the disclosure is described in detail in conjunction with attached drawing above, still, the disclosure is not limited to above-mentioned reality
The detail in mode is applied, in the range of the technology design of the disclosure, a variety of letters can be carried out to the technical solution of the disclosure
Monotropic type, these simple variants belong to the protection scope of the disclosure.
It is further to note that specific technical features described in the above specific embodiments, in not lance
In the case where shield, can be combined in any appropriate way, in order to avoid unnecessary repetition, the disclosure to it is various can
No further explanation will be given for the combination of energy.
In addition, any combination can also be carried out between a variety of different embodiments of the disclosure, as long as it is without prejudice to originally
Disclosed thought equally should be considered as disclosure disclosure of that.
Claims (10)
1. a kind of glass substrate support platform characterized by comprising frame (1) is disposed side by side on the frame (1)
More crossbeams (2) and the multiple suckers (3) being connected on the crossbeam (2), the crossbeam (2) have and the sucker (3)
The cavity of connection, the crossbeam (2) have been selectively connected positive pressure source or negative pressure source.
2. glass substrate support platform according to claim 1, which is characterized in that the side wall of the crossbeam (2) protrudes shape
At having hollow boss (21), the sucker (3) includes oral area (31) and neck (32), is inserted to neck (32) interference fit
Enter in the boss (21).
3. glass substrate support platform according to claim 2, which is characterized in that the internal diameter of the oral area (31) is greater than institute
State the internal diameter of neck (32).
4. glass substrate support platform according to claim 2, which is characterized in that be formed on the outside of the neck (32)
Raised (321), the protrusion (321) are supported in the end face of the boss (21).
5. glass substrate support platform according to claim 2, which is characterized in that the internal diameter of the neck (32) with it is described
The ratio between internal diameter of crossbeam (2) is 1:6-1:10.
6. glass substrate support platform according to claim 1, which is characterized in that the frame (1) is configured to rectangle rack,
The crossbeam (2) is configured to tee girder, and the two sides of the crossbeam (2) are overlapped on the frame (1).
7. glass substrate support platform according to claim 1, which is characterized in that the crossbeam (2) is removably installed
On the frame (1).
8. glass substrate support platform according to claim 1, which is characterized in that the more crossbeams (2) set at equal intervals
It sets, multiple suckers (3) on the every crossbeam (2) are arranged at equal intervals.
9. glass substrate support platform according to claim 1 to 8, which is characterized in that the crossbeam (2)
Both ends are provided with gas-tpe fitting (22).
10. a kind of glass substrate macro inspection apparatus, the support platform including being used for bearing glass substrate (4), which is characterized in that
The support platform is according to glass substrate support platform of any of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811603603.5A CN109870556A (en) | 2018-12-26 | 2018-12-26 | Glass substrate support platform and glass substrate macro inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811603603.5A CN109870556A (en) | 2018-12-26 | 2018-12-26 | Glass substrate support platform and glass substrate macro inspection apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109870556A true CN109870556A (en) | 2019-06-11 |
Family
ID=66917157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811603603.5A Pending CN109870556A (en) | 2018-12-26 | 2018-12-26 | Glass substrate support platform and glass substrate macro inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109870556A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110672629A (en) * | 2019-11-07 | 2020-01-10 | 江苏上达电子有限公司 | Method for preventing COF product from generating back scratch during appearance inspection |
| CN112461164A (en) * | 2020-12-09 | 2021-03-09 | 蚌埠中光电科技有限公司 | Advanced generation TFT-LCD glass substrate air supporting device |
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| CN201670585U (en) * | 2010-05-19 | 2010-12-15 | 河北东旭投资集团有限公司 | High-efficiency loading device of glass substrates |
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| CN206230372U (en) * | 2016-10-31 | 2017-06-09 | 彩虹（合肥）液晶玻璃有限公司 | One kind prevents liquid crystal glass base sucker printing equipment from putting |
| CN207488292U (en) * | 2017-10-20 | 2018-06-12 | 合肥欣奕华智能机器有限公司 | A kind of glass substrate bearing platform |
| CN207645598U (en) * | 2017-12-26 | 2018-07-24 | 贵州汤姆逊电气有限公司 | A kind of Acetabula device for large scale liquid crystal glass substrate |
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2018
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201670585U (en) * | 2010-05-19 | 2010-12-15 | 河北东旭投资集团有限公司 | High-efficiency loading device of glass substrates |
| CN202367630U (en) * | 2011-12-13 | 2012-08-08 | 广州信邦汽车装备制造有限公司 | Vacuum sucker device |
| CN103342205A (en) * | 2013-07-01 | 2013-10-09 | 深圳市华星光电技术有限公司 | Cartridge and glass substrate transporting device |
| CN206230372U (en) * | 2016-10-31 | 2017-06-09 | 彩虹（合肥）液晶玻璃有限公司 | One kind prevents liquid crystal glass base sucker printing equipment from putting |
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| CN207645598U (en) * | 2017-12-26 | 2018-07-24 | 贵州汤姆逊电气有限公司 | A kind of Acetabula device for large scale liquid crystal glass substrate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110672629A (en) * | 2019-11-07 | 2020-01-10 | 江苏上达电子有限公司 | Method for preventing COF product from generating back scratch during appearance inspection |
| CN112461164A (en) * | 2020-12-09 | 2021-03-09 | 蚌埠中光电科技有限公司 | Advanced generation TFT-LCD glass substrate air supporting device |
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Legal Events
| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 223800 178 JinJiHu Road, Suqian Economic Development Zone, Jiangsu Province Applicant before: JIANGSU DONGXU YITAI INTELLIGENT EQUIPMENT Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20201224 Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant before: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190611 |