CN109841554A - A kind of hundred shaping charging equipments of silicon wafer - Google Patents
A kind of hundred shaping charging equipments of silicon wafer Download PDFInfo
- Publication number
- CN109841554A CN109841554A CN201910226173.8A CN201910226173A CN109841554A CN 109841554 A CN109841554 A CN 109841554A CN 201910226173 A CN201910226173 A CN 201910226173A CN 109841554 A CN109841554 A CN 109841554A
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- fixedly connected
- screw rod
- mounting rack
- clamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 76
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 76
- 239000010703 silicon Substances 0.000 title claims abstract description 76
- 238000007493 shaping process Methods 0.000 title claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- 230000002035 prolonged effect Effects 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 54
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000035611 feeding Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910021418 black silicon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of hundred shaping charging equipments of silicon wafer, including equipment rack, the upper surface of the equipment rack is fixedly installed with a silicon wafer lift mechanism, a piece folder conveying microscope carrier is fixedly installed on the silicon wafer lift mechanism, the surface of described folder conveying microscope carrier is equipped with a silicon wafer and stacks reshaping device, the lower end that the silicon wafer stacks reshaping device is respectively fixedly connected with the four corners in silicon wafer lift mechanism upper surface, the silicon wafer lift mechanism includes support plate, the beneficial effects of the present invention are: a kind of hundred shaping charging equipments of silicon wafer of the present invention, its structure novel, it is easy to operate, it is easy to use, pass through the input of front and back end, output, convenient, flexible hundred shapings of silicon wafer for realizing this station, piece presss from both sides station replacement charging, improve productivity, it saves artificial, reduce silicon wafer loss, improve working efficiency and quality, and System information, which synchronizes, to be followed, and the trackability of product is improved.
Description
Technical field
The present invention relates to a kind of shaping charging equipment, in particular to a kind of hundred charging equipments of thin slice silicon wafer belong to the sun
It can photovoltaic apparatus technical field.
Background technique
Since black silicon wafer belongs to fragile article, silicon wafer single-sheet thickness only has 0.2mm, using turnover box transportation；It is needed at feeding end
Manually 100 silicon wafers to be put into upper tablet folder, upper tablet folder is re-fed into production line and carries out making herbs into wool production；Since silicon wafer has
Have thin and frangible characteristic, be easy to produce in feeding process touch while, it is broken while, information tracing is poor, and the duplication of labour is big, and efficiency is not
Height, Personnel Dependence are strong.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the defect of the prior art, a kind of hundred shaping feedings of silicon wafer are provided and are set
It is standby, to solve the problems, such as to mention in above-mentioned background technique.
In order to solve the above-mentioned technical problems, the present invention provides the following technical solutions:
A kind of hundred shaping charging equipments of silicon wafer of the present invention, including equipment rack, the upper surface of the equipment rack are fixed
One silicon wafer lift mechanism is installed, a piece folder conveying microscope carrier, described folder are fixedly installed on the silicon wafer lift mechanism
The surface for conveying microscope carrier is equipped with a silicon wafer and stacks reshaping device, and the lower end of the silicon wafer stacking reshaping device is fixed respectively to be connected
Connect the four corners in silicon wafer lift mechanism upper surface.
As a preferred technical solution of the present invention, the silicon wafer lift mechanism includes support plate, and the support plate is solid
Surely it is connected to the upper surface of equipment rack, the upper surface of the support plate is fixedly connected with two first straight line guide rails, two institutes
State the servo electric cylinders that a setting in a vertical shape is slidably connected on first straight line guide rail, the lower end of two servo electric cylinders
Run through support plate and extend and extend downwardly, the output end of two servo electric cylinders runs through the upper end of first straight line guide rail simultaneously
An electric cylinders top plate is upwardly extended and is fixedly connected with, the upper surface of the support plate is about two first straight line center line of guide rail
Position be fixedly connected with an electric cylinders mobile cylinder, the output end of the electric cylinders mobile cylinder is fixedly connected on two servo electricity
On cylinder.
As a preferred technical solution of the present invention, described folder conveying microscope carrier includes bracket, the fixed peace of the bracket
Mounted in the upper surface of equipment rack, two pieces of limited blocks are slidably connected at the wherein one side edge of the rack upper surface, it is described
The position of the corresponding two pieces of limited blocks in the lower surface of bracket is fixedly connected to a driving motor, and the lower surface of the bracket is separate
Clamping cylinder, fixed company in two opposite side walls of the bracket are rotated there are two being fixedly connected at the one side edge of driving motor
It is connected to a side and pushes away clamping cylinder, there are four upper tablets to press from both sides for the upper surface placement of the bracket, upper tablet folder described in two of them
Wherein side side wall offset with corresponding limited block, two sides push away the output end of clamping cylinder respectively with four feedings
The correspondence side wall of piece folder offsets, and upper tablet folder corresponding with two offsets the output end of two rotation clamping cylinders respectively.
As a preferred technical solution of the present invention, it includes fixed frame that the silicon wafer, which stacks reshaping device, the fixation
Frame is fixedly connected on the four corners of support plate upper surface, and the upper surface of the fixed frame is fixedly connected with two second straight lines and leads
Rail slidably connects a mounting rack on two second straight line guide rails jointly, and the fixed frame is wherein on the side wall of side
It is fixedly connected with station cylinder switching, the upper end of the station cylinder switching is fixedly connected on the lower surface of mounting rack, the peace
It shelves and is threaded with a front and back clamping screw rod on the wherein side wall of side, peace is run through at the both ends that the front and back clamps screw rod
The correspondence side wall shelved simultaneously extends outwardly, and the front and back clamps wherein one end that screw rod is located at outside mounting rack and is fixedly connected with one
Front and back clamping motor, the front and back clamping motor are fixedly connected with two panels front and back clamping plate far from one end that front and back clamps screw rod,
One or so clamping screw rod is rotatablely connected by bearing between the two opposite side walls of the mounting rack, the left and right clamps screw rod
Wherein one end runs through the correspondence side wall of mounting rack and extends outwardly, and the corresponding left and right in the upper surface of the mounting rack clamps the position of screw rod
It sets and is fixedly connected with one or so clamping motor, the output end of the left and right clamping motor is fixedly connected on left and right and clamps screw rod position
In one end outside mounting rack, the upper surface of the mounting rack is fixedly connected with a third linear guide, and the third straight line is led
Two groups or so clamping plates are slidably connected on rail, left and right clamping plate described in every group includes that two pieces of left and right being symmetrical set clamp
Plate, the left and right in the two opposite side walls of the mounting rack clamp the screw thread on screw rod bar wall and clamp about every group two pieces or so
Plate is arranged in symmetry shape, and four pieces of left and right clamping plates clamp screw rod to threaded connection with left and right.
The beneficial effects of the present invention are: a kind of hundred shaping charging equipments of silicon wafer of the present invention, structure novel, operation letter
Single, easy to use, by the input of front and back end, output, convenient, flexible hundred shapings of silicon wafer for realizing this station, piece press from both sides station
Replacement charging, improves productivity, saves artificial, reduces silicon wafer loss, improves working efficiency and quality, and system information it is synchronous with
With improving the trackability of product.
Detailed description of the invention
Attached drawing is used to provide further understanding of the present invention, and constitutes part of specification, with reality of the invention
It applies example to be used to explain the present invention together, not be construed as limiting the invention.In the accompanying drawings:
Attached drawing is used to provide further understanding of the present invention, and constitutes part of specification, with reality of the invention
It applies example to be used to explain the present invention together, not be construed as limiting the invention.
In the accompanying drawings:
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the overall structure diagram of silicon wafer lift mechanism of the present invention；
Fig. 3 is the overlooking structure diagram of silicon wafer lift mechanism of the present invention；
Fig. 4 is the overall structure diagram of piece folder conveying microscope carrier of the present invention；
Fig. 5 is the overall structure diagram that silicon wafer of the present invention stacks reshaping device；
Fig. 6 is the overlooking structure diagram that silicon wafer of the present invention stacks reshaping device.
In figure:
1, equipment rack；
2, silicon wafer lift mechanism；21, servo electric cylinders；22, first straight line guide rail；23, electric cylinders top plate；24, the mobile gas of electric cylinders
Cylinder；25, support plate；
3, piece folder conveying microscope carrier；31, driving motor；32, side pushes away clamping cylinder；33, clamping cylinder is rotated；34, limited block；
35, bracket；36, upper tablet folder；
4, silicon wafer stacks reshaping device；41, station cylinder switching；42, second straight line guide rail；43, front and back clamping plate；44,
Front and back clamping motor；45, front and back clamps screw rod；46, left and right clamping plate；47, second straight line guide rail；48, left and right clamps screw rod；
49, left and right clamping motor；410, fixed frame；411, mounting rack.
Specific embodiment
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, it should be understood that preferred reality described herein
Apply example only for the purpose of illustrating and explaining the present invention and is not intended to limit the present invention.
Embodiment
As shown in figures 1 to 6, a kind of hundred shaping charging equipments of silicon wafer of the present invention, including equipment rack 1, equipment rack 1
Upper surface is fixedly installed with a silicon wafer lift mechanism 2, and a piece folder conveying microscope carrier 3 is fixedly installed on silicon wafer lift mechanism 2,
The surface of piece folder conveying microscope carrier 3 is equipped with a silicon wafer and stacks reshaping device 4, and the lower end that silicon wafer stacks reshaping device 4 is solid respectively
Surely the four corners of 2 upper surface of silicon wafer lift mechanism are connected to.
Silicon wafer lift mechanism 2 includes support plate 25, and support plate 25 is fixedly connected on the upper surface of equipment rack 1, support plate
25 upper surface is fixedly connected with two first straight line guide rails 22, slidably connects one on two first straight line guide rails 22 and is in
The servo electric cylinders 21 of vertical shape setting, the lower end of two servo electric cylinders 21, which is run through support plate 25 and extended, to be extended downwardly, and two
The output end of servo electric cylinders 21 runs through the upper end of first straight line guide rail 22 and upwardly extends and be fixedly connected with an electric cylinders top
The upper surface of plate 23, support plate 25 is fixedly connected with an electric cylinders movement about the position of two 22 center lines of first straight line guide rail
Cylinder 24, the output end of electric cylinders mobile cylinder 24 are fixedly connected in two servo electric cylinders 21.
Piece folder conveying microscope carrier 3 includes bracket 35, and bracket 35 is fixedly mounted on the upper surface of equipment rack 1, table on bracket 35
Two pieces of limited blocks 34, the position of the corresponding two pieces of limited blocks 34 in the lower surface of bracket 35 are slidably connected at the wherein one side edge in face
It is fixedly connected to a driving motor 31, the lower surface of bracket 35 at the one side edge of driving motor 31 far from being fixedly connected with
Two rotation clamping cylinders 33 are fixedly connected to a side in two opposite side walls of bracket 35 and push away clamping cylinder 32, bracket 35
Upper surface place there are four upper tablet folder 36, in two of them the wherein side side wall of tablet folder 36 with corresponding limited block
34 offset, and the output end that two sides push away clamping cylinder 32 offsets with the corresponding side wall of four upper tablet folders 36 respectively, two rotations
Upper tablet folder 36 corresponding with two offsets the output end of clamping cylinder 33 respectively.
It includes fixed frame 410 that silicon wafer, which stacks reshaping device 4, and fixed frame 410 is fixedly connected on the four of 25 upper surface of support plate
At angle, the upper surface of fixed frame 410 is fixedly connected with two second straight line guide rails 42, slides jointly on two second straight line guide rails 42
Dynamic to be connected with a mounting rack 411, fixed frame 410 is wherein fixedly connected with station cylinder switching 41, station on the side wall of side
The upper end of cylinder switching 41 is fixedly connected on the lower surface of mounting rack 411, and mounting rack 411 is wherein threadedly coupled on the side wall of side
There is a front and back to clamp screw rod 45, the both ends that front and back clamps screw rod 45 run through the correspondence side wall of mounting rack 411 and extend outwardly,
Front and back clamps screw rod 45 and is located at clamping motor 44 before and after wherein one end outside mounting rack 411 is fixedly connected with one, and front and back clamps
Motor 44 is fixedly connected with two panels front and back clamping plate 43, the two opposite sides of mounting rack 411 far from one end that front and back clamps screw rod 45
One or so clamping screw rod 48 is rotatablely connected by bearing between wall, mounting rack is run through in wherein one end that left and right clamps screw rod 48
411 correspondence side wall simultaneously extends outwardly, and the position that the corresponding left and right in the upper surface of mounting rack 411 clamps screw rod 48 is fixedly connected with one
A or so clamping motor 49, the output end of left and right clamping motor 49 are fixedly connected on left and right clamping screw rod 48 and are located at mounting rack 411
Outer one end, the upper surface of mounting rack 411 are fixedly connected with a third linear guide 47, are slidably connected in third linear guide
There are two groups or so clamping plates 46, every group or so clamping plate 46 includes two pieces of left and right clamping plates 46 being symmetrical set, and is located at peace
It is in pair that the screw thread on the left and right clamping 48 bar wall of screw rod in 411 two opposite side walls, which is shelved, about every group two pieces or so clamping plates 46
Claim shape setting, four pieces or so clamping plates 46 clamp screw rod 48 to threaded connection with left and right.
Specifically, the present invention is pressed from both sides in conveying microscope carrier 3 in use, upper tablet folder 36 is sent into piece by rear end equipment conveying,
The start-up operation of clamping cylinder 32 is pushed away when upper tablet folder 36 bumps against on rear side of limited block 34, upper tablet folder 36 is pushed into fix on one side, together
Shi Xuanzhuan clamping cylinder 33 is started to work, and upper tablet folder 36 is pushed to 34 direction of limited block, it is fixed；Upper tablet folder
After 36 is fixed, silicon wafer stacks reshaping device 4 and starts, and detects each component state and returns origin, will by station cylinder switching 41
Silicon wafer stacks reshaping device 4 and is moved to piece the first station of folder；After silicon wafer stacks 4 first station on earth of reshaping device, silicon wafer support
It lifts mechanism 2 to start, detects each component state and return origin, be moved to silicon wafer lift mechanism 2 by electric cylinders mobile cylinder 24
Piece presss from both sides the first station, and servo electric cylinders 21 drive electric cylinders top plate 23 to stretch out, and the working plate in upper tablet folder 36 is jacked high to setting
Degree, which is located at silicon wafer and stacks in reshaping device 4, by setting in debugging process；Initial shape is reached in all mechanisms
After state, feed mechanism one whole hundred silicon chip extracting is placed on extend to silicon wafer stack reshaping device 4 in electric cylinders top plate 23 it
On, left and right clamping motor 49 clamps screw rod 48 by left and right and drives left and right clamping plate 46 later, by silicon wafer left and right directions shaping, right
In；Screw rod 45 is clamped by front and back by front and back clamping motor 44 again later and drives front and back clamping plate 43, by silicon wafer front-rear direction
Shaping；Servo electric cylinders 21 drive electric cylinders top plate 23, silicon wafer to decline together after shaping, and whole hundred silicon wafer thickness is completed primary
Silicon wafer shaping；The processes such as decline are driven by continuous whole hundred silicon wafers placements, shaping, servo electric cylinders 21, completion four times whole hundred
For one group of stocking process；After the first station is four whole hundred full, servo electric cylinders 21 drop to minimum, and silicon wafer lift mechanism 2 passes through
Electric cylinders and its attached electric cylinders top plate 23 are moved to upper tablet and press from both sides 36 second stations by electric cylinders mobile cylinder 24；Meanwhile silicon wafer heap
Silicon wafer stacking reshaping device 4 is moved integrally supreme tablet and presss from both sides 36 second works by folded reshaping device 4 by station cylinder switching 41
Position；After silicon wafer stacks reshaping device 4 and silicon wafer lift mechanism 2 reaches second station, servo electric cylinders 21 are stretched out, by electric cylinders top plate
23 jackings to silicon wafer stacks the height set in reshaping device 4, repeats the processes such as above whole hundred silicon wafers placement, shaping, pan feeding；When
After first, second station all expires four whole hundred silicon wafers, upper tablet folder 36 presss from both sides conveying microscope carrier 3 by piece and exports this shaping device, from
And the process for completing silicon wafer shaping feeding.
Finally, it should be noted that the foregoing is only a preferred embodiment of the present invention, it is not intended to restrict the invention,
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Finally, it should be noted that the foregoing is only a preferred embodiment of the present invention, it is not intended to restrict the invention,
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (4)
1. a kind of hundred shaping charging equipments of silicon wafer, which is characterized in that including equipment rack (1), the equipment rack (1) it is upper
Surface is fixedly installed with a silicon wafer lift mechanism (2), and a piece folder conveying is fixedly installed on the silicon wafer lift mechanism (2)
Microscope carrier (3), the surface of described folder conveying microscope carrier (3) are equipped with a silicon wafer and stack reshaping device (4), and the silicon wafer stacks whole
The lower end of shape mechanism (4) is respectively fixedly connected with the four corners in silicon wafer lift mechanism (2) upper surface.
2. hundred shaping charging equipments of a kind of silicon wafer according to claim 1, which is characterized in that the silicon wafer lift mechanism
It (2) include support plate (25), the support plate (25) is fixedly connected on the upper surface of equipment rack (1), the support plate (25)
Upper surface be fixedly connected with two first straight line guide rails (22), slidably connected on two first straight line guide rails (22)
The servo electric cylinders (21) of one setting in a vertical shape, the lower end of two servo electric cylinders (21) are run through support plate (25) and are prolonged
It stretches and extends downwardly, the output end of two servo electric cylinders (21) runs through the upper end of first straight line guide rail (22) and upwardly extends
And it is fixedly connected with an electric cylinders top plate (23), the upper surface of the support plate (25) is about in two first straight line guide rails (22)
The position of heart line is fixedly connected with an electric cylinders mobile cylinder (24), and the output end of the electric cylinders mobile cylinder (24) is fixedly connected
On two servo electric cylinders (21).
3. hundred shaping charging equipments of a kind of silicon wafer according to claim 1, which is characterized in that described folder conveys microscope carrier
It (3) include bracket (35), the bracket (35) is fixedly mounted on the upper surface of equipment rack (1), bracket (35) upper surface
Wherein one side edge at slidably connect two pieces of limited blocks (34), the corresponding two pieces of limited blocks in the lower surface of the bracket (35)
(34) position is fixedly connected to a driving motor (31), and the lower surface of the bracket (35) is far from driving motor (31)
It is fixedly connected at one side edge there are two clamping cylinder (33) are rotated, is fixedly connected in two opposite side walls of the bracket (35)
There is a side to push away clamping cylinder (32), there are four upper tablet folder (36), two of them institutes for the upper surface placement of the bracket (35)
The wherein side side wall for stating tablet folder (36) offsets with corresponding limited block (34), and two sides push away clamping cylinder (32)
Output end offset respectively with the corresponding side walls of four upper tablets folders (36), the output ends of two rotations clamping cylinder (33)
Upper tablet folder (36) corresponding with two offsets respectively.
4. hundred shaping charging equipments of a kind of silicon wafer according to claim 1, which is characterized in that the silicon wafer stacks shaping
Mechanism (4) includes fixed frame (410), and the fixed frame (410) is fixedly connected on the four corners of support plate (25) upper surface, described
The upper surface of fixed frame (410) is fixedly connected with two second straight line guide rails (42), on two second straight line guide rails (42)
Slidably connect a mounting rack (411) jointly, the fixed frame (410) is wherein fixedly connected with station on the side wall of side and turns
It takes a breath cylinder (41), the upper end of the station cylinder switching (41) is fixedly connected on the lower surface of mounting rack (411), the mounting rack
(411) it is wherein threaded with a front and back on the side wall of side and clamps screw rod (45), the front and back clamps the two of screw rod (45)
End runs through the correspondence side wall of mounting rack (411) and extends outwardly, and the front and back clamps screw rod (45) and is located at mounting rack (411) outside
Wherein one end be fixedly connected with one front and back clamping motor (44), the front and back clamping motor (44) far from front and back clamp screw rod
(45) one end is fixedly connected with clamping plate (43) before and after two panels, passes through axis between the two opposite side walls of the mounting rack (411)
One or so clamping screw rod (48) of rotation connection is held, mounting rack (411) are run through in wherein one end that the left and right clamps screw rod (48)
Correspondence side wall and extend outwardly, the position that the corresponding left and right in the upper surface of the mounting rack (411) clamps screw rod (48) fixed connects
It is connected to one or so clamping motor (49), the output end of the left and right clamping motor (49) is fixedly connected on left and right and clamps screw rod
(48) it is located at the one end of mounting rack (411) outside, the upper surface of the mounting rack (411) is fixedly connected with a third linear guide
(47), two groups or so clamping plates (46) are slidably connected in the third linear guide, left and right clamping plate (46) described in every group is equal
The left and right clamping plate (46) being symmetrical set including two pieces, the left and right folder being located in the two opposite side walls of the mounting rack (411)
Screw thread on tight screw rod (48) bar wall is arranged about every group two pieces or so clamping plates (46) in symmetry shape, and four pieces of left and right clamp
Plate (46) clamps screw rod (48) to threaded connection with left and right.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910226173.8A CN109841554B (en) | 2019-03-25 | 2019-03-25 | Shaping and feeding equipment for hundred silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910226173.8A CN109841554B (en) | 2019-03-25 | 2019-03-25 | Shaping and feeding equipment for hundred silicon wafers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109841554A true CN109841554A (en) | 2019-06-04 |
| CN109841554B CN109841554B (en) | 2024-04-12 |
Family
ID=66886186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910226173.8A Active CN109841554B (en) | 2019-03-25 | 2019-03-25 | Shaping and feeding equipment for hundred silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109841554B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111628203A (en) * | 2020-04-30 | 2020-09-04 | 大族激光科技产业集团股份有限公司 | Pre-stacking and shaping device |
| CN114556049A (en) * | 2019-10-11 | 2022-05-27 | 斯塔夫控股私人有限公司 | Level meter |
| CN114883233A (en) * | 2022-04-28 | 2022-08-09 | 无锡市南亚科技有限公司 | Continuous feeding mechanism of insert machine |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5950643A (en) * | 1995-09-06 | 1999-09-14 | Miyazaki; Takeshiro | Wafer processing system |
| KR20070065622A (en) * | 2005-12-20 | 2007-06-25 | 유테크존 컴퍼니 리미티드 | Wafer transport system and wafer-testing system including the same |
| CN202651082U (en) * | 2012-06-21 | 2013-01-02 | 华中科技大学 | Photovoltaic solar silicon wafer delivering device |
| CN104377154A (en) * | 2014-11-03 | 2015-02-25 | 江阴方艾机器人有限公司 | Pipe-type PECVD graphite boat assembling and disassembling piece system and process |
| CN207426042U (en) * | 2017-11-30 | 2018-05-29 | 常州华数锦明智能装备技术研究院有限公司 | Battery modules string assembly tooling |
| CN208400828U (en) * | 2018-05-24 | 2019-01-18 | 江苏利奥新材料科技有限公司 | A kind of automatic silicon plug-in sheet machine Special shaping device |
| CN209496844U (en) * | 2019-03-25 | 2019-10-15 | 常州华数锦明智能装备技术研究院有限公司 | A kind of hundred shaping charging equipments of silicon wafer |
-
2019
- 2019-03-25 CN CN201910226173.8A patent/CN109841554B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5950643A (en) * | 1995-09-06 | 1999-09-14 | Miyazaki; Takeshiro | Wafer processing system |
| KR20070065622A (en) * | 2005-12-20 | 2007-06-25 | 유테크존 컴퍼니 리미티드 | Wafer transport system and wafer-testing system including the same |
| CN202651082U (en) * | 2012-06-21 | 2013-01-02 | 华中科技大学 | Photovoltaic solar silicon wafer delivering device |
| CN104377154A (en) * | 2014-11-03 | 2015-02-25 | 江阴方艾机器人有限公司 | Pipe-type PECVD graphite boat assembling and disassembling piece system and process |
| CN207426042U (en) * | 2017-11-30 | 2018-05-29 | 常州华数锦明智能装备技术研究院有限公司 | Battery modules string assembly tooling |
| CN208400828U (en) * | 2018-05-24 | 2019-01-18 | 江苏利奥新材料科技有限公司 | A kind of automatic silicon plug-in sheet machine Special shaping device |
| CN209496844U (en) * | 2019-03-25 | 2019-10-15 | 常州华数锦明智能装备技术研究院有限公司 | A kind of hundred shaping charging equipments of silicon wafer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114556049A (en) * | 2019-10-11 | 2022-05-27 | 斯塔夫控股私人有限公司 | Level meter |
| CN111628203A (en) * | 2020-04-30 | 2020-09-04 | 大族激光科技产业集团股份有限公司 | Pre-stacking and shaping device |
| CN111628203B (en) * | 2020-04-30 | 2022-04-08 | 大族激光科技产业集团股份有限公司 | Pre-stacking and shaping device |
| CN114883233A (en) * | 2022-04-28 | 2022-08-09 | 无锡市南亚科技有限公司 | Continuous feeding mechanism of insert machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109841554B (en) | 2024-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109841554A (en) | A kind of hundred shaping charging equipments of silicon wafer | |
| CN105109097B (en) | A kind of automatic liner box machine | |
| CN209465587U (en) | A kind of bending machine and its feed device | |
| CN109244013A (en) | A kind of automatic neatening device of photovoltaic cell | |
| CN209496844U (en) | A kind of hundred shaping charging equipments of silicon wafer | |
| CN212603712U (en) | Bag expanding device for packaging | |
| CN107253070A (en) | A kind of auto parts machinery clamping device conveniently picked and placeed | |
| CN209140467U (en) | A kind of a pair of two automatic feeding systems of CNC | |
| CN204449882U (en) | Automobile condenser iron cover assembly machine | |
| CN113279155B (en) | Sewing equipment | |
| CN217335522U (en) | A dress frame machine for photovoltaic module | |
| CN211467660U (en) | Be used for two room bag system bag of powder liquid to tear slitter edge device | |
| CN208409652U (en) | A kind of positioning fixture | |
| CN110586713B (en) | Symmetrical bidirectional bending machine and working method thereof | |
| CN209335486U (en) | The mobile phone center jig that a kind of three sides of unidirectional power realization clamp | |
| CN104163273B (en) | Labelling machine station shifting apparatus | |
| CN221289301U (en) | Work platform structure of punch feeder | |
| CN202448189U (en) | Workpiece clamp structure for numerical-control multi-shaft mortising machine | |
| CN220422146U (en) | Full-automatic PCB moves back PIN and cuts glued board equipment | |
| CN220078121U (en) | Paper layering mechanism of rotary paper folding machine | |
| CN201147924Y (en) | Manipulator clamp mechanism | |
| CN209716365U (en) | A kind of riveting machine assistance for lifting positioning device | |
| CN208842690U (en) | A kind of feeding device | |
| CN221661944U (en) | Multi-station fixture for transparent film | |
| CN218968215U (en) | Lens equipment based on CCD location |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |