CN109827750B - An adjustable-angle workpiece fixture suitable for 3D scanning galvanometer test bench - Google Patents
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Abstract
本发明提供了一种适用于三维扫描振镜实验台的可调角度工件夹具,用于装夹激光加工用的金属片类的工件,包括:底座,通过六角螺栓固定在三维扫描振镜实验台的工作台上;立架,通过内六角螺栓固定在底座上;盖板,安装在立架的顶端,通过内六角螺栓与立架连接;圆导轨,安装在立架内部,顶端固定在盖板中,底端与底座过盈配合安装;直线轴承与圆导轨配合,沿导轨上下滑动;滑块,与直线轴承通过紧定螺钉进行连接;压块,通过六角头螺栓与滑块连接;以及弹簧,安装在盖板和滑块之间对滑块产生弹力。本发明将特定尺寸的工件安放在底座上不同的阶梯和立架侧面中,使工件与底座平面产生不同的测试角度,并使工件在压块作用下压紧。
The invention provides an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench, which is used for clamping metal sheet-like workpieces for laser processing. The stand is fixed on the base by hexagon socket head bolts; the cover plate is installed on the top of the stand and is connected with the stand by the hexagon socket head bolts; the round guide rail is installed inside the stand and the top is fixed on the cover plate In the middle, the bottom end and the base are installed with interference fit; the linear bearing cooperates with the circular guide rail and slides up and down along the guide rail; the sliding block is connected with the linear bearing through the set screw; the pressure block is connected with the sliding block through the hexagon head bolt; and the spring , installed between the cover plate and the slider to generate elastic force for the slider. In the invention, workpieces of specific size are placed in different steps on the base and in the sides of the vertical frame, so that the workpiece and the base plane have different test angles, and the workpiece is pressed under the action of the pressing block.
Description
技术领域technical field
本发明属于激光三维扫描加工和三维扫描振镜性能测试领域,具体涉及一种适用于三维扫描振镜实验台的可调角度工件夹具。The invention belongs to the field of laser three-dimensional scanning processing and three-dimensional scanning galvanometer performance testing, and particularly relates to an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench.
背景技术Background technique
三维扫描振镜是进行高效、高精半导体电子器件制造装备的核心部件之一,在激光打标、激光切割、激光焊接、激光微观形貌加工等方面得到广泛应用。为对三维扫描振镜性能测试和开展相关性能研究,三维扫描振镜实验台被研究机构广泛使用,为了方便测试三维振镜的性能,通常将平面工件在三维空间放置成不同标准角度。为了满足三维扫描振镜实验台这种工件装夹需要,本发明提出一种适用于该实验台的夹具。3D scanning galvanometer is one of the core components of high-efficiency and high-precision semiconductor electronic device manufacturing equipment. It is widely used in laser marking, laser cutting, laser welding, and laser micro-topography processing. In order to test the performance of the 3D scanning galvanometer and carry out related performance research, the 3D scanning galvanometer test bench is widely used by research institutions. In order to facilitate the performance of the 3D galvanometer, the plane workpiece is usually placed in three-dimensional space at different standard angles. In order to meet the workpiece clamping needs of the three-dimensional scanning galvanometer test bench, the present invention provides a fixture suitable for the test bench.
发明内容SUMMARY OF THE INVENTION
本发明是为了解决上述问题而进行的,目的在于提供一种适用于三维扫描振镜实验台的可调角度工件夹具。The present invention is made to solve the above problems, and aims to provide an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench.
本发明提供了一种适用于三维扫描振镜实验台的可调角度工件夹具,用于装夹激光加工用的金属片类的工件,具有这样的特征,包括:底座,通过六角螺栓固定在三维扫描振镜实验台的工作台上;立架,通过内六角螺栓固定在底座上;盖板,安装在立架的顶端,通过内六角螺栓与立架连接;圆导轨,安装在立架内部,顶端固定在盖板中,底端与底座过盈配合安装;直线轴承,设置在圆导轨上,用于进行上下滑动;滑块,与直线轴承通过紧定螺钉进行连接,用于与直线轴承配合,从而进行上下滑动;弹簧,套在圆导轨上并置于盖板和滑块之间,用于对滑块产生弹力;以及压块,通过六角头螺栓与滑块连接,用于压紧工件,其中,底座的一侧设置有阶梯部,该阶梯部用于与底座另一侧的压块以及立架进行配合来放置并压紧工件,并通过将工件放置在不同的阶梯来使工件与工作台平面形成不同的测试角度,阶梯部包括A阶梯、B阶梯、C阶梯、D阶梯以及E阶梯。The invention provides an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench, which is used for clamping workpieces such as metal sheets for laser processing. On the workbench of the scanning galvanometer test bench; the stand is fixed on the base by the hexagon socket head bolt; the cover plate is installed on the top of the stand and is connected with the stand by the socket head bolt; the circular guide rail is installed inside the stand, The top end is fixed in the cover plate, and the bottom end is installed with interference fit with the base; the linear bearing is set on the circular guide rail for up and down sliding; the slider is connected with the linear bearing by means of set screws and is used for matching with the linear bearing , so as to slide up and down; the spring is sleeved on the circular guide rail and placed between the cover plate and the slider to generate elastic force for the slider; and the pressure block is connected to the slider through hexagon head bolts to compress the workpiece , wherein one side of the base is provided with a stepped part, the stepped part is used to cooperate with the pressing block and the vertical frame on the other side of the base to place and press the workpiece, and by placing the workpiece on different steps to make the workpiece and the workpiece The worktable plane forms different test angles, and the step part includes A step, B step, C step, D step and E step.
在本发明提供的一种适用于三维扫描振镜实验台的可调角度工件夹具中,还可以具有这样的特征:其中,工件的尺寸为86×54mm,厚度小于1mm。The adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench provided by the present invention may also have the following features: the size of the workpiece is 86×54 mm, and the thickness is less than 1 mm.
在本发明提供的一种适用于三维扫描振镜实验台的可调角度工件夹具中,还可以具有这样的特征:其中,立架的侧面设置有一条竖直的压块通道,该压块通道用于给压块提供进行上下运动的空间。In an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench provided by the present invention, it can also have the following feature: wherein a vertical pressure block channel is arranged on the side of the stand, and the pressure block channel It is used to provide space for the pressure block to move up and down.
在本发明提供的一种适用于三维扫描振镜实验台的可调角度工件夹具中,还可以具有这样的特征:其中,压块在自然状态时位于底座上,当放置工件时,抬起压块使得弹簧进行收缩,并放入工件,工件放置完成后,压块在弹簧的压力作用下将放置的工件自然压紧,当取出工件时,沿压紧的反方向抬起压块来将工件松开。In an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench provided by the present invention, it can also have the following feature: wherein the pressure block is located on the base in a natural state, and when the workpiece is placed, the pressure block is lifted up. The block causes the spring to contract and put the workpiece. After the workpiece is placed, the pressing block will naturally compress the placed workpiece under the pressure of the spring. release.
在本发明提供的一种适用于三维扫描振镜实验台的可调角度工件夹具中,还可以具有这样的特征:其中,A阶梯与B阶梯位于同一水平面,C阶梯在B阶梯的下方,D阶梯在C阶梯的下方,E阶梯在D阶梯的下方。In an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench provided by the present invention, it may also have the following characteristics: wherein, the A step and the B step are located on the same horizontal plane, the C step is below the B step, and the D step is below the B step. The ladder is below the C ladder, and the E ladder is below the D ladder.
在本发明提供的一种适用于三维扫描振镜实验台的可调角度工件夹具中,还可以具有这样的特征:其中,当工件水平放置时,压块在弹簧的压力作用下压住工件,使得工件与工作面平台形成0°的夹角,当工件的54mm边放置在A阶梯时,工件的86mm边在重力以及压块的作用力下与工作台平面形成30°的夹角,当工件的54mm边放置在B阶梯时,工件的86mm边在重力以及压块的作用力下与工作台平面形成45°的夹角,当工件的86mm边放置在C阶梯时,工件的54mm边在重力以及压块的作用力下与工作台平面形成30°的夹角,当工件的54mm边放置在D阶梯时,工件的86mm边在重力以及压块的作用力下与工作台平面形成60°的夹角,当工件的86mm边放置在E阶梯时,工件的54mm边在重力以及压块的作用力下与工作台平面形成45°的夹角。In an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench provided by the present invention, it may also have the following feature: when the workpiece is placed horizontally, the pressing block presses the workpiece under the pressure of the spring, Make the workpiece and the working surface platform form an included angle of 0°. When the 54mm side of the workpiece is placed on the A step, the 86mm side of the workpiece forms an included angle of 30° with the table plane under the force of gravity and the pressing block. When the 54mm side of the workpiece is placed on the B step, the 86mm side of the workpiece forms an angle of 45° with the table plane under the force of gravity and the pressing block. When the 86mm side of the workpiece is placed on the C step, the 54mm side of the workpiece is under the gravity And under the force of the pressure block, it forms an included angle of 30° with the plane of the table. When the 54mm side of the workpiece is placed on the D step, the 86mm side of the workpiece forms a 60° angle with the plane of the table under the force of gravity and the pressure block. Included angle, when the 86mm side of the workpiece is placed on the E-step, the 54mm side of the workpiece forms an included angle of 45° with the table plane under the force of gravity and the pressing block.
发明的作用与效果The role and effect of the invention
根据本发明所涉及的一种适用于三维扫描振镜实验台的可调角度工件夹具,因为设置了A阶梯、B阶梯、C阶梯、D阶梯以及E阶梯,并且通过将工件放置在不同的阶梯位置就能使得工件与工作台平面形成不同测试角度,所以,能够更加简便的得到不同测试角度来进行三维激光扫描加工实验和三维扫描振镜性能测试;因为使用了弹簧来为压块提供作用力,在夹装工件时只需抬起压块并放入工件,压块就能在弹簧的压力作用下夹紧放入的工件,在取下工件时也只需抬起压块即可取出工件,所以,简化了安装与夹持工件的流程,提高了实验测试效率。因此,本发明的一种适用于三维扫描振镜实验台的可调角度工件夹具结构简单,操作简便,能够更加简便的进行三维激光扫描加工实验和三维扫描振镜性能测试。According to an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench according to the present invention, A step, B step, C step, D step and E step are provided, and by placing the workpiece on different steps The position can make the workpiece and the table plane form different test angles, so it is easier to obtain different test angles for 3D laser scanning processing experiments and 3D scanning galvanometer performance tests; because a spring is used to provide force for the pressure block , When clamping the workpiece, you only need to lift the pressure block and put the workpiece, the pressure block can clamp the placed workpiece under the pressure of the spring, and when you remove the workpiece, you only need to lift the pressure block to take out the workpiece. Therefore, the process of installing and clamping the workpiece is simplified, and the experimental test efficiency is improved. Therefore, an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench of the present invention is simple in structure, easy to operate, and can more easily perform three-dimensional laser scanning processing experiments and three-dimensional scanning galvanometer performance tests.
附图说明Description of drawings
图1是本发明的实施例中的一种适用于三维扫描振镜实验台的可调角度工件夹具的结构示意图;1 is a schematic structural diagram of an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench according to an embodiment of the present invention;
图2是本发明的实施例中的一种适用于三维扫描振镜实验台的可调角度工件夹具的左剖视图;2 is a left cross-sectional view of an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench according to an embodiment of the present invention;
图3是本发明的实施例中的一种适用于三维扫描振镜实验台的可调角度工件夹具的俯剖视图。3 is a top cross-sectional view of an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench according to an embodiment of the present invention.
具体实施方式Detailed ways
为了使本发明实现的技术手段与功效易于明白了解,以下结合实施例及附图对本发明作具体阐述。In order to make the technical means and effects realized by the present invention easy to understand, the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.
实施例:Example:
图1是本发明的实施例中的一种适用于三维扫描振镜实验台的可调角度工件夹具的结构示意图,图2是本发明的实施例中的一种适用于三维扫描振镜实验台的可调角度工件夹具的左剖视图,图3是本发明的实施例中的一种适用于三维扫描振镜实验台的可调角度工件夹具的俯剖视图。1 is a schematic structural diagram of an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench according to an embodiment of the present invention, and FIG. 2 is an embodiment of the present invention suitable for a three-dimensional scanning galvanometer test bench. Figure 3 is a top sectional view of an adjustable angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench according to an embodiment of the present invention.
如图1、图2和图3所示,本实施例的一种适用于三维扫描振镜实验台的可调角度工件夹具100,用于装夹激光加工用的金属片类的工件,具有底座1、立架2、盖板3、圆导轨4、直线轴承5、滑块6、弹簧7以及压块8。As shown in FIG. 1 , FIG. 2 and FIG. 3 , an adjustable-
底座1,通过六角螺栓固定在三维扫描振镜实验台的工作台上。The
立架2,通过内六角螺栓固定在底座1上。The
盖板3,安装在立架2的顶端,通过内六角螺栓与立架2连接。The
圆导轨4,安装在立架2内部,顶端固定在盖板3中,底端与底座1过盈配合安装。The
直线轴承5,设置在圆导轨4上,用于进行上下滑动。The linear bearing 5 is arranged on the
滑块6,与直线轴承5通过紧定螺钉进行连接,用于与直线轴承5配合,从而进行上下滑动。The sliding
弹簧7,套在圆导轨4上并置于盖板3和滑块6之间,用于对滑块6产生弹力。The
压块8,通过六角头螺栓与滑块6连接,用于压紧工件。The
工件的尺寸为86×54mm,厚度小于1mm。The size of the workpiece is 86×54mm, and the thickness is less than 1mm.
底座1的一侧设置有阶梯部,该阶梯部用于与底座1另一侧的压块8以及立架2进行配合来放置并压紧工件,并通过将工件放置在不同的阶梯来使工件与工作台平面形成不同的测试角度,阶梯部包括A阶梯、B阶梯、C阶梯、D阶梯以及E阶梯。One side of the
A阶梯与B阶梯位于同一水平面,C阶梯在B阶梯的下方,D阶梯在C阶梯的下方,E阶梯在D阶梯的下方。Step A and Step B are on the same level, Step C is below Step B, Step D is below Step C, Step E is below Step D.
当工件水平放置时,压块8在弹簧7的压力作用下压住工件,使得工件与工作面平台形成0°的夹角,When the workpiece is placed horizontally, the
当工件的54mm边放置在A阶梯时,工件的86mm边在重力以及压块8的作用力下与工作台平面形成30°的夹角,When the 54mm side of the workpiece is placed on step A, the 86mm side of the workpiece forms an included angle of 30° with the table plane under the force of gravity and the
当工件的54mm边放置在B阶梯时,工件的86mm边在重力以及压块8的作用力下与工作台平面形成45°的夹角,When the 54mm side of the workpiece is placed on the B step, the 86mm side of the workpiece forms an included angle of 45° with the table plane under the force of gravity and the
当工件的86mm边放置在C阶梯时,工件的54mm边在重力以及压块8的作用力下与工作台平面形成30°的夹角,When the 86mm side of the workpiece is placed on the C step, the 54mm side of the workpiece forms an included angle of 30° with the table plane under the force of gravity and the
当工件的54mm边放置在D阶梯时,工件的86mm边在重力以及压块8的作用力下与工作台平面形成60°的夹角,When the 54mm side of the workpiece is placed on the D step, the 86mm side of the workpiece forms an included angle of 60° with the table plane under the force of gravity and the
当工件的86mm边放置在E阶梯时,工件的54mm边在重力以及压块8的作用力下与工作台平面形成45°的夹角。When the 86mm side of the workpiece is placed on the E step, the 54mm side of the workpiece forms an included angle of 45° with the table plane under the force of gravity and the
立架2的侧面设置有一条竖直的压块通道,该压块通道用于给压块8提供进行上下运动的空间。A vertical pressure block channel is provided on the side of the
压块8在自然状态时位于底座1上,当放置工件时,抬起压块8使得弹簧7进行收缩,并放入工件,工件放置完成后,压块8在弹簧7的压力作用下将放置的工件自然压紧,当取出工件时,沿压紧的反方向抬起压块8来将工件松开。The
实施例的作用与效果Actions and Effects of the Embodiments
根据本实施例所涉及的一种适用于三维扫描振镜实验台的可调角度工件夹具,因为设置了A阶梯、B阶梯、C阶梯、D阶梯以及E阶梯,并且通过将工件放置在不同的阶梯位置就能使得工件与工作台平面形成不同测试角度,所以,能够更加简便的得到不同测试角度来进行三维激光扫描加工实验和三维扫描振镜性能测试;因为使用了弹簧来为压块提供作用力,在夹装工件时只需抬起压块并放入工件,压块就能在弹簧的压力作用下夹紧放入的工件,在取下工件时也只需抬起压块即可取出工件,所以,简化了安装与夹持工件的流程,提高了实验测试效率。因此,本实施例的一种适用于三维扫描振镜实验台的可调角度工件夹具结构简单,操作简便,能够更加简便的进行三维激光扫描加工实验和三维扫描振镜性能测试。According to an adjustable-angle workpiece fixture suitable for a three-dimensional scanning galvanometer test bench according to the present embodiment, A step, B step, C step, D step, and E step are provided, and by placing the workpiece in different The stepped position can make the workpiece and the table plane form different test angles, so it is easier to obtain different test angles for 3D laser scanning processing experiments and 3D scanning galvanometer performance tests; because the spring is used to provide a function for the pressure block When clamping the workpiece, you only need to lift the pressure block and put the workpiece, the pressure block can clamp the placed workpiece under the pressure of the spring, and when you remove the workpiece, you only need to lift the pressure block to take it out. Therefore, the process of installing and clamping the workpiece is simplified, and the experimental test efficiency is improved. Therefore, an adjustable-angle workpiece fixture suitable for a 3D scanning galvanometer test bench in this embodiment is simple in structure, easy to operate, and can more easily perform 3D laser scanning processing experiments and 3D scanning galvanometer performance tests.
上述实施方式为本发明的优选案例,并不用来限制本发明的保护范围。The above embodiments are preferred cases of the present invention, and are not intended to limit the protection scope of the present invention.
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| CN110487180B (en) * | 2019-08-12 | 2020-12-25 | 上海理工大学 | Thermal drift measurement method for scanning galvanometer type laser processing system |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4113320B2 (en) * | 2000-06-26 | 2008-07-09 | 株式会社リコー | Optical element fixing structure, reading unit, image scanning device |
| JP2005327374A (en) * | 2004-05-14 | 2005-11-24 | Matsushita Electric Ind Co Ltd | Head holding member, disk device including the same, and head holding method in disk device |
| CN101890646B (en) * | 2010-06-12 | 2012-12-05 | 四川成飞集成科技股份有限公司 | Multi-stage angle-variable machining tool |
| CN202571818U (en) * | 2012-03-07 | 2012-12-05 | 鑫鸿交通工业(安徽)有限公司 | Workbench adjustable in angle |
| CN103487610A (en) * | 2013-09-22 | 2014-01-01 | 中国科学院半导体研究所 | Clamp and clamp assembly for testing device photoelectric properties |
| CN103667607B (en) * | 2013-12-11 | 2015-09-09 | 广州中国科学院先进技术研究所 | Laser quenching method and device based on scanning galvanometer |
| CN103753233A (en) * | 2013-12-27 | 2014-04-30 | 柳州职业技术学院 | Angle workbench |
| CN203993225U (en) * | 2014-08-01 | 2014-12-10 | 上海屹丰汽车模具制造有限公司 | Angle adjustable large mold processing and loading clamp platform |
| CN205817335U (en) * | 2016-07-21 | 2016-12-21 | 重庆平伟汽车科技股份有限公司 | A kind of wedge processing tool |
| CN207742395U (en) * | 2017-12-25 | 2018-08-17 | 深圳市光峰光电技术有限公司 | Optical mirror slip mounting structure |
| CN208386813U (en) * | 2018-06-12 | 2019-01-15 | 歌尔科技有限公司 | Position correction jig and optical adjustment system |
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2019
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