CN109786585B - Flexible display substrate, manufacturing method thereof and display device - Google Patents
Flexible display substrate, manufacturing method thereof and display device Download PDFInfo
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Abstract
The invention provides a flexible display substrate, a manufacturing method thereof and a display device, and belongs to the technical field of display. The manufacturing method of the flexible display substrate comprises the following steps: providing a first bearing substrate; forming a flexible substrate on the first carrier substrate; forming a wave-absorbing material layer on the flexible substrate, wherein the wave-absorbing material layer can absorb energy emitted by laser; forming a display structure on the wave-absorbing material layer; and irradiating laser from one side of the first bearing substrate, which is opposite to the flexible substrate, so that the flexible substrate is separated from the first bearing substrate. The technical scheme of the invention can improve the yield of the flexible display substrate.
Description
Technical Field
The invention relates to the technical field of display, in particular to a flexible display substrate, a manufacturing method thereof and a display device.
Background
Compared with the traditional flat panel display, the flexible display has the advantages of light weight, durability, easy mass storage, ultra-thin property, rolling property and the like. In the prior art, when a flexible display substrate is manufactured, a rigid carrier substrate is provided, a flexible substrate is formed on the carrier substrate, a display structure is formed on the flexible substrate, and then the flexible substrate is separated from the carrier substrate by using a laser lift-off technology, so that the flexible display substrate including the flexible substrate and the display structure is obtained.
When the flexible substrate is separated from the bearing substrate by adopting a laser lift-off technology, the energy generated by laser is easy to damage the display structure, so that the yield of the flexible display substrate is influenced.
Disclosure of Invention
The invention aims to provide a flexible display substrate, a manufacturing method thereof and a display device, which can improve the yield of the flexible display substrate.
To solve the above technical problem, embodiments of the present invention provide the following technical solutions:
in one aspect, a method for manufacturing a flexible display substrate is provided, including:
providing a first bearing substrate;
forming a flexible substrate on the first carrier substrate;
forming a wave-absorbing material layer on the flexible substrate, wherein the wave-absorbing material layer can absorb energy emitted by laser;
forming a display structure on the wave-absorbing material layer;
and irradiating laser from one side of the first bearing substrate, which is opposite to the flexible substrate, so that the flexible substrate is separated from the first bearing substrate.
Further, the wave-absorbing material layer is made of a graphene-polyaniline composite film, and the graphene-polyaniline composite film is formed by polymerizing graphene and polyaniline.
Further, before forming the display structure, the method further comprises:
forming a conductive column on the wave-absorbing material layer;
forming an insulating layer;
forming the display structure includes:
and forming a display structure on the insulating layer, wherein the conductive column is connected with a signal line of the display structure through a via hole penetrating through the insulating layer.
Further, before the laser is irradiated from the side of the first carrier substrate opposite to the flexible substrate to separate the flexible substrate from the carrier substrate, the method further includes:
providing a second bearing substrate, and bonding the second bearing substrate and one side of the first bearing substrate, which is provided with the display structure;
after the laser is irradiated from the side of the first carrier substrate opposite to the flexible substrate to separate the flexible substrate from the carrier substrate, the method further includes:
forming a via hole penetrating through the flexible substrate and the wave-absorbing material layer, wherein the conductive post is exposed out of the via hole;
filling the via hole with a conductive material to form a conductive connecting line in the via hole;
and a driving circuit is formed on one side of the flexible substrate, which is opposite to the wave-absorbing material layer, and the signal output end of the driving circuit is connected with the conductive connecting wire in the through hole.
Further, after the driving circuit is formed, the method further includes:
and stripping the second bearing substrate.
An embodiment of the present invention further provides a flexible display substrate, including:
a flexible substrate;
the wave-absorbing material layer is positioned on the flexible substrate and can absorb energy emitted by laser;
and the display structure is positioned on the wave-absorbing material layer.
Further, the wave-absorbing material layer is made of a graphene-polyaniline composite film, and the graphene-polyaniline composite film is formed by polymerizing graphene and polyaniline.
Further, still include:
the conductive column is positioned on the wave-absorbing material layer;
the insulating layer covers the wave-absorbing material layer, and the conductive column is connected with a signal line of a display structure on the insulating layer through a via hole penetrating through the insulating layer;
a via hole penetrating through the flexible substrate and the wave-absorbing material layer;
the conductive connecting line is positioned in the through hole and connected with the conductive column;
and the driving circuit is positioned on one side of the flexible substrate, which is back to the wave-absorbing material layer, and the signal output end of the driving circuit is connected with the conductive connecting wire in the through hole.
Further, the display structure includes a driving thin film transistor and a light emitting element.
The embodiment of the invention also provides a display device which comprises the flexible display substrate.
The embodiment of the invention has the following beneficial effects:
in the above scheme, the wave-absorbing material layer is arranged between the flexible substrate and the display structure and can absorb energy emitted by laser, so that when the flexible substrate is separated from the first bearing substrate in a laser stripping mode, the energy generated by the laser is absorbed by the wave-absorbing material layer after penetrating through the flexible substrate, thereby avoiding the damage of the energy generated by the laser to the display structure and ensuring the yield of the flexible display substrate.
Drawings
Fig. 1-12 are schematic diagrams illustrating a process of manufacturing a flexible display substrate according to an embodiment of the invention.
Reference numerals
1 first carrier substrate
2 Flexible substrate
3 wave-absorbing material layer
4 conductive pole
5 insulating layer
6 display structure
7 bonding layer
8 second carrier substrate
9 via hole
10 conductive connecting line
11 drive circuit
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
The embodiment of the invention provides a flexible display substrate, a manufacturing method thereof and a display device, which can improve the yield of the flexible display substrate.
The embodiment of the invention provides a manufacturing method of a flexible display substrate, which comprises the following steps:
providing a first bearing substrate;
forming a flexible substrate on the first carrier substrate;
forming a wave-absorbing material layer on the flexible substrate, wherein the wave-absorbing material layer can absorb energy emitted by laser;
forming a display structure on the wave-absorbing material layer;
and irradiating laser from one side of the first bearing substrate, which is opposite to the flexible substrate, so that the flexible substrate is separated from the first bearing substrate.
In this embodiment, a wave-absorbing material layer is arranged between the flexible substrate and the display structure, and the wave-absorbing material layer can absorb energy emitted by laser, so that when the flexible substrate is separated from the first bearing substrate in a laser peeling mode, the energy generated by the laser is absorbed or reflected by the wave-absorbing material layer after penetrating through the flexible substrate, thereby preventing the energy generated by the laser from damaging the display structure and ensuring the yield of the flexible display substrate.
Further, the wave-absorbing material layer is made of a graphene-polyaniline composite film, and the graphene-polyaniline composite film is formed by polymerizing graphene and polyaniline.
Graphene has excellent optical and mechanical properties, has good barrier property to gas and liquid molecules, polyaniline is low in price, has good environmental stability, water and oxygen resistance and wave absorbing property, the graphene and polyaniline are polymerized to form the graphene-polyaniline composite film, the specific surface area of the graphene can be improved to a certain extent, the agglomeration of the graphene is prevented, and due to the synergistic effect between the graphene and the polyaniline, the performance of the graphene-polyaniline composite film is improved to a greater extent compared with that of pure polyaniline and graphene, and the graphene-polyaniline composite film has better water and oxygen resistance, wave absorbing property, excellent chemical stability, thermal stability and mechanical strength, so that when the graphene-polyaniline composite film is used for manufacturing a wave absorbing material layer, when a flexible substrate is separated from a first bearing substrate in a laser stripping mode, the graphene-polyaniline composite film can well absorb or reflect energy generated by laser, damage to a display structure caused by the energy generated by the laser is avoided, and the yield of the flexible display substrate is ensured. The graphene-polyaniline composite film also has good water and oxygen resistance, so that the packaging performance of the flexible display substrate can be improved, the corrosion of water vapor and oxygen to the flexible substrate is effectively avoided, the contact of the water vapor and the oxygen with the display structure is avoided, and the effect of protecting the display structure is achieved; in addition, the graphene-polyaniline composite material has good flexibility and light weight, can meet the requirements of a flexible display device, and is beneficial to improving the flexibility and the lightness of the flexible display device.
Further, before forming the display structure, the method further comprises:
forming a conductive column on the wave-absorbing material layer;
forming an insulating layer;
forming the display structure includes:
and forming a display structure on the insulating layer, wherein the conductive column is connected with a signal line of the display structure through a via hole penetrating through the insulating layer.
Further, before the laser is irradiated from the side of the first carrier substrate opposite to the flexible substrate to separate the flexible substrate from the carrier substrate, the method further includes:
providing a second bearing substrate, and bonding the second bearing substrate and one side of the first bearing substrate, which is provided with the display structure;
after the laser is irradiated from the side of the first carrier substrate opposite to the flexible substrate to separate the flexible substrate from the carrier substrate, the method further includes:
forming a via hole penetrating through the flexible substrate and the wave-absorbing material layer, wherein the conductive post is exposed out of the via hole;
filling the via hole with a conductive material to form a conductive connecting line in the via hole;
and a driving circuit is formed on one side of the flexible substrate, which is opposite to the wave-absorbing material layer, and the signal output end of the driving circuit is connected with the conductive connecting wire in the through hole.
Therefore, the driving circuit and the display structure are respectively positioned on two side surfaces of the flexible substrate, and a reserved area for the driving circuit at the periphery of the display area is not needed, so that the narrow frame of the flexible display device is favorably realized.
Further, after the driving circuit is formed, the method further includes:
and stripping the second bearing substrate.
The second carrier substrate can be peeled off by adopting various modes such as mechanical peeling, ultraviolet irradiation, laser peeling and the like. The second bearing substrate is bonded with the display structure by using adhesive glue, and the viscosity of the adhesive glue is reduced after the ultraviolet light is irradiated, so that the second bearing substrate can be easily peeled off from the flexible substrate by using a mechanical peeling mode. In this embodiment, the display structure includes a driving thin film transistor and a light emitting unit, a flat layer is spaced between the light emitting unit and the driving thin film transistor, and when the second carrier substrate is peeled off from the flexible substrate in a laser peeling manner, since the flat layer, the light emitting unit, and other functional film layers are spaced between the laser and the driving thin film transistor of the display structure, the laser generated will be absorbed or blocked by the flat layer, the light emitting unit, and other functional film layers, and the driving thin film transistor will not be damaged.
The method for manufacturing a flexible display substrate according to the present invention is further described with reference to the accompanying drawings and specific embodiments, where the method for manufacturing a flexible display substrate according to the present embodiment includes the following steps:
the first carrier substrate 1 is a hard substrate, such as a quartz substrate or a glass substrate.
Step 2, as shown in fig. 2, forming a flexible substrate 2 on a first carrier substrate 1;
specifically, the flexible substrate 2 may employ polyimide.
Step 3, as shown in fig. 3, forming a wave-absorbing material layer 3 on the flexible substrate 2;
the wave-absorbing material layer 3 can specifically adopt a graphene-polyaniline composite film, and the graphene-polyaniline composite film is formed by polymerizing graphene and polyaniline.
Graphene has excellent optical and mechanical properties, has good barrier property to gas and liquid molecules, polyaniline is low in price, has good environmental stability, water and oxygen resistance and wave absorbing property, the graphene and polyaniline are polymerized to form the graphene-polyaniline composite film, the specific surface area of the graphene can be improved to a certain extent, the agglomeration of the graphene is prevented, and due to the synergistic effect between the graphene and the polyaniline, the performance of the graphene-polyaniline composite film is improved to a greater extent compared with that of pure polyaniline and graphene, and the graphene-polyaniline composite film has better water and oxygen resistance, wave absorbing property, excellent chemical stability, thermal stability and mechanical strength, so that when the graphene-polyaniline composite film is used for manufacturing a wave absorbing material layer, when a flexible substrate is separated from a first bearing substrate in a laser stripping mode, the graphene-polyaniline composite film can well absorb or reflect energy generated by laser, damage to a display structure caused by the energy generated by the laser is avoided, and the yield of the flexible display substrate is ensured. The graphene-polyaniline composite film also has good water and oxygen resistance, so that the packaging performance of the flexible display substrate can be improved, the corrosion of water vapor and oxygen to the flexible substrate is effectively avoided, the contact of the water vapor and the oxygen with the display structure is avoided, and the effect of protecting the display structure is achieved; in addition, the graphene-polyaniline composite material has good flexibility and light weight, can meet the requirements of a flexible display device, and is beneficial to improving the flexibility and the lightness of the flexible display device.
specifically, a conductive layer may be formed on the wave-absorbing material layer 3, the conductive layer may specifically adopt Cu, the conductive layer is patterned to form a plurality of conductive pillars 4, and the positions of the conductive pillars 4 correspond to signal lines to be formed.
Step 5, as shown in fig. 5, forming an insulating layer 5;
the insulating layer 5 may be an organic insulating layer or an inorganic insulating layer, specifically, the inorganic insulating layer may be silicon oxide or silicon nitride, and the thickness of the insulating layer 5 is not greater than the height of the conductive post 4.
Step 6, as shown in fig. 6, forming a display structure 6;
in this embodiment, the flexible display substrate is a flexible OLED display substrate, the display structure 6 includes a driving thin film transistor, a signal line, a light-emitting unit, and the like, the light-emitting unit includes an anode, a cathode, and a light-emitting layer between the anode and the cathode, and the signal line is connected to the conductive pillar 4.
in particular, the second carrier substrate 8 and the display structure 6 may be bonded together by using a bonding layer 7, and the second carrier substrate 8 is a hard substrate, such as a quartz substrate or a glass substrate.
the energy generated by the laser is absorbed or reflected by the wave-absorbing material layer 3 after passing through the flexible substrate 2, and the display structure 6 is not damaged.
Step 9, as shown in fig. 9, forming a via hole 9 penetrating through the flexible substrate 2 and the wave-absorbing material layer 3, wherein the conductive column 4 is exposed out of the via hole 9;
specifically, the conductive connection line 10 may be formed by filling a conductive material in the via hole 9 by using an electroplating process.
in this way, the signal output terminal of the driving circuit 11 can be electrically connected to the signal line of the display structure 6 through the conductive connection line 10 and the conductive column 4, and the display structure 6 is driven to display by increasing the display signal for the signal line.
Step 12, as shown in fig. 12, the second carrier substrate 8 is peeled off.
The flexible display substrate of the present embodiment can be obtained through the above steps 1 to 12. The graphene-polyaniline composite material film in the flexible display substrate can protect the display structure, prevent the display structure from being corroded by water vapor and oxygen, avoid the display structure from being damaged when laser stripping is carried out, and also contribute to improving the flexibility and the lightness of the flexible OLED display substrate.
An embodiment of the present invention further provides a flexible display substrate, including:
a flexible substrate;
the wave-absorbing material layer is positioned on the flexible substrate and can absorb energy emitted by laser;
and the display structure is positioned on the wave-absorbing material layer.
In the embodiment, the wave-absorbing material layer is arranged between the flexible substrate and the display structure and can absorb energy emitted by laser, so that when the flexible display substrate is manufactured, the flexible substrate is separated from the bearing substrate in a laser stripping mode, the energy generated by the laser is absorbed by the wave-absorbing material layer after penetrating through the flexible substrate, the display structure is prevented from being damaged by the energy generated by the laser, and the yield of the flexible display substrate is ensured.
Further, the wave-absorbing material layer is made of a graphene-polyaniline composite film, and the graphene-polyaniline composite film is formed by polymerizing graphene and polyaniline.
Graphene has excellent optical and mechanical properties, has good barrier property to gas and liquid molecules, polyaniline is low in price, has good environmental stability, water and oxygen resistance and wave absorbing property, the graphene and polyaniline are polymerized to form the graphene-polyaniline composite film, the specific surface area of the graphene can be improved to a certain extent, the agglomeration of the graphene is prevented, and due to the synergistic effect between the graphene and the polyaniline, the performance of the graphene-polyaniline composite film is improved to a greater extent compared with that of pure polyaniline and graphene, and the graphene-polyaniline composite film has better water and oxygen resistance, wave absorbing property, excellent chemical stability, thermal stability and mechanical strength, so that when the graphene-polyaniline composite film is used for manufacturing a wave absorbing material layer, when a flexible substrate is separated from a first bearing substrate in a laser stripping mode, the graphene-polyaniline composite film can well absorb or reflect energy generated by laser, damage to a display structure caused by the energy generated by the laser is avoided, and the yield of the flexible display substrate is ensured. The graphene-polyaniline composite film also has good water and oxygen resistance, so that the packaging performance of the flexible display substrate can be improved, the corrosion of water vapor and oxygen to the flexible substrate is effectively avoided, the contact of the water vapor and the oxygen with the display structure is avoided, and the effect of protecting the display structure is achieved; in addition, the graphene-polyaniline composite material has good flexibility and light weight, can meet the requirements of a flexible display device, and is beneficial to improving the flexibility and the lightness of the flexible display device.
Further, the flexible display substrate further includes:
the conductive column is positioned on the wave-absorbing material layer;
the insulating layer covers the wave-absorbing material layer, and the conductive column is connected with a signal line of a display structure on the insulating layer through a via hole penetrating through the insulating layer;
a via hole penetrating through the flexible substrate and the wave-absorbing material layer;
the conductive connecting line is positioned in the through hole and connected with the conductive column;
and the driving circuit is positioned on one side of the flexible substrate, which is back to the wave-absorbing material layer, and the signal output end of the driving circuit is connected with the conductive connecting wire in the through hole.
Therefore, the driving circuit and the display structure are respectively positioned on two side surfaces of the flexible substrate, and a reserved area for the driving circuit at the periphery of the display area is not needed, so that the narrow frame of the flexible display device is favorably realized.
Further, the display structure includes a driving thin film transistor and a light emitting element, and the light emitting element may include an anode, a cathode, and a light emitting layer between the anode and the cathode.
The embodiment of the invention also provides a display device which comprises the flexible display substrate. The display device may be: the display device comprises a television, a display, a digital photo frame, a mobile phone, a tablet personal computer and any other product or component with a display function, wherein the display device further comprises a flexible circuit board, a printed circuit board and a back plate.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (8)
1. A method for manufacturing a flexible display substrate is characterized by comprising the following steps:
providing a first bearing substrate;
forming a flexible substrate on the first carrier substrate;
forming a wave-absorbing material layer on the flexible substrate, wherein the wave-absorbing material layer can absorb energy emitted by laser;
forming a display structure on the wave-absorbing material layer;
irradiating laser from one side of the first bearing substrate, which is opposite to the flexible substrate, so that the flexible substrate is separated from the first bearing substrate;
the wave-absorbing material layer is formed by adopting a graphene-polyaniline composite film, and the graphene-polyaniline composite film is formed by polymerizing graphene and polyaniline.
2. The method of claim 1, wherein prior to forming the display structure, the method further comprises:
forming a conductive column on the wave-absorbing material layer;
forming an insulating layer;
forming the display structure includes:
and forming a display structure on the insulating layer, wherein the conductive column is connected with a signal line of the display structure through a via hole penetrating through the insulating layer.
3. The method according to claim 2, wherein before the laser is irradiated from the side of the first carrier substrate opposite to the flexible substrate to separate the flexible substrate from the first carrier substrate, the method further comprises:
providing a second bearing substrate, and bonding the second bearing substrate and one side of the first bearing substrate, which is provided with the display structure;
after the laser is irradiated from the side of the first carrier substrate opposite to the flexible substrate to separate the flexible substrate from the first carrier substrate, the method further includes:
forming a via hole penetrating through the flexible substrate and the wave-absorbing material layer, wherein the conductive post is exposed out of the via hole;
filling the via hole with a conductive material to form a conductive connecting line in the via hole;
and a driving circuit is formed on one side of the flexible substrate, which is opposite to the wave-absorbing material layer, and the signal output end of the driving circuit is connected with the conductive connecting wire in the through hole.
4. The method of claim 3, wherein after forming the driving circuit, the method further comprises:
and stripping the second bearing substrate.
5. A flexible display substrate, comprising:
a flexible substrate;
the wave-absorbing material layer is positioned on the flexible substrate and can absorb energy emitted by laser;
the display structure is positioned on the wave-absorbing material layer;
the wave-absorbing material layer is formed by adopting a graphene-polyaniline composite film, and the graphene-polyaniline composite film is formed by polymerizing graphene and polyaniline.
6. The flexible display substrate of claim 5, further comprising:
the conductive column is positioned on the wave-absorbing material layer;
the insulating layer covers the wave-absorbing material layer, and the conductive column is connected with a signal line of a display structure on the insulating layer through a via hole penetrating through the insulating layer;
a via hole penetrating through the flexible substrate and the wave-absorbing material layer;
the conductive connecting line is positioned in the through hole and connected with the conductive column;
and the driving circuit is positioned on one side of the flexible substrate, which is back to the wave-absorbing material layer, and the signal output end of the driving circuit is connected with the conductive connecting wire in the through hole.
7. The flexible display substrate of claim 5, wherein the display structure comprises a driving thin film transistor and a light emitting element.
8. A display device comprising the flexible display substrate according to any one of claims 5 to 7.
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