CN109712922A - 一种清洗干燥晶片用的花篮 - Google Patents
一种清洗干燥晶片用的花篮 Download PDFInfo
- Publication number
- CN109712922A CN109712922A CN201910059146.6A CN201910059146A CN109712922A CN 109712922 A CN109712922 A CN 109712922A CN 201910059146 A CN201910059146 A CN 201910059146A CN 109712922 A CN109712922 A CN 109712922A
- Authority
- CN
- China
- Prior art keywords
- decorated basket
- gaily decorated
- chip
- cleaned
- ventilation pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims abstract description 32
- 238000001035 drying Methods 0.000 claims abstract description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 3
- 238000006902 nitrogenation reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910059146.6A CN109712922A (zh) | 2019-01-22 | 2019-01-22 | 一种清洗干燥晶片用的花篮 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910059146.6A CN109712922A (zh) | 2019-01-22 | 2019-01-22 | 一种清洗干燥晶片用的花篮 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN109712922A true CN109712922A (zh) | 2019-05-03 |
Family
ID=66261964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910059146.6A Pending CN109712922A (zh) | 2019-01-22 | 2019-01-22 | 一种清洗干燥晶片用的花篮 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109712922A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110745482A (zh) * | 2019-10-28 | 2020-02-04 | 北京北方华创微电子装备有限公司 | 单侧上下料半导体设备及其物料传送装置 |
CN116230598A (zh) * | 2023-03-02 | 2023-06-06 | 常州科讯精密机械有限公司 | 一种具有锁定结构的高稳定性硅片花篮及其锁定方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1116876A (ja) * | 1997-06-27 | 1999-01-22 | Tokyo Electron Ltd | 乾燥処理装置 |
KR20040069448A (ko) * | 2003-01-29 | 2004-08-06 | 주식회사 윌비에스엔티 | 기판 건조 방법 및 장치 |
US20050097771A1 (en) * | 2003-11-08 | 2005-05-12 | Samsung Electronics Co., Ltd. | Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer |
JP2005217258A (ja) * | 2004-01-30 | 2005-08-11 | Toko Inc | ウェハキャリア |
US20060059708A1 (en) * | 2004-09-07 | 2006-03-23 | Tai-Gyun Kim | Apparatus for cleaning semiconductor substrates |
CN107478007A (zh) * | 2017-09-22 | 2017-12-15 | 张家港市超声电气有限公司 | 硅片烘槽 |
CN108063109A (zh) * | 2017-12-22 | 2018-05-22 | 山西飞虹激光科技有限公司 | 一种用于清洗晶片的花篮及对晶片进行清洗的方法 |
CN209607712U (zh) * | 2019-01-22 | 2019-11-08 | 上海提牛机电设备有限公司 | 一种清洗干燥晶片用的花篮 |
-
2019
- 2019-01-22 CN CN201910059146.6A patent/CN109712922A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1116876A (ja) * | 1997-06-27 | 1999-01-22 | Tokyo Electron Ltd | 乾燥処理装置 |
KR20040069448A (ko) * | 2003-01-29 | 2004-08-06 | 주식회사 윌비에스엔티 | 기판 건조 방법 및 장치 |
US20050097771A1 (en) * | 2003-11-08 | 2005-05-12 | Samsung Electronics Co., Ltd. | Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer |
JP2005217258A (ja) * | 2004-01-30 | 2005-08-11 | Toko Inc | ウェハキャリア |
US20060059708A1 (en) * | 2004-09-07 | 2006-03-23 | Tai-Gyun Kim | Apparatus for cleaning semiconductor substrates |
CN107478007A (zh) * | 2017-09-22 | 2017-12-15 | 张家港市超声电气有限公司 | 硅片烘槽 |
CN108063109A (zh) * | 2017-12-22 | 2018-05-22 | 山西飞虹激光科技有限公司 | 一种用于清洗晶片的花篮及对晶片进行清洗的方法 |
CN209607712U (zh) * | 2019-01-22 | 2019-11-08 | 上海提牛机电设备有限公司 | 一种清洗干燥晶片用的花篮 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110745482A (zh) * | 2019-10-28 | 2020-02-04 | 北京北方华创微电子装备有限公司 | 单侧上下料半导体设备及其物料传送装置 |
CN116230598A (zh) * | 2023-03-02 | 2023-06-06 | 常州科讯精密机械有限公司 | 一种具有锁定结构的高稳定性硅片花篮及其锁定方法 |
CN116230598B (zh) * | 2023-03-02 | 2024-05-07 | 常州科讯精密机械有限公司 | 一种具有锁定结构的高稳定性硅片花篮及其锁定方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109712922A (zh) | 一种清洗干燥晶片用的花篮 | |
CN209607712U (zh) | 一种清洗干燥晶片用的花篮 | |
CN209263510U (zh) | 便于卸下筒子纱的箱式烘干机 | |
CN209131295U (zh) | 环保型银铜矿干燥分离系统 | |
CN202460210U (zh) | 一种用于水处理的高效全自动净水器布水装置 | |
CN209246518U (zh) | 一种具有多级置物筛的清壁型沸腾干燥机 | |
CN215668063U (zh) | 一种回水机 | |
CN205352046U (zh) | 珍珠岩制砂颗粒专用烘干回转窑 | |
CN204902489U (zh) | 一种纺织用烘干卷布装置 | |
CN105226133A (zh) | 一种风刀及具有风刀的湿法处理装置 | |
CN200996775Y (zh) | 一种生物颗粒肥料干燥机的变截面抄板装置 | |
CN207659294U (zh) | 圆盘干燥机 | |
CN206663068U (zh) | 用于大型异形螺栓的组合式扳手 | |
CN210994897U (zh) | 一种喷涂用喷淋式洗板装置 | |
CN217465222U (zh) | 扬砂板多形态的烘砂机 | |
CN204869537U (zh) | 一种注塑机及其下料口冷却装置 | |
CN210051095U (zh) | 一种丹参烘干机 | |
CN214892451U (zh) | 一种移动式粮食谷物连续循环两用干燥设备 | |
CN206009350U (zh) | 粘尘机 | |
CN107966006A (zh) | 一种烘干机 | |
CN215250369U (zh) | 一种盘式干化机的主轴总成及盘式干化机 | |
CN107965988A (zh) | 一种提高烘干效率的烘干机 | |
CN215810020U (zh) | 一种节能粮食烘干装置 | |
CN221216525U (zh) | 一种无纺布加工辊 | |
CN206838163U (zh) | 一种节能型大米抛光机凸点抛光辊 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Chen Jingshao Inventor after: Ge Linwu Inventor after: Ge Linxin Inventor after: Li Jie Inventor after: Ding Gaosheng Inventor before: Chen Jingshao Inventor before: Ge Linwu Inventor before: Ge Linxin Inventor before: Li Jie Inventor before: Ding Gaosheng Inventor before: Lin Shenghai |