CN109644545A - X射线生成设备 - Google Patents
X射线生成设备 Download PDFInfo
- Publication number
- CN109644545A CN109644545A CN201780051938.8A CN201780051938A CN109644545A CN 109644545 A CN109644545 A CN 109644545A CN 201780051938 A CN201780051938 A CN 201780051938A CN 109644545 A CN109644545 A CN 109644545A
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- Prior art keywords
- ray
- cathode
- ray generating
- anode
- linking
- Prior art date
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- 238000009413 insulation Methods 0.000 claims abstract description 54
- 238000005452 bending Methods 0.000 claims abstract description 35
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Chemical compound 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O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- VEUACKUBDLVUAC-UHFFFAOYSA-N [Ca].[Na] Chemical compound 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[Ca].[Na] VEUACKUBDLVUAC-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N al2o3 Chemical compound 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- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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[Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium(0) Chemical compound 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[Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound 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[Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound 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[W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/04—Mounting the X-ray tube within a closed housing
- H05G1/06—X-ray tube and at least part of the power supply apparatus being mounted within the same housing
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Abstract
Description
技术领域
本发明涉及一种包括X射线管的X射线生成设备。
背景技术
一些现有的X射线生成设备包括具有透射靶的X射线管。这种X射线生成设备具有接地并填充有绝缘液体的金属容器,并且X射线管以及用于驱动该X射线管的驱动电路容纳在所述金属容器中。X射线管容纳在金属容器中的这种结构被称为单罐式结构(monotankstructure)。单罐式结构使得X射线生成设备不仅具有更小的尺寸而且具有高的可靠性,使得即使在施加高的管电压时也不太可能会发生放电。
通常,在具有单罐式结构的X射线生成设备中,通过使用中性点接地方式和阳极接地方式这两种接地方式中的任一种来确定X射线管的阳极和阴极相对于接地的金属容器的电位。
在使用中性点接地方式的X射线生成设备中,双极电压源分别对X射线管的阳极和阴极施加+1/2Va和-1/2Va,从而施加管电压Va。在使用中性点接地方式的X射线生成设备中,X射线管安装在包括阳极的X射线管完全浸没在绝缘液体中的状态中。
专利文献1描述了一种X射线生成设备,所述X射线生成设备包括使用中性点接地方式的透射X射线管并具有单罐式结构。
利用专利文献1中描述的中性点接地方式,相对于公共接地电极和金属容器的最大电压差是管电压Va的1/2。该方法有利于实现X射线生成设备的尺寸的减小和高电气可靠性。
另一方面,适合于减小尺寸的使用中性点接地方式的X射线生成设备不适合于放大成像,原因是X射线靶设置在容器中并且因此X射线发生器与对象之间的距离的减小是有限的。
在使用阳极接地方式的X射线生成设备中,X射线管的阳极和金属容器接地,并且单极电压源向阴极施加-Va的电位(负的管电压)。阳极可以被视为金属容器的一部分或单罐的一部分。因此,使用阳极接地方式并安装在容器中的X射线管的阳极部分地暴露于单罐的外部,并且绝缘管和阴极完全浸没在绝缘液体中。
在使用阳极接地方式的包括透射X射线管的X射线生成设备中,X射线靶设置在金属容器的壁表面上或金属容器的外部。因此,能够将X射线发生器定位成靠近对象,并且X射线生成设备适合于放大成像。通常,通过X射线发生器和X射线检测表面之间的距离(SID)与X射线发生器和对象之间的距离(SOD)的比率来确定放大率。这里,“SID”和“SOD”分别是“源到图像接收器的距离”以及“源到对象的距离”的缩写。专利文献2描述了一种X射线生成设备,所述X射线生成设备具有单罐式结构,并且其中阳极接地的透射X射线管的阳极突出到容器的外部。
引文列表
专利文献
[专利文献1]美国专利No.7949099
[专利文献2]日本专利特开No.2015-58180
发明内容
[技术问题]
专利文献2中描述的X射线生成设备(其中阳极接地的透射X射线管的阳极突出到容器的外部)具有以下问题:该X射线生成设备可能无法同时实现SOD的减小以及管电压的稳定施加,并且因此放大成像和稳定成像中的至少一者可能会受到限制。
[解决技术方案]
本发明提供了一种能够进行放大成像并且其中X射线管与容器之间的放电减少的X射线生成设备。
[问题的解决方案]
根据本发明,X射线生成设备包括X射线管和容纳所述X射线管的导电的容器,所述X射线管包括:包括电子发射源的阴极、包括透射靶的阳极和绝缘管,所述绝缘管连结到所述阳极和所述阴极中的每一个。所述容器包括凸缘部分和突出部分,所述凸缘部分朝向所述绝缘管延伸,所述突出部分从所述凸缘部分突出并且所述阳极固定到所述突出部分。
通过下文参考附图对示例性实施例的描述,本发明的其他特征将变得明显。
附图说明
图1A是根据本发明的第一实施例的X射线生成设备的剖视图。
图1B是根据本发明的第一实施例的X射线生成设备的正视图。
图1C是根据本发明的第一实施例的X射线生成设备的俯视图。
图1D是根据本发明的第一实施例的X射线生成设备的侧视图。
图2A是根据本发明的第二实施例的X射线生成设备的透视图。
图2B示出了根据本发明的第二实施例的X射线生成设备的剖视图(a)以及与容器的内表面与绝缘管之间的距离相关的图表(b)、(c)和(d)。
图3A是根据本发明的第三实施例的X射线生成设备的透视图。
图3B示出了根据本发明的第三实施例的X射线生成设备的剖视图(a)以及与容器的内表面和绝缘管之间的距离相关的图表(b)、(c)和(d)。
图4A是示出了本发明的第四实施例的主要部分的剖视图。
图4B是示出了本发明的第五实施例的主要部分的剖视图。
图4C是示出了本发明的第六实施例的主要部分的剖视图。
图4D是保护构件的透视图。
图5A是示出了根据本发明的第七实施例的X射线管的阳极侧连结部分和阴极侧连结部分的剖视图。
图5B是示出了根据本发明的第八实施例的X射线管的阳极侧连结部分和阴极侧连结部分的剖视图。
图6是示出了根据本发明的第九实施例的X射线成像系统的方框图。
具体实施方式
下面将参考附图对本发明的实施例进行描述。
[第一实施例]
[X射线生成设备]
图1A是根据本发明的第一实施例的X射线生成设备101的剖视图。图1B至1D分别是X射线生成设备101的正视图、俯视图和侧视图。在本说明书和附图中,z轴沿X射线管的轴向方向Dt延伸,而x-y平面沿X射线管的径向方向延伸。透射靶的发射表面的z坐标是0,X射线从容器107发射出的方向是正z方向,而朝向阴极104的方向是负z方向。换句话说,从阴极104朝向阳极103的方向是正z方向。
X射线生成设备101包括X射线管102、绝缘液体108和容纳X射线管102和绝缘液体108的容器107。本发明的特征在于容器107和X射线管102具有特殊的位置关系。下面将描述该位置关系。
[X射线管]
根据第一实施例的X射线管102是透射X射线管。X射线管102包括具有透射靶1的阳极103、具有电子发射源9的阴极104、以及绝缘管4。绝缘管4在其一个端部和另一个端部处分别连结到阳极103和阴极104,并且使阳极103和阴极104相互绝缘。绝缘管4、阳极103和阴极104形成真空密封容器。
阳极103包括透射靶1和环形阳极构件2。透射靶1包括靶层1a和支撑靶层1a的支撑窗口1b。阳极构件2电连接到靶层1a并连结到支撑窗口1b。阳极构件2和支撑窗口1b通过使用钎焊材料沿环形线被密封。
包括例如钨和钽等重金属的靶层1a在被电子照射时产生X射线。靶层1a的厚度基于有助于X射线的产生的电子的穿透深度与产生的朝向支撑窗口1b穿过靶层1a的X射线的自衰减之间的平衡而确定。该厚度可以在1μm至几十μm的范围内。
支撑窗口1b具有端部窗口的功能,其透射在靶层1a中产生的X射线并将该X射线发射到X射线管102的外部。支撑窗口1b由能够透射X射线的材料制成。该材料的示例包括铍、铝、氮化硅和碳的同位素。支撑窗口1b可以由具有高导热性的金刚石制成,从而可以有效地将靶层1a的热量传递到阳极构件2。
绝缘管4由具有真空密封性和绝缘特性的材料制成。该材料的示例包括陶瓷材料(例如氧化铝和氧化锆)和玻璃材料(例如钠钙和石英)。为了减小绝缘管4与阴极构件8和阳极构件2之间的热应力,阴极构件8和阳极构件2由线性膨胀系数αc(ppm/℃)和αa(ppm/℃)接近绝缘管4的线性膨胀系数αi(ppm/℃)的材料制成。该材料的示例包括合金,例如可伐合金(Kovar)和蒙乃尔合金(Monel)。
在本说明书中,X射线管102的轴向方向Dt和轴线Ct被限定为绝缘管4的轴向方向和轴线。
阴极104包括电子发射源9和阴极构件8。电子发射源9包括具有电子发射器的头部部分23以及将该头部部分固定到阴极构件8的颈部部分22。阴极构件8是环形的并连结到电子发射源9。
通过使用钎焊材料将电子发射源9钎焊到阴极构件8或通过激光焊接等将所述电子发射源热熔合到阴极构件8。电子发射源9的头部部分23包括电子发射器,该电子发射器例如是浸渍型热离子电子源、灯丝型热离子电子源或冷阴极型电子源。头部部分23可以包括限定静电场的电极(未示出),例如引出栅电极或会聚透镜电极。颈部部分22的形状类似于沿轴向方向延伸的中空圆柱体或多个柱状体,使得电连接到电子发射器和静电透镜电极的导线可以延伸穿过其中。
根据第一实施例的X射线管102是透射X射线管。如图1A所示,X射线管102固定到容器107,以便使用阳极接地方式。X射线管102的阳极103通过穿过导电的容器107电连接到接地端子105而接地。X射线管102的阴极104电连接到管驱动电路106的负电极端子,并且通过管驱动电路106的正电极端子电连接到接地端子。管驱动电路106包括输出管电压Va的管电压驱动器(未示出)。管驱动电路106的正电极端子的电位被定义为接地电位,并且管驱动电路106的负电极端子输出电位-Va(V)。管驱动电路106包括控制从电子发射器发射的电子的数量的电子数量控制器(未示出)。
[容器]
容器107具有密封结构并容纳绝缘液体108、X射线管102和管驱动电路106。容器107包括容纳管驱动电路106的后容纳部分107a、凸缘部分107b和突出部分107c。后容纳部分107a和凸缘部分107b沿闭合线密封,以便形成液体密封。凸缘部分107b和突出部分107c沿环形线密封,以便形成液体密封。
在第一实施例中,后容纳部分107a、凸缘部分107b和突出部分107c中的每一个都具有导电性,使得整个容器107可以具有相同的电位(接地电位)。通过以这种方式将容器107接地,确保了X射线生成设备101的电气稳定性。考虑到导电性和强度,后容纳部分107a、凸缘部分107b和突出部分107c中的每一个可以由金属材料制成。
用绝缘液体108真空填充容器107,使得在X射线管102和管驱动电路106之间不存在气泡。这是因为绝缘液体108中的气泡是介电常数低于绝缘液体108的周围区域的区域,并且可能引起放电。绝缘液体108具有由于设置在容器中的部件之间的温度分布不均匀而通过对流进行热交换的功能。绝缘液体108具有减少容器107中不均匀的温度分布的功能;使容器107中的热量通过容器107的壁散发到外部的功能;以及减少X射线管102、管驱动电路106和容器107之间的放电的功能。具体而言,使用具有与X射线生成设备101的操作温度范围相对应的耐热性、流动性和电绝缘性的流体作为绝缘液体108。该流体的示例包括例如硅油或氟树脂油的化学合成油;矿物油;和例如SF6的绝缘气体。
[容器的各部分与X射线管的位置关系]
参考图1A至1D,将描述根据本发明的X射线管102与容器的后容纳部分107a、凸缘部分107b和突出部分107c之间的位置关系。
根据第一实施例的X射线生成设备101包括具有圆筒形形状的突出部分107c,并且X射线管102的阳极103连结到突出部分107c。
X射线管102的阳极103连结到形成在圆筒形突出部分107c中的开口,并由此将X射线管102固定到容器107。通过使用固定构件(未示出)将管驱动电路106固定到容器的后容纳部分107a。通过将沿着闭合线与凸缘部分107b连续的后容纳部分107a分成用于固定和容纳X射线管102的部分以及用于固定管驱动电路106的部分,能够选择性地将X射线管102设置在容器107的突出部分107c中。
如果在如图6所示的X射线成像系统中,X射线管的阳极将固定到不具有突出部分的容器上,容器的面向对象并靠近对象的一部分将具有更大的面积,并且将很难减小源到图像接收器的距离SID。
相反,容器107包括凸缘部分107b,所述凸缘部分沿闭合线与后容纳部分107a连续,所述凸缘部分从与后容纳部分107a连续的部分朝向绝缘管4延伸,并包围绝缘管4。容器107还包括突出部分107c,所述突出部分沿环形线与凸缘部分107b连续,所述突出部分包括在远离后容纳部分107a的方向上从凸缘部分107b突出的部分,并且阳极103固定到所述突出部分。容器107包括在突出部分107c和凸缘部分107b之间的弯曲部分107d。突出部分107c和凸缘部分107b沿环形线彼此连续,其中沿容器107的内表面环形延伸的弯曲部分107d位于突出部分和凸缘部分之间。换句话说,弯曲部分107d定位在容器107的突出到容器107中的部分中。换句话说,凸缘部分107b环形地延伸,使得弯曲部分107d包围绝缘管4。
由于突出部分107c从凸缘部分107b突出并且两者之间具有弯曲部分107d,因此能够在容器107的突出部分107c的端部处定位透射靶1,在该透射靶处聚焦电子束并且产生X射线。
因此,当根据本发明的X射线生成设备101用在图6所示的X射线成像系统200中时,X射线成像系统200可以具有高的放大率并有效地执行高分辨率成像。也就是说,在X射线生成设备101和X射线检测器206之间,相对于源到图像接收器的距离SID能够有效地减小源到对象的距离SOD,对于所述X射线检测器206来说检测表面的面积实际上是有限的;并且能够增大放大率SID/SOD。因此,能够将透射靶1(为X射线生成设备101的X射线发生器)定位成靠近具有朝向X射线生成设备101突出的部分的对象204的感兴趣区域ROI,同时防止X射线生成设备101与对象204碰撞。具有突出部分的对象204的示例包括半导体基板,具有不同高度的多个装置安装在该半导体基板上。
如图1A所示,在轴向方向Dt(z方向)上,弯曲部分107d定位于阳极侧连结部分128(绝缘管4和阳极103在该处彼此连结)与阴极侧连结部分122(绝缘管4和阴极104在该处彼此连结)之间。通过以这种方式将X射线管102设置在容器107中,能够提供可以执行放大成像并具有高可靠性的X射线生成设备101。也就是说,将透射靶1设置在容器107的突出位置处的技术优势在于它适合于放大成像。而且,由于与阳极具有相同电位的弯曲部分107d设置成以便与阴极104分离,因此能够减少放电并确保X射线生成设备101的可靠性。这种设置相当于将与阳极具有相同电位的弯曲部分107d与三重点(阴极104和绝缘管4之间的连结部分)分离,并因此减少了X射线生成设备101的放电。
注意,表述“突出部分107c从凸缘部分107b突出并且两者之间具有弯曲部分107d”与表述“容器107包括凸缘部分,所述凸缘部分从其沿着闭合线与后容纳部分107a连续的部分朝向绝缘管4延伸并包围绝缘管4”具有基本相同的含义。
图2A是根据本发明的第二实施例的X射线生成设备101的透视图。图2B示出了X射线生成设备101的剖视图(a)以及与容器107的内表面与绝缘管4之间的距离相关的图表(b)、(c)和(d)。在图2B中,以与本说明书的其他附图中相同的方式,从阴极104朝向阳极103的方向被定义为正z方向,并且容器107的内表面上沿轴向方向Dt的位置由z表示。
根据第二实施例的X射线生成设备101包括具有长方体形状的突出部分107c。第二实施例与第一实施例的不同之处在于凸缘部分107b、突出部分107c和弯曲部分107d的形状。在第二实施例中,弯曲部分107d是矩形的并包围绝缘管4。
在图2B的图表(b)中,绝缘管4与容器107的内周表面之间的距离Li相对于轴向方向上的位置z而绘制。在图2B的图表(c)中,距离Li相对于位置z的一阶导数相对于位置z而绘制。同样地,在图2B的图表(d)中,距离Li相对于位置z的二阶导数相对于位置z而绘制。
如图2B的剖视图(a)和图表(c)所示,绝缘管4和容器107之间的距离Li相对于位置z的一阶导数局部最小的位置与弯曲部分107d重叠。如图2B的剖视图(a)和图表(d)所示,绝缘管4和容器107之间的距离Li相对于位置z的二阶导数的符号从负变为正的位置与弯曲部分107d重叠。因此,即使容器107包括具有有限曲率半径的部分,也能够唯一地确定弯曲部分107d的位置。
图3A是根据本发明的第三实施例的X射线生成设备101的透视图。图3B示出了X射线生成设备101的剖视图(a)以及与容器107的内表面与绝缘管4之间的距离相关的图表(b)、(c)和(d)。根据第三实施例的X射线生成设备101包括具有截头圆锥形状的突出部分107c。第三实施例与第一实施例的不同之处在于突出部分107c的形状,并且与第二实施例的不同之处在于凸缘部分107b、突出部分107c和弯曲部分107d的形状。在第三实施例中,弯曲部分107d如第一和第二实施例中那样是环形的并且包围绝缘管4。
在图3B的图表(b)中,绝缘管4与容器107的内周表面之间的距离Li相对于轴向方向上的位置z而绘制。在图3B的图表(c)中,距离Li相对于位置z的一阶导数相对于位置z而绘制。同样地,在图3B的图表(d)中,距离Li相对于位置z的二阶导数相对于位置z而绘制。
同样在第三实施例中,如图3B的剖视图(a)和图表(c)所示,绝缘管4和容器107之间的距离Li相对于位置z的一阶导数局部最小的位置与弯曲部分107d重叠。如图3B的剖视图(a)和图表(d)所示,绝缘管4和容器107之间的距离Li相对于位置z的二阶导数的符号从负变为正的位置与弯曲部分107d重叠。
图4A至4C是根据本发明第四、第五和第六实施例的X射线生成设备101的主要部分的局部放大剖视图。图4A至4C各自示出了根据第四至第六实施例中的相应一个的X射线生成设备101的阴极侧连结部分122和阳极侧连结部分128。阴极104(阴极构件8)与绝缘管4在阴极侧连结部分122处彼此连结。阳极103(阳极构件2)与绝缘管4在阳极侧连结部分128处彼此连结。
在图4A所示的第四实施例中,阴极侧连结部分122与弯曲部分107d之间的距离Lcb大于阴极侧连结部分122与阳极侧连结部分128之间的距离Lca。第四实施例(其中突出部分107c的突出长度较小)在捕捉对象的放大图像时有可能受到对象(未示出)的高度的影响。因此,与下面描述的第五和第六实施例相比,第四实施例不是特别适合于放大成像。另一方面,在第四实施例中,形成发生电场集中的三重点的阴极侧连结部分122不比阳极侧连结部分128更靠近弯曲部分107d。因此,阴极104和容器107之间不太可能会发生放电。在第四实施例中,弯曲部分107d与阴极侧连结部分122之间的距离可以等于阳极侧连结部分128与阴极侧连结部分122之间的距离。
在图4B所示的第五实施例中,阴极侧连结部分122与弯曲部分107d之间的距离Lcb小于阴极侧连结部分122与阳极侧连结部分128之间的距离Lca。与第四实施例相比,第五实施例(其中突出部分107c的突出长度较长)在捕捉对象的放大图像时不太可能受到对象(未示出)高度的影响。因此,第五实施例相较于第四实施例更适合于放大成像。另一方面,在第五实施例中,形成发生电场集中的三重点的阴极侧连结部分122比阳极侧连结部分128更靠近弯曲部分107d。因此,阴极104和容器107之间的电压电阻减小,并且与第四实施例相比更可能会发生放电。换句话说,根据第五实施例的弯曲部分107d具有近侧点107p,在所述近侧点处从阴极侧连结部分122到容器107的内周表面的距离最小。在第五实施例中,近侧点107p与阴极侧连结部分122之间的距离Lcb小于阳极侧连结部分128与阴极侧连结部分122之间的距离Lca。
图4C所示的第六实施例是第五实施例的改型。第六实施例与第五实施例的不同之处在于,具有绝缘特性的保护构件120设置在弯曲部分107d(近侧点107p)和阴极侧连结部分122之间,使得从阴极侧连结部分122不能直接看到弯曲部分107d(近侧点107p)。如图4C和4D所示,保护构件120是管状构件,所述管状构件具有通过使L形横截面旋转而形成的形状。保护构件120包围X射线管102,使得从阴极侧连结部分122周围的区域不能直接看到弯曲部分107d(近侧点107p)。保护构件120由绝缘的固体材料制成,例如陶瓷、玻璃或树脂。保护构件120在25℃下可以具有1×105Ωm或更高的体积电阻率。
接下来,参考图5A和5B,将描述确定阴极侧连结部分122和阳极侧连结部分128的位置的方法。图5A和5B是示出了根据本发明的第七实施例和第八实施例的X射线管102的阳极侧连结部分128和阴极侧连结部分122的剖视图。
在第七实施例中,均具有盘状形状的阳极构件2和阴极构件8在其彼此面对的表面处连结到绝缘管4。在第七实施例中,阴极侧连结部分122对应于绝缘管4的阴极侧端部部分,而阳极侧连结部分128对应于绝缘管4的阳极侧端部部分。因此,阴极侧连结部分122与阳极侧连结部分128之间的距离Lca与绝缘管4在轴向方向上的长度相同。
第八实施例与第七实施例的不同之处在于,阳极构件2和阴极构件8包括管状套筒部分,所述管状套筒部分在使得套筒部分彼此面对的方向上突出。在第八实施例中,阴极侧连结部分122从绝缘管4的阴极侧端点沿轴向方向Dt偏移阴极构件8的套管部分的突出长度。同样地,阳极侧连结部分128从绝缘管4的阳极侧端点沿轴向方向Dt偏移阳极构件2的套管部分的突出长度。因此,阴极侧连结部分122与阳极侧连结部分128之间的距离Lca小于绝缘管4在轴向方向上的长度。
通过使用上述方法,不管阳极构件2、阴极构件8和绝缘管4的形状如何,都能够在电场集中于此并且与相对电极相邻的区域中确定阴极侧连结部分122和阳极侧连结部分128的位置。
图6是根据本发明的第九实施例的X射线成像系统200的方框图。系统控制器202彼此协作地控制X射线生成设备101和X射线检测装置201。
管驱动电路106在系统控制器202的控制下向X射线管102输出各种控制信号。X射线生成设备101根据从系统控制器202输出的控制信号发射X射线。X射线检测器206检测从X射线生成设备101发射并穿过对象204的X射线11。X射线检测器206包括多个检测元件(未示出)并获得透射的X射线图像。X射线检测器206将透射的X射线图像转换为图像信号,并将该图像信号输出到信号处理器205。信号处理器205在系统控制器202的控制下对图像信号执行预定的信号处理,并将处理后的图像信号输出到系统控制器202。系统控制器202根据处理后的图像信号将显示信号输出到显示装置203,使得显示装置203可以显示图像。显示装置203在屏幕上基于显示信号显示图像(该图像是对象204的捕获的图像)。具有预定间隙的狭缝(未示出)、具有预定开口的准直器(未示出)等可以设置在X射线管102和对象204之间,以减少不必要的X射线照射。在第九实施例中,对象204由布置部分或传送部分(未示出)支撑,以便与X射线管102和X射线检测器206分开预定距离。
根据第九实施例的X射线成像系统200可以稳定地捕捉放大的图像,所述X射线成像系统200包括适合于放大成像并且减少放电的X射线生成设备101。
[发明的有益效果]
利用本发明,能够提供一种X射线生成设备,所述X射线生成设备由于放电的减少而具有高可靠性并且由于低SOD可以而执行放大成像。
尽管已经参考示例性实施例描述了本发明,但是应该理解,本发明不限于所公开的示例性实施例。对下列权利要求的范围应作最广义的解释,从而涵盖所有改型以及等同的结构和功能。
本申请要求2016年10月28日提交的日本专利申请No.2016-212124的权益,该日本专利申请在此通过引用整体并入本文。
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