CN109604183A - Check device and inspection method - Google Patents

Check device and inspection method Download PDF

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Publication number
CN109604183A
CN109604183A CN201811139185.9A CN201811139185A CN109604183A CN 109604183 A CN109604183 A CN 109604183A CN 201811139185 A CN201811139185 A CN 201811139185A CN 109604183 A CN109604183 A CN 109604183A
Authority
CN
China
Prior art keywords
metal mask
piece
grade
mask piece
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811139185.9A
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Chinese (zh)
Inventor
福山智博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sinto S Precision Ltd
Original Assignee
Sinto S Precision Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2017-193996 priority Critical
Priority to JP2017193996A priority patent/JP6986916B2/en
Application filed by Sinto S Precision Ltd filed Critical Sinto S Precision Ltd
Publication of CN109604183A publication Critical patent/CN109604183A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/38Collecting or arranging articles in groups

Abstract

The present invention provides check device and inspection method, can hierarchically accommodate metal mask piece after checking metal mask piece.The check device is to check the check device (2) of the metal mask piece before the installation of metal mask frame, is had: determination part (8), measurement are formed in the management point of the metal mask piece;Grade determination unit is classified the metal mask piece based on the measurement result of the determination part;And trucking department (24), the metal mask piece is carried to receiving by the receiving portion (22) of the metal mask piece of the grade distinction based on the grade of the metal mask piece determined by the grade determination unit.

Description

Check device and inspection method
Technical field
The present invention relates to the check device for checking metal mask piece and use the inspection method of the check device.
Background technique
Past, it is known that a kind of metal mask check device carries out in the manufacturing process of organic EL element in vacuum evaporation Visual examination of the metal mask used when organic luminous layer etc. (for example, referring to patent document 1).
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2004-037134 bulletin
Summary of the invention
Problems to be solved by the invention
However, metal mask by band-like metal mask piece give as defined in tension in the state of to frame-shaped gold Belong to mask frame to attach metal mask piece and be made.The patterns of openings of metal mask piece is formed in by giving metal mask piece The influence of tension and bi-directional scaling.In addition, the shape of metal mask frame is also produced by the tension by giving metal mask piece The influence of raw deformation and formed.Therefore, it in order to investigate the tension for giving metal mask piece, needs to paste to metal mask frame Metal mask piece is checked before attached.
In the inspection of metal mask piece, measurement is formed in the size of the management point of metal mask piece, based on measurement result The tension of metal mask piece is given in decision.Specifically, measuring management point in check device using microscope etc., being based on Measure the grade decision that result carries out metal mask piece.Determine the metal mask piece of grade by operator with manual operations Mode return to product shelf, be arranged in a manner of manually operated by operator to metal mask manufacturing device.However, in order to Expeditiously manufacture high-precision metal mask, it is desirable to after by the graduation of metal mask piece, divide in check device in advance etc. Grade ground receiving metal mask piece.
The object of the present invention is to provide metal mask piece can be hierarchically accommodated after checking out metal mask piece Check device and the inspection method for using the check device.
A technical solution to solve project
Check device of the invention is the check device for checking the metal mask piece before the installation of metal mask frame, Be characterized in that having: determination part, measurement are formed in the management point of the metal mask piece;Grade determination unit is based on the measurement The measurement result in portion classifies the metal mask piece;And trucking department, described in being determined as the grade determination unit The grade of metal mask piece is by the metal mask piece to receiving by the receiving of the metal mask piece of the grade distinction It carries in portion.
In addition, check device of the invention is characterized in that: visual examination portion is also equipped with, described in visual examination portion inspection The appearance of metal mask piece, the grade determination unit determine the metal mask based on the inspection result in the visual examination portion Piece is being determined as that the metal is covered by the grade determination unit if appropriate for as component used in the manufacture in metal mask In the case that matrix is not suitable as the component used in the manufacture of the metal mask, the trucking department covers the metal It carries matrix receiving portion to outside the grade for accommodating the unsuitable metal mask piece.
In addition, check device of the invention is characterized in that: measurement knot of the grade determination unit based on the determination part Fruit determines that the metal mask piece if appropriate for as component used in the manufacture in metal mask, is sentenced by the grade In the case where determining portion and be determined as that the metal mask piece is not suitable as the component used in the manufacture of the metal mask, institute Stating trucking department, the receiving portion to outside the grade for accommodating the unsuitable metal mask piece is carried by the metal mask piece.
In addition, inspection method of the invention is to check the reviewing party of the metal mask piece before the installation of metal mask frame Method characterized by comprising mensuration operation, measurement are formed in the management point of the metal mask piece;Grade judgment process, base The metal mask piece is classified in the measurement result of the mensuration operation;And transportation process, based on being sentenced by the grade Determine the gold of the grade of the metal mask piece of process judgement by the metal mask piece to each grade of receiving It carries the receiving portion for belonging to mask sheet.
In addition, inspection method of the invention is characterized in that: including visual examination process, being examined in the visual examination process The appearance for looking into the metal mask piece, in the grade judgment process, the inspection result based on the visual examination process come Determine the metal mask piece if appropriate for as component used in the manufacture in metal mask, in the transportation process, It is being determined as that the metal mask piece is not suitable as using in the manufacture of the metal mask by the grade judgment process Component in the case where, the metal mask piece is removed receiving portion to outside the grade for accommodating the unsuitable metal mask piece Fortune.
In addition, inspection method of the invention is characterized in that: in the grade judgment process, being based on the mensuration operation Measurement result determine the metal mask piece if appropriate for as component used in the manufacture in metal mask, described In transportation process, it is being determined as that the metal mask piece is not suitable as in the metal mask by the grade judgment process In the case where component used in manufacture, by the metal mask piece to outside the grade for accommodating the unsuitable metal mask piece It carries receiving portion.
Invention effect
In accordance with the invention it is possible to provide the inspection that can hierarchically accommodate metal mask piece after checking out metal mask piece Look into device and the inspection method using the check device.
Detailed description of the invention
Fig. 1 is the figure for indicating the structure of check device of embodiment.
Fig. 2 is the figure for indicating the structure of metal mask piece of embodiment.
Fig. 3 is the figure of the structure of piece receiving portion after indicating the inspection of embodiment.
Fig. 4 is the figure for indicating the structure of pallet of embodiment.
Fig. 5 is the block diagram for indicating the system structure of check device of embodiment.
Fig. 6 is for checking that the check device of embodiment is used, the inspection method of metal mask piece is illustrated Flow chart.
Specific embodiment
Hereinafter, for the check device of embodiments of the present invention, enumerating the manufacture work in organic EL element referring to attached drawing Metal mask piece (the metal mask to before the installation of metal mask frame used in vacuum evaporation organic luminous layer is checked in sequence Piece) the example of check device be illustrated.
Fig. 1 is the figure for indicating the outline structure of check device of the embodiment.In addition, in the following description, setting XYZ rectangular coordinate system shown in FIG. 1 is illustrated referring to positional relationship etc. of the rectangular coordinate system to each component.X/Y plane quilt It is set as the face parallel with the mounting horizontal plane of check device, Z axis is set to vertical direction.As shown in Figure 1, check device 2 Has platform portion 5, glass platform portion 6, inspection portion 8, frame 10, a pair of guide rails 12, clamping piece 14, platform portion 15, adsorption section 16, a pair are led Rail 17, check after the temporary receiving portion 20 of piece, check after piece receiving portion 22 and manipulator 24.
Platform portion 5 is the rectangular-shaped plate for the metal mask piece 4 (referring to Fig. 2) that temporary mounting is checked out by inspection portion 8.Separately Outside, glass platform portion 6 is the rectangular-shaped plate that metal mask piece 4 (referring to Fig. 2) is loaded when being checked by inspection portion 8.Such as Shown in Fig. 2, metal mask piece 4 is made of band-like metallic film, in each region 4a of metal mask piece 4, passes through etching etc. It is formed with the patterns of openings of multiple square shapes, round, oblong-shaped etc..In addition, around each region 4a, such as Fig. 2 institute Show, is formed with multiple management point 4b.By by the both ends of multiple metal mask pieces 4 to the metal mask frame for constituting frame-shaped Two opposite sides sequentially attach to manufacture metal mask, and metal mask is organic in progress in the manufacturing process of organic EL element It is used when the vacuum evaporation of material.
Inspection portion 8 has microscope and camera, checks the metal mask piece 4 for being placed in glass platform portion 6.Specifically, Inspection portion 8 measures the position for being formed in the management point 4b of metal mask piece 4 using microscope and camera.In addition, inspection portion 8 The appearance of metal mask piece 4 is checked using microscope and camera, such as whether check has foreign matter attached on metal mask piece 4 , whether patterns of openings be weak.The bearing of inspection portion 8 (can be placed in the metal in glass platform portion 6 in X direction by frame 10 The length direction of mask sheet 4) sliding.The bearing of frame 10 (can be placed in the gold in glass platform portion 6 along Y-direction by a pair of guide rails 12 Belong to the width direction of mask sheet 4) sliding.
Clamping piece 14 will be placed in the two of the metal mask piece 4 in glass platform portion 6 at least during being checked by inspection portion 8 End clamping.In addition, clamping piece 14 is configured to moveable in the y direction, after the inspection for terminating to be carried out by inspection portion 8, will load It is clamped in the both ends of the metal mask piece 4 in glass platform portion 6 and keeps it mobile to platform portion 5.
Platform portion 15 is the rectangular-shaped plate for loading metal mask piece case (not shown).In metal mask piece case, check Preceding metal mask piece 4 with paper, metal mask piece 4, paper, metal mask piece 4 sequence multiple stacking and be received.Adsorption section 16 It is adsorbed on the upper surface of the metal mask piece 4 of the top accommodated in metal mask piece case, a pair of guide rails 17 is by adsorption section 16 It holds as that can be slided along Y-direction.The metal mask piece 4 that being adsorbed by adsorption section 16 remains passes through adsorption section 16 in a pair of guide rails 17 It is moved along Y-direction and is moved to glass platform portion 6.
The temporary receiving portion 20 of piece is temporarily housed in the metal mask piece 4 for finishing to check at inspection portion 8 after inspection.In addition, The metal that piece receiving portion 22 hierarchically accommodates that the temporary receiving portion 20 of piece is carried out after inspection using manipulator 24 after inspection is covered Matrix 4.Fig. 3 is the figure of the structure of piece receiving portion 22 after indicating to check.After inspection in piece receiving portion 22, as shown in figure 3, setting There are layer 22a, 22b of the metal mask piece 4 of receiving A grade, the layer 22c, 22d for the metal mask piece 4 for accommodating B grade, receiving C etc. Layer 22g, 22h of the metal mask piece 4 of layer 22e, 22f and receiving NG grade of the metal mask piece 4 of grade.For metal mask piece 4 grade describes later.
The metal mask piece 4 of A grade be accommodated in the state of being placed on pallet 23 as shown in Figure 4 a layer 22a, 22b.Similarly, the metal mask piece 4 of B grade is accommodated in layer 22c, a 22d in the state of being placed in pallet 23, C grade Metal mask piece 4 is accommodated in layer 22e, 22f receiving in the state of being placed in pallet 23, and the metal mask piece 4 of NG grade exists It is placed in the state of pallet 23 and is accommodated in layer 22g, a 22h.
Manipulator 24 is the trucking department for loading metal mask piece 4 and being carried, and has supporting mass 24a, arm 24b And hand 24c.Supporting mass 24a is configured to carry out rotation as axis using Z-direction and (Z-direction) can move along the vertical direction. Arm 24b is fixed on supporting mass 24a, is configured to scalable.In addition, arm 24b is rotated by supporting mass 24a in X-direction and Y It is moved on direction, is moved up and down by supporting mass 24a and moved in z-direction.The front end of arm 24b is provided with hand 24c, hand 24c load metal mask piece 4.Manipulator 24 by finish check metal mask piece 4 from platform portion 5 to inspection after piece It carries temporary receiving portion 20.In addition, manipulator 24 by be contained in check after the temporary receiving portion 20 of piece metal mask piece 4 to inspection Piece receiving portion 22 is carried afterwards.
Fig. 5 is the block diagram for indicating the system structure of check device 2.It is controlled blanketly as shown in figure 5, check device 2 has The control unit 26 of each section of check device 2.Inspection portion 8, robot drives portion 28, clamping piece driving are connected in control unit 26 Portion 29, X-direction driving portion 30, Y-direction driving portion 32, adsorption section driving portion 33, storage unit 34 and input unit 36.
Control unit 26 obtains the inspection result (dimension measurement result and visual examination result) for coming self-check portion 8 and based on inspection The fruit that comes to an end classifies metal mask piece 4.For example, be formed in the region 4a of metal mask piece 4 size relative to design It is A grade in the first prescribed limit, with bigger than the first prescribed limit and (be greater than the in the second prescribed limit that the difference of value, which is in, One prescribed limit) in be B grade, with bigger than the second prescribed limit and in third prescribed limit (being greater than the second prescribed limit) Interior when being C grade, with (defective products) bigger than third prescribed limit being NG (bad) grade, control unit 26 is based on by checking The size of the region 4a calculated on the basis of the position for the management point 4b that portion 8 determines determines that metal mask piece 4 meets A etc. Which of grade, B grade, C grade or NG grade.In addition, control unit 26 is determined based on the visual examination result in inspection portion 8 Metal mask piece 4 is if appropriate for as component used in the manufacture in metal mask.It is being determined as that metal mask piece 4 is unsuitable As in the case where component, control unit 26 is determined as it being that defective products meets NG grade used in the manufacture in metal mask. In addition, including the related with the grade of metal mask piece 4 of the first prescribed limit, the second prescribed limit and third prescribed limit etc. Information is stored in advance in storage unit 34.
Piece is temporarily received when the temporary receiving portion 20 of piece after making metal mask piece 4 from platform portion 5 to inspection is mobile and after inspection When appearance portion 20 is mobile to piece receiving portion 22 after inspection, 28 driving manipulator 24 of robot drives portion.Control unit 26 uses manipulator Driving portion 28 carries layer from the metal mask piece 4 for being identified as meeting A grade to piece receiving portion 22 after inspection 22a or 22b.Together Sample, control unit 26 is accommodated the metal mask piece 4 for being identified as meeting B grade to piece after inspection using robot drives portion 28 The layer 22c or 22d in portion 22 are carried, and will be identified as meeting the metal mask piece 4 of C grade to the layer of piece receiving portion 22 after inspection 22e or 22f is carried, and will be identified as meeting (being not suitable as the component used in the manufacture of metal mask) gold of NG grade Belong to mask sheet 4 to carry to the layer 22g or 22h of piece receiving portion 22 after inspection.
Clamping piece driving portion 29 moves clamping piece 14 in the Y direction.X-direction driving portion 30 makes the inspection for being supported on frame 10 Portion 8 is looked into slide in the X direction.Y-direction driving portion 32 makes the frame for being supported on guide rail 12 10 (and then make the inspection for being supported on frame 10 Look into portion 8) it slides in the Y direction.Adsorption section driving portion 33 moves adsorption section 16 in the Y direction.Storage unit 34 storage with it is above-mentioned Metal mask piece 4 the related information of grade.In addition, storage unit 34 also store it is related with the grade of other metal mask pieces Information.Input unit 36 exports the information related with the grade of metal mask piece inputted by operator relative to control unit 26. Control unit 26 makes the information related with the grade of metal mask piece obtained by input unit 36 be stored in storage unit 34.
Next, referring to attached drawing, to the inspection method for checking metal mask piece 4 in check device 2 preferably It is illustrated.Fig. 6 is for the flow chart for checking that processing when metal mask piece 4 is illustrated in check device 2.This Outside, before the inspection in check device 2, metal mask piece 4 with other metal mask pieces (multiple metal mask pieces) 4 together It is arranged by operator etc. onto platform portion 15 in the state of being housed in metal mask piece case.
Firstly, metal mask piece 4 is carried (step S10) from platform portion 15 to glass platform portion 6 by control unit 26.That is, control unit 26 keep adsorption section 16 mobile via adsorption section driving portion 33, make (being housed in the metal mask piece case) metal for being placed in platform portion 15 The upper surface of mask sheet 4 is adsorbed by adsorption section 16 and is kept, by further keeping adsorption section 16 mobile via adsorption section driving portion 33 And metal mask piece 4 is made to be moved to glass platform portion 6.
Next, control unit 26 measures the management point 4b (step S11) for being formed in metal mask piece 4.Specifically, control Portion 26 moves inspection portion 8 along frame 10 and guide rail 12 via X-direction driving portion 30 and Y-direction driving portion 32, to make to check Portion 8, which is moved to, to locate (above the region 4a being measured).Next, control unit 26 is designated as surveying relative to inspection portion 8 It is shaped as the position of each management point 4b around the 4a of region.Inspection portion 8 measures each management using microscope and camera The position of point 4b, and measurement result is exported relative to control unit 26.Control unit 26 is based on each pipe determined at inspection portion 8 The position for managing point 4b calculates the size of region 4a.Inspection portion 8 is set to measure the management point formed around other region 4a In the case where the position of 4b, control unit 26 repeats the processing of step S11.In addition, measuring the size of at least one region 4a.
Next, control unit 26 based on the measurement result measured in step s 11 by metal mask piece 4 classify (step S12).That is, size of the control unit 26 based on the region 4a calculated on the basis of the position of the management point 4b of measurement at inspection portion 8 To determine that metal mask piece 4 meets which of A grade, B grade, C grade or NG grade.In region the size of 4a relative to The difference of design value it is bigger than third prescribed limit it is equal do not meet any of A grade, B grade or C grade in the case where, control Portion 26 is determined as that metal mask piece 4 is NG grade (defective products: being not suitable as the component used in the manufacture of metal mask) (step S13: yes), enters step the processing of S16.
On the other hand, in the case where being determined as that metal mask piece 4 is non-NG grade (step S13: no), control unit 26 is examined Look into the appearance (step S14) of metal mask piece 4.Specifically, control unit 26 is designated as checking metal mask relative to inspection portion 8 The appearance of piece 4, inspection portion 8 checks the appearance of metal mask piece 4 using microscope and camera, such as checks in metal mask Whether have whether foreign matter attachment, patterns of openings are short of, and inspection result is exported relative to control unit 26 on piece 4.
Next, control unit 26 is sentenced based on the inspection result of the appearance of the metal mask piece 4 checked in step S14 Whether deposit category mask sheet 4 is defective products (step S15).That is, control unit 26 determines metal mask piece 4 if appropriate for as in gold Belong to component used in the manufacture of mask.Such as exist in the case where being attached with foreign matter on metal mask piece 4, in patterns of openings The case where shortcoming, is inferior, and control unit 26 is determined as that metal mask piece 4 is not suitable as used in the manufacture of metal mask Part (being defective products).
Next, control unit 26 is in the metal mask piece 4 that will finish the inspection carried out by inspection portion 8 using clamping piece 14 After being carried from glass platform portion 6 to platform portion 5, by it from platform portion 5 to inspection after the temporary receiving portion 20 of piece carry (step S16).Control Portion 26 processed makes supporting part 24a rotation/movement of manipulator 24 via robot drives portion 28 and stretches the arm 24b of manipulator 24 Metal mask piece 4 is moved to by contracting to loading the metal mask piece 4 for being placed in platform portion 5 to the hand 24c of manipulator 24 The temporary receiving portion 20 of piece after inspection.
Next, being contained in the metal mask piece 4 of the temporary receiving portion 20 of piece after inspection in step s 16 in step s 12 In the case where being judged as A grade and be judged as non-defective products in step S15 (step S17: yes), control unit 26 is by metal The temporary receiving portion 20 of the piece after inspection of mask sheet 4 is carried to piece receiving portion 22 after inspection, and is contained in piece receiving portion 22 after inspection A grade layer 22a or layer 22b (step S18).Specifically, control unit 26 makes manipulator 24 via robot drives portion 28 Arm 24b it is flexible and mobile, the metal mask piece 4 of the temporary receiving portion 20 of piece after checking will be contained in and be placed in manipulator 24 Hand 24c is further made and making supporting part 24a rotation/movement of manipulator 24 and the arm 24b of manipulator 24 is made to stretch Metal mask piece 4 piece receiving portion 22 and is contained in layer 22a or layer 22b after being moved to inspection.
In addition, (having the space of receiving metal mask piece 4 on the pallet 23 of layer 22a in the case where layer 22a has vacant position In the case of), the metal mask piece 4 of A grade is contained in a layer 22a by control unit 26.On the other hand, there is no the feelings in vacancy in layer 22a (due to containing space of other metal mask pieces 4 without accommodating metal mask piece 4 on the pallet 23 of layer 22a under condition In the case where), the metal mask piece 4 of A grade is contained in a layer 22b by control unit 26.Contain metal mask piece 4 with position not leaving a blank Pallet 23 moved out using MGV (manual guided vehicle: manual guidance vehicle) etc. from check device 2.
On the other hand, it is contained in the metal mask piece 4 of the temporary receiving portion 20 of piece after checking in step s 16 in step S12 In be not judged as A grade (step S17: no) and be judged as B grade and be judged as the feelings of non-defective products in step S15 Under condition (step S19: yes), control unit 26 by metal mask piece 4 the temporary receiving portion 20 of the piece after inspection to piece receiving portion after inspection 22 carry and be contained in check after piece receiving portion 22 B grade layer 22c or layer 22d (step S20).
Further, it is contained in the metal mask piece 4 of the temporary receiving portion 20 of piece after checking in step s 16 in step s 12 In the case where not being judged as B grade (step S19: no) and be judged as C grade and be determined as non-defective products in step S15 (step S21: yes), control unit 26 by metal mask piece 4, remove to piece receiving portion 22 after inspection by the temporary receiving portion 20 of the piece after inspection Transport and be contained in check after piece receiving portion 22 C grade layer 22e or layer 22f (step S22).On the other hand, in metal mask Piece 4 is not judged as C grade (step S21: no) in step s 12 and is judged as NG grade in step S12 or step S15 In the case where, control unit 26 by metal mask piece 4, carry simultaneously to piece receiving portion 22 after inspection by the temporary receiving portion 20 of the piece after inspection It is contained in the layer 22g or layer 22h (step S23) of the NG grade of piece receiving portion 22 after checking.
In the processing of step S20, S22 and S23, in the same manner as the processing of step S18, control unit 26 drives via manipulator Dynamic portion 28 makes supporting part 24a rotation/movement of manipulator 24 and keeps the arm 24b of manipulator 24 flexible, so that inspection will be contained in The metal mask piece 4 for looking into the temporary receiving portion 20 of rear piece is placed in the hand 24c of manipulator 24, and metal mask piece 4 is made to be moved to inspection Look into rear piece receiving portion 22.In addition, metal mask piece 4 is contained in by control unit 26 in the case where layer 22c, 22e, 22g have vacant position Layer 22c, 22e, 22g.On the other hand, in the case where layer 22c, 22e, 22g do not have vacancy, control unit 26 is by metal mask piece 4 It is contained in layer 22d, 22f, a 22h.
In addition, in above-mentioned inspection method, it can also be in the processing for executing step S10~S17 repeatedly with stipulated number The processing transfer of backward step S18.For example, it is also possible to be temporarily contained in by multiple the metal mask pieces 4 for finishing to check (for the visual inspection etc. of operator) behind the temporary receiving portion 20 of piece after inspection, multiple metal mask pieces 4 are received to piece after inspection It carries and hierarchically accommodates in appearance portion 22.
According to the check device 2 of the embodiment and using the inspection method of the check device 2, have based on inspection result Determine the control unit 26 of the grade of metal mask piece 4, can hierarchically accommodate piece receiving portion after the inspection of metal mask piece 4 22.Therefore, because metal mask piece 4 hierarchically can be housed in inspection after checking out metal mask piece 4 at inspection portion 8 Afterwards in piece receiving portion 22, thus to using metal mask piece 4 manufacture metal mask when with the high-precision metal of high efficient production Mask is useful.
In addition, in the above-described embodiment, the appearance of metal mask piece 4 is checked after determining management point 4b, still Can also after the appearance for checking out metal mask piece 4 management by measurement point 4b.
In addition, in the above-described embodiment, piece temporarily accommodates after having inspection for visual inspection of operator etc. Portion 20, but also can be set to do not have check after the temporary receiving portion 20 of piece structure.Piece temporarily accommodates after not having inspection In the case where portion 20, metal mask piece 4 is after terminating to check and by clamping piece 14 be placed on platform portion 5, from manipulator 24 to inspection Piece receiving portion 22 is carried and is hierarchically accommodated afterwards.
Label declaration
2 check devices, 4 metal mask pieces, 4b management point, 5 portions, 6 glass platform portions, 8 inspection portions, 10 frames, 12 guide rails, 14 clamping pieces, 15 portions, 16 adsorption sections, 17 guide rails, the temporary receiving portion of piece after 20 inspections, piece after 22 inspections Receiving portion, 24 manipulators, 24a supporting part, 24b arm, 24c hand, 26 control units, 28 robot drives portions, 29 folders Gripping member driving portion, 30 X-direction driving portions, 32 Y-direction driving portions, 33 adsorption section driving portions, 34 storage units, 36 input units.

Claims (6)

1. a kind of check device, is the check device for checking the metal mask piece before the installation of metal mask frame, feature exists In having:
Determination part, measurement are formed in the management point of the metal mask piece;
Grade determination unit is classified the metal mask piece based on the measurement result of the determination part;And
Trucking department, based on the grade of the metal mask piece determined by the grade determination unit come by the metal mask piece to Receiving is carried by the receiving portion of the metal mask piece of the grade distinction.
2. check device according to claim 1, which is characterized in that
It is also equipped with visual examination portion, which checks the appearance of the metal mask piece,
The grade determination unit determines the metal mask piece if appropriate for work based on the inspection result in the visual examination portion For component used in the manufacture in metal mask,
It is being determined as that the metal mask piece is not suitable as making in the manufacture of the metal mask by the grade determination unit In the case where component, the trucking department is by the metal mask piece to the grade for accommodating the unsuitable metal mask piece It carries outer receiving portion.
3. check device according to claim 1, which is characterized in that
The grade determination unit determined based on the measurement result of the determination part metal mask piece if appropriate for as Component used in the manufacture of metal mask,
It is being determined as that the metal mask piece is not suitable as making in the manufacture of the metal mask by the grade determination unit In the case where component, the trucking department is by the metal mask piece to the grade for accommodating the unsuitable metal mask piece It carries outer receiving portion.
4. a kind of inspection method, is the inspection method for checking the metal mask piece before the installation of metal mask frame, feature exists In, comprising:
Mensuration operation, measurement are formed in the management point of the metal mask piece;
Grade judgment process is classified the metal mask piece based on the measurement result of the mensuration operation;And
Transportation process, based on the grade of the metal mask piece determined by the grade judgment process come by the metal mask Piece is carried to receiving by the receiving portion of the metal mask piece of the grade distinction.
5. inspection method according to claim 4, which is characterized in that
Visual examination process including checking the appearance of the metal mask piece,
In the grade judgment process, determine that the metal mask piece is based on the inspection result of the visual examination process It is no to be suitable as the component used in the manufacture of metal mask,
In the transportation process, it is being determined as that the metal mask piece is not suitable as described by the grade judgment process In the case where component used in the manufacture of metal mask, by the metal mask piece to accommodating the unsuitable metal mask It carries the outer receiving portion of the grade of piece.
6. inspection method according to claim 4, which is characterized in that
In the grade judgment process, determine whether the metal mask piece fits based on the measurement result of the mensuration operation Cooperation is the component used in the manufacture of metal mask,
In the transportation process, it is being determined as that the metal mask piece is not suitable as described by the grade judgment process In the case where component used in the manufacture of metal mask, by the metal mask piece to accommodating the unsuitable metal mask It carries the outer receiving portion of the grade of piece.
CN201811139185.9A 2017-10-04 2018-09-28 Check device and inspection method Pending CN109604183A (en)

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Application Number Priority Date Filing Date Title
JP2017-193996 2017-10-04
JP2017193996A JP6986916B2 (en) 2017-10-04 2017-10-04 Inspection equipment and inspection method

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Publication Number Publication Date
CN109604183A true CN109604183A (en) 2019-04-12

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CN (1) CN109604183A (en)
TW (1) TW201916208A (en)

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WO2020203489A1 (en) 2019-03-29 2020-10-08 住友建機株式会社 Asphalt finisher

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