CN109581861A - Move bench control system, sports platform system and exposure device - Google Patents

Move bench control system, sports platform system and exposure device Download PDF

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Publication number
CN109581861A
CN109581861A CN201710912242.1A CN201710912242A CN109581861A CN 109581861 A CN109581861 A CN 109581861A CN 201710912242 A CN201710912242 A CN 201710912242A CN 109581861 A CN109581861 A CN 109581861A
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resetting
sports platform
module
input
control system
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CN109581861B (en
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袁智行
吴立伟
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00Automatic controllers
    • G05B11/01Automatic controllers electric
    • G05B11/36Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P.I., P.I.D.

Abstract

The present invention provides a kind of movement bench control system, sports platform system and exposure devices, control system therein, including sports platform, measuring system, PID controller, the PID controller includes integration module, proportional gain module and derivative module, the error originated from input is separately input into derivative module and integration module after the proportional gain resume module, and the output quantity of the comprehensive proportional gain module of the PID controller, derivative module and integration module obtains control amount;Wherein, the integration module includes resetting integrator and regular integral device, the resetting integrator is to the error originated from input after the proportional gain resume module for input, it is exported after carrying out corresponding Integral Processing, the integration module is based on the ratio that is introduced into of resetting and the ratio that is not introduced into, and in conjunction with output signal after the output quantity of the resetting integrator and the regular integral device.

Description

Move bench control system, sports platform system and exposure device
Technical field
The present invention relates to field of lithography more particularly to a kind of movement bench control systems, sports platform system and exposure device.
Background technique
It is wide since PID (Proportional-Integral-Derivative) controller architecture is simply easy to debug It is general to apply in litho machine sports platform feedback control system.But for a closed-loop control system, the limitation of some performances is can not It avoids.For PID controller, the effect of integrator is the steady-state error in order to eliminate closed-loop control system, but will lead to and be System response has the longer steady state time of biggish hyperharmonic.The differential action can improve caused by integral action not in controller Good influence, but the differential action crosses conference and makes system that can not inhibit high-frequency noise.In order to eliminate integrate caused by larger hyperharmonic compared with Long to stablize time effects, resetting control (reset control) method is applied in movement bench control system.
Resetting control is to optimize on the basis of PID controller to integrator.The principle of resetting control is to control When device input value zero passage, to integrator current state zero setting.For moving bench control system, resetting control is exactly in control deviation When e (t)=0, integral action is set 0.Resetting control is as shown in fig. 1 in sports platform system closed loop configuration block diagram.
Patent CN201510058161 uses control structure shown in Fig. 2, is a kind of combination proportional integration and state The control system of resetting.It is advantageous that retaining controller integral action, guarantee that the systematic steady state error without integrator is 0.It lacks Point is that it uses single order to reset link, changes existing PID controller structure, increases adjustment parameter and debugging complexity.Simultaneously Influence of the reset mechanism to system frequency domain is not considered, for the practical work piece platform system more critical for stability margin, if weight The mechanism of setting changes system frequency domain performance and causes system that can not restrain, and bring consequence is serious.
Summary of the invention
The technical problem to be solved by the present invention is to how guarantee the debugging freedom degree of system, accurate adjustment sports platform performance.
In order to solve the above technical problems, the first aspect of the present invention provides a kind of movement bench control system, sports platform System and exposure device, including sports platform, measuring system, PID controller, the PID controller are detected with the sports platform Position detection value and position setting value between error as error originated from input, control the movement position of the sports platform, it is described PID controller includes integration module, proportional gain module and derivative module, and the error originated from input is through the proportional gain module Derivative module and integration module, the comprehensive proportional gain module of the PID controller, module of differentials are separately input into after processing The output quantity of block and integration module obtains control amount;
Wherein, the integration module includes resetting integrator and regular integral device, and the regular integral device is to for defeated The error originated from input after the proportional gain resume module entered, exports after carrying out corresponding Integral Processing, the resetting integral Device exports after carrying out corresponding Integral Processing to the error originated from input after the proportional gain resume module for input, The integration module is based on the ratio that is introduced into of resetting and the ratio that is not introduced into, and in conjunction with the resetting integrator and described normal Output signal after the output quantity of rule integrator.
Optionally, the acceleration error value quilt between the acceleration of motion observation and acceleration setting value of the sports platform It is input to the resetting integrator, so that: in the acceleration error value of current acceleration error amount and a upper servo period Between symbol it is opposite when, it is described resetting integrator current state be reset.
Optionally, the resetting integrator, which also inputs, resetting integral proportionality coefficient unit, resetting integral ratio system Counting unit changes the initial state value of resetting to be adjusted.
Optionally, the integration module further includes resetting proportional unit and non-resetting proportional unit;
The resetting proportional unit is used for: the ratio being introduced into the resetting adjusted is at through the proportional gain module Error originated from input after reason exports after being handled to the resetting integrator;
The proportional unit that do not reset is used for: the ratio being not introduced into the resetting adjusted is to through the proportional gain mould Block treated after error originated from input handled output is to the regular integral device.
Optionally, the processing result of the resetting integrator is exported to an integral compensation unit.
Optionally, the integral compensation unit is to the knot with following integral compensation coefficient to the resetting integrator output Fruit compensates:
Wherein, P is to indicate that resetting is introduced into the resetting proportionality coefficient of ratio, and R is the initial shape to indicate resetting The resetting of state value integrates proportionality coefficient.
Optionally, the resetting integrator governing equation are as follows: xr(t+)=Rxr(t),e(t)·e(t-)<0。
Optionally, the movement mechanism of the PID controller is stated by following equation:
Wherein, u (t) is the output of PID controller, and e (t) is current error originated from input;e(t-) it is the defeated of a upper servo period Enter error, kpIndicate the proportional gain in PID controller, fiIndicate the integration frequencies in PID controller, fdThen indicate PID control Differential-frequency in device, xr(t) quantity of state of current integration, x are indicatedr(t+) indicate the state output amount integrated after resetting.
Optionally, the mathematical model statement of the sports platform are as follows:
Wherein, m is the moving-mass of sports platform, and c is cable damping, and k is cable rigidity.
Optionally, the mathematical model statement of the sports platform are as follows:
Wherein, m is the moving-mass of sports platform.
The second aspect of the present invention provides a kind of sports platform system, and the sports platform system uses the control of the sports platform System processed controls the movement of the sports platform.
The third aspect of the present invention provides a kind of exposure device, includes at least lighting system, to Barebone, sports platform system System, the sports platform system includes sports platform and the movement bench control system.
Optionally, the sports platform is mask platform and/or work stage.
In order to guarantee the debugging freedom degree of system, accurate adjustment estrade performance, the present invention is on the basis of resetting integrator, into one Step introduces regular integral device, meanwhile, the ratio being introduced into based on resetting and the ratio being not introduced into are to resetting integrator and often Rule integrator is handled respectively, and two integrators can effectively ensure that steady-state error is than column distribution access loop by certain 0, further, due to resetting the introducing for ratio this amount being introduced into, by changing this ratio, it ensure that debugging freely Degree, it is seen then that it finally realizes the promotion of sports platform accurate adjustment performance.
Detailed description of the invention
Fig. 1 is the schematic diagram of an existing movement bench control system in the related technology;
Fig. 2 is the schematic diagram of PID controller in an existing movement bench control system in the related technology;
Fig. 3 is the schematic diagram that bench control system is moved in the embodiment of the present invention 1;
Fig. 4 is the schematic diagram that bench control system is moved in the embodiment of the present invention 2;
Fig. 5 is that system phase is promoted and parameter P, R relational graph in the embodiment of the present invention 2;
Fig. 6 is to debug flow diagram in the embodiment of the present invention 2;
Fig. 7 is the schematic diagram that bench control system is moved in the embodiment of the present invention 3;
Fig. 8 is to debug flow diagram in the embodiment of the present invention 3.
Specific embodiment
Movement bench control system provided by the invention is described in detail below with reference to Fig. 3 to Fig. 8, is this hair Bright optional embodiment, it is believed that those skilled in the art, can be right in the range of not changing spirit of that invention and content It is modified and polishes.
Bench control system please be moved in tri- embodiments of comprehensive reference Fig. 3, Fig. 4 and Fig. 7, the present invention provides a kind of fortune Dynamic bench control system, including sports platform, measuring system, PID controller, the PID controller are detected with the sports platform Error between position detection value and position setting value controls the movement position of the sports platform, the PID as error originated from input Controller includes integration module, proportional gain module and derivative module, the error originated from input through the proportional gain module at Derivative module and integration module, the comprehensive proportional gain module of the PID controller, derivative module are separately input into after reason And the output quantity of integration module obtains control amount;
Wherein, the integration module includes resetting integrator and regular integral device, and the regular integral device is to for defeated The error originated from input after the proportional gain resume module entered, exports after carrying out corresponding Integral Processing, the resetting integral Device exports after carrying out corresponding Integral Processing to the error originated from input after the proportional gain resume module for input, The integration module is based on the ratio that is introduced into of resetting and the ratio that is not introduced into, and in conjunction with the resetting integrator and described normal Output signal after the output quantity of rule integrator.
Use in relation to resetting integrator therein:
In embodiment 1, referring to FIG. 3, it is similar with existing the relevant technologies, the principle for resetting control is to control When device input value zero passage, to integrator current state zero setting.
It please compare with reference to Fig. 4 and Fig. 3, embodiment 2 is that the movement of the sports platform adds with the maximum difference of embodiment 1 Acceleration error value between speed observation and acceleration setting value is input to the resetting integrator, so that: When symbol between current acceleration error amount and the acceleration error value of a upper servo period is opposite, the resetting integrator Current state is reset.
Why this design is had, and reason is:
The measuring system of litho machine sports platform is strong by environmental disturbances, for example, by using interferometer system be measuring system when, survey There are errors for magnitude, and the sports platform system place precision for being applied to litho machine requires to generally reach Nano grade, actual measurement System be difficult to detect controller input value whether zero passage, therefore reset rule and need to optimize.It now improves are as follows: actual control system is Discrete system, if error current value with error past value symbol on the contrary, if reset;
Further, the optimization method of reset mechanism is as shown in figure 4, be directly to take current fortune using acceleration transducer Dynamic platform acceleration value, cooperates the sports platform acceleration setting value after trajectory planning, our available sports platforms are real-time Acceleration bias, when acceleration bias current value and upper servo period deviation meets on the contrary, resetting movement is opened.It is this to do Method is direct detection sports platform actual motion state, more accurately.Meanwhile the trigger mechanism of the resetting control technology originally used The delayed-action that will receive feedback control loop for detection system response error restricts, and can be disappeared using direct detection sports platform acceleration Except loop delay.
In embodiment 1 into embodiment 3, in order to guarantee that the debugging freedom degree of system, accurate adjustment estrade performance increase controller The adjustability of the resetting initial value of integral, introduces resetting coefficient, changes system resetting rate.
Specifically, the resetting integrator, which also inputs, resetting integral proportionality coefficient unit, the resetting integral ratio Coefficient elements change the initial state value of resetting to be adjusted.
The integration module further includes resetting proportional unit and non-resetting proportional unit;
The resetting proportional unit is used for: the ratio being introduced into the resetting adjusted is at through the proportional gain module Error originated from input after reason exports after being handled to the resetting integrator;
The proportional unit that do not reset is used for: the ratio being not introduced into the resetting adjusted is to through the proportional gain mould Block treated after error originated from input handled output is to the regular integral device.
Optimized by both, resetting equation change are as follows:
That is: the described resetting integrator governing equation are as follows: xr(t+)=Rxr(t),e(t)·e(t-)<0。
The movement mechanism of the PID controller is stated by following equation:
Wherein, u (t) is the output of PID controller, and e (t) is current error originated from input;e(t-) it is the defeated of a upper servo period Enter error, kpIndicate the proportional gain in PID controller, fiIndicate the integration frequencies in PID controller, fdThen indicate PID control Differential-frequency in device, xr(t) quantity of state of current integration, x are indicatedr(t+) indicate the state output amount integrated after resetting.
In example 2, the mathematical model statement of the sports platform are as follows:
Wherein, m is the moving-mass of sports platform, and c is cable damping, and k is cable rigidity.
(enabling setting value is step signal) can be then calculated for the steady-state error of sports platform single shaft SISO system:
Wherein, e (s) Representative errors item, r (s) represent reference input item, GwsFor controlled device, that is, sports platform transmitting letter Number, GcFor the transmission function of controller.It can be seen that from result, if not can guarantee steady-state error without pure integral term in controller It is 0.It therefrom can also further prove that reset controller structure is changed to PI+ present invention introduces the beneficial effect of two integrators CI integrator, wherein integrator and resetting integrator need to exist simultaneously, and by certain than column distribution access loop.Using PI+CI After integrator, integral compensation coefficient then needs to be modified, while debugging step sequence further determines that.
By calculating and deriving, the processing result of the resetting integrator is exported to an integral compensation unit, the integral Compensating unit with result of the following integral compensation coefficient to the resetting integrator output to be compensated:
After this structure, the phase of system can be made to be promoted in the case where not influencing system amplitude:
System phase is promoted as shown in Figure 5 with the relationship schedule of parameter P and R.
As it can be seen that the resetting control structure being applied on sports platform in embodiment 2, wherein P is in conjunction with PID and reset mechanism Proportionality coefficient is reset, the ratio that reset mechanism introduces PID controller can be changed;R is resetting integral proportionality coefficient, and resetting can be changed Initial state value;Ki is integral gain penalty coefficient, can be calculated numerical value by (3-5), reduces debugging difficulty, can eliminate weight Set influence of the mechanism to system frequency domain performance.
New tuning parameter P and R are introduced, while debugging process, there are sequencing, debugging needs to defer to step shown in Fig. 6 Suddenly.When initial debugging, since being debugged pid parameter and each compensator parameter, fi parameter values can suitably increase, and guarantee system While stabilization, can appropriate sacrificial system phase margin come the bandwidth and integration frequencies of lifting system, phase margin is positively retained at 20~35 degree or so.After introducing resetting, the phase margin of system can be improved.
In embodiment 3, work stage uses cable stage structure, or introduces cable rigidity and damping compensation module, Controller architecture then becomes structure as shown in Figure 7.Then the mathematical model of sports platform simplifies are as follows:
Wherein, m is the moving-mass of sports platform, and the steady-state error of sports platform single shaft SISO system can be then calculated (enabling setting value is step signal):
Wherein, e (s) Representative errors item, r (s) represent reference input item, GwsFor controlled device, that is, sports platform transmitting letter Number, GcFor the transmission function of controller.Since there are integral terms for controlled device, it is ensured that steady state position error 0, then debugging step Cataclysm step more as shown in Figure 8.
One embodiment of the invention additionally provides a kind of sports platform system, and the sports platform system uses the control of the sports platform System processed controls the movement of the sports platform.
One embodiment of the invention additionally provides a kind of exposure device, includes at least lighting system, to Barebone, sports platform system System, the sports platform system includes sports platform and the movement bench control system.
Optionally, the sports platform is mask platform and/or work stage.
In conclusion the debugging freedom degree in order to guarantee system, accurate adjustment estrade performance, base of the present invention in resetting integrator On plinth, it has been further introduced into regular integral device, meanwhile, resetting is accumulated with the ratio being not introduced into based on the ratio that resetting is introduced into Divide device to be handled respectively with regular integral device, distributes two integrators to access loop than column by certain, can effectively ensure that steady State error is 0, and further, the introducing due to resetting ratio this amount being introduced into ensure that tune by changing this ratio Try freedom degree, it is seen then that it finally realizes the promotion of sports platform accurate adjustment performance.

Claims (13)

1. a kind of movement bench control system, it is characterised in that: including sports platform, measuring system, PID controller, the PID control Device controls the fortune using the error between the sports platform position detection value detected and position setting value as error originated from input The movement position of dynamic platform, the PID controller include integration module, proportional gain module and derivative module, and the input misses Difference is separately input into derivative module and integration module, the comprehensive institute of the PID controller after the proportional gain resume module The output quantity for stating proportional gain module, derivative module and integration module obtains control amount;
Wherein, the integration module includes resetting integrator and regular integral device, and the regular integral device is to for input Error originated from input after the proportional gain resume module, exports after carrying out corresponding Integral Processing, and the resetting integrator is used With the error originated from input after the proportional gain resume module for input, exported after carrying out corresponding Integral Processing, it is described Integration module is based on the ratio that is introduced into of resetting and the ratio that is not introduced into, and in conjunction with the resetting integrator and described conventional long-pending Output signal after the output quantity of point device.
2. the control system of litho machine sports platform as described in claim 1, it is characterised in that: the movement of the sports platform accelerates Acceleration error value between degree observation and acceleration setting value is input to the resetting integrator, so that: working as When symbol between preacceleration error amount and the acceleration error value of a upper servo period is opposite, the resetting integrator is worked as Preceding state is reset.
3. the control system of litho machine sports platform as described in claim 1, it is characterised in that: the resetting integrator also inputs There is resetting integral proportionality coefficient unit, the resetting integral proportionality coefficient unit is to be adjusted the original state for changing resetting Value.
4. the control system of litho machine sports platform as described in claim 1, it is characterised in that: the integration module further includes weight Set proportional unit and non-resetting proportional unit;
The resetting proportional unit is used for: the ratio being introduced into the resetting adjusted is to after the proportional gain resume module Error originated from input handled after output to the resetting integrator;
The proportional unit that do not reset is used for: the ratio being not introduced into the resetting adjusted is at through the proportional gain module Error originated from input after reason exports after being handled to the regular integral device.
5. the control system of the litho machine sports platform as described in Claims 1-4 is one of any, it is characterised in that: the resetting The processing result of integrator is exported to an integral compensation unit.
6. the control system of the litho machine sports platform as described in claim 5 is one of any, it is characterised in that: the integral compensation Unit with result of the following integral compensation coefficient to the resetting integrator output to be compensated:
Wherein, P is to indicate that resetting is introduced into the resetting proportionality coefficient of ratio, and R is the initial state value to indicate resetting Resetting integrate proportionality coefficient.
7. the control system of the litho machine sports platform as described in Claims 1-4 is one of any, it is characterised in that: the resetting Integrator governing equation are as follows: xr(t+)=Rxr(t),e(t)·e(t-)<0。
8. the control system of the litho machine sports platform as described in claim 7 is one of any, it is characterised in that: the PID control The movement mechanism of device is stated by following equation:
Wherein, u (t) is the output of PID controller, and e (t) is current error originated from input;e(t-) missed for the input of a upper servo period Difference, kpIndicate the proportional gain in PID controller, fiIndicate the integration frequencies in PID controller, fdThen indicate in PID controller Differential-frequency, xr(t) quantity of state of current integration, x are indicatedr(t+) indicate the state output amount integrated after resetting.
9. the control system of the litho machine sports platform as described in Claims 1-4 is one of any, it is characterised in that: the movement The mathematical model of platform is stated are as follows:
Wherein, m is the moving-mass of sports platform, and c is cable damping, and k is cable rigidity.
10. the control system of the litho machine sports platform as described in claim 1 or 3 or 4, it is characterised in that: the sports platform Mathematical model statement are as follows:
Wherein, m is the moving-mass of sports platform.
11. a kind of sports platform system, which is characterized in that the sports platform system uses the sports platform control as described in claim 1-10 System processed controls the movement of the sports platform.
12. a kind of exposure device includes at least lighting system, to Barebone, sports platform system, the sports platform system includes fortune Dynamic platform and the movement bench control system as described in claim 1-10.
13. exposure device as claimed in claim 12, which is characterized in that the sports platform is mask platform and/or work stage.
CN201710912242.1A 2017-09-29 2017-09-29 Motion stage control system, motion stage system, and exposure apparatus Active CN109581861B (en)

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