CN109450529A - Detection device and detection method - Google Patents

Detection device and detection method Download PDF

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Publication number
CN109450529A
CN109450529A CN201811489009.8A CN201811489009A CN109450529A CN 109450529 A CN109450529 A CN 109450529A CN 201811489009 A CN201811489009 A CN 201811489009A CN 109450529 A CN109450529 A CN 109450529A
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laser
phase
modulator
under test
signal
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CN201811489009.8A
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CN109450529B (en
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白栋
钱勇
高炎锟
张恩惠
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Nanjing Mulai Laser Technology Co ltd
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Nanjing Laser Technology Co Ltd
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/07Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems
    • H04B10/075Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal
    • H04B10/079Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal using measurements of the data signal
    • H04B10/0795Performance monitoring; Measurement of transmission parameters

Abstract

The embodiment of the present application provides a kind of detection device and detection method, common-mode rejection ratio for device under test is detected, device includes: phase-modulator, beam splitter and frequency spectrograph, the output end of phase-modulator and the input terminal of beam splitter connect, the first output end and second output terminal of beam splitter are connect with device under test, and the output end of device under test and the input terminal of frequency spectrograph connect;Phase-modulator is used to receive laser and changes the frequency of laser, and the laser for changing frequency is exported to beam splitter;The laser received is divided into two beams by beam splitter, and the two beam laser separated are input to device under test;Frequency spectrograph is used to measure the signal that two beam laser generate in device under test.Laser is modulated and the internal modulation of non-laser itself with phase-modulator, the frequency that can only modulate laser increases the accuracy of frequency spectrograph detection without changing its amplitude.

Description

Detection device and detection method
Technical field
This application involves testing equipment fields, in particular to a kind of detection device and detection method.
Background technique
As space optical communication, light carry the development of the technologies such as radio communication, balance photodetector is as relevant light-receiving Device, by more and more attention.Balance photodetector can inhibit in institute's detectable signal to be introduced by local oscillator light opposite The common-mode noise of intensity noise and all forms, receiving sensitivity are close to quantum noise limit;It can also make full use of simultaneously The power of local oscillator light has bigger linear dynamic range compared with common photodetector.
In practical applications, in order to learn balance photodetector performance, it is often necessary to its common-mode rejection ratio (Common Mode Rejection Ratio, CMRR) is measured, and the prior art carries out common mode suppression to balance photodetector When system is than measuring, what is often measured is the laser by internal modulation, and the laser that the laser of internal modulation issues is not only It is the frequency for adjusting laser, it is also possible to the amplitude of laser is adjusted, to influence the accuracy of detection.
Apply for content
In view of this, the embodiment of the present application provides a kind of detection device and detection method.
In a first aspect, the embodiment of the present application provides a kind of detection device, for device under test common-mode rejection ratio into Row detection, described device includes: phase-modulator, beam splitter and frequency spectrograph, the output end of the phase-modulator with it is described The input terminal of beam splitter connects, and the first output end and second output terminal of the beam splitter are connect with the device under test, The output end of the device under test is connect with the input terminal of the frequency spectrograph;The phase-modulator is for receiving laser and changing The frequency of the laser exports the laser for changing frequency to the beam splitter;The laser received is averaged by the beam splitter It is divided into two beams, and the two beam laser separated is input to device under test;The frequency spectrograph is for measuring two beam in device under test The signal that laser generates.
The embodiment of the present application handles the laser received and changes the frequency of laser, beam splitting by phase-modulator The laser that device receiving phase modulator is sent, and laser is divided into two beams, the two beam laser separated are input to be measured Device (such as balance photodetector), then utilizes the frequency spectrograph connecting with device under test to measure the signal that two beam laser generate. Laser is modulated and the internal modulation of non-laser itself with phase-modulator, can only modulate the frequency of laser without changing Its amplitude increases the accuracy of frequency spectrograph detection.
In a possible design, described device further includes laser, and the laser and the phase-modulator connect It connects, the laser is for exporting continuous laser to the phase-modulator.
The apparatus may include laser, the received laser of phase-modulator can be issued by laser, and laser can also be with It is to be generated by other devices.It is limitation to the application that the mode that laser generates, which should not be construed,.
In a possible design, described device further includes isolator, the isolator be set to the laser with Between the phase-modulator.
Isolator can prevent the light echo of laser from entering laser, to influence the performance of laser.
In a possible design, described device further includes the first optical attenuator, and first optical attenuator is set to Between the isolator and the phase-modulator.
First optical attenuator is adjusted into the size of the power of the laser before phase-modulator, only due to phase-modulator It can receive the laser of certain power, the excessive laser of power can damage phase-modulator.
In a possible design, described device further includes signal generator, the signal generator and the phase Modulator connection, the signal generator is for generating signal and being sent to the phase-modulator, so that the phase-modulation Device work.
Signal generator can provide the equipment of various frequencies, waveform and output level electric signal, phase for phase-modulator Position modulator just can work normally when receiving the electric signal of certain frequency, waveform.However, it is to be understood that phase The electric signal that modulator receives can be issued by signal generator, can also be issued by other equipment, and the source of electric signal is not It is construed as being to limit the application.
In a possible design, the beam splitter is 50/50 coupler.
Beam splitter specifically can be 50/50 coupler, and laser can be divided into two beams by 50/50 coupler.
In a possible design, the detection device further includes the second optical attenuator and third optical attenuator, described Second optical attenuator and the third optical attenuator are all set between the beam splitter and the frequency spectrograph, second light decay Subtract device for a branch of carry out frequency adjusting in the two beam laser that separate to the beam splitter, the third optical attenuator for pair Another Shu Jinhang frequency in the two beam laser that the beam splitter separates is adjusted.
The wherein beam of laser that second optical attenuator separates beam splitter carries out frequency adjusting, and third optical attenuator is to separating Wherein another beam of laser carry out frequency adjusting, due to the presence of error, beam splitter can not completely by laser mean allocation, because This, by the laser after beam splitting can the adjusting different degrees of through the second optical attenuator and third optical attenuator respectively, to make The frequency of two beam laser after must adjusting is consistent.
In a possible design, the device under test is balanced detector.
Device under test is specifically as follows balanced detector, using above-mentioned detection device to the common mode inhibition of balanced detector Than being tested.
Second aspect, the embodiment of the present application provide a kind of detection method, applied to above-mentioned detection device, the method It include: the balanced signal measured two beam laser and be input to the device under test;Measuring in the two beams laser appoints beam of laser defeated Enter to the unbalanced signal of the device under test;According to the balanced signal and unbalanced signal, the device under test is calculated Common-mode rejection ratio.
It specifically can use frequency spectrograph and measure balanced signal when two beam laser are input to device under test, then utilize frequency Spectrometer measures the unbalanced signal (another beam of laser is blocked) for appointing beam of laser when being input to device under test, then using measuring Balanced signal and unbalanced signal calculate common-mode rejection ratio.
It is described according to the balanced signal and unbalanced signal in a possible design, calculate the device under test Common-mode rejection ratio, comprising: according to formulaCalculate common-mode rejection ratio CMRRdB, wherein Vbal For balanced signal, VunbalFor unbalanced signal.
Above objects, features, and advantages to enable the embodiment of the present application to be realized are clearer and more comprehensible, be cited below particularly compared with Good embodiment, and cooperate appended attached drawing, it is described in detail below.
Detailed description of the invention
Illustrate the technical solutions in the embodiments of the present application or in the prior art in order to clearer, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of application for those of ordinary skill in the art without creative efforts, can be with It obtains other drawings based on these drawings.
Fig. 1 shows the structural schematic diagram for detecting the common-mode rejection ratio of device under test in the prior art;
Fig. 2 shows the schematic block diagrams of balance photodetector;
Fig. 3 shows the structural schematic diagram of the detection device of the application first embodiment offer;
Fig. 4 shows a kind of structural representation of specific embodiment of the detection device of the application first embodiment offer Figure;
Fig. 5 shows the flow chart of the detection method of the application second embodiment offer.
Icon: phase-modulator 110;Signal generator 111;Beam splitter 120;Frequency spectrograph 130;Laser 140;Isolator 150;First optical attenuator 160;Second optical attenuator 170;Third optical attenuator 180.
Specific embodiment
The common-mode signal and difference mode signal of balance photodetector are first introduced, when difference mode signal is double-width grinding, width Spend equal, the signal of opposite in phase;When common-mode signal is double-width grinding, amplitude is equal, the identical signal of phase.Any two letter Number it can be broken into common-mode signal and difference mode signal.
It might as well set there are two signal v1, v2, their common-mode signal is Vcom, difference mode signal VDiff.Common-mode signal is It is the part that two signals of v1, v2 all have, i.e., (v1+v2)/2.
Difference mode signal is the part that two signals of v1, v2 are respectively provided with, and for v1, is (v1-v2)/2;For v2 be- (v1-v2)/2.So v1, v2 are illustrated as the sum of common-mode signal and difference mode signal.
Because difference mode signal is opposite in phase, (V1+V2) can offset difference mode signal, and what is obtained is common-mode signal Twice, therefore common-mode signal Vcom=(V1+V2)/2.Each signal be common-mode signal and difference mode signal and, so Difference mode signal is V1- (V1+V2)/2=(v1-v2)/2 for V1;Difference mode signal is V2- (v1+v2)/2=- for V2 (v1-v2)/2。
Fig. 2 is referred to, Fig. 2 shows the structural block diagram of balance photodetector, detector input terminal 1 is received by beam splitter The beam of laser separated, is denoted as Popt1+;Detector input terminal 2 receives the another beam of laser separated by beam splitter, is denoted as Popt2-。
Trans-impedance amplifier is faint optical signal to be converted to electric signal, and electric signal progress some strength low noise is put Big sensitive detection parts.Operational amplifier is the circuit unit with very high-amplification-factor, it can by voltage analogy at number, from And add, subtracts, multiplication and division operation.
RF signal output output are as follows:Wherein,For detection The responsiveness of device, expression input the ability that electric current is converted into the light of detector;G is the gain of detector, and G+ represents Popt1+ Gain, G- represent Popt2Gain.
If the optical power for the two beam laser that photodetector obtains is identical, the balanced signal that photodetector obtains is Vbal=(G+-G-) P, when wherein beam of laser is removed, the laser that might as well set the input of detector input terminal 2 is removed, then light The unbalanced signal that electric explorer obtains is Vunbal=G+P.Assuming thatThen
Referring to Figure 1, Fig. 1 shows the mode that the prior art obtains the common-mode rejection ratio of balance photodetector, passes through Frescan inside laser carries out frequency modulation(PFM) (internal modulation) to laser, and then beam splitter divides equally laser, makes light decay Subtract device 1 and optical attenuator 2 is respectively adjusted laser, to make laser adjusted, that is, enters the two-way of balanced detector The power of laser is equal.
A signal (i.e. above-mentioned balanced signal) is then measured by frequency spectrograph, is then removed by optical attenuator 1 Laser removes the laser for passing through optical attenuator 2, then measures a signal (i.e. above-mentioned unbalanced signal) by frequency spectrograph, can To calculate common-mode rejection ratio using the two signals.
Above-mentioned test method is that internal modulation is carried out to laser, and internal modulation refers to be loaded in the oscillatory process that laser generates Modulated signal, the parameter of oscillation by changing laser realize the purpose of modulation.
When carrying out internal modulation to laser, due to the coupling between electronics and photon density is very strong and also the frequency of light source with The variation of electron density changes, and when modulating curent change, electronics and photon density can generate Henan before reaching stable state and relax and shake It swings, this will aggravate the frequency chirp of light source.Wherein, it is not a smooth light pulse that relaxation oscillation in Henan, which is waveform, but by many The light pulse of the spike changed at random composition is made at amplitude, pulsewidth and interval.It is added when frequency chirp is that laser is modulated Alternating signal can change the performance of operation material.For example, the refractive index of active area changes, phase changes therewith, Therefore during directly modulated laser, not only the frequency of output light can change, but also the light of output light Intensity can also change with modulation electric current, i.e. for laser when receiving frequency modulation(PFM), the amplitude of laser also will receive modulation.
Meanwhile the frequency chirp of light source is also related with the rate of modulated signal, the more high then light source of the rate of modulated signal Frequency chirp is bigger.This internal modulation mode will affect the accuracy of test, and modulating frequency stimulated light device own frequency shadow Ringing limitation not can be carried out the modulation of wider frequency range.
First embodiment
Fig. 3 is specifically referred to, Fig. 3 shows the detection device of the application first embodiment offer, which includes: phase Modulator 110, beam splitter 120 and frequency spectrograph 130.The output end of phase-modulator 110 and the input terminal of beam splitter 120 connect Connect, the first output end and second output terminal of beam splitter 120 are connect with device under test, the output end of device under test with it is described The input terminal of frequency spectrograph 130 connects.
Phase-modulator 110 is used to receive laser and changes the frequency of laser, and the laser for changing frequency is exported to beam splitting Device 120.The laser received is divided into two beams by beam splitter 120, and the two beam laser separated are input to device under test; Frequency spectrograph 130 is used to measure the signal that two beam laser generate in device under test.Beam splitter 120 can be 50/50 coupler.It is to be measured Device can be balanced detector, i.e. balance photodetector.
Fig. 4 is referred to, which can also include laser 140, isolator 150, the first optical attenuator 160, signal hair Raw device 111, the second optical attenuator 170 and third optical attenuator 180.
Laser 140 is connect with phase-modulator 110, and laser 140 is for exporting continuous laser to phase-modulator 110.Isolator 150 is set between laser 140 and phase-modulator 110.First optical attenuator 160 is set to isolator Between 150 and phase-modulator 110.
Signal generator 111 is connect with phase-modulator 110, and signal generator 111 is for generating signal and being sent to phase Position modulator 110, so that phase-modulator 110 works.
Second optical attenuator 170 and third optical attenuator 180 are all set between beam splitter 120 and frequency spectrograph 130, and second A branch of carry out frequency adjusting in two beam laser that optical attenuator 170 is used to separate beam splitter 120, third optical attenuator 180 Another Shu Jinhang frequency in the two beam laser for separating to beam splitter 120 is adjusted.
The working principle for the detection device that the application first embodiment provides are as follows:
Continuous laser is exported using laser 140, laser mainly prevents laser by isolator 150, isolator 150 Light echo return laser light device 140, damages laser activity, and the laser then exported from isolator 150 passes through the first optical attenuation Device 160 adjusts the optical power of the laser.The laser for being adjusted optical power, which is input to phase-modulator 110, makes the frequency of laser It changes.Signal generator 111 can produce a sine wave signal and modulating frequency, and frequently by sine wave signal and modulation Rate is input to phase-modulator 110, so that phase-modulator 110 works normally.Laser swashs after the output of phase-modulator 110 The frequency of light is just changed, and the laser that phase-modulator 110 exports then is divided into two beams by beam splitter 120.
Due to beam splitter 120 can not accomplish 100% it is accurate, it is therefore desirable to pass through the second optical attenuator 170 and third light Attenuator 180 is equal to make the optical power into the two beam laser of device under test (such as balanced detector).Then pass through frequency spectrograph 130 first measure two-way light while inputting the signal (i.e. balanced signal) of device under test, then survey any road under identical optical power The signal (unbalanced signal) when balanced detector is inputted, device to be measured is then calculated according to balanced signal and unbalanced signal The common-mode rejection ratio of part.
The modulation principle of 110 pairs of light of phase-modulator will be illustrated next:
For 110 frequency modulation of phase-modulator, the instantaneous light field expression formula of laser are as follows: EC(t)=ACcos(ωCt+φC); Wherein, ACFor amplitude, ωcFor angular frequency, φcFor phase angle.
Phase-modulation is exactly to make phase angle no longer be constant, and change, phase-modulated wave with the changing rule of modulated signal Total phase angle be φ (t)=ωCt+φC+KφAmcosωmT, Mφ=KφAmFor coefficient of phase modulation, m is the index of modulation, KφFor ratio system Number, AmFor the amplitude of frequency-modulated wave SIN function, WmFor frequency modulation angular frequency.
Phase-modulated wave expression formula is E (t)=ACcos(ωCt+msinωmt+φc), utilize triangle formula cos (alpha+beta)=cos α cos β-sin α sin β is unfolded by phase-modulated wave expression formula, can obtain:
E (t)=AC[cos(ωct+φc)cos(msinωmt)-sin(ωct+φc)sin(msinωmt)]
By (the msin ω of cos in above formulamAnd sin (msin ω t)mT) it is unfolded using Bessel function:
Wherein, n is order;
The value of each rank Bessel function can be checked in from Bessel function table according to index of modulation m.By the above two formulas band Enter to utilize trigonometric function relational expression:
It can obtain:
It is found that the frequency spectrum of angle modulated wave is symmetrical by light carrier frequency and its both sides in the modulation of single frequency sinusoidal wave Infinite multipair side frequency composed by.Frequency interval between each side frequency is ωm, the size J of each side frequency amplituden(m) by Bezier Function determines.ACAmplitude is represented, is a constant always.Therefore, when 110 pairs of light of phase-modulator are modulated, laser is had not been changed Amplitude parameter.
Second embodiment
The application second embodiment provides a kind of detection method, refers to Fig. 5, which includes the following steps:
Step S110 measures the balanced signal that two beam laser are input to device under test.
Frequency spectrograph 130 first measures two-way light while inputting the signal (i.e. balanced signal) of device under test.
Step S120 measures the unbalanced signal for appointing beam of laser to be input to device under test in two beam laser.
Frequency spectrograph 130 surveys signal (i.e. uneven letter when any road input balanced detector under identical optical power again Number), such as the laser through the second optical attenuator 170 can be blocked, the laser through third optical attenuator 180 is tested;? The laser through third optical attenuator 180 can be blocked, the laser through the second optical attenuator 170 is tested.
Step S130 calculates the common-mode rejection ratio of device under test according to balanced signal and unbalanced signal.
According to formulaCalculate common-mode rejection ratio CMRRdB, wherein VbalFor balanced signal, VunbalFor unbalanced signal.
The embodiment of the present application provides a kind of detection device and detection method, for device under test common-mode rejection ratio into Row detection, described device includes: phase-modulator, beam splitter and frequency spectrograph, the output end of the phase-modulator with it is described The input terminal of beam splitter connects, and the first output end and second output terminal of the beam splitter are connect with the device under test, The output end of the device under test is connect with the input terminal of the frequency spectrograph;The phase-modulator is for receiving laser and changing The frequency of the laser exports the laser for changing frequency to the beam splitter;The laser received is averaged by the beam splitter It is divided into two beams, and the two beam laser separated is input to device under test;The frequency spectrograph is for measuring two beam in device under test The signal that laser generates.The embodiment of the present application handles the laser received and changes the frequency of laser by phase-modulator Rate, the laser that beam splitter receiving phase modulator is sent, and laser is divided into two beams, the two beam laser separated are inputted To device under test (such as balance photodetector), the frequency spectrograph connecting with device under test is then utilized to measure what two beam laser generated Signal.Laser is modulated and the internal modulation of non-laser itself with phase-modulator, can only modulation laser frequency and Do not change its amplitude, increases the accuracy of frequency spectrograph detection.
It should be noted that all the embodiments in this specification are described in a progressive manner, each embodiment weight Point explanation is the difference from other embodiments, and the same or similar parts between the embodiments can be referred to each other. For device class embodiment, since it is basically similar to the method embodiment, so being described relatively simple, related place ginseng See the part explanation of embodiment of the method.
To keep the purposes, technical schemes and advantages of the embodiment of the present application clearer, above in conjunction in the embodiment of the present application Attached drawing, technical solutions in the embodiments of the present application clearly and completely described, it is clear that described embodiment is Some embodiments of the present application, instead of all the embodiments.The application being usually described and illustrated herein in the accompanying drawings is implemented The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the above detailed description to the embodiments herein provided in the accompanying drawings is not intended to limit claimed Scope of the present application, but be merely representative of the selected embodiment of the application.Based on the embodiment in the application, this field is common Technical staff's every other embodiment obtained without creative efforts belongs to the model of the application protection It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical", The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do Application product using when the orientation or positional relationship usually put, be merely for convenience of description the application and simplify description, without It is that the device of indication or suggestion meaning or element must have a particular orientation, be constructed and operated in a specific orientation, therefore not It can be interpreted as the limitation to the application.In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, and cannot manage Solution is indication or suggestion relative importance.
In the description of the present application, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one Connect to body;It can be mechanical connection, be also possible to be electrically connected;It can be directly connected, it can also be indirect by intermediary It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition State the concrete meaning of term in this application.

Claims (10)

1. a kind of detection device, which is characterized in that the common-mode rejection ratio for device under test is detected, described device packet Include: the input terminal of phase-modulator, beam splitter and frequency spectrograph, the output end of the phase-modulator and the beam splitter connects Connect, the first output end and second output terminal of the beam splitter are connect with the device under test, the device under test it is defeated Outlet is connect with the input terminal of the frequency spectrograph;
The phase-modulator is used to receive laser and changes the frequency of the laser, and the laser for changing frequency is exported to described Beam splitter;The laser received is divided into two beams by the beam splitter, and the two beam laser separated are input to device to be measured Part;The frequency spectrograph is used to measure the signal that two beam laser generate in device under test.
2. detection device according to claim 1, which is characterized in that described device further includes laser, the laser It is connect with the phase-modulator, the laser is for exporting continuous laser to the phase-modulator.
3. detection device according to claim 2, which is characterized in that described device further includes isolator, the isolator It is set between the laser and the phase-modulator.
4. detection device according to claim 3, which is characterized in that described device further includes the first optical attenuator, described First optical attenuator is set between the isolator and the phase-modulator.
5. detection device according to claim 1, which is characterized in that described device further includes signal generator, the letter Number generator is connect with the phase-modulator, and the signal generator is for generating signal and being sent to the phase-modulation Device, so that the phase-modulator works.
6. detection device according to claim 1, which is characterized in that the beam splitter is 50/50 coupler.
7. detection device according to claim 1, which is characterized in that the detection device further include the second optical attenuator and Third optical attenuator, second optical attenuator and the third optical attenuator are all set in the beam splitter and the frequency spectrograph Between, a branch of carry out frequency adjusting in two beam laser that second optical attenuator is used to separate the beam splitter is described Another Shu Jinhang frequency in two beam laser that third optical attenuator is used to separate the beam splitter is adjusted.
8. detection device according to claim 1, which is characterized in that the device under test is balanced detector.
9. a kind of detection method, which is characterized in that be applied to the described in any item detection devices of claim 1-8, the method Include:
Measure the balanced signal that two beam laser are input to the device under test;
Measure the unbalanced signal for appointing beam of laser to be input to the device under test in the two beams laser;
According to the balanced signal and unbalanced signal, the common-mode rejection ratio of the device under test is calculated.
10. detection method according to claim 9, which is characterized in that described according to the balanced signal and uneven letter Number, calculate the common-mode rejection ratio of the device under test, comprising:
According to formulaCalculate common-mode rejection ratio CMRRdB, wherein VbalFor balanced signal, Vunbal For unbalanced signal.
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石倩芸: "相干光通信中平衡探测器的研究与测试", 《科学技术与工程》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111664870A (en) * 2020-06-04 2020-09-15 北京控制工程研究所 Dynamic Young laser interference fringe calibration system and detector pixel geometric position deviation calibration method
CN111664870B (en) * 2020-06-04 2021-07-13 北京控制工程研究所 Dynamic Young laser interference fringe calibration system and detector pixel geometric position deviation calibration method

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