CN109426096B

CN109426096B - Synchronous trigger diagnosis method and system for photoetching machine

Info

Publication number: CN109426096B
Application number: CN201710776280.9A
Authority: CN
Inventors: 谢仁飚
Original assignee: Shanghai Micro Electronics Equipment Co Ltd
Current assignee: Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2017-08-31
Filing date: 2017-08-31
Publication date: 2020-08-25
Anticipated expiration: 2037-08-31
Also published as: CN109426096A

Abstract

The invention provides a synchronous trigger diagnosis system of a photoetching machine, which comprises a main controller and at least two subsystems, wherein the at least two subsystems are connected with the main controller of the whole machine through Ethernet, each subsystem comprises a subsystem controller, a synchronous trigger diagnosis card and at least one subsystem control daughter card, the synchronous trigger diagnosis cards of the at least two subsystems are interconnected through an external synchronous bus, and in each subsystem, the subsystem controller, the synchronous trigger diagnosis card and the at least one subsystem control daughter card are interconnected through a standard VME or Ethernet; the at least one subsystem control daughter card and the synchronous trigger diagnosis card are also interconnected with each other through an internal synchronous bus. The invention realizes synchronous acquisition of subsystem data through the self-defined external synchronous bus and the self-defined internal synchronous bus, and completely does not influence the operation of the original system by utilizing an independent data transmission channel and an independent complete machine processing mechanism.

Description

Synchronous trigger diagnosis method and system for photoetching machine

Technical Field

The invention relates to the technical field of scanning photoetching machines, in particular to the technical field of synchronous control of scanning photoetching machines.

Background

Lithography machines can be generally classified into stepper lithography machines and scanning lithography machines, wherein stepper lithography machines employ one-pass imaging technology. Due to the double restrictions of the prior art and the economic cost, the application occasions of the stepping photoetching machine are limited. Thus, a scanning lithography machine is produced.

The scanning photoetching machine is mainly characterized by a synchronous scanning function. The exposure process of a scanning lithography machine is different from that of a stepper. The light beam passes through a slit and is projected on the mask surface through the illumination system, and the mask passes through the light beam at a set constant speed. At the same time, the silicon wafer moves under the lens in the opposite direction to the mask. During scanning, the involved subsystem modules must complete the scanning within the same time period, and the start time and the end time of the scanning must be the same. That is, for scanning, all involved subsystem modules must be strictly consistent in scanning timing. There are strict synchronization timing requirements for the involved subsystems during the exposure scan, and other scans (e.g., alignment scans, etc.) also have strict synchronization timing requirements for all involved subsystem modules.

A scanning lithography machine is an expensive piece of equipment that has high requirements on the reliability of the equipment, and once the equipment fails, the error must be discovered and resolved as soon as possible. Therefore, in each subsystem of the lithography machine system, a corresponding data diagnosis module is often provided for diagnosing problems of the subsystem.

For a scanning lithography machine, the current data diagnosis mode based on various subsystems has serious defects, and particularly, the diagnosis of problems related to synchronous time sequence of the lithography machine is not sufficient. When the whole system has the problem related to synchronous time sequence, the diagnosis modules of all the subsystems are normal, but the problems that the subsystems cannot be systematically positioned due to independent diagnosis data and the diagnosis data time sequences among the subsystems are asynchronous and cannot be strictly in one-to-one correspondence according to accurate time can occur, so that the whole machine is abnormal. These deficiencies result in the inability of the current general diagnostic systems to locate synchronization related problems with the system, thereby resulting in an inability to quickly resolve the problems and unnecessary cost loss.

US patent publication US20070002295a1 proposes a method of detecting and diagnosing the environment and performance of a lithographic apparatus by collecting data sets for specific problems using a priori data definitions, but does not relate to a specific implementation hardware solution.

Chinese patent application 200810200085.2 proposes a method and system for diagnosing synchronous triggering hardware of a lithography machine, but the synchronization among sub-systems only relates to the hardware synchronization, and the data synchronization in the sub-systems does not relate to; and the method has one and only one standard VME bus, which is easy to cause the blocking and delaying of programs and data.

Therefore, a method and a system for synchronously triggering diagnosis of a lithography machine are needed.

It is noted that the information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.

Disclosure of Invention

In view of the above disadvantages of the prior art, the present invention provides a method and a system for synchronously triggering and diagnosing a lithography machine, which can realize the synchronous diagnosis of the whole system and each subsystem of the scanning lithography machine.

In order to achieve the above object, in one aspect of the present application, a synchronous trigger diagnosis method for a lithography machine is provided, which includes a main controller and at least two subsystems, the at least two subsystems are connected to the main controller of the whole machine through an ethernet, each subsystem includes a subsystem controller, a synchronous trigger diagnosis card and at least one subsystem control daughter card, the synchronous trigger diagnosis cards of the at least two subsystems are interconnected through an external synchronous bus,

in each subsystem, the subsystem controller, the synchronous trigger diagnosis card and at least one subsystem control daughter card are interconnected with each other through a standard VME or an Ethernet; the at least one subsystem control daughter card and the synchronous trigger diagnosis card are also interconnected through an internal synchronous bus.

In some embodiments, one of the synchronous trigger diagnostic cards in the at least two subsystems is set as a master diagnostic card, and the remaining synchronous trigger diagnostic cards are set as slave diagnostic cards.

In some embodiments, the external synchronization bus comprises a clock with a frequency greater than 1MHz for achieving sample synchronization between subsystems with a precision greater than 1 us.

In some embodiments, the external synchronization bus comprises a differential pair, and each subsystem realizes microsecond-level trigger time synchronization by looking at trigger request data of the differential pair.

In some embodiments, the internal synchronization bus comprises an address signal, a data bus, a control bus.

In some embodiments, the system further comprises a complete machine diagnosis processor, wherein the complete machine diagnosis processor is connected with the synchronous trigger diagnosis cards in each subsystem through an Ethernet, and is used for collecting data in each synchronous trigger diagnosis card and processing the data according to a time stamp.

In some embodiments, the synchronous trigger diagnostic card in each subsystem is provided with a plurality of ring buffers for storing diagnostic data of each subsystem controller and subsystem control daughter card.

In some embodiments, the update frequency of the plurality of ring buffers is set to a motion servo frequency in the lithography machine.

In some embodiments, a timer is provided inside the synchronous trigger diagnostic card for setting the locking time of the ring buffer.

In some embodiments, all diagnostic data is queued according to a timestamp.

In some embodiments, the lithography machine synchronous trigger diagnostic system triggers diagnostics passively by a fault, or actively by a user.

In another aspect of the present application, there is also provided a method for synchronously triggering and diagnosing a lithography machine, including:

during the normal scanning period of the photoetching machine, the whole machine main controller and the subsystem controller write diagnosis data into a ring buffer area of the synchronous trigger diagnosis card and keep updating continuously;

when the main controller of the whole machine detects a system error or detects that a diagnosis trigger condition set by a user is met, starting a synchronous diagnosis program;

the user program directly calls the specific interface program for triggering diagnosis, the triggering diagnosis control center directly responds to the request of the user program and sends a triggering diagnosis request signal to the triggering diagnosis control center;

the trigger diagnosis control center receives the trigger diagnosis request signal and sends a trigger diagnosis signal to the synchronous trigger diagnosis cards of all the subsystems after detecting that the trigger condition is met;

the synchronous trigger diagnosis card receives a trigger diagnosis signal at the same time and starts an internal timer;

when the synchronous trigger diagnostic card reaches the locking time set by the timer, the annular buffer area of the synchronous trigger diagnostic card is locked, and the writing of diagnostic data is stopped;

when the ring buffer areas of the synchronous trigger diagnosis cards are all locked, a command for collecting diagnosis data is issued through a trigger diagnosis upper computer program on the whole machine main controller, and the diagnosis data in the synchronous trigger diagnosis cards are uploaded to the whole machine main controller through the subsystem controller;

the whole machine main controller sequences and arranges all the received diagnosis data by triggering the diagnosis upper computer program, and a user can check the synchronous diagnosis data of each system at any time.

In some embodiments, all diagnostic data is queued according to a timestamp.

In some embodiments, one of the synchronous trigger diagnostic cards in each subsystem is set as a master diagnostic card, and the rest of the synchronous trigger diagnostic cards are set as slave diagnostic cards.

The invention has the beneficial effects that: the invention provides a photo-etching machine synchronous trigger diagnosis system and method, which realizes the synchronization of scanning servo cycle precision in subsystems through self-defined internal and external buses, realizes the synchronous trigger diagnosis of microsecond precision between subsystems through clock channel and state trigger, and realizes the record sequencing and arrangement of data of a data photo-etching machine through an Ethernet network between synchronous trigger diagnosis cards.

Drawings

Other features and advantages of the present invention will be apparent from, or are set forth in more detail in, the accompanying drawings, which together with the description serve to explain certain principles of the invention.

FIG. 1 is a schematic diagram of a system for simultaneous trigger diagnostics of a lithography machine including several subsystems according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of a custom internal synchronization bus according to an embodiment of the invention.

FIG. 3 is a schematic diagram of a custom external synchronization bus according to an embodiment of the invention.

FIG. 4 is a schematic diagram of a trigger process of a synchronous trigger diagnosis method for a lithography machine according to an embodiment of the invention.

It should be understood that the drawings are not necessarily to scale, showing the particular construction of the invention, and that illustrative features in the drawings, which are used to illustrate certain principles of the invention, may also be somewhat simplified. Specific design features of the invention disclosed herein, including, for example, specific dimensions, orientations, locations, and configurations, will be determined in part by the particular intended application and use environment.

Like reference characters designate like or equivalent parts throughout the several views of the drawings.

Detailed Description

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings. Referring to fig. 1-4, the present invention provides a method and a system for synchronously triggering and diagnosing a lithography machine.

FIG. 1 is a schematic diagram of a system for simultaneous trigger diagnostics of a lithography machine including several subsystems according to an embodiment of the present invention. The lithography machine synchronous trigger diagnosis system comprises: the system comprises a complete machine main controller 1 and at least two subsystems 10 which need to trigger diagnosis synchronously. The whole machine main controller 1 runs an upper computer operating system, a photoetching machine application software and an upper computer processing program for triggering a diagnosis system are run on the upper computer operating system, the whole machine is controlled to run according to a normal flow, and the subsystem 10 is connected with the whole machine main controller 1 through the Ethernet.

As shown in FIG. 1, each subsystem 10 includes a subsystem controller 2, at least one subsystem control daughter card 3, and a synchronous trigger diagnostic card 4. One of the synchronous trigger diagnostic cards 4 of the plurality of subsystems 10 can be preset as a master diagnostic card, and the rest are slave diagnostic cards, so that the condition that a plurality of pieces of hardware conflict with each other can be avoided.

In each subsystem 10, the subsystem controller 2, at least one subsystem control daughter card 3, and the synchronous trigger diagnostic card 4 are connected to each other through a standard VME or an ethernet 5, where the VME or the ethernet 5 is a normal overall control channel and executes a normal process of the overall system. Specifically, a VME or an Ethernet is connected between the subsystem controller 2 and each subsystem control daughter card 3, between the subsystem controller 2 and the synchronous trigger diagnosis card 4, between each subsystem control daughter card 3 and the synchronous trigger diagnosis card 4, and between each subsystem control daughter card, so as to execute a normal flow of the whole machine, thereby realizing a normal control logic. And a timer is arranged in the synchronous trigger diagnostic card and is used for setting the locking time of the annular buffer area.

In the present embodiment, in each subsystem 10, at least one subsystem control daughter card 3 and the synchronization trigger diagnostic card 4 are further connected to each other through a customized internal synchronization bus 6. Specifically, each subsystem control daughter card 3 is connected with a synchronous trigger diagnostic card 4 and each subsystem control daughter card 3 through a self-defined internal synchronous bus, and the synchronous trigger diagnostic card 4 synchronizes and collects data in the subsystem 10 through the internal synchronous bus 6. The synchronous trigger diagnostic card 4 provides a plurality of dedicated ring buffers for buffering data on subsystem controllers 2 and subsystem control daughter cards 3 within the subsystem 10. The update frequency of the plurality of ring buffers may be set to a motion servo frequency in the lithography machine.

In the embodiment, each synchronous trigger diagnosis card 4 in at least two subsystems is also interconnected through a set of customized external synchronous buses 7, and synchronous triggering is performed among the synchronous trigger diagnosis cards through the external synchronous buses. The external synchronization bus 7 is used to synchronize the synchronous trigger diagnostic cards 4 of the various subsystems 10. The sampling time stamp of the synchronous trigger diagnostic card 4 can be precisely given by the external synchronous bus 7, so that the diagnostic data of each subsystem 10 are recorded according to the time stamp. The internal synchronization bus 6 and the external synchronization bus 7 are used for realizing synchronous acquisition of subsystem data.

In this embodiment, the system further includes a complete machine diagnosis processor 9 connected to the synchronous trigger diagnosis card 4 in each subsystem 10. Specifically, each synchronous trigger diagnostic card 4 and the complete machine diagnostic processor 9 are interconnected through the ethernet 8. The synchronous trigger diagnosis card 4 transmits the diagnosis data to the complete machine diagnosis processor 9, and the complete machine diagnosis processor 9 collects the data of each synchronous trigger diagnosis card 4 and performs classification, recording and post-processing according to the time stamp.

In the embodiment, data acquisition and diagnosis related to the complete machine time sequence are realized through synchronous acquisition of data in the subsystems and synchronous triggering among the subsystems, an original complete machine main control flow and a synchronous triggering diagnosis hardware entity are separated and are mutually independent, and software is called through a fixed interface library to realize independent operation of control and diagnosis without mutual interference.

FIG. 2 is a schematic diagram of a custom internal synchronization bus according to an embodiment of the invention. The internal synchronization bus comprises at least an address bus, a data bus and a control bus. The synchronous trigger diagnosis card 4 sends a data latch signal to each subsystem control daughter card 3 in the subsystem 10 through the control bus; synchronously triggering the diagnosis card 4 to give out the address of the subsystem control daughter card 3 of the data to be uploaded through an address bus; the addressed subsystem control daughter card 3 puts the latched data on the data bus, and the synchronization triggers the diagnostic card 4 to read the data of the data bus and store it in the assigned ring buffer. The synchronous trigger diagnosis card 4 can control each bus, and the subsystem control daughter card 3 can provide data for the data bus. The synchronous trigger diagnostic card 4 controls the address bus according to the timing requirement or the diagnostic requirement. The subsystem control daughter card 3 periodically checks the address bus and the control bus, and when the data latch signal is checked, all the subsystem control daughter cards 3 latch the current data; when the data transmission signal is detected and the subsystem control daughter card 3 is used as a data provider, the latest latched data is provided and uploaded to the data bus; the synchronous trigger diagnosis card 4 stamps a time stamp, reads the data according to the time sequence and buffers the data into an internal ring buffer area. Moreover, a set of latched data is read out in a servo cycle.

FIG. 3 is a schematic diagram of a custom external synchronization bus according to an embodiment of the invention. As shown in fig. 3, the external synchronization bus at least comprises a clock with a clock frequency >1M, which ensures that the status synchronization between the synchronous trigger diagnostic cards 4 is in the microsecond level. The external synchronous bus also comprises a differential pair used for realizing the transmission of a standard acquisition state; each subsystem realizes microsecond-level trigger time synchronization by checking trigger request data of the differential pairs. The external synchronous bus also comprises at least one group of synchronous diagnosis trigger states, and when the related subsystems detect different states, different data are collected and stored in the ring buffer area according to the predetermined convention. In fig. 3, T1 and T2 represent the high and low level times of the clock, respectively; t3 represents the minimum time that a state needs to be satisfied to a falling edge of the clock, T4 represents the minimum time that a state needs to be satisfied to a rising edge of the clock, T5 represents the minimum time that a state continues, and T6 represents the minimum time that a rising edge meets to the diagnostic state to switch to an error state; DTR indicates that the diagnosis requirement is triggered, ERROR indicates that the data latch of the whole subsystem is triggered due to ERRORs, and State [ N ] indicates that the subsystem is actively triggered, wherein N is 0,1,2 and 3 …, and different State [ N ] indicates different diagnosis triggering requirements. Generally, if there are N synchronous trigger diagnostic cards, it is necessary to define a synchronous trigger diagnostic card as a master diagnostic card and the rest as slave diagnostic cards, and the slave diagnostic cards are only responsible for receiving a clock and a diagnostic trigger state. The master or slave diagnostic cards are defined only to achieve hardware non-conflict.

When the photoetching machine works normally, the self-defined outer synchronous bus 9 periodically sends a normal data latch signal to each synchronous trigger diagnosis card 4, each synchronous trigger diagnosis card 4 receives the data latch signal and then sends the data latch signal to a subsystem control daughter card 3 in the subsystem, and the subsystem control daughter card 3 latches defined data; the diagnostic card 4 to be synchronously triggered gives an appointed address, and the subsystem control daughter card 3 of the appointed address puts latching data on a data bus; the synchronous trigger diagnostic card 4 reads the data of the data bus and stores the data into the designated ring buffer.

FIG. 4 is a schematic diagram of a trigger process of a synchronous trigger diagnosis method for a lithography machine according to an embodiment of the invention. In fig. 4, 21 denotes a user program, 22 denotes a diagnostic trigger control center, 4 denotes a synchronization trigger diagnostic card, 3 denotes a subsystem control daughter card, 5 denotes a trigger diagnostic request signal, 6 denotes a trigger diagnostic signal, 7 denotes a normal program bus (VME or ethernet), 8 denotes an internal synchronization bus, and 9 denotes an external synchronization bus. It should be noted that the diagnosis trigger control center 22 may be injected through the whole host controller 1 or the whole diagnosis processor 9, and when the diagnosis trigger control center is issued through the whole diagnosis processor 9, it needs to pass through the ethernet channel of the synchronous trigger diagnosis card 4.

The occurrence of a trigger diagnostic action includes two situations, one to trigger the diagnostic system for the detection of an error and the other to actively trigger the diagnostic system as desired by the user.

During the normal scanning period of the photoetching machine, the whole machine main controller 1 and the subsystem controller 2 write diagnosis data into a ring buffer area of the synchronous trigger diagnosis card 4 and keep updating continuously; when software on the subsystem controller 2 or firmware programs on the subsystem control daughter card 3 find errors, for example, some monitored sensor values exceed the range, a trigger diagnosis specific interface program can be called, a trigger diagnosis request signal 5 is sent to the diagnosis trigger control center 22, after receiving the trigger diagnosis request signal 5, the trigger diagnosis control center 22 makes a judgment according to a certain condition, and when the condition for performing trigger diagnosis is met, a trigger diagnosis signal 6 is sent to the synchronous trigger diagnosis card 4. The trigger diagnosis control center 22 ignores the diagnosis trigger request signal 5 if it judges that the trigger diagnosis is not necessary. If the condition is met, the trigger diagnostics control center 22 will send a trigger diagnostics signal 6.

All synchronous trigger diagnostic cards 4 are connected through an external synchronous bus 9, so that all synchronous trigger diagnostic cards 4 (i.e., all master diagnostic cards and slave diagnostic cards) receive the trigger diagnostic signal 6 at the same time, after receiving the trigger diagnostic signal 6, the synchronous trigger diagnostic cards 4 start their internal timers, and after a predefined period of time, lock their ring buffers. Once the ring buffer is locked, when the subsystem control daughter card 3 calls the program of the trigger diagnostic interface library, the trigger diagnostic interface library directly returns after judging that the buffer is locked, and diagnostic data is not written into the ring buffer any more. Thus, the diagnostic data stored in the ring buffer includes diagnostic data for a period of time before initiation of the trigger diagnostic signal and a period of time after initiation.

In addition, the user can perform diagnostic triggers as needed. The user program 21 directly calls the trigger diagnosis specific interface program, and the trigger diagnosis control center 22 directly responds to the request of the user program 21 and sends a trigger diagnosis request signal 5 to the trigger diagnosis control center 22. The trigger diagnosis control center 22 directly responds to the request of the user program 21 and sends a trigger diagnosis signal 6 to the trigger diagnosis card 4. All synchronous trigger diagnosis cards 4 start their internal timers after receiving the trigger diagnosis signal 6 at the same time, and lock all internal ring buffers after reaching a predefined locking time set by the timer, and stop writing in the diagnosis data. This is mainly the case when the user actively views the diagnostic data information within the system.

When the ring buffers of the synchronous trigger diagnostic card 4 are all locked, the user can collect all diagnostic data through the whole machine main controller 1 and carry out sequencing and sorting work according to the time stamps. Specifically, after the ring buffers of the synchronous trigger diagnostic cards are all locked, a command for collecting diagnostic data is issued through a trigger diagnostic upper computer program on the whole machine main controller 1, and the diagnostic data in the synchronous trigger diagnostic card 4 is uploaded to the whole machine main controller 1 through the subsystem controller 2. Then, the user can check the value of the diagnostic data of all the subsystems at any moment at a certain moment, so that the user can quickly judge where the problem exists and whether the problem exists in the synchronous time sequence.

The whole machine main controller 1 sequences and arranges all the received diagnosis data by triggering a diagnosis upper computer program, and a user can check the synchronous diagnosis data of each system at any time.

The above embodiments are provided to illustrate the principle of the present invention and its efficacy, but the present invention is not limited to the above embodiments. Those skilled in the art will recognize that changes may be made in the above embodiments without departing from the spirit and scope of the invention, which is set forth in the following claims. Therefore, the scope of the present invention should be covered by the appended claims.

Claims

1. A lithography machine synchronous trigger diagnosis system is characterized by comprising a main controller and at least two subsystems, wherein the at least two subsystems are connected with the main controller of the whole machine through an Ethernet, each subsystem comprises a subsystem controller, a synchronous trigger diagnosis card and at least one subsystem control daughter card, all synchronous trigger diagnosis cards of the at least two subsystems are interconnected through an external synchronous bus,

in each subsystem, the subsystem controller, the synchronous trigger diagnosis card and at least one subsystem control daughter card are interconnected with each other through a standard VME or an Ethernet; the at least one subsystem control daughter card and the synchronous trigger diagnosis card are also interconnected through an internal synchronous bus;

the synchronous trigger diagnosis card in each subsystem is provided with a plurality of annular buffer areas for storing the diagnosis data of each subsystem controller and the subsystem control daughter card.

2. The system of claim 1, wherein one of the synchronously triggered diagnostic cards in the at least two subsystems is set as a master diagnostic card, and the remaining synchronously triggered diagnostic cards are set as slave diagnostic cards.

3. The system of claim 2, wherein the external synchronization bus comprises a clock having a frequency greater than 1 MHz.

4. The system of claim 3, wherein the external synchronization bus comprises a differential pair.

5. The system of claim 4, wherein the internal synchronization bus comprises an address signal, a data bus, and a control bus.

6. The system of claim 5, further comprising a complete machine diagnosis processor, wherein the complete machine diagnosis processor is connected to the synchronous trigger diagnosis cards in each subsystem through an ethernet network, and is configured to collect data in each synchronous trigger diagnosis card and process the data according to a timestamp.

7. The system of claim 1, wherein the update frequency of the plurality of ring buffers is set to a motion servo frequency in the lithography machine.

8. The system as claimed in claim 7, wherein a timer is provided inside the synchronous trigger diagnostic card for setting the lock time of the ring buffer.

9. The system of claim 8, wherein all diagnostic data is queued according to a timestamp.

10. The system of claim 7, wherein the system triggers diagnostics passively by a fault or actively by a user.

11. A synchronous trigger diagnosis method for a photoetching machine is characterized by comprising the following steps:

the trigger diagnosis control center receives the trigger diagnosis request signal and sends a trigger diagnosis signal to the synchronous trigger diagnosis cards of all the subsystems through the external synchronous bus after detecting that the trigger condition is met;

the whole machine main controller sequences and arranges all the received diagnosis data by triggering a diagnosis upper computer program, and a user can check the synchronous diagnosis data of each system at any time;

the method for writing the diagnostic data into the annular buffer area of the synchronous trigger diagnostic card by the whole machine main controller and the subsystem controllers comprises the steps that the synchronous trigger diagnostic card sends a data latch signal to each subsystem control daughter card in the subsystem through a control bus; synchronously triggering the diagnostic card to give out the address of the subsystem control daughter card of the data to be uploaded through an address bus; the subsystem control sub-card assigned with the address puts the latched data on the data bus, and synchronously triggers the diagnostic card to read the data of the data bus and store the data into the assigned ring buffer area.

12. The lithography machine synchronous trigger diagnostic method according to claim 11, wherein all diagnostic data is queued according to a time stamp.

13. The method as claimed in claim 11, wherein one of the synchronous trigger diagnosis cards in each subsystem is set as a master diagnosis card, and the rest of the synchronous trigger diagnosis cards are set as slave diagnosis cards.