CN109338457A - A kind of monocrystalline furnace discharge cooling system - Google Patents
A kind of monocrystalline furnace discharge cooling system Download PDFInfo
- Publication number
- CN109338457A CN109338457A CN201811185691.1A CN201811185691A CN109338457A CN 109338457 A CN109338457 A CN 109338457A CN 201811185691 A CN201811185691 A CN 201811185691A CN 109338457 A CN109338457 A CN 109338457A
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- CN
- China
- Prior art keywords
- frame
- mounting plate
- locking nut
- shaft
- connecting cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
Abstract
The present invention relates to a kind of monocrystalline furnace discharge cooling systems, including frame, conveying cylinder, delivery board, water tank, cooling spray and mounting plate, the frame it is U-shaped, the mounting plate is fixedly connected on frame, the bottom of the frame is connected with support foot, the water tank is mounted on the bottom of frame, the cooling spray is mounted on the bottom of mounting plate, the cooling spray is connected by conveyance conduit with water tank, drawing liquid pump is installed on the conveyance conduit, there are two the delivery board settings, the lower end of two delivery boards is connected by angle adjusting mechanism and forms V-groove, the angle adjusting mechanism is fixed on the bottom in frame, the upper surface of two delivery boards is fitted with several conveying cylinders;The design has the advantages that structure is simple, easily fabricated and practical and efficient.
Description
Technical field
The present invention relates to single crystal growing furnace technical field, especially a kind of monocrystalline furnace discharge cooling system.
Background technique
Pulling of crystals is a kind of periodic, discrete production process.After each end cycle, require to wait in furnace
After temperature is cooled to 300 DEG C or less, the preparation for tearing furnace, cleaning and next production cycle open just can be carried out.In addition, due to vertical pulling
Monocrystalline production process is lasting pyroprocess, in order to reduce crystal pulling energy consumption, is provided with a large amount of insulating layer in furnace, leads to blowing out
After need to wait 6~10h just thermal field in furnace can be made to cool down, this time accounts for the 1/8 of entire production cycle.Stove during this
In idle state, the running rate of single-crystal manufacturing apparatus is reduced, affects the efficiency of single crystal growing furnace crystal pulling.And utilizing monocrystalline
If cooling too fast of material, can also have an impact material itself, to generate unnecessary damage during furnace produces
It loses.
Summary of the invention
The present invention adjusts the spacing between two conveying cylinders by angle adjusting mechanism, to transport different dimensions
Charge bar, play the role of increase the practicality can;A kind of monocrystalline furnace discharge cooling system is provided.
In order to solve the above technical problems, structure of the invention includes frame, conveying cylinder, delivery board, water tank, cooling spray
Head and mounting plate, the frame it is U-shaped, the mounting plate is fixedly connected on frame, the connection of the bottom of the frame
There is support foot, the water tank is mounted on the bottom of frame, and the cooling spray is mounted on the bottom of mounting plate, the cooling
Spray head is connected by conveyance conduit with water tank, drawing liquid pump is equipped on the conveyance conduit, the delivery board is provided with two
A, the lower end of two delivery boards is connected by angle adjusting mechanism and forms V-groove, and the angle adjusting mechanism is fixed on frame
Bottom in frame, the upper surface of two delivery boards are fitted with several conveying cylinders, several groups are arranged on the delivery board
Two pieces of support plates staggered relatively are rotatably connected to rotation axis, one end of the rotation axis and servo between two pieces of support plates
Motor is connected, and the conveying cylinder connects on the rotating shaft and as it is rotated together.
Further, the angle adjusting mechanism includes screw shaft, the first connecting cylinder and the first locking nut, the spiral shell
Bar axis is mounted on the bottom surface in frame, and two delivery boards respectively pass through first connecting cylinder and are connected on screw shaft, described
First locking nut is respectively connected on the screw shaft of first connecting cylinder front and rear sides, first connecting cylinder passes through front and back
First locking nut of two sides is fixed on screw shaft, and the two sides of first connecting cylinder are provided with the first connection sheet, described
The first connection sheet be bolted on delivery board.
Further: the second connecting cylinder is also connected on the screw shaft, the second connecting cylinder front and rear sides
The second locking nut is also connected on screw shaft, second connecting cylinder is fixed on by the second locking nut of front and rear sides
On screw shaft, the bottom of second connecting cylinder is provided with attachment base, is provided with connecting rod on the bottom surface in the frame,
The lower end of the attachment base offers the connecting hole to match with connecting rod, and the upper end of the connecting rod stretches to connecting hole
It is interior, threaded hole is offered on the side wall of the attachment base lower end, and puller bolt, the top are connected in the threaded hole
Tight bolt passes through threaded hole and is connected with connecting rod, and the connecting rod is fixed in connecting hole by puller bolt.
Further: the mounting plate is connected with lower platen, the bottom of the lower platen by buffering press mechanism
Two pieces of second connecting plates staggered relatively are provided with, are connected with the second shaft between second connecting plate, described second
The both ends of shaft are movably connected on two piece of second connecting plate by bearing, are set with driven roller in second shaft,
The driven roller rotates together with the second shaft, and the driven roller is being located between two conveying cylinders space just
Top.
Further: the buffering press mechanism includes adjusting bolt, adjustable plate and spring, is opened on the mounting plate
Equipped with the second threaded hole, the adjusting is bolted in the second threaded hole, and the lower end of the adjusting bolt passes through second
Threaded hole is movably connected in the top of adjustable plate, and the lower platen is connected to the bottom of adjustable plate by spring.
Further: the two sides of the frame are provided with attachment base, and the second screw rod, institute are provided on the attachment base
The upper end for the second screw rod stated pass through mounting plate, shown in mounting plate up and down two sides the second screw rod on be respectively connected with a third
Locking nut, the mounting plate are fixed on the second screw rod by the third locking nut of upper and lower two sides.
After adopting the above structure, the present invention adjusts the spacing between two conveying cylinders by angle adjusting mechanism, thus
The charge bar for transporting different dimensions plays the role of increasing the practicality energy;And the design also has structure simple, easy
In manufacture and practical and efficient advantage.
Detailed description of the invention
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the structural schematic diagram of angle adjusting mechanism.
Specific embodiment
A kind of monocrystalline furnace discharge cooling system as shown in Figure 1, including frame 1, conveying cylinder 8, delivery board 3, water tank 19,
Cooling spray 21 and mounting plate 2, the frame 1 it is U-shaped, the mounting plate 2 is fixedly connected on frame 1, the frame
The bottom of frame 1 is connected with support foot 20, and the water tank 19 is mounted on the bottom of frame 1, and the cooling spray 21 is mounted on
The bottom of loading board 2, the cooling spray 21 are connected by conveyance conduit with water tank 19, and pumping is equipped on the conveyance conduit
Liquid pump, there are two the described delivery board settings, and the lower end of two delivery boards is connected by angle adjusting mechanism and forms V-groove,
The angle adjusting mechanism is fixed on the bottom in frame 1, and the upper surface of two delivery boards is fitted with several conveying rollings
Cylinder 8, setting several groups two pieces of support plates staggered relatively on the delivery board are rotatably connected to rotation between two pieces of support plates
One end of axis, the rotation axis is connected with servo motor 9, and the conveying cylinder 8 connects on the rotating shaft and with one
With rotation.The present invention adjusts the spacing between two conveying cylinders by angle adjusting mechanism, to transport different dimensions
Charge bar, play the role of increase the practicality can.
Angle adjusting mechanism as shown in Figure 2 includes screw shaft 4, the first connecting cylinder 22 and the first locking nut 23, described
Screw shaft 4 be mounted on the bottom surface in frame 1, two delivery boards respectively pass through first connecting cylinder 22 and are connected to screw shaft 4
On, respectively it is connected with first locking nut 23 on the screw shaft 4 of 22 front and rear sides of the first connecting cylinder, described first
Connecting cylinder 22 is fixed on screw shaft 4 by the first locking nut 23 of front and rear sides, the two sides of first connecting cylinder 22
It is provided with the first connection sheet, first connection sheet is bolted on delivery board.
The second connecting cylinder 24,24 front and back of the second connecting cylinder are also connected on screw shaft 4 as depicted in figs. 1 and 2
The second locking nut 25, the second lock that second connecting cylinder 24 passes through front and rear sides are also connected on the screw shaft 4 of two sides
Tight nut 25 is fixed on screw shaft 4, and the bottom of second connecting cylinder 24 is provided with attachment base 5, in the frame 1
Connecting rod 6 is provided on bottom surface, the lower end of the attachment base 5 offers the connecting hole to match with connecting rod 6, the company
The upper end of extension bar 6 stretches in connecting hole, offers threaded hole, the threaded hole on the side wall of 5 lower end of attachment base
It is inside connected with puller bolt 7, the puller bolt 7 passes through threaded hole and is connected with connecting rod 6, and the connecting rod 6 passes through top
Tight bolt 7 is fixed in connecting hole.
Mounting plate 2 as shown in Figure 1 is connected with lower platen 13, the bottom of the lower platen 13 by buffering press mechanism
Two pieces of second connecting plates 14 staggered relatively are provided with, are connected with the second shaft between second connecting plate 14, it is described
The both ends of second shaft are movably connected on two piece of second connecting plate 14 by bearing, are set in second shaft driven
Roller 15, the driven roller 15 rotate together with the second shaft, and the driven roller 15 is located at two conveying cylinders 8
Between space surface.
Buffering press mechanism as shown in Figure 1 includes adjusting bolt 18, adjustable plate 17 and spring 16, the mounting plate 2
On offer the second threaded hole, the adjusting bolt 18 is connected in the second threaded hole, the lower end of the described adjusting bolt 18
The top of adjustable plate 17 is movably connected in across the second threaded hole, the lower platen 13 is connected to adjustable plate 17 by spring 16
Bottom.
The two sides of frame 1 as shown in Figure 1 are provided with attachment base 10, and the second screw rod 11 is provided on the attachment base 10,
The upper end of second screw rod 11 pass through mounting plate 2, shown in about 2 two sides of mounting plate the second screw rod 11 on be respectively connected with
One third locking nut 12, the mounting plate 2 are fixed on the second screw rod 11 by the third locking nut of upper and lower two sides.
The design has the advantages that structure is simple, easily fabricated and practical and efficient.
Claims (6)
1. a kind of monocrystalline furnace discharge cooling system, it is characterised in that: including frame, conveying cylinder, delivery board, water tank, cooling spray
Head and mounting plate, the frame it is U-shaped, the mounting plate is fixedly connected on frame, the connection of the bottom of the frame
There is support foot, the water tank is mounted on the bottom of frame, and the cooling spray is mounted on the bottom of mounting plate, the cooling
Spray head is connected by conveyance conduit with water tank, drawing liquid pump is equipped on the conveyance conduit, the delivery board is provided with two
A, the lower end of two delivery boards is connected by angle adjusting mechanism and forms V-groove, and the angle adjusting mechanism is fixed on frame
Bottom in frame, the upper surface of two delivery boards are fitted with several conveying cylinders, several groups are arranged on the delivery board
Two pieces of support plates staggered relatively are rotatably connected to rotation axis, one end of the rotation axis and servo between two pieces of support plates
Motor is connected, and the conveying cylinder connects on the rotating shaft and as it is rotated together.
2. a kind of monocrystalline furnace discharge cooling system according to claim 1, it is characterised in that: the angle adjusting mechanism
Including screw shaft, the first connecting cylinder and the first locking nut, the screw shaft is mounted on the bottom surface in frame, two conveyings
Plate respectively passes through first connecting cylinder and is connected on screw shaft, respectively connects on the screw shaft of the first connecting cylinder front and rear sides
There is first locking nut, first connecting cylinder is fixed on screw shaft by the first locking nut of front and rear sides,
The two sides of first connecting cylinder are provided with the first connection sheet, and first connection sheet is bolted in delivery board
On.
3. a kind of monocrystalline furnace discharge cooling system according to claim 2, it is characterised in that: also connect on the screw shaft
It is connected to the second connecting cylinder, is also connected with the second locking nut on the screw shaft of the second connecting cylinder front and rear sides, it is described
Second connecting cylinder is fixed on screw shaft by the second locking nut of front and rear sides, the bottom setting of second connecting cylinder
There is attachment base, connecting rod is provided on the bottom surface in the frame, the lower end of the attachment base offers and connecting rod phase
The upper end of matched connecting hole, the connecting rod stretches in connecting hole, offers on the side wall of the attachment base lower end
Threaded hole is connected with puller bolt in the threaded hole, and the puller bolt passes through threaded hole and is connected with connecting rod, described
Connecting rod be fixed in connecting hole by puller bolt.
4. a kind of monocrystalline furnace discharge cooling system according to claim 1, it is characterised in that: the mounting plate passes through slow
It sweeps away press mechanism and is connected with lower platen, the bottom of the lower platen is provided with two pieces of second connecting plates staggered relatively, described
The second connecting plate between be connected with the second shaft, the both ends of second shaft are movably connected in two piece second by bearing
On connecting plate, driven roller is set in second shaft, the driven roller rotates together with the second shaft, institute
The driven roller stated is located at the surface in space between two conveying cylinders.
5. a kind of monocrystalline furnace discharge cooling system according to claim 4, it is characterised in that: the buffering press mechanism
Including adjusting bolt, adjustable plate and spring, the second threaded hole is offered on the mounting plate, the adjusting is bolted to
In second threaded hole, the lower end of the adjusting bolt passes through the top that the second threaded hole is movably connected in adjustable plate, described
Lower platen is connected to the bottom of adjustable plate by spring.
6. a kind of monocrystalline furnace discharge cooling system according to claim 1, it is characterised in that: the two sides of the frame are set
It is equipped with attachment base, the second screw rod is provided on the attachment base, the upper end of second screw rod passes through mounting plate, shown in
A third locking nut is respectively connected with above and below mounting plate on second screw rod of two sides, the mounting plate passes through upper and lower two sides
Third locking nut is fixed on the second screw rod.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811185691.1A CN109338457A (en) | 2018-10-11 | 2018-10-11 | A kind of monocrystalline furnace discharge cooling system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811185691.1A CN109338457A (en) | 2018-10-11 | 2018-10-11 | A kind of monocrystalline furnace discharge cooling system |
Publications (1)
Publication Number | Publication Date |
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CN109338457A true CN109338457A (en) | 2019-02-15 |
Family
ID=65309542
Family Applications (1)
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CN201811185691.1A Pending CN109338457A (en) | 2018-10-11 | 2018-10-11 | A kind of monocrystalline furnace discharge cooling system |
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CN (1) | CN109338457A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008037686A (en) * | 2006-08-04 | 2008-02-21 | Katsuyo Tawara | Crystal manufacturing apparatus |
CN103495943A (en) * | 2013-09-18 | 2014-01-08 | 常州市武进翔宇电子元器件有限公司 | V-type block with adjustable angles |
CN105112992A (en) * | 2015-10-13 | 2015-12-02 | 江苏华盛天龙光电设备股份有限公司 | Single crystal furnace body with automatic discharging function |
CN105568367A (en) * | 2016-03-16 | 2016-05-11 | 江苏华盛天龙光电设备股份有限公司 | Single-crystal furnace discharge cooling system |
CN205556846U (en) * | 2015-10-13 | 2016-09-07 | 江苏华盛天龙光电设备股份有限公司 | Single crystal growing furnace bleed valve with oneself protect function |
-
2018
- 2018-10-11 CN CN201811185691.1A patent/CN109338457A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008037686A (en) * | 2006-08-04 | 2008-02-21 | Katsuyo Tawara | Crystal manufacturing apparatus |
CN103495943A (en) * | 2013-09-18 | 2014-01-08 | 常州市武进翔宇电子元器件有限公司 | V-type block with adjustable angles |
CN105112992A (en) * | 2015-10-13 | 2015-12-02 | 江苏华盛天龙光电设备股份有限公司 | Single crystal furnace body with automatic discharging function |
CN205556846U (en) * | 2015-10-13 | 2016-09-07 | 江苏华盛天龙光电设备股份有限公司 | Single crystal growing furnace bleed valve with oneself protect function |
CN105568367A (en) * | 2016-03-16 | 2016-05-11 | 江苏华盛天龙光电设备股份有限公司 | Single-crystal furnace discharge cooling system |
Non-Patent Citations (1)
Title |
---|
王秋平主编: "《机械化运输与仓储工程》", 28 February 2017, 陕西科学技术出版社 * |
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Application publication date: 20190215 |