CN109326552A - A kind of pedestal convenient for safeguarding - Google Patents
A kind of pedestal convenient for safeguarding Download PDFInfo
- Publication number
- CN109326552A CN109326552A CN201811302696.8A CN201811302696A CN109326552A CN 109326552 A CN109326552 A CN 109326552A CN 201811302696 A CN201811302696 A CN 201811302696A CN 109326552 A CN109326552 A CN 109326552A
- Authority
- CN
- China
- Prior art keywords
- hole
- pedestal
- installation
- safeguarding
- fixing bolt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Vibration Dampers (AREA)
Abstract
The present invention provides a kind of pedestal convenient for safeguarding, applied in the process cavity of semiconductor processing equipment, wherein pedestal is provided with the recess of cuboid, and it further includes catch and fixing bolt that it is circular installation through-hole that concave bottom, which is provided with section,；Catch shape adaptation recess, and be arranged in recess；Wheel shelves are provided with stepped hole, and the position of stepped hole is corresponding with installation through-hole when wheel shelves are set in recess；Fixing bolt protrudes into installation through-hole across stepped hole, and is connected and fixed in the nut being set in installation through-hole；Buffer unit is equipped between fixing bolt and catch.The beneficial effects of the present invention are without dismantling entire pedestal, keeps the replacement of fixing screws and buffer unit simpler effectively, improve the runing time and operational effect of board.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, more particularly to a kind of pedestal convenient for safeguarding.
Background technique
Each process cavity of chemical method tungsten deposition machine (Lam WCD board) has 4 pedestals at present.However process cavity
Interior processing procedure is in high temperature and the working environment of fluoride, and this working environment will lead to the ceramics that catch is fixed on pedestal
Screw and elastic washer are easily damaged, and refer mainly to be easily broken off at the top of ceramic screw, to need to ceramic screw and elasticity
Washer is replaced.
As shown in Figure 1, in the prior art including ceramic screw 6 in pedestal 1, and ceramic screw 6 is solid design, ceramics
It is equipped with nut 3 between screw 6 and pedestal 1, buffer unit 5 is equipped with above nut 3, i.e., the installation that buffer unit 5 is located at pedestal 1 is led to
In hole, it is more difficult to dismantle.When ceramic screw 6 or the damage of buffer unit 5 need replacing, because the more difficult disassembly of ceramic screw 6 is gentle
Flushing device 5 is mounted on 3 top of nut, so needing to carry out entire pedestal 1 disassembly could further progress replacement ceramic screw 6
Or the operation of buffer unit 5, entire pedestal 1 is also reinstalled after having replaced, is taken time and effort, the influence board of high degree
Runing time and operational effect.
Summary of the invention
For the above-mentioned problems in the prior art, one kind pedestal convenient for safeguarding is now provided and is intended to without disassembly entirely
Pedestal keeps the replacement of fixing screws and buffer unit simpler effectively, improves the runing time and operational effect of board.
Specific technical solution is as follows:
A kind of pedestal convenient for safeguarding, applied in the process cavity of semiconductor processing equipment, wherein pedestal is provided with length
The recess of cube, it further includes catch and fixing bolt that it is circular installation through-hole that concave bottom, which is provided with section,；
Catch shape adaptation recess, and be arranged in recess；
Wheel shelves are provided with stepped hole, and the position of stepped hole is corresponding with installation through-hole when wheel shelves are set in recess；
Fixing bolt protrudes into installation through-hole across stepped hole, and is connected and fixed in the nut being set in installation through-hole；
Buffer unit is equipped between fixing bolt and catch.
Preferably, pedestal convenient for safeguarding, wherein fixing bolt is hollow structure, is provided in hollow structure to even
Connect the internal spline of fastening tool.
Preferably, pedestal convenient for safeguarding, wherein internal spline is interior hexagonal.
Preferably, pedestal convenient for safeguarding, wherein the lower half portion of installation through-hole is equipped with the groove for installing nut.
Preferably, pedestal convenient for safeguarding, wherein the diameter of installation through-hole is less than the length of groove.
Preferably, pedestal convenient for safeguarding, wherein the center of the center and pedestal of installation through-hole and stepped hole
On same straight line.
Preferably, pedestal convenient for safeguarding, wherein buffer unit is spring washer.
Preferably, pedestal convenient for safeguarding, wherein buffer unit is detachably arranged between fixing bolt and catch.
Above-mentioned technical proposal has the following advantages that or the utility model has the advantages that without dismantling entire pedestal, makes fixing screws and buffering
The replacement of device is simpler effectively, improves the runing time and operational effect of board.
Detailed description of the invention
With reference to appended attached drawing, more fully to describe the embodiment of the present invention.However, appended attached drawing be merely to illustrate and
It illustrates, and is not meant to limit the scope of the invention.
Fig. 1 is the structural schematic diagram of pedestal in the prior art of the invention；
Fig. 2 is a kind of structural schematic diagram of pedestal convenient for safeguarding of the present invention；
Fig. 3 is a kind of top view of pedestal convenient for safeguarding of the present invention.
Appended drawing reference: 1, pedestal, 11, recess, 12, installation through-hole, 2, catch, 21, stepped hole, 211, first step,
212, second step, 3, nut, 31, groove, 4, fixing bolt, 41, internal spline, 5, buffer unit, 6, ceramic screw.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art without creative labor it is obtained it is all its
His embodiment, shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
The present invention will be further explained below with reference to the attached drawings and specific examples, but not as the limitation of the invention.
As Figure 2-3, one kind provided by the invention pedestal 1 convenient for safeguarding, it is as Figure 2-3, provided by the invention
A kind of pedestal 1 convenient for safeguarding, applied in the process cavity of semiconductor processing equipment, pedestal 1 is provided with the recess of cuboid
11, it further includes catch 2 and fixing bolt 4 that 11 bottoms of recess, which are provided with section and can be circular installation through-hole 12,；
2 shape adaptation of catch recess 11, and be arranged in recess 11；
Wheel shelves are provided with stepped hole 21, and it is right that wheel shelves are set to the position of stepped hole 21 and installation through-hole 12 when in recess 11
It answers；Compared to the prior art, the catch 2 of the present embodiment has deepened the depth of stepped hole 21, facilitates the peace of subsequent buffer unit 5
Dress.
Fixing bolt 4 protrudes into installation through-hole 12 across stepped hole 21, and in the nut 3 being set in installation through-hole 12
It is connected and fixed；Stepped hole 21 includes first step 211 and second step 212.
Buffer unit 5 is equipped between fixing bolt 4 and catch 2.That is the upper surface that first step is set of buffer unit 5
Place, fixing bolt 4 and buffer unit 5 are used to catch 2 being fixed on pedestal 1.
Further, in the above-described embodiments, fixing bolt 4 can be hollow structure, be provided in hollow structure to
Connect the internal spline 41 of fastening tool.
Further, in the above-described embodiments, internal spline 41 can be interior hexagonal, naturally it is also possible to be the flower of other shapes
Key.When the damage of fixing bolt 4 is replaced, can will be fixed by the interior hexagonal internal spline 41 at 4 center of fixing bolt
Bolt 4 takes out, easy to operate effective.
Further, in the above-described embodiments, when needing replacing fixing bolt 4 or buffer unit 5, it is only necessary to pass through disassembly
Tool can disassemble the fixing bolt 4 for being provided with interior hexagonal, then can directly take buffer unit 5 from pedestal 1
Out, without dismantling entire pedestal 1.
Further, in the above-described embodiments, the lower half portion of installation through-hole 12 is equipped with the groove for installing nut 3
31。
Further, in the above-described embodiments, the diameter of installation through-hole 12 is less than the length of groove 31.
Further, in the above-described embodiments, the centre bit of the center of installation through-hole 12 and stepped hole 21 and pedestal 1
It sets on same straight line.Facilitate fixing bolt 4 to pass through stepped hole 21 to protrude into installation through-hole 12, avoids fixing bolt 4
Because of parts depreciation caused by installation through-hole 12 and stepped hole 21 are not aligned.
Further, in the above-described embodiments, buffer unit 5 can be spring washer.
Further, in the above-described embodiments, buffer unit 5 is detachably arranged between fixing bolt 4 and catch 2.
It is convenient in the maintenance in later period that buffer unit 5 is replaced.
To sum up, in the above-described embodiments, when installing catch 2, first catch 2 is placed in the recess 11 of pedestal 1, at this time
The lower surface of catch 2 is bonded with the upper surface of the recess 11 of pedestal 1, the center of installation through-hole 12 and groove 31 and pedestal 1
Center be on same straight line, then buffer unit 5 is placed at the upper surface of first step of stepped hole 21, it is then solid
Determine bolt 4 to be from top to bottom inserted into the stepped hole 21 of catch 2 and the installation through-hole 12 of pedestal 1, and rotate fixation, to complete to take turns
The fixed installation process of gear 2.
The above is only preferred embodiments of the present invention, are not intended to limit the implementation manners and the protection scope of the present invention, right
For those skilled in the art, it should can appreciate that and all replace with being equal made by description of the invention and diagramatic content
It changes and obviously changes obtained scheme, should all be included within the scope of the present invention.
Claims (8)
1. a kind of pedestal convenient for safeguarding, applied in the process cavity of semiconductor processing equipment, which is characterized in that the pedestal
Be provided with the recess of a cuboid, it is circular installation through-hole that the concave bottom, which is provided with a section, further include a catch and
One fixing bolt；
It is recessed described in the catch shape adaptation, and is arranged in the recess；
The wheel shelves are provided with stepped hole, the wheel shelves position of the stepped hole and installation when being set in the recess
Through-hole is corresponding；
The fixing bolt protrudes into the installation through-hole across the stepped hole, and in being set in the installation through-hole
One nut is connected and fixed；
A buffer unit is equipped between the fixing bolt and the catch.
2. pedestal convenient for safeguarding as described in claim 1, which is characterized in that the fixing bolt is hollow structure, described
The internal spline to connect fastening tool is provided in hollow structure.
3. pedestal convenient for safeguarding as claimed in claim 2, which is characterized in that the internal spline is interior hexagonal.
4. pedestal convenient for safeguarding as described in claim 1, which is characterized in that the lower half portion of the installation through-hole, which is equipped with, to be used
In the groove for installing the nut.
5. pedestal convenient for safeguarding as described in claim 1, which is characterized in that the diameter of the installation through-hole is less than described recessed
The length of slot.
6. pedestal convenient for safeguarding as described in claim 1, which is characterized in that in the installation through-hole and the stepped hole
Heart position and the center of the pedestal are on same straight line.
7. pedestal convenient for safeguarding as described in claim 1, which is characterized in that the buffer unit is spring washer.
8. pedestal convenient for safeguarding as described in claim 1, which is characterized in that the buffer unit is detachably arranged on institute
It states between fixing bolt and the catch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811302696.8A CN109326552A (en) | 2018-11-02 | 2018-11-02 | A kind of pedestal convenient for safeguarding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811302696.8A CN109326552A (en) | 2018-11-02 | 2018-11-02 | A kind of pedestal convenient for safeguarding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109326552A true CN109326552A (en) | 2019-02-12 |
Family
ID=65259393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811302696.8A Pending CN109326552A (en) | 2018-11-02 | 2018-11-02 | A kind of pedestal convenient for safeguarding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109326552A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111799213A (en) * | 2020-07-23 | 2020-10-20 | 上海华力微电子有限公司 | Wafer conveying device and PVD (physical vapor deposition) machine |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205043714U (en) * | 2015-10-19 | 2016-02-24 | 中航湖南通用航空发动机有限公司 | Bushing mounting tool |
| CN106849900A (en) * | 2016-12-15 | 2017-06-13 | 北京无线电计量测试研究所 | A kind of pedestal for installing quartz wafer |
| CN207408038U (en) * | 2017-11-01 | 2018-05-25 | 宜昌思卓科技有限公司 | A kind of pressure sensor pedestal |
| CN207647950U (en) * | 2017-12-21 | 2018-07-24 | 常州工程职业技术学院 | A kind of multiple-effect racing car clinch fastener |
-
2018
- 2018-11-02 CN CN201811302696.8A patent/CN109326552A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205043714U (en) * | 2015-10-19 | 2016-02-24 | 中航湖南通用航空发动机有限公司 | Bushing mounting tool |
| CN106849900A (en) * | 2016-12-15 | 2017-06-13 | 北京无线电计量测试研究所 | A kind of pedestal for installing quartz wafer |
| CN207408038U (en) * | 2017-11-01 | 2018-05-25 | 宜昌思卓科技有限公司 | A kind of pressure sensor pedestal |
| CN207647950U (en) * | 2017-12-21 | 2018-07-24 | 常州工程职业技术学院 | A kind of multiple-effect racing car clinch fastener |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111799213A (en) * | 2020-07-23 | 2020-10-20 | 上海华力微电子有限公司 | Wafer conveying device and PVD (physical vapor deposition) machine |
| CN111799213B (en) * | 2020-07-23 | 2022-08-05 | 上海华力微电子有限公司 | Wafer conveying device and PVD (physical vapor deposition) machine |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190212 |