CN109323816A - Mass spectrum leak detection equipment - Google Patents

Mass spectrum leak detection equipment Download PDF

Info

Publication number
CN109323816A
CN109323816A CN201710640780.XA CN201710640780A CN109323816A CN 109323816 A CN109323816 A CN 109323816A CN 201710640780 A CN201710640780 A CN 201710640780A CN 109323816 A CN109323816 A CN 109323816A
Authority
CN
China
Prior art keywords
support
vacuum cavity
mass spectrum
leak detection
cabinet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710640780.XA
Other languages
Chinese (zh)
Inventor
龙超祥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Yuanwang Industry Automation Equipment Co Ltd
Original Assignee
Shenzhen Yuanwang Industry Automation Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Yuanwang Industry Automation Equipment Co Ltd filed Critical Shenzhen Yuanwang Industry Automation Equipment Co Ltd
Priority to CN201710640780.XA priority Critical patent/CN109323816A/en
Publication of CN109323816A publication Critical patent/CN109323816A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Abstract

The present invention discloses a kind of mass spectrum leak detection equipment, including support frame, vacuum cavity, elevating mechanism, safety guard, trace gas source, mass spectrum leak detection device and control device;The elevating mechanism includes bearing, connecting shaft, gear, belt wheel, clump weight and cylinder, the bearing is fixed on support frame as described above, the connecting shaft is connected with the bearing, the gear is set in the connecting shaft, the belt wheel is engaged with the gear to be connected, and one end of the belt wheel is connected with the vacuum cavity, and the other end of the belt wheel is connected with the clump weight, one end of the cylinder is fixed on support frame as described above, and the other end of the cylinder is connected with the vacuum cavity;The safety guard includes: grating sensor, arrives digit buffer, buffer baffle and buffer stopper;The present invention has many advantages, such as that air-tightness is excellent, security performance is excellent and vacuum cavity folding is stablized and.

Description

Mass spectrum leak detection equipment
Technical field
The present invention relates to box body tightness detection technique field more particularly to a kind of mass spectrum leak detection equipment.
Background technique
Mass spectrum leak detection technology is used widely in scientific research and industrial department, and major advantage is can be in various detection works The quantitative detection of slip is realized under the conditions of condition, and its hunt leak high resolution, measurement range are wide, especially suitable for minute leakage rate Accurate measurement.However the mass spectrum leak detection equipment of the prior art causes its vacuum cavity to open and close step because of the requirement of its air-tightness It is cumbersome, and lack necessary safeguard protection.The vacuum cavity of the prior art is difficult to provide one kind safely, while meeting air-tightness With the agility requirement of folding, causes the mass spectrum leak detection equipment of the prior art that can not adapt to pipelining requirement, constrain life Produce the raising of efficiency, it is clear that be not suitable for the development of modernization industry.
Summary of the invention
The present invention is based on above one or more problems, a kind of mass spectrum leak detection equipment is provided, to solve existing skill The problem of vacuum cavity poor air-tightness in art, folding complex steps and poor safety performance.
The present invention provides a kind of mass spectrum leak detection equipment, for detecting the air-tightness of cabinet to be measured comprising: it is support frame, true Cavity body, elevating mechanism, safety guard, trace gas source, mass spectrum leak detection device and control device;
The vacuum cavity is placed on support frame as described above, is provided in the vacuum cavity described to measuring tank for accommodating The accommodating chamber of body;
The elevating mechanism be set to support frame as described above on, for drive the combination of vacuum cavity with separate;The elevator Structure includes belt wheel, clump weight and cylinder, and the belt wheel is movably connected on support frame as described above, one end of the belt wheel and vacuum chamber Body is connected, and the other end of the belt wheel is connected with the clump weight, and one end of the cylinder is fixed on support frame as described above, described The other end of cylinder is connected with the vacuum cavity, for driving the vacuum cavity to move;
The safety guard is arranged on the outside of vacuum cavity, for the combination and separation process in the vacuum cavity Middle carry out safeguard protection;The safety guard includes: to digit buffer and buffer baffle;The buffer baffle is fixed In on the vacuum cavity, for being offseted to digit buffer with described when the vacuum cavity will be moved to predetermined position It holds, so that the vacuum cavity slowly reaches predetermined position;
The trace gas source is used to provide search gas for the cabinet to be measured;
Connection is connected with the vacuum cavity in the mass spectrum leak detection device, for detecting the search gas in accommodating chamber Content, to judge whether the cabinet to be measured is qualified;
The control device is for controlling the elevating mechanism, trace gas source and the work of mass spectrum leak detection device.
In conclusion mass spectrum leak detection equipment of the present invention passes through support frame as described above, vacuum cavity, elevating mechanism, safeguard protection Mutual cooperation between device, trace gas source, mass spectrum leak detection device and control device, thus detecting the cabinet to be measured When air-tightness, the vacuum cavity is controlled in predetermined position by the cylinder, while by the effect of the clump weight, So that the vacuum cavity is stablized in the predetermined position, vacuum cavity is combined additionally by described ground safety guard Safety guarantee is provided with separation process, thus not only air-tightness is excellent and folding is stable and security performance is excellent.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of mass spectrum leak detection equipment of the invention;
Fig. 2 is that the structure when support frame, vacuum cavity and elevating mechanism of removal extension board of the invention cooperate is shown It is intended to;
Fig. 3 is the side view of Fig. 2 structure;
Fig. 4 is the structural schematic diagram of vacuum cavity of the present invention;
Fig. 5 is the front view of vacuum cavity of the present invention;
Fig. 6 is the side view of lower cover of the present invention
Fig. 7 is the enlarged drawing of a-quadrant shown in Fig. 2;
Fig. 8 is the enlarged drawing of B area shown in Fig. 2;
Fig. 9 is the structural schematic diagram of connector of the invention;
Figure 10 is partially connected architecture schematic diagram of the invention;
Figure 11 is partially connected architecture schematic diagram of the invention;
Figure 12 is the flow chart of second embodiment of the invention;
Figure 13 is the flow chart of third embodiment of the invention;
Figure 14 is the flow chart of fourth embodiment of the invention.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawings and examples.It should be noted that if do not conflicted, this hair Each feature in bright embodiment and embodiment can be combined with each other, within the scope of the present invention.
Embodiment one
Fig. 1 to Figure 11 is please referred to, the present invention provides a kind of mass spectrum leak detection equipment, for detecting the airtight of cabinet 20a to be measured Property, the cabinet 20a to be measured can be the cabinet that gearbox, water tank or fuel tank etc. have air-tightness requirement.The mass spectrum leak detection Equipment includes support frame 10, safety guard, vacuum cavity 20, elevating mechanism 30, classification extraction sector 40, trace gas source 50, inflation mechanism 60, mass spectrum leak detection device 70, gas recovering mechanism 80 and control device 90 are classified.
Please refer to Fig. 1, Fig. 2 and Fig. 8, support frame as described above 10 includes the first support component 15, the second support component 16 and the Three support components 17;First support component 15 is for carrying classification pulling mechanism 40, being classified and fill mechanism 60, gas recovering mechanism 80 and the trace gas source 50;Second support component 16 is for carrying the elevating mechanism 30 and mass spectrum leak detection dress Set 70;The third support component 17 further includes extending version for carrying the vacuum cavity 20, first support component 15 15a, the extension version 15a are for carrying the air compressor machine 85 and the low-pressure tank 84;
Second support component 16 is provided with the first guide rail 12 longitudinally extended along second support component 16 With the second guide rail 13, the cross section of first guide rail 12 is in work shape.The cross section of second guide rail 13 is V-shaped, and described One guide rail 12 and the setting of second guide rail 13 interval.The third support component 17 is formed with for placing the vacuum cavity 20 accommodation space, the third support component 17 are being formed with placement mouth 14 on the outside of the accommodation space.
The grating sensor 111 is fixed at the placement mouth 14 comprising transmitter 111a and receiver 111b, institute It states transmitter 111a and receiver 111b and is separately positioned on the two sides that position is opposite at the placement mouth 14, the transmitter 111a And the receiver 111b is electrically connected with the control device 90.The transmitter 111a issues infrared light irradiation when work Onto receiver 111b, shape light curtain in a row;The light curtain is around 20 outside of vacuum cavity.When light curtain is blocked, institute It states after receiver 111b detects certain road intensity variation, can judge the danger zone for thering is foreign matter to enter light curtain setting, then The control device 90 is output control signals to, the control device 90 controls the elevating mechanism 30 and stops working.By setting Set the grating sensor 111, thus when cabinet 20a to be measured is put into the vacuum cavity 20 or from the vacuum cavity by user When the 20 taking-up cabinet 20a to be measured, the safety of user can be protected.
Fig. 1 to Fig. 6 is please referred to, the vacuum cavity 20 includes upper cover body 21 and lower cover 22, and the lid of upper cover body 21 is set On the lower cover 22, accommodating chamber 23 is formed between the upper cover body 21 and the lower cover 22;
The lower cover 22 includes support base 22a, elastic supporting member for supporting optical member 22b and support plate component 22c, the support base 22a The corresponding upper cover body 21 is arranged, and for carrying the support plate component 22c, the elastic supporting member for supporting optical member 22b is fixed on institute in one end It states on support base 22a, the elastic supporting member for supporting optical member 22b other end is flexibly supported with the support plate component 22c, so that the support Board group part 22c and the support base 22a elastic connection, the support plate component 22c is for carrying the cabinet 20a to be measured;
The trace gas source 50 is used to provide search gas for the cabinet 20a to be measured;
The mass spectrum leak detection device 70 is connected with the vacuum cavity 20 conducting, is let out for detecting the cabinet 20a to be measured Drain to the search gas of vacuum cavity 20.
Preferably, the support base 22a further includes support beam 22g, supporting vertical plate 22k and support hanging plate 22m, the branch The side support plate 22m is hung on support frame as described above 10, and it is another that the supporting vertical plate 22k is perpendicularly fixed at the support hanging plate 22m Side, is used to support the support beam 22g, and the support beam 22g vertical rack is set on the supporting vertical plate 22k, is used for The support plate component 22c is carried, is had by the support base 22a that support beam 22g, supporting vertical plate 22k and support hanging plate 22m are constituted There is terminal with compact integral structure and firm.
Preferably, the support plate component 22c includes plate body 22e, support plate guide post 22p, the support plate guide post 22p is provided with the opposite first end and second end in position, and the first end of the support plate guide post 22p is fixed on the plate body The bottom 22e, the both ends the support beam 22g are respectively arranged with pilot hole 22h, and the pilot hole 22h runs through the support beam The opposite two sides in the position 22g, the support plate guide post 22p are through the pilot hole 22h and living with the support beam 22g Dynamic connection, so that the plate body 22e can be along the guiding movement of the pilot hole 22h;Preferably, the pilot hole 22h and institute It states and is avoided between support plate guide post 22p equipped with linear bearing 22j with reducing the resistance to sliding of the support plate guide post 22p The direct abrasion of the support plate guide post 22p and pilot hole 22h, the linear bearing 22j are also possible to sliding bearing, This is not specifically limited.
Preferably, the support plate component 22c includes baffle 22q, the baffle 22q is fixed on the support plate guide post The second end of 22p, it is movable within a preset range for limiting the support plate guide post 22p, avoid the support plate component 22c It is detached from the support base 22a.
Preferably, the surface towards the upper cover body 21 of the plate body 22e is provided with several elastic spacer 22f, it is described Elastic spacer 22f effectively prevents cabinet 20a to be measured to the direct mill on the surface plate body 22e for carrying the cabinet 20a to be measured Damage, when elastic spacer 22f, which may wear to, is unsatisfactory for job requirement, can only change elastic spacer 22f, effectively reduce and be produced into This, the elastic spacer 22f can be Wear-resistant plastic material strip, be not specifically limited herein.
Preferably, the surface surrounding towards the upper cover body 21 of the plate body 22e is provided with sealing joint strip 22s, it is used for The sealing of the lower cover 22 and 21 joint surface of upper cover body passes through the setting of the sealing joint strip 22s, effectively filling engagement The micro gap in face, to obtain the excellent air-tightness of vacuum cavity.
Preferably, support frame as described above 10 is provided with the first guide rail 12 longitudinally extended along support frame as described above 10, it is described Hanging plate 22m is supported to be equipped with several sliding block (not shown)s towards the side of first guide rail 12, the sliding block is equipped with and institute The guide groove 22d of the first guide rail 12 cooperation is stated, the first guide rail 12 is plugged in the guide groove 22d, so that the lower cover 22 It can move up and down under lesser external force along first guide rail 12, thus the upper cover body 21 and 22 energy of lower cover Enough preferably lids are combined or separate.
Preferably, 21 lateral wall of upper cover body is equipped with several upper cover body fixing piece 21d, the upper cover body fixing piece 21d The upper cover body is fixed on including upper cover body fixed column 21e and support frame 10 fixing hanger 21f, the upper cover body fixed column 21e 21 lateral walls, 10 fixing hanger 21f of support frame as described above are fixed on 10 predeterminated position of support frame as described above, solid by the upper cover body Determining part 21d can be fixed on the upper cover body 21 on support frame as described above 10.
Preferably, the upper cover body 21 includes the first upper cover body 21b and the second upper cover body 21c, the second upper cover body 21c It is covered on the first upper cover body 21b, the first upper cover body 21b is used to accommodate the main body of cabinet 20a to be measured, second upper cover Body 21c is used to accommodate the protrusion of cabinet 20a to be measured, preferably, the second upper cover body 21c volume is less than the first upper cover body 21b, the protrusion are the pipeline of cabinet to be measured, grow because the pipeline is thin, by the setting of the second upper cover body 21c, can make The volume of the vacuum cavity 20 is reduced to minimum, significantly reduces the time vacuumized, improves leak detection efficiency.
Preferably, the upper cover body 21 is provided with pipe hole 21h, the pipe hole 21h and the mass spectrum leak detection device 70 Conducting connection, the outside pipe hole 21h are equipped with Air Filter 21j, avoid mass spectrum leak detection device 70 described in the foreign substance pollution.
Preferably, the plate body 22e side wall is provided with protection wear strips 22r, for protecting the plate body 22e and sealant 22s, when avoiding being dragged in the cabinet 20a to be measured from assembly line, the cabinet 20a to be measured damages the plate body 22e and close Seal strip 22s influences the air-tightness of cabinet.
Preferably, the upper cover body 21 is provided with elastic top plate 21a, institute at the top position for being located at the accommodating chamber 23 Elastic top plate 21a is stated for supporting in the cabinet 20a to be measured, preferably to fix the cabinet 20a to be measured.
In the present embodiment, the upper cover body 21 is fixed on support frame as described above 10, and the lower cover 22 is movably set in On support frame as described above 10;When staff dismounts the cabinet 20a to be measured on lower cover 22, can be led to avoid hindering for some reason It causes upper cover body 21 to decline suddenly, causes the accident;Thus setting method safety with higher.
When the lower cover 22 is moved upwards close to the upper cover body 21, can avoid because the lower cover 22 is with described in Seal request is not achieved in lid joint surface up and down caused by joint surface between upper cover body 21 is not parallel;When the lower cover 22 When being detached from the upper cover body 21 and moving downward, the cabinet 20a to be measured can avoid by enormous impact.The elastic supporting member for supporting optical member 22b can be spring, elastic slice or air bag etc., be not specifically limited herein.
Fig. 1 to Fig. 8 is please referred to, the safety guard setting is in 20 outside of vacuum cavity, in vacuum cavity 20 Combination and separation process in carry out safeguard protection;The safety guard includes: grating sensor 111, arrives digit buffer 112, buffer baffle 113 and buffer stopper 114;
Preferably, the safety guard further includes to digit buffer 112,10 top and bottom of support frame as described above difference It is provided with a pair of to digit buffer 112.It is described to be set to 30 side of elevating mechanism to digit buffer 112, for described Vacuum cavity 20 offsets when will be moved to predetermined position with the vacuum cavity 20, so that the vacuum cavity 20 is slowly Predetermined position is reached, it is described to can be damper to digit buffer 112, it is not limited thereto.
Preferably, the safety guard further include with it is described to digit buffer 112 cooperate buffer baffle 113, The buffer baffle 113 is fixed on the vacuum cavity 20, and the buffer baffle 113 includes floor 113b and described hits Plate 113a, the plate 113a that hits are fixed between the floor 113b that two pieces of positions are oppositely arranged, and the plate 113a that hits is used for It offsets with described to digit buffer 112 when the vacuum cavity 20 will be moved to predetermined position, the floor 113b packet Include floor top, in the middle part of floor and floor lower part, for hitting plate 113a described in fixed in the middle part of the floor, the floor top and Plate 113a is hit described in being used to support in floor lower part, and floor top and floor lower part are symmetrical arranged, so as to work as the vacuum cavity 20 Combination or separation when, the plate 113a that hits is able to maintain structural strength, and the floor 113b orthographic projection can be isosceles trapezoid, It is the rectangular of wide, the described a height of length of isosceles trapezoid that accordingly orthographic projection, which can be with bottom in the isosceles trapezoid, in the middle part of the floor Body, the floor top and floor lower part orthographic projection are right angled triangle, it is not limited here.
Preferably, the safety guard further includes the buffer stopper 114 with the elevating mechanism 30 cooperation, the buffering Block 114 is set on support frame 10 corresponding with 35 position of clump weight, for delaying when the clump weight 35 moves downward Rush impact of the clump weight 35 to support frame as described above 10.
Preferably, the safety guard further includes heater 115, the mass spectrum leak detection equipment further includes low-pressure tank 84 And air compressor machine 85, the heater 115 are set to on the low-pressure tank 84 and the pipeline of the conducting connection of institute's air compressor machine 85, are used for Prevent the pipeline from freezing to block, the heater 115 can be heating copper ring, it is not limited here.
Preferably, referring to Fig. 9, the lower cover 22 is connected with connector 200, the connector 200 and the tracer Gas source 50 conducting connection, for by the search gas in the trace gas source 50 import in the accommodating chamber 23 to measuring tank In body 20a.The connector 200 include connecting plate 210, outer tube 220, clips 221, limit casing 230, limited cover 231, Elastic seal cartridge 240, washer 250, piston 260, cushion 270 and connector 280, the connecting plate 210 are fixed on the lower cover On body 22, the outer tube 220 is placed on the connecting plate 210.The clips 221 are coated on the outer tube 220 Outer surface is simultaneously connected with the connecting plate 210, for the outer tube 220 to be fixed on the connecting plate 210.
One end of the limit casing 230 is plugged in the outer tube 220, and the other end of the limit casing 230 prolongs It extends to outside the outer tube 220, the limited cover 231, which covers, is located at the limit casing 230 backwards to the one of the outer tube 220 End, the elastic seal cartridge 240 and the washer 250 are set in the limit casing 230, the elastic seal cartridge 240 Between the limited cover 231 and the washer 250, and one end of the elastic seal cartridge 240 offsets with limited cover 231 It holds, the other end of the elastic seal cartridge 240 offsets with the washer 250.The elastic seal cartridge 240 can be rubber sleeve Or silica gel sheath etc., it is not specifically limited herein.
The piston 260 includes hollow cock body 261 and the stop collar 262 at 261 outer peripheral surface of cock body, described One end of cock body 261 is plugged in the outer tube 220, and the other end of the cock body 261 is plugged in the limit casing 230 It is interior, the cushion 270 be set on the cock body 261 and be located at the limit casing 230 end face and stop collar 262 it Between.Gas port 222, one end of the gas port 222 and the outer tube 220 are provided at the tube wall of the outer tube 220 Outer surface is connected, and the other end of the gas port 222 is connected with the inner wall of the outer tube 220 and is located at the limit Ring 262 is backwards to the side of the cushion 270.The connector 280 is fixed on the outer tube 220 backwards to the limit casing 230 one end end face is connected for being connected with the trace gas source 50.
Before inflating to the cabinet 20a to be measured, the compressed air of compressed air source (not shown) is led by described Stomata 222 imports in the outer tube 220, so that the piston 260 is pushed to move towards the elastic seal cartridge 240, the bullet Property extrusion deformation of the sealing shroud 240 by the limited cover 231 and the washer 250, thus be closely clamped in to measuring tank In the connecting tube of body 20a conducting connection, thus gas leakage is not only preferably avoided, but also more convenient user connects;When to it is described to When measuring tank body 20a is inflated, the search gas of the trace gas source 50 passes through the connector 200, the outer tube 220, institute It states piston 260 and washer 250 enters in the connecting tube, finally flow into the cabinet 20a to be measured.By the way that the buffering is arranged Pad 270, thus can avoid the piston 260 and hit with the limit casing 230.By the way that the washer 250 is arranged, thus can keep away Exempt from the elastic seal cartridge 240 arbitrarily sliding or deformation and causes to connect untight problem.
Fig. 2, Fig. 7 and Fig. 8 are please referred to, the elevating mechanism 30 includes bearing 31, connecting shaft 32, sprocket wheel 33, chain 34, matches Pouring weight 35 and cylinder 36, the bearing 31 are fixed on support frame as described above 10, and the connecting shaft 32 is connected with the bearing 31, institute It states sprocket wheel 33 to be set in the connecting shaft 32, the chain 34 is engaged with the sprocket wheel 33 to be connected, one end of the chain 34 It is connected with the lower cover 22, the other end of the chain 34 is connected with the clump weight 35.It is fixed on the clump weight 35 First pulley 35a and second pulley 35b, the first pulley 35a and second pulley 35b are located at second guide rail 13 Two sides.One end of the cylinder 36 is fixed on support frame as described above 10, the other end of the cylinder 36 and the vacuum cavity 20 The lower cover 22 be connected.The cylinder 36 drives the lower cover 22 to be moved upwardly or downwardly when work, and described first is sliding 35a and second pulley 35b is taken turns along the guiding movement of second guide rail 13, to make the upper cover body 21 and the lower cover 22 It is combined together or separates.Since one end of the chain 34 is connected with the lower cover 22, the other end of the chain 34 It is connected with the clump weight 35, thus when the cylinder 36 drives the lower cover 22 to move upwards, it can be relatively labor-saving, Er Qiesuo When stating lower cover 22 and moving to highest point, the lower cover 22 can be fitted close with the upper cover body 21.Due to described second The cross section of guide rail 13 is V-shaped, thus is not only convenient for the first pulley 35a and second pulley 35b and second guide rail 13 Cooperation convenient for manufacture, and is not easy to derail, more reliably.
Referring to Fig. 10, the classification extraction sector 40 includes chamber vacuum pump 41 and fore pump 42, the chamber vacuum Pump 41 is connected with the vacuum cavity 20 conducting, for taking out the gas in the accommodating chamber 23, so as to the cabinet to be measured In 20a before filling search gas, the air in the cabinet 20a to be measured and the accommodating chamber 23 is extracted out, is avoided in air Gas impacts detection.The fore pump 42 is connected with 41 conducting of chamber vacuum pump, in the chamber vacuum The gas in the accommodating chamber 23 is taken out before 41 work of pump, to drive the chamber vacuum pump 41 to work.Due to the prime The pumping speed of pump 42 is fast, but final vacuum is low, and the final vacuum of chamber vacuum pump 41 is higher, thus passes through the chamber Body vacuum pump 41 and fore pump 42 cooperate, to keep pumping speed of the present invention fast, final vacuum is higher.Wherein, in the present embodiment, The chamber vacuum pump 41 is lobe pump, and the fore pump 42 is sliding vane rotary pump, and the sliding vane rotary pump is two, two blades Pump is set side by side, thus can be quickly evacuated.
Preferably, the mass spectrum leak detection equipment further includes that cabinet aspirator vacuum pumps 43, cabinet cavity switching valve 44, the first chamber Pressure sensor 45, the second chamber pressure sensor 46, correction switch valve 47 and scaling bottle 48, the cabinet aspirator vacuum pump 43 for being connected connection with the cabinet 20a to be measured, and the gas in the cabinet 20a to be measured is extracted out, thus can avoid sky Gas in gas impacts detection.
The cabinet cavity switching valve 44 is connected with cabinet aspirator vacuum pump 43 and the conducting of the vacuum cavity 20, institute It states cabinet cavity switching valve 44 to be also used to that connection is connected with the cabinet 20a to be measured, so that in the when first stage institute for taking out air Stating vacuum cavity 20 can be connected to the cabinet 20a to be measured, and the cabinet pumping is true when taking out the second stage of air Sky pump 43 can individually be evacuated the cabinet 20a to be measured.Specifically, in the present embodiment, in the first rank for taking out air Duan Shi, the cabinet cavity switching valve 44 are opened, and the vacuum cavity 20 is connected to the cabinet 20a to be measured, thus can be quick Take out the air in the vacuum cavity 20 and the cabinet 20a to be measured in ground.When being evacuated to air pressure inside and reaching preset value, into Two-stage closes the chamber vacuum pump 41, fore pump 42 and the cabinet cavity switching valve 44, is evacuated by the cabinet Vacuum pump 43 is evacuated the cabinet 20a to be measured, until the air pressure inside of the cabinet 20a to be measured reaches preset value, from And the air in atmosphere can be preferably avoided to impact detection.
The first chamber pressure sensor 45 and the second chamber pressure sensor 46 are electrically connected with the control device 90 It connects, the first chamber pressure sensor 45 and the second chamber pressure sensor 46 are used to detect the accommodating chamber 23 Air pressure, wherein the first chamber pressure sensor 45 is different from the measurement range of the second chamber pressure sensor 46.By In right simultaneously by different the first chamber pressure sensor 45 of measurement range and the second chamber pressure sensor 46 Air pressure in the accommodating chamber 23 is detected, therefore detection accuracy can be improved, and preferably avoids judging by accident.
The correction switch valve 47 is connected with the scaling bottle 48 and the conducting of the vacuum cavity 20, to control the calibration Whether the search gas in bottle 48 is discharged into the accommodating chamber 23, so that the mass spectrum leak detection device 70 can be according to the calibration 48 pairs of slips of bottle are corrected.The control device 90 and the correction switch valve 47, chamber vacuum pump 41 and the prime 42 electrical connection of pump works for controlling the correction switch valve 47, chamber vacuum pump 41 and the fore pump 42.It can manage Solution, in order to improve detection efficiency, after the cabinet 20a to be measured of every detection preset quantity, the control device 90 controls institute Correction switch valve 47 is stated to open, so that the mass spectrum leak detection device 70 is corrected slip according to the scaling bottle 48, because And it can avoid erroneous judgement when trace gas leak causes to detect.
The trace gas source 50 is used to that connection to be connected with the cabinet 20a to be measured, to provide to the cabinet 20a to be measured Search gas.Specifically, in the present embodiment, the trace gas source 50 includes that high pressure search gas tank 51 and search gas are fast Valve 52 is filled, the high pressure search gas tank 51 is for filling search gas, and the search gas fast charge valve 52 is for controlling the height Press the open and close of search gas tank 51.
Please continue to refer to Figure 10, the classification inflation mechanism 60 includes that the first inflation branch 61 and second inflate branch 62, The first inflation branch 61 includes the first search gas supply valve 61a, the input terminal of the first search gas supply valve 61a It is connected and connects with the trace gas source 50, the output end of the first search gas supply valve 61a is used for described to measuring tank Body 20a conducting connection, the first search gas supply valve 61a are used to control the first output quantity of the search gas.
The second inflation branch 62 includes the second search gas supply valve 62a, the second search gas supply valve 62a Input terminal and the trace gas source 50 conducting connect, the output end of the second search gas supply valve 62a is used for and institute Cabinet 20a conducting connection to be measured is stated, the second search gas supply valve 62a is used to control the second output of the search gas Amount, second output quantity are greater than first output quantity.
Control device 90 and the first search gas supply valve 61a and the second search gas supply valve 62a Electrical connection is opened and closed with controlling the first search gas supply valve 61a and the second search gas supply valve 62a.
Preferably, the first inflation branch 61 further includes the first surge tank 61b and throttle valve 61c, first buffering Connection is connected with the trace gas source 50 and the first search gas supply valve 61a in tank 61b, for keeping in the tracer gas Body source 50 conveys the search gas to come to buffer search gas pressure oscillation.The input terminal of the throttle valve 61c and first delays Tank 61b conducting connection is rushed, connection is connected with the first search gas supply valve 61a in the output end of the throttle valve 61c.At this In embodiment, the first search gas supply valve 61a is needle-valve, is cooperated by the throttle valve 61c and the needle-valve, The search gas of needle-valve output wave within the unit time is caused to can avoid the air pressure change of the first surge tank 61b output Move larger problem.
Preferably, the mass spectrum leak detection equipment further includes fast charge pressure switch 52a and absolute pressure sensor 52b.The tracer The input terminal of gas fast charge valve 52 and the high pressure search gas tank 51 conducting connect, the search gas fast charge valve 52 it is defeated Connection, institute is connected with the input terminal of the input terminal of the first surge tank 61b and the second search gas supply valve 62a in outlet It states fast charge pressure switch 52a and connection is connected with the output end of the first surge tank 61b, for monitoring first surge tank Air pressure in 61b simultaneously sends the pressure information in the first surge tank 61b to the control device 90.
The control device 90 is electrically connected with the fast charge pressure switch 52a and the search gas fast charge valve 52, is used for It controls the search gas fast charge valve 52 when the air pressure in the first surge tank 61b is less than preset value to open, so that first Surge tank 61b air pressure is kept within a preset range.
The absolute pressure sensor 52b is electrically connected with the control device 90, the absolute pressure sensor 52b and the tracer gas Connection is connected in the output end of body fast charge valve 52, for monitoring the gas for the search gas being discharged from the search gas fast charge valve 52 Pressure.
The mass spectrum leak detection device 70 is connected with the vacuum cavity 20 conducting, for detecting the institute in the accommodating chamber 23 Search gas content is stated, to judge whether the cabinet 20a to be measured is qualified.Since the mass spectrum leak detection device 70 is existing skill Art is not repeating herein.
When starting to fill the search gas to the cabinet 20a to be measured, the control device 90 controls described first and shows Track gas supply valve 61a is opened, and closes the second search gas supply valve 62a, to be supplied by first search gas Valve 61a fills a small amount of search gas (be no more than 3KPa) into the cabinet 20a to be measured, if the cabinet 20a leakproofness to be measured compared with Difference, then the mass spectrum leak detection device 70 will soon detected.If the cabinet 20a leakage to be measured cannot be detected immediately, Then control device 90 controls the first search gas supply valve 61a and closes, and opens the second search gas supply valve 62a, A large amount of search gas is conveyed to the cabinet 20a to be measured by the second search gas supply valve 62a (to be no more than 10KPa), then the mass spectrum leak detection device 70 detects the air-tightness of the cabinet 20a to be measured again, so that detection not only can be improved Efficiency, and preferably avoid judging by accident.
Figure 11 is please referred to, the gas recovering mechanism 80 includes gas recovery on-off valve 81, recycling surge tank 82, recycles very Sky pump 83, low-pressure tank 84 and air compressor machine 85, the input terminal of the gas recovery on-off valve 81 with the cabinet 20a to be measured for leading Lead to and connect, the output end of the gas recovery on-off valve 81 connects with the recycling surge tank 82 and the conducting of the recovery vacuum pump 83 It connects, connection, the low-pressure tank 84 and the recycling are connected with the input terminal of the recovery vacuum pump 83 for the recycling surge tank 82 The conducting connection of the input terminal of the output end of vacuum pump 83 and the air compressor machine 85, the output end of the air compressor machine 85 and the tracer The conducting connection of gas source 50.
The control device 90 is electrically connected with the gas recovery on-off valve 81, recovery vacuum pump 83 and air compressor machine 85, is used It works in controlling the gas recovery on-off valve 81, recovery vacuum pump 83 and air compressor machine 85.
Preferably, the gas recovering mechanism 80 further includes tonifying Qi on-off valve 86, angled seat on-off valve 86a, low pressure pressure tank Sensor 87, filtering pressure reducing valve 88a, trace gas concentration analytical equipment 88 and gas recovery pressure sensor 89, the tonifying Qi The input terminal of on-off valve 86 is used to be connected with trace gas source 50 and connect, the output end of the tonifying Qi on-off valve 86 and the low pressure The conducting connection of tank 84;One end of the angled seat on-off valve 86a and the recycling surge tank 82 conducting connect, the angled seat on-off valve The other end of 86a and the conducting of the gas recovery on-off valve 81 and the recovery vacuum pump 83 connect, and the low pressure pressure tank passes Sensor 87 is electrically connected with the control device 90, and the low-pressure tank pressure sensor 87 is used to detect the gas of the low-pressure tank 84 Pressure to open tonifying Qi on-off valve 86 when the air pressure of the low-pressure tank 84 is less than preset value, and is working as the low-pressure tank 84 Pressure be higher than preset value when open the air compressor machine 85.
Connection, the filtering decompression are connected with the output end of the air compressor machine 85 for the input terminal of the filtering pressure reducing valve 88a The output end of valve 88a and the trace gas concentration analytical equipment 88 conducting connect.The gas recovery pressure sensor 89 with Connection is connected in the output end of the air compressor machine 85, and the gas recovery pressure sensor 89 is electrically connected with the control device 90. Preferably, the volume of the recycling surge tank 82 is at least 10 times of the cabinet 20a to be measured, so as to make the test tank Interior search gas is easier to flow into the recycling surge tank 82.
When carrying out gas recycling, the control device 90 first opens the recovery vacuum pump 83 and control angled seat on-off valve 86a is opened, and the search gas in the recycling surge tank 82 is evacuated in low-pressure tank 84, then control device 90 controls described Gas recovery on-off valve 81 open, by the search gas in the cabinet 20a to be measured be delivered to the recycling surge tank 82 and In the low-pressure tank 84, when the air pressure in the low-pressure tank 84 reaches preset value, control device 90 controls the air compressor machine 85 Gas in the low-pressure tank 84 is pumped into high pressure search gas tank 51.
Embodiment two
Figure 12 is please referred to, the invention also discloses a kind of mass spectrum leak detection methods, for detecting the airtight of cabinet 20a to be measured Property, include the following steps:
S10, empty van leak detection is carried out to closed vacuum cavity;
The step is mass spectrum leak detection equipment after electrifying startup, is detected first to vacuum cavity, at the first time Detect whether vacuum cavity internal structure or pipeline leak.The specific method of detection can be for by injecting pressure to vacuum cavity Contracting air, then by the variation of air pressure in pressure sensor detection within a preset time vacuum cavity, to know vacuum cavity Whether leakage is had.It is of course also possible to be detected with search gas, it is not specifically limited herein.
S101, the slip obtained after leak detection is corrected;
Search gas in scaling bottle is emitted into the accommodating chamber of the vacuum cavity, and the mass spectrum leak detection device is according to institute It states the search gas that scaling bottle is emitted into the accommodating chamber to be corrected slip, to improve the accuracy rate of detection.
S11, cabinet 20a to be measured is placed in the accommodating chamber 23 of vacuum cavity 20;
Before the cabinet 20a to be measured is placed in the accommodating chamber 23, control device 90 is controlled under the drive of cylinder 36 Lid 22 moves downward, so that lower cover 22, far from upper cover body 21, the lower cover 22 moves downward and makes elevating mechanism 30 Clump weight 35 moves upwards.When the lower cover 22 moves to predeterminated position, cylinder 36 controls the upper cover body 21 and stops at On the predeterminated position, at this point, the accommodating chamber 23 fully opens, then cabinet 20a to be measured is placed in the receiving of vacuum cavity 20 In chamber 23, the lower cover 22 is then controlled by the cylinder 36 again and is moved upwards, by upper cover body 21 and the lower cover 22 are combined, at this point, the accommodating chamber 23 is a closed cavity.Be understood that when, as long as can be by cabinet to be measured 20a is placed in the accommodating chamber 23 of vacuum cavity 20, and implementation is not specifically limited herein.
S12, control fore pump 42 are evacuated the accommodating chamber 23 of vacuum cavity 20;
The vacuum pumping rate of the fore pump 42 is fast, and under normal pressure also can quick start, thus can preferably avoid big Influence of the gas to testing result.The fore pump 42 can be sliding vane rotary pump.
S13, the control fore pump 42 drive chamber vacuum to pump 41 pairs of accommodating chambers 23 and are evacuated simultaneously;
Since 41 pumping speed of the cavity cavity vacuum pump are fast, but ultimate pressure is low, and the pumping speed of the fore pump 42 is fast, but Final vacuum is low, and the final vacuum of chamber vacuum pump 41 is higher, thus through chamber vacuum pump 41 with before 42 cooperation of grade pump, to keep pumping speed of the present invention fast, final vacuum is higher.In addition, driving the chamber by the fore pump 42 Body cavity body vacuum pump 41 works, and can avoid causing service life is short to ask when the cavity cavity vacuum pump 41 is opened under normal pressure Topic.Wherein, in the present embodiment, the chamber vacuum pump 41 is lobe pump, and the fore pump 42 is sliding vane rotary pump, in the blade After pump is opened 3-5 seconds, the lobe pump is just opened, and when vacuum degree reaches 10-20Pa, is just closed cavity and is vacuumized on-off valve 41a stops being evacuated cavity.
S14, control trace gas source 50 fill search gas to the cabinet 20a to be measured, and the detection of mass spectrum leak detection device 70 is held It is pre- to judge whether the cabinet 20a to be measured meets according to the search gas content for the search gas content received in chamber 23 If condition.
The search gas supply valve that connection is connected in trace gas source 50 with the cabinet 20a to be measured is opened, so that described The high pressure search gas tank 51 that search gas is compressed in trace gas source 50 fills search gas to the cabinet 20a to be measured, institute Stating search gas can be argon gas, ammonia, helium or deuterium etc., be not specifically limited herein.
Preferably, further including S102 after the step S101: whether the identification cabinet to be measured is to examination box.Institute Bar code or two dimensional code can be posted by stating on cabinet to be measured, identify whether the cabinet to be measured is case to be checked by identification device Body, to avoid confusion and erroneous detection.
Preferably, further including S111 after the step S11: whether thering is foreign matter to enter default detection by Grating examinations Region.In the present embodiment, it is provided with the grating sensor being electrically connected with control device around the vacuum cavity, passes through light Grid have detected whether that foreign matter enters predetermined detection area, to preferably guarantee the safety of user.
Preferably, further including step S131 after the step S13: opening and the cabinet 20a to be measured and the vacuum The cabinet cavity switching valve 44 of the conducting connection of cavity 20, so that the cabinet 20a to be measured and the vacuum cavity 20 are connected.Due to By the fore pump 42 and the cavity cavity vacuum pump 41 simultaneously to the vacuum cavity 20 and the cabinet 20a to be measured into Therefore row pumping preferably prevents the cabinet 20a deformation to be measured.
Preferably, further including S132 after the step S131: closing the cabinet cavity switching valve 44, then pass through case Body aspirator vacuum pumps 43 couples of cabinet 20a to be measured and is evacuated.In the step, by cabinet aspirator vacuum pump 43 pairs described in Measuring tank body 20a is individually evacuated, thus can better assure that the gas in the cabinet 20a to be measured is evacuated to required state.
Further include step S1311 before the step S132: after the vacuum cavity 20 pumping, will be used to detect First sensing value of the first pressure sensor of the cabinet 20a to be measured generates the first proportionality coefficient, so divided by the first preset value The first pressure sensor is calibrated using first proportionality coefficient afterwards;The of the pressure of the vacuum cavity will be used to detect Second sensing value of two sensors generates the second proportionality coefficient divided by the second preset value, then uses second proportionality coefficient Calibrate the second pressure sensor.The step may be sent out for correcting the first pressure sensor or second pressure sensor The case where raw drift.In the present embodiment, first preset value and second preset value are 14.7, the second pressure Sensor includes the first chamber pressure sensor 45 and the second chamber pressure sensor 46, the first pressure sensor and second Pressure sensor is electrically connected with control device, can be obtained by the first pressure sensor and second pressure sensor described true Air pressure in cavity body 20 and the cabinet to be measured in 20a.
Preferably, further including step S133 after the step S132: the search gas in scaling bottle 48 is emitted into institute It states in accommodating chamber 23, the mass spectrum leak detection device 70 is emitted into the search gas in the accommodating chamber 23 according to the scaling bottle 48 Content is corrected the slip.By the step, thus can avoid after detecting multiple cabinet 20a to be measured, leakage Search gas causes to judge by accident to detection.
In order to improve detection efficiency, in one embodiment, the step S133 is specifically included: if the testing time reaches Search gas in scaling bottle 48 is emitted into the accommodating chamber 23 by preset time, and the mass spectrum leak detection device 70 is according to institute The search gas content that scaling bottle 48 is emitted into the accommodating chamber 23 is stated to be corrected the slip.Wherein, in this reality It applies in example, the preset time is 55 seconds, i.e., in the detection process, carried out once every 55 seconds to the mass spectrum leak detection device 70 Correction.
Preferably, the step S14 is specifically included: trace gas source is filled with search gas to the cabinet to be measured, described Mass spectrum leak detection device 70 detects the search gas content outside the cabinet 20a to be measured, if showing outside the cabinet 20a to be measured Track gas content is greater than preset value, then the index line ascensional range of the mass spectrum leak detection device 70 is greater than predetermined amplitude.By this Step, human eye can directly judge whether the cabinet 20a to be measured is qualified by the observation index line, thus be easy to use.
Embodiment three
Figure 13 is please referred to, the invention also discloses another mass spectrum leak detection method, the side of this method and the embodiment two Method is similar, the difference is that the step S14 of this method is specifically included:
S141, trace gas source 50 convey the first output quantity to the cabinet 20a to be measured by the first inflation branch 61 Search gas;
In the step, a small amount of search gas is conveyed to the cabinet 20a to be measured by the first inflation branch 61, if The cabinet 20a leakproofness to be measured is poor, then the search gas largely leaks in 23 body of accommodating chamber, thus can avoid A large amount of conveyings cause to waste and excessive trace gas leak to the accommodating chamber 23 in, clean it is relatively time-consuming, so as to cause inspection Survey low efficiency.
Preferably, the trace gas source 50 includes high pressure search gas tank 51 and leads with the high pressure search gas tank 51 Lead to the search gas fast charge valve 52 connect, the high pressure search gas tank 51 is for filling the search gas, the search gas Fast charge valve 52 is used to control the opening and closing of the high pressure search gas tank 51;The first inflation branch 61 shows including first Track gas supply valve 61a, the first surge tank 61b and fast charge pressure switch 52a, the first search gas supply valve 61a's is defeated Outlet is for connection, the input terminal and described first of the first search gas supply valve 61a to be connected with the cabinet 20a to be measured Surge tank 61b conducting connection, the first surge tank 61b and the search gas fast charge valve 52 conducting connect, the fast pressurising Company is connected with the output end of the input terminal of the first search gas supply valve 61a and the first surge tank 61b in power switch 52a It connects, the fast charge pressure switch 52a is for detecting the first surge tank 61b air pressure inside, when in the first surge tank 61b Air pressure control the search gas fast charge valve 52 when being less than preset value and open so that the first surge tank 61b air pressure is maintained at pre- If in range.By the cooperation of the surge tank and the first search gas supply valve 61a, so as to make first inflation Branch 61 exports stable a small amount of search gas.
Search gas content outside S142, the detection cabinet 20a to be measured, if showing outside the cabinet 20a to be measured Track gas content is greater than preset value, then exports the underproof prompt information of cabinet 20a to be measured, otherwise enter step S143;
Preferably, the step S142 is specifically included: the mass spectrum leak detection device 70 detects outside the cabinet 20a to be measured Search gas content, if search gas content outside the cabinet 20a to be measured is greater than preset value, the mass spectrum leak detection dress The index line ascensional range for setting 70 is greater than predetermined amplitude.
S143, the trace gas source 50 are defeated to the cabinet 20a conveying second to be measured again by the second inflation branch 62 The search gas of output, wherein first output quantity is less than second output quantity;
In the step, in order to detect the cabinet 20a to be measured that can not be detected in step s 141, thus pass through the second inflation Branch 62 conveys a large amount of search gas to the cabinet 20a to be measured, i.e., described first output quantity is less than second output quantity, To as far as possible detected underproof cabinet 20a to be measured, so that accuracy rate can be improved.
Preferably, the second inflation branch 62 includes the second search gas supply valve 62a, second search gas is supplied The input terminal and the trace gas source 50 conducting for answering valve 62a connect, and the output end of the second search gas supply valve 62a is used In connection is connected with the cabinet 20a to be measured.
Search gas content outside S144, the detection cabinet 20a to be measured, if showing outside the cabinet 20a to be measured Track gas content is greater than preset value, then exports the underproof prompt information of cabinet 20a to be measured.
Preferably, the step S144 is specifically included: the mass spectrum leak detection device 70 detects outside the cabinet 20a to be measured Search gas content, if search gas content outside the cabinet 20a to be measured is greater than preset value, the mass spectrum leak detection dress 70 controls are set for characterizing the underproof red light of cabinet 20a to be measured.It is glowed and is characterized to measuring tank by the red light Body 20a is unqualified thus more user-friendly.
Example IV
Figure 14 is please referred to, the invention also discloses another mass spectrum leak detection method, the method phases of this method and embodiment one Seemingly, the difference is that this method further includes following steps after step s 14:
The search gas recycled in surge tank 82 is evacuated in low-pressure tank 84 by S15, recovery vacuum pump 83;In the step, it is The search gas extraction that will be stored in the recycling surge tank 82, can fill more new search gas, pass through institute It states recycling surge tank 82 and the recovery vacuum pump 83 cooperates, so as to quickly and more thoroughly by the cabinet 20a to be measured Interior search gas is released.
Preferably, the step S15 is specifically included: after first opening 83 preset time of recovery vacuum pump, being then turned on institute Recycling surge tank 82 is stated, so that the search gas recycled in surge tank 82 is evacuated in low-pressure tank 84 by recovery vacuum pump 83.
S16, recovery vacuum pump 83 extract the search gas in the cabinet 20a to be measured out, convey the search gas To the recycling surge tank 82 and the low-pressure tank 84;
Preferably, further including step S161 after the step S16: opening tonifying Qi on-off valve 86, make trace gas source 50 Search gas is conveyed to the low-pressure tank 84.The step can enable the low-pressure tank 84 be stored with enough search gas, with Just it is discharged.
S17, when the air pressure in the low-pressure tank 84 reaches preset value, air compressor machine 85 is by the tracer in the low-pressure tank 84 Gas is evacuated in trace gas source 50.
The search gas in the low-pressure tank 84 is evacuated in trace gas source 50 by the air compressor machine 85, thus it is described Search gas is reusable, thus cost-saved.
Preferably, further including S181 after the step S17: detecting the dense of the search gas that the air compressor machine 85 is discharged Degree will be evacuated in the trace gas source 50 when the concentration of the search gas of the air compressor machine 85 discharge is less than preset value Search gas discharge.The step can avoid user and use undesirable search gas, so that the accuracy of detection can be improved.
Preferably, further including step S182 after the step S17: the air outside the vacuum chamber is filtered and It is compressed to after drying process in gas source tank, then passes through the gas source tank to the vacuum cavity 20 and the cabinet to be measured 20a backfills air.
In the step, to after the vacuum cavity 20 and the cabinet 20a backfill air to be measured, it can be convenient for the vacuum Cavity 20 is opened, and to carry out the detection of next cabinet 20a to be measured, detection efficiency can be improved.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the invention, all to utilize this Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it is relevant to be applied directly or indirectly in other Technical field is included within the scope of the present invention.

Claims (10)

1. a kind of mass spectrum leak detection equipment, for detecting the air-tightness of cabinet to be measured, characterized in that it comprises: support frame, vacuum Cavity, elevating mechanism, safety guard, trace gas source, mass spectrum leak detection device and control device;
The vacuum cavity is placed on support frame as described above, is provided in the vacuum cavity for accommodating the cabinet to be measured Accommodating chamber;
The elevating mechanism be set to support frame as described above on, for drive the combination of the vacuum cavity with separate;The elevator Structure includes belt wheel, clump weight and cylinder, and the belt wheel is movably connected on support frame as described above, one end of the belt wheel and vacuum chamber Body is connected, and the other end of the belt wheel is connected with the clump weight, and one end of the cylinder is fixed on support frame as described above, described The other end of cylinder is connected with the vacuum cavity, for driving the vacuum cavity to move;
The safety guard is arranged on the outside of vacuum cavity, in the combination and separation process of the vacuum cavity into Row safeguard protection;The safety guard includes: to digit buffer and buffer baffle;The buffer baffle is fixed on institute It states on vacuum cavity, for being offseted to digit buffer with described when the vacuum cavity will be moved to predetermined position, with The vacuum cavity is set slowly to reach predetermined position;
The trace gas source is used to provide search gas for the cabinet to be measured;
Connection is connected with the vacuum cavity in the mass spectrum leak detection device, and the search gas for detecting in accommodating chamber contains Amount, to judge whether the cabinet to be measured is qualified;
The control device is for controlling the elevating mechanism, trace gas source and the work of mass spectrum leak detection device.
2. mass spectrum leak detection equipment according to claim 1, which is characterized in that the safety guard further includes that grating passes Sensor, the grating sensor include: transmitter and receiver, and the transmitter and receiver are arranged in support frame as described above position Opposite two sides, so that when grating sensor work, shape light curtain in a row between the transmitter and receiver;It is described Light curtain is on the outside of the vacuum cavity.
3. mass spectrum leak detection equipment according to claim 2, which is characterized in that the vacuum cavity includes upper cover body and lower cover Body, the upper cover body lid are located on the lower cover, are formed with accommodating chamber between the upper cover body and the lower cover;
The lower cover includes support base, elastic supporting member for supporting optical member and support plate component, and the support base corresponds to the upper cover body setting, For carrying the support plate component, described elastic supporting member for supporting optical member one end is fixed on the support base, and the elastic supporting member for supporting optical member is another One end is flexibly supported with the support plate component, so that the support plate component and the support base elastic connection, the support Board group part is for carrying the cabinet to be measured.
4. mass spectrum leak detection equipment according to claim 3, which is characterized in that the support base includes support beam, support Vertical plate and support hanging plate, the support hanging plate side are hung on support frame as described above, and the supporting vertical plate is fixed on the support The hanging plate other side is used to support the support beam, and the support beam is set up in the supporting vertical plate, described for carrying Support plate component.
5. mass spectrum leak detection equipment according to claim 2, which is characterized in that support frame as described above include the first support component, Second support component and third support component;First support component is for carrying classification pulling mechanism, being classified and fill mechanism, gas Recovering mechanism and the trace gas source;Second support component is for carrying the elevating mechanism and mass spectrum leak detection dress It sets;The third support component is for carrying the vacuum cavity.
6. mass spectrum leak detection equipment according to claim 5, which is characterized in that the third support component is formed with for putting The accommodation space of the vacuum cavity is set, the third support component is being formed with placement on the outside of the accommodation space Mouthful, the placement mouth is for accommodating the grating sensor.
7. mass spectrum leak detection equipment according to claim 2, which is characterized in that support frame as described above top and bottom are respectively set Have a pair of to digit buffer.
8. mass spectrum leak detection equipment according to claim 7, which is characterized in that the buffer baffle is fixed on the vacuum On cavity, the buffer baffle include floor and it is described hit plate, it is described hit plate be fixed on two pieces of positions be oppositely arranged it is described Between floor, the plate that hits with described when the vacuum cavity will be moved to predetermined position to digit buffer for offseting It holds, the floor includes floor top, floor middle part and floor lower part, is used to hit plate described in fixation in the middle part of the floor, described Plate is hit described in being used to support in floor top and floor lower part, and floor top and floor lower part are symmetrical arranged, so as to work as the vacuum When the combination or separation of cavity, the plate that hits is able to maintain structural strength.
9. mass spectrum leak detection equipment according to claim 2, which is characterized in that the safety guard further include with it is described The buffer stopper of elevating mechanism cooperation, the buffer stopper are set on support frame corresponding with the clump weight position, for working as institute When stating configuration block and moving downward, impact of the clump weight to support frame as described above is buffered.
10. mass spectrum leak detection equipment according to claim 2, which is characterized in that the safety guard further includes heating Device, the mass spectrum leak detection equipment include low-pressure tank and air compressor machine, and the heater is set to and the low-pressure tank and institute's air compressor machine On the pipeline that connection is connected, for preventing the pipeline from freezing to block.
CN201710640780.XA 2017-07-31 2017-07-31 Mass spectrum leak detection equipment Pending CN109323816A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710640780.XA CN109323816A (en) 2017-07-31 2017-07-31 Mass spectrum leak detection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710640780.XA CN109323816A (en) 2017-07-31 2017-07-31 Mass spectrum leak detection equipment

Publications (1)

Publication Number Publication Date
CN109323816A true CN109323816A (en) 2019-02-12

Family

ID=65244876

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710640780.XA Pending CN109323816A (en) 2017-07-31 2017-07-31 Mass spectrum leak detection equipment

Country Status (1)

Country Link
CN (1) CN109323816A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101979293A (en) * 2010-11-02 2011-02-23 无锡力马化工机械有限公司 Stack shaping machine
CN103671511A (en) * 2013-12-26 2014-03-26 苏州市启扬商贸有限公司 High-speed linear guide rail with following protection function
CN205309167U (en) * 2016-01-26 2016-06-15 莆田德信电子有限公司 Punch press safety device
CN105890849A (en) * 2016-06-28 2016-08-24 襄阳富临精工机械有限责任公司 Cavity product airtightness detection table and detection method
CN106679895A (en) * 2015-11-06 2017-05-17 北京卫星环境工程研究所 Automatic leakage rate testing system applied to large space environment simulator
CN206208469U (en) * 2016-11-16 2017-05-31 宝钛集团有限公司 Metal composite blank vacuum leak detecting system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101979293A (en) * 2010-11-02 2011-02-23 无锡力马化工机械有限公司 Stack shaping machine
CN103671511A (en) * 2013-12-26 2014-03-26 苏州市启扬商贸有限公司 High-speed linear guide rail with following protection function
CN106679895A (en) * 2015-11-06 2017-05-17 北京卫星环境工程研究所 Automatic leakage rate testing system applied to large space environment simulator
CN205309167U (en) * 2016-01-26 2016-06-15 莆田德信电子有限公司 Punch press safety device
CN105890849A (en) * 2016-06-28 2016-08-24 襄阳富临精工机械有限责任公司 Cavity product airtightness detection table and detection method
CN206208469U (en) * 2016-11-16 2017-05-31 宝钛集团有限公司 Metal composite blank vacuum leak detecting system

Similar Documents

Publication Publication Date Title
CN105890849B (en) A kind of cavity class product hermeticity monitor station and detection method
CN102269641A (en) Detection device and method of tightness of flexible package products
CN107024324A (en) The diaphragm gas meter dry check system of complete machine sealing helium and method
CN105136407A (en) Worm gear box tightness test device
CN107167407A (en) A kind of rock porosity determines device
CN103776599A (en) Device and method for detecting holes of disposable gloves
CN207066700U (en) Mass spectrum leak detection equipment with connector
CN104061955A (en) Verification platform for sulfur hexafluoride gas humidity sensor under pressure
CN105467284A (en) A switchgear air discharge analogue device and an experiment method
CN109323816A (en) Mass spectrum leak detection equipment
CN109556809B (en) Nondestructive leak detection method and device based on differential pressure principle
CN109323812A (en) Mass spectrum leak detection equipment and mass spectrum leak detection method with classification extraction sector
CN207318018U (en) Mass spectrum leak detection equipment
KR101613540B1 (en) Leak tester for high pressure component
CN109323819A (en) Mass spectrum leak detection method
CN207763912U (en) A kind of tightness tester
CN103257022A (en) Seal testing instrument and seal testing methods
CN109323815A (en) Mass spectrum leak detection equipment and mass spectrum leak detection method with gas recovering mechanism
CN207180961U (en) Mass spectrum leak detection equipment with vacuum cavity
CN109323811A (en) Mass spectrum leak detection equipment with vacuum cavity
CN109323810A (en) Mass spectrum leak detection equipment with connector
CN109323814A (en) Mass spectrum leak detection equipment and mass spectrum leak detection method with classification inflation mechanism
CN107490459B (en) A kind of ventilating control method of air-leakage detector detection seal products
CN104764862B (en) A kind of gas concentration on-the-spot test method
CN207066690U (en) Mass spectrum leak detection equipment with classification inflation mechanism

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination