CN109290931A - Tantalum ring knurled surface roughness control method - Google Patents

Tantalum ring knurled surface roughness control method Download PDF

Info

Publication number
CN109290931A
CN109290931A CN201811226171.0A CN201811226171A CN109290931A CN 109290931 A CN109290931 A CN 109290931A CN 201811226171 A CN201811226171 A CN 201811226171A CN 109290931 A CN109290931 A CN 109290931A
Authority
CN
China
Prior art keywords
polishing
workpiece
roughness
knife handle
tantalum ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811226171.0A
Other languages
Chinese (zh)
Inventor
姚力军
潘杰
王学泽
毛杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Jiangfeng Electronic Material Co Ltd
Original Assignee
Ningbo Jiangfeng Electronic Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Jiangfeng Electronic Material Co Ltd filed Critical Ningbo Jiangfeng Electronic Material Co Ltd
Priority to CN201811226171.0A priority Critical patent/CN109290931A/en
Publication of CN109290931A publication Critical patent/CN109290931A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B24B29/04Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces for rotationally symmetrical workpieces, e.g. ball-, cylinder- or cone-shaped workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation

Abstract

The present invention provides a kind of tantalum ring knurled surface roughness control methods, are related to the technical field of semiconductor, are polished including the workpiece surface after annular knurl;Check whether the decorative pattern plane on workpiece is consistent after polishing;After the completion of confirmation polishing, roughness measurement is carried out to workpiece surface, confirms the consistency of workpiece surface roughness.The purpose of the present invention is to provide a kind of tantalum ring knurled surface roughness control methods, are processed by shot blasting to ring surface detail, keep ring surface detail roughness consistent, and decorative pattern height is smooth, to improve product in the service performance of client.

Description

Tantalum ring knurled surface roughness control method
Technical field
The present invention relates to technical field of semiconductors, more particularly, to a kind of tantalum ring knurled surface roughness control method.
Background technique
Ring is the material for participating in semiconductor sputtering, and in PVD coating process and target participates in sputtering together, is being sputtered Decorative pattern in journey in ring plays the role of atomic adsorption.
Disadvantage:
Decorative pattern roughness is uneven after ring surface knurling, that is, decorative pattern is uneven, product surface decorative pattern Higher protrusion will cause " point discharge ", relatively low to will cause excoriation, and client service performance is unstable.
Therefore, it is necessary to handle ring surface detail, keep ring surface detail roughness consistent, decorative pattern height is smooth It is those skilled in the art's urgent problem to be solved.
The information disclosed in the background technology section is intended only to deepen understanding of the general background technology to the present invention, and It is not construed as recognizing or implying in any form that the information constitutes the prior art known to those skilled in the art.
Summary of the invention
The purpose of the present invention is to provide a kind of tantalum ring knurled surface roughness control methods, carry out to ring surface detail Polishing treatment keeps ring surface detail roughness consistent, and decorative pattern height is smooth, to improve product in the usability of client Energy.
To achieve the above object, the present invention the following technical schemes are provided:
The present invention provides a kind of tantalum ring knurled surface roughness control method, comprising:
Workpiece surface after annular knurl is polished;
Check whether the decorative pattern plane on workpiece is consistent after polishing;
After the completion of confirmation polishing, roughness measurement is carried out to workpiece surface, confirms the consistency of workpiece surface roughness.
Further, the workpiece surface after annular knurl, which polish, includes:
Polishing tool is controlled with the Y direction of lathe to the polishing dynamics of workpiece surface.
Further, after the polishing check workpiece on decorative pattern plane whether unanimously include:
Check whether the decorative pattern plane on workpiece is consistent with moving magnifier.
Further, the tantalum ring knurled surface roughness control method further include:
Decorative pattern plane on workpiece is inconsistent, is polished again.
Further, described to include: to workpiece surface progress roughness measurement
Roughness measurement is carried out to workpiece surface with roughness instrument.
Further, the workpiece surface after annular knurl, which polish, includes:
Sand paper is sticked on the polishing tool.
Further, the polishing tool includes knife handle, adjusts component, polishing blade main body and metering device;
The polishing blade main body is installed on the knife handle by adjusting component;
The metering device is installed in the polishing blade main body for measuring the polishing blade main body to workpiece surface Polishing dynamics.
Further, the adjusting component includes elastic element and guide part;
The elastic element is arranged between the knife handle and the polishing blade ontology, for adjusting the polishing blade ontology With the active force between the knife handle, to adjust the polishing blade main body to the polishing dynamics of workpiece surface;
The guide part is arranged inside the elastic element or is set in outside the elastic element.
Further, the guide part is slidably connected with the knife handle, and the guide part and the knife handle pass through limit Part limit.
Further, the metering device includes graduated scale, and the graduated scale is slidably connected with the knife handle, the knife handle It is equipped with the graduation mark with the graduated scale high scale lines matching.
Tantalum ring knurled surface roughness control method provided by the invention has the advantages that
The present invention provides a kind of tantalum ring knurled surface roughness control method, comprising: the workpiece surface after annular knurl carries out Polishing;Check whether the decorative pattern plane on workpiece is consistent after polishing;After the completion of confirmation polishing, roughness inspection is carried out to workpiece surface It surveys, confirms the consistency of workpiece surface roughness.
Decorative pattern roughness is uneven after prior art ring surface knurling, that is, decorative pattern is uneven, product surface The higher protrusion of decorative pattern will cause " point discharge ", and relatively low to will cause excoriation, client service performance is unstable, using this The tantalum ring knurled surface roughness control method that invention provides can avoid this defect.Product surface decorative pattern is carried out using this method Make product surface smooth consistent after polishing treatment, roughness is unanimously uniform.
The present invention provides a kind of tantalum ring knurled surface roughness control method, is processed by shot blasting to ring surface detail, Keep ring surface detail roughness consistent, decorative pattern height is smooth, to improve product in the service performance of client.
Other features and advantages of the present invention will illustrate in the following description, also, partly become from specification It obtains it is clear that understand through the implementation of the invention.The objectives and other advantages of the invention are in specification, claims And specifically noted structure is achieved and obtained in attached drawing.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the block diagram of tantalum ring knurled surface roughness control method provided in an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of polishing tool provided in an embodiment of the present invention.
Icon: 1- knife handle;2- polishing blade main body;3- adjusts component;4- metering device;31- elastic element;32- guide part; 41- graduated scale.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical", The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation, It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ", " third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediary Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition Concrete meaning in invention.
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
Fig. 1 is the block diagram of tantalum ring knurled surface roughness control method provided in an embodiment of the present invention;Fig. 2 is that the present invention is real The structural schematic diagram of the polishing tool of example offer is provided.
Referring to Fig.1 and 2, below in conjunction with attached drawing to tantalum ring knurled surface roughness control provided in an embodiment of the present invention Method processed elaborates.
The embodiment provides a kind of tantalum ring knurled surface roughness control methods, comprising:
Workpiece surface after annular knurl is polished;
Check whether the decorative pattern plane on workpiece is consistent after polishing;
After the completion of confirmation polishing, roughness measurement is carried out to workpiece surface, confirms the consistency of workpiece surface roughness.
Decorative pattern roughness is uneven after prior art ring surface knurling, that is, decorative pattern is uneven, product surface The higher protrusion of decorative pattern will cause " point discharge ", and relatively low to will cause excoriation, client service performance is unstable, using this The tantalum ring knurled surface roughness control method that the embodiment of invention provides can avoid this defect.Using this method to product surface Decorative pattern makes product surface smooth consistent after being processed by shot blasting, roughness is unanimously uniform.
The embodiment of the present invention provides a kind of tantalum ring knurled surface roughness control method, throws to ring surface detail Light processing keeps ring surface detail roughness consistent, and decorative pattern height is smooth, to improve product in the service performance of client.
In the optional scheme of the present embodiment, further, the workpiece surface after annular knurl carries out polishing and includes:
Polishing tool is controlled with the Y direction of lathe to the polishing dynamics of workpiece surface.
In the optional scheme of the present embodiment, further, after polishing check whether the decorative pattern plane on workpiece unanimously wraps It includes:
Check whether the decorative pattern plane on workpiece is consistent with moving magnifier.
In at least one embodiment, with moving magnifier check workpiece on the whether consistent standard of decorative pattern plane according to SOP is polished to execute.
Wherein: SOP (capitalization of initial in tri- words of Standard Operating Procedure) i.e. standard is made Industry program exactly by the standard operating procedure of polishing and requires to be depicted to come in a unified format, for instructing and specification is daily Work.
In the optional scheme of the present embodiment, further, tantalum ring knurled surface roughness control method further include:
Decorative pattern plane on workpiece is inconsistent, is polished again.
In at least one embodiment, with moving magnifier check workpiece on the whether consistent standard of decorative pattern plane according to It polishes SOP to execute, the decorative pattern plane on workpiece is inconsistent, is polished again, until it is consistent to be polished to decorative pattern plane sizes.
In the optional scheme of the present embodiment, further, carrying out roughness measurement to workpiece surface includes:
Roughness measurement is carried out to workpiece surface with roughness instrument.
In the optional scheme of the present embodiment, further, the workpiece surface after annular knurl carries out polishing and includes:
Sand paper is sticked on polishing tool.
In at least one embodiment, sand paper is cut into velcro size, be pasted on polishing tool.
In the optional scheme of the present embodiment, further, polishing tool includes knife handle 1, adjusts component 3, polishing blade master Body 2 and metering device 4;
Polishing blade main body 2 is installed on knife handle 1 by adjusting component 3;
Metering device 4 is installed on the polishing dynamics in polishing blade main body 2 for measuring polishing blade main body 2 to workpiece surface.
In at least one embodiment, polishing using surface with need polished surface contact after, by polish main body direction knife The direction of handle 1 is pressed into, and is adjusted by metering device 4 and is adjusted component 3, is polished with adjusting polishing dynamics.
In the optional scheme of the present embodiment, further, adjusting component 3 includes elastic element 31 and guide part 32;
Elastic element 31 is arranged between knife handle 1 and polishing blade ontology, for adjusting between polishing blade ontology and knife handle 1 Active force, to adjust polishing blade main body 2 to the polishing dynamics of workpiece surface;
The setting of guide part 32 is in 31 inside of elastic element or is set in outside elastic element 31.
In at least one embodiment, guide part 32 is guide pin, which is arranged inside elastic element 31, leads It is connect to 32 one end of part with polishing blade main body 2, the other end passes through knife handle 1.Elastic element 31 can with but be not limited only to as spring.
In the optional scheme of the present embodiment, further, guide part 32 is slidably connected with knife handle 1, and guide part 32 with Knife handle 1 is limited by locating part.
In at least one embodiment, guide part 32 is equipped with limit hole, and the guide part 32 far from 2 one end of polishing blade main body Knife handle 1 is passed through on knife handle 1 and stretched out far from 2 one end of polishing blade main body, is passed through on guide part 32 by locating parts such as spacer pins Limit hole realizes limit function.Limit of the guide part 32 close to 2 one end of polishing blade main body, which passes through, to be arranged in knife handle 1 and polishing blade sheet Elastic element 31 between body is realized.
In the optional scheme of the present embodiment, further, metering device 4 includes graduated scale 41, graduated scale 41 and knife handle 1 It is slidably connected, knife handle 1 is equipped with the graduation mark with 41 high scale lines matching of graduated scale.
In at least one embodiment, graduated scale 41 is equipped with a plurality of graduation mark, and graduated scale 41 is located at 1 outside of knife handle, When polishing main body towards when the movement of knife handle 1, graduated scale 41 is moved up with polishing main body direction A along figure;Close to quarter on knife handle 1 It spends 41 side of ruler and is equipped with a graduation mark, for judging polishing dynamics with the graduation mark comparison on graduated scale 41.
The embodiment of the present invention provides a kind of method that tantalum ring knurled surface controls roughness by polishing, and step is such as Under:
S1: sand paper is sticked on polishing tool.
S2: it is polished in the product surface for rolling colored, controls polishing blade to product surface with the Y direction of lathe Polishing dynamics (scale to check) on polishing blade.
S3: check whether decorative pattern plane is consistent with moving magnifier after polishing.(being executed according to polishing SOP)
It is such as inconsistent, it is polished again, until it is consistent to be polished to decorative pattern plane sizes.(being executed according to polishing SOP)
S4: after the completion of confirmation polishing, roughness measurement is carried out to product surface with roughness instrument, confirms product surface Roughness consistency.
The embodiment of the present invention provides a kind of tantalum ring knurled surface roughness control method, with mechanical and physical method into Row polishing operation, thus will not make product surface polish after it is uneven;
Using making product surface smooth consistent after being processed by shot blasting to product surface decorative pattern, roughness is unanimously uniform;
Decorative pattern roughness is uneven after prior art ring surface knurling, that is, decorative pattern is uneven, product surface The higher protrusion of decorative pattern will cause " point discharge ", and relatively low to will cause excoriation, client service performance is unstable, use this Method can avoid this defect.
Tantalum ring knurled surface roughness control method of the invention is illustrated above, still, the present invention does not limit Various deformations or change can be carried out without departing from the scope of the claims in above-mentioned specific embodiment.This Invent the various modifications and change being included within the scope of the claims.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations;To the greatest extent Pipe is described in detail invention referring to foregoing embodiments, those skilled in the art should understand that: it is still It is possible to modify the technical solutions described in the foregoing embodiments, or some or all of the technical features is carried out Equivalent replacement;And these are modified or replaceed, it does not separate the essence of the corresponding technical solution various embodiments of the present invention technical side The range of case.

Claims (10)

1. a kind of tantalum ring knurled surface roughness control method characterized by comprising
Workpiece surface after annular knurl is polished;
Check whether the decorative pattern plane on workpiece is consistent after polishing;
After the completion of confirmation polishing, roughness measurement is carried out to workpiece surface, confirms the consistency of workpiece surface roughness.
2. tantalum ring knurled surface roughness control method according to claim 1, which is characterized in that described after annular knurl Workpiece surface carries out polishing
Polishing tool is controlled with the Y direction of lathe to the polishing dynamics of workpiece surface.
3. tantalum ring knurled surface roughness control method according to claim 1, which is characterized in that checked after the polishing Decorative pattern plane on workpiece whether unanimously include:
Check whether the decorative pattern plane on workpiece is consistent with moving magnifier.
4. tantalum ring knurled surface roughness control method according to claim 1, which is characterized in that the tantalum ring annular knurl table Surface roughness control method further include:
Decorative pattern plane on workpiece is inconsistent, is polished again.
5. tantalum ring knurled surface roughness control method according to claim 1, which is characterized in that described to workpiece surface Carrying out roughness measurement includes:
Roughness measurement is carried out to workpiece surface with roughness instrument.
6. tantalum ring knurled surface roughness control method according to claim 2, which is characterized in that described after annular knurl Workpiece surface carries out polishing
Sand paper is sticked on the polishing tool.
7. tantalum ring knurled surface roughness control method according to claim 2, which is characterized in that the polishing tool packet It includes knife handle, adjust component, polishing blade main body and metering device;
The polishing blade main body is installed on the knife handle by adjusting component;
The metering device is installed in the polishing blade main body for measuring polishing of the polishing blade main body to workpiece surface Dynamics.
8. tantalum ring knurled surface roughness control method according to claim 7, which is characterized in that the adjusting component packet Include elastic element and guide part;
The elastic element is arranged between the knife handle and the polishing blade ontology, for adjusting the polishing blade ontology and institute The active force between knife handle is stated, to adjust the polishing blade main body to the polishing dynamics of workpiece surface;
The guide part is arranged inside the elastic element or is set in outside the elastic element.
9. tantalum ring knurled surface roughness control method according to claim 8, which is characterized in that the guide part and institute It states knife handle to be slidably connected, and the guide part and the knife handle are limited by locating part.
10. tantalum ring knurled surface roughness control method according to claim 7, which is characterized in that the metering device Including graduated scale, the graduated scale is slidably connected with the knife handle, and the knife handle is equipped with and the graduated scale high scale line The graduation mark matched.
CN201811226171.0A 2018-10-19 2018-10-19 Tantalum ring knurled surface roughness control method Pending CN109290931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811226171.0A CN109290931A (en) 2018-10-19 2018-10-19 Tantalum ring knurled surface roughness control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811226171.0A CN109290931A (en) 2018-10-19 2018-10-19 Tantalum ring knurled surface roughness control method

Publications (1)

Publication Number Publication Date
CN109290931A true CN109290931A (en) 2019-02-01

Family

ID=65158295

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811226171.0A Pending CN109290931A (en) 2018-10-19 2018-10-19 Tantalum ring knurled surface roughness control method

Country Status (1)

Country Link
CN (1) CN109290931A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013031903A (en) * 2011-08-02 2013-02-14 Nissan Motor Co Ltd Knurling surface reprocessing method of ultrasonic welding tool
CN104746021A (en) * 2013-12-31 2015-07-01 宁波江丰电子材料股份有限公司 Ring piece structure and manufacturing method thereof
CN205438077U (en) * 2016-03-28 2016-08-10 中原内配集团股份有限公司 Burring device behind cylinder liner annular knurl
CN106346380A (en) * 2015-07-17 2017-01-25 宁波江丰电子材料股份有限公司 Polishing cutter and polishing system
CN107415060A (en) * 2017-09-26 2017-12-01 长沙理工大学 A kind of small-bore axisymmetry optical surface element precision machining method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013031903A (en) * 2011-08-02 2013-02-14 Nissan Motor Co Ltd Knurling surface reprocessing method of ultrasonic welding tool
CN104746021A (en) * 2013-12-31 2015-07-01 宁波江丰电子材料股份有限公司 Ring piece structure and manufacturing method thereof
CN106346380A (en) * 2015-07-17 2017-01-25 宁波江丰电子材料股份有限公司 Polishing cutter and polishing system
CN205438077U (en) * 2016-03-28 2016-08-10 中原内配集团股份有限公司 Burring device behind cylinder liner annular knurl
CN107415060A (en) * 2017-09-26 2017-12-01 长沙理工大学 A kind of small-bore axisymmetry optical surface element precision machining method

Similar Documents

Publication Publication Date Title
US7685733B2 (en) Micro force measurement device, micro force measurement method, and micro surface shape measurement probe
US3079732A (en) Generation of aspheric surfaces
CA2691136C (en) Method of processing synthetic quartz glass substrate for semiconductor
TW424030B (en) Dual purpose tool for cutting and grinding
EP2047343B1 (en) Control of a machining operation
CN102645758B (en) Eyeglass machining shape adquisitiones
KR20120005947A (en) Method for manufacturing electronic grade synthetic quartz glass substrate
EP1657026B1 (en) Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces
US4884569A (en) Device for ophthalmologic operations
JP2007326212A (en) Device and method for repairing substrate
CN106853610B (en) Polishing pad and its monitoring method and monitoring system
JP2006513050A (en) High precision processing of object surface, especially polishing and lapping method and apparatus for semiconductor substrate
Schinhaerl et al. Mathematical modelling of influence functions in computer-controlled polishing: Part I
TW201029797A (en) Lens processing method and grinding device
CN107984303B (en) The processing method of uniform thickness off-axis aspheric surface reflecting mirror
CN101660905B (en) Device for detecting roundness of arc of tool tip of diamond tool with arc edge
JPH11165256A (en) Chemical mechanical polishing method and its device
KR100393740B1 (en) Shape control method and NC processing equipment by this method
CN105773309B (en) A kind of ultraphotic cutter online test method
TW559932B (en) Method for evaluating shape of wafer, wafer and method for selecting wafer
CN104290002A (en) Method for machining cylindrical mirror
CA2737514C (en) Component repair using reverse engineering
JP2014161938A (en) Method for acquiring slide distance distribution on dresser polishing member, method for acquiring slide vector distribution on dresser polishing member, and polishing device
JP2002032737A (en) Method and device for navigation for pattern observation of semiconductor device
TW480208B (en) Process for polishing semiconductor wafers using a wafer polishing machine

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination