CN109270805A - A kind of no cable type bilateral scanning device - Google Patents

A kind of no cable type bilateral scanning device Download PDF

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Publication number
CN109270805A
CN109270805A CN201811358472.9A CN201811358472A CN109270805A CN 109270805 A CN109270805 A CN 109270805A CN 201811358472 A CN201811358472 A CN 201811358472A CN 109270805 A CN109270805 A CN 109270805A
Authority
CN
China
Prior art keywords
scanning
air
magnet steel
motion component
scanning motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811358472.9A
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Chinese (zh)
Inventor
吴剑威
温众普
崔继文
谭久彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
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Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201811358472.9A priority Critical patent/CN109270805A/en
Publication of CN109270805A publication Critical patent/CN109270805A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70216Systems for imaging mask onto workpiece
    • G03F7/70358Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70691Handling of masks or wafers
    • G03F7/70716Stages
    • G03F7/70725Stages control

Abstract

The present invention discloses a kind of no cable type bilateral scanning device;Linear reciprocating motion is carried out by serial coil drive array magnet steel module, eliminate influence of the cable power to movement and positioning accuracy in the prior art, linear motion is supported and is oriented to by the way that corresponding air floating structure is arranged simultaneously, and eventually by feedback control is combined, achieve the purpose that bilateral scanning.The present invention can establish a kind of high speed, high frequency, high-precision bilateral scanning device.

Description

A kind of no cable type bilateral scanning device
Technical field
The invention belongs to Precision Instrument and Machinery technical field, in particular to a kind of no cable type bilateral scanning device.
Background technique
In recent years, as advanced manufacture of microchips is increasingly towards, function is integrated and volume microminiaturization develops, gas-static The benchmark that moves along a straight line becomes one of the critical component in the litho machine of tip with the remarkable advantages such as its high speed and high-precision;Photoetching The high speed of diaphragm piece, high acceleration and high kinematic accuracy demand in machine exposure system, in gas-static linear motion benchmark Pneumato-static slideway proposes the requirement of high bearing capacity, high rotational stiffness;To avoid straight-line motion mechanism from blocking optical path or touching Optical device is touched, diaphragm piece is mounted on the cantilever end of linear motion benchmark, it is therefore desirable to which the rotation for improving pneumato-static slideway is rigid Degree, to resist the rotating torque generated when diaphragm piece high acceleration moving;And exposure system of photo-etching machine is complicated and accurate, gas is quiet Straightening line movement mechanism needs to minimize, therefore improves the rotational stiffness on unit area, becomes restriction pneumato-static slideway and exists The main difficult technical applied in exposure system of photo-etching machine.
2008,38nm chip may be implemented in the Twinscan XT 1950i type litho machine that Dutch ASML company is researched and developed Laser ablation.Linear motion benchmark in its exposure system uses mechanical guide structure, and has reached 40m/s2Acceleration fortune Dynamic (Y.B.Patrick Kwan, Erik L.Loopstra.Nullifying Acceleration Forces in Nano- Positioning Stages for Sub-0.1mm Lithography Tool for 300mm Wafers[J] .proceeding of SPIC:Optical Microlithography, 2010,4346:544-557);But with chip system The development of industry is made, traditional slides/rolls guide rail is difficult to meet the requirement of High acceleration motion and service temperature stability.
Patent CN201310436356 " experimental provision is unfolded in air bearing suspension type three-dimensional " proposes a kind of positioning accuracy height response Fireballing three-dimensional motion device mainly includes the spatially corresponding distribution of more than ten of air bearing movement mechanism, and by pulley, hang The mechanisms such as rope, counterweight are mounted on inside scaffold;But although the device can satisfy certain kinematic accuracy, but due to It is more to move link, under high frequency motion state, can not ensure quick and accurate dynamic respond in output end, and structure is not It is enough compact.
Patent CN201410839808 " a kind of double air-float guide rail formula grating ruling knife rest driving devices " proposes a kind of small-sized Motion in one dimension device, main include the two groups of air-float guide rails installed in parallel, and is improved by way of being connected air bearing sliding sleeve Delineate the kinetic stability of knife rest;High speed, high frequency motion may be implemented in the device, but exports compared to the displacement with the device End, such as knife rest pinboard and portrays knife rest, and air-float guide rail is excessively huge, therefore the rotational stiffness on unit area is poor, and Knife rest clump weight is needed to keep balancing.
A series of patent CN201610023016, CN201610023017, CN201610023018, CN201610023019 " gas magnetic knot closes air bearing double-workpiece-table vector circular arc channel switching method and device " proposed with CN201610023020, solves existing The problems such as zapping scheme beat is more, track is long, start-stop link is more, the stable time is long, reduce zapping link, when shortening zapping Between, improve the yield of litho machine.But since stage body is excessively heavy, it is not used to underslung movement occasion, and for light For quarter machine exposure system, volume is excessively huge.
Being common that for foregoing invention cannot apply small-sized air-float guide rail in high speed, high acceleration, high frequency motion Situation, because influence of the cable power to the kinematic accuracy movement of diaphragm piece is not allowed in the confined space of exposure system of photo-etching machine Ignore, seriously limits the speed of service and precision of exposure system of photo-etching machine;Therefore, it is designed by the structure of serial coil, it is excellent The performance for having changed driving motor eliminates influence of the cable power to movement and positioning accuracy in the prior art, and then improves exposure The speed of service and precision of system.
Summary of the invention
The purpose of the present invention is to above-mentioned prior art there are the problem of, propose a kind of no cable type bilateral scanning dress Set, by serial coil drive array magnet steel module carry out linear reciprocating motion, eliminate in the prior art cable power to movement And the influence of positioning accuracy, while linear motion is supported and is oriented to by the way that corresponding air floating structure is arranged, and eventually by In conjunction with feedback control, achieve the purpose that bilateral scanning.
Above-mentioned purpose is realized by the following technical solution:
A kind of no cable type bilateral scanning device, including pedestal, scanning motion component and upper cover, the pedestal include outer Shell, serial coil gentle floating workbench are machined with card slot on shell, and serial coil is mounted on the two sides of card slot, air-flotation workbench It installs on shell, several pieces of hole shape flow controllers is installed on air-flotation workbench, are machined with miniature straight trough between each hole shape flow controller; The scanning motion component includes scanning board, L-type gantry and array magnet steel module, and scanning board and array magnet steel module are connected in On L-type gantry, array magnet steel module is equipped with grating scale and damper, and air bearing slide plate is equipped on L-type gantry;On the upper lid Reading head is installed, the installation site of reading head is corresponding with grating scale;
The scanning motion component movably assembles on the base, wherein array magnet steel module be assemblied in serial coil and Between air-flotation workbench, L-type gantry is assemblied in above air-flotation workbench;
The serial fitting coils array magnet steel module drive scanning motion component carries out linear reciprocating motion, air bearing work Platform cooperates air bearing slide plate to carry out bearing guiding to scanning motion component, and reading head cooperates grating scale to carry out position to scanning motion component Set measurement.
Array magnet steel module is installed on the scanning motion component and forms electromagnetic drive, is equipped on scanning motion component Air bearing slide plate forms gas suspension guiding, is not connected to any cable structure.
2 sets of scanning motion components are installed on pedestal, and are respectively driven by serial coil, bilateral scanning can be carried out.
The invention has the characteristics that and the utility model has the advantages that
1, apparatus of the present invention include 2 sets of scanning motion components, and respectively by serial coil drive array magnet steel module into Row linear reciprocating motion eliminates influence of the cable power to movement and positioning accuracy in the prior art, it is straight to greatly improve electromagnetism The performance of line motor has expanded the application range of electromagnetic linear motor.
2, apparatus of the present invention combine serial dynamic magnetic steel structure with gas suspension supporting structure, carry out to rectilinear scanning motion Bearing and guiding, and binding site feedback control function are finally reached the purpose that high speed, high frequency, high-precision scan.
Apparatus of the present invention are widely used, be particularly suitable for the middle-size and small-size straight-line motion mechanism of exposure system of photo-etching machine high speed, High frequency, high-precision scanning motion occasion.
Detailed description of the invention
Fig. 1 is a kind of no cable type bilateral scanning schematic device.
Fig. 2 is pedestal schematic diagram.
Fig. 3 is scanning motion block diagram.
In figure: 1, pedestal;2, scanning motion component;3, upper cover;4, reading head;5, shell;6, serial coil;7, air bearing work Make platform;8, hole shape flow controller;9, card slot;10, miniature straight trough;11, scanning board;12, L-type gantry;13, array magnet steel module;14, Grating scale;15, damper;16, air bearing slide plate.
Specific embodiment
It elaborates with reference to the accompanying drawing to the embodiment of the present invention.
With reference to Fig. 1, a kind of no cable type bilateral scanning device, including pedestal 1, scanning motion component 2 and upper cover 3, it is described Reading head 4 is installed, the installation site of reading head 4 is corresponding with grating scale 14 in upper cover 3.
With reference to Fig. 2, the pedestal 1 includes shell 5, serial coil 6 and air-flotation workbench 7, is machined with card slot 9 on shell 5, Serial coil 6 is mounted on the two sides of card slot 9, and air-flotation workbench 7 is installed on shell 5, and several pieces are equipped on air-flotation workbench 7 Hole shape flow controller 8 is machined with miniature straight trough 10 between each hole shape flow controller 8.
With reference to Fig. 3, the scanning motion component 2 includes scanning board 11, L-type gantry 12 and array magnet steel module 13, scanning Plate 11 and array magnet steel module 13 are connected on L-type gantry 12, and array magnet steel module 13 is equipped with grating scale 14 and damper 15, air bearing slide plate 16 is installed on L-type gantry 12.
With reference to Fig. 1-3, the scanning motion component 2 is movably assemblied on pedestal 1, and wherein array magnet steel module 13 fills It fits between serial coil 6 and air-flotation workbench 7, L-type gantry 12 is assemblied in 7 top of air-flotation workbench;On scanning motion component 2 Array magnet steel module 13 is installed and forms the driving of floating magnet steel, air bearing slide plate 16 is installed on scanning motion component 2 and forms air bearing Bearing guiding, is not connected to any cable structure.
When the device works, the serial coil 6 cooperates array magnet steel module 13 that scanning motion component 2 is driven to carry out back and forth Linear motion, air-flotation workbench 7 cooperate air bearing slide plate 16 to carry out bearing guiding to scanning motion component 2, and reading head 4 cooperates grating Ruler 14 carries out position measurement to scanning motion component 2, is equipped with 2 sets of scanning motion components 2 on pedestal 1, and divided by serial coil 6 It does not drive, bilateral scanning can be carried out.

Claims (3)

1. a kind of no cable type bilateral scanning device, including pedestal (1), scanning motion component (2) and upper cover (3);Its feature exists In: the pedestal (1) includes shell (5), serial coil (6) and air-flotation workbench (7), is machined with card slot (9) on shell (5), Serial coil (6) is mounted on the two sides of card slot (9), and air-flotation workbench (7) is installed on shell (5), pacified on air-flotation workbench (7) Equipped with several pieces of hole shape flow controllers (8), miniature straight trough (10) are machined between each hole shape flow controller (8);The scanning motion component It (2) include scanning board (11), L-type gantry (12) and array magnet steel module (13), scanning board (11) and array magnet steel module (13) It is connected on L-type gantry (12), array magnet steel module (13) is equipped with grating scale (14) and damper (15), L-type gantry (12) air bearing slide plate (16) are installed on;It is equipped with reading head (4) on the upper cover (3), the installation site and light of reading head (4) Grid ruler (14) is corresponding;
The scanning motion component (2) is movably assemblied on pedestal (1), and wherein array magnet steel module (13) is assemblied in serially Between coil (6) and air-flotation workbench (7), L-type gantry (12) is assemblied in above air-flotation workbench (7);
Serial coil (6) cooperation array magnet steel module (13) driving scanning motion component (2) carries out linear reciprocating motion, gas Floating workbench (7) cooperation air bearing slide plate (16) carries out bearing guiding to scanning motion component (2), and reading head (4) cooperates grating scale (14) position measurement is carried out to scanning motion component (2).
2. a kind of no cable type bilateral scanning device according to claim 1, it is characterised in that: scanning motion component (2) On array magnet steel module (13) be installed form electromagnetic drive, air bearing slide plate (16) formation is installed on scanning motion component (2) Gas suspension guiding, is not connected to any cable structure.
3. a kind of no cable type bilateral scanning device according to claim 1, it is characterised in that: pacify on the pedestal (1) It is respectively driven equipped with 2 sets of scanning motion components (2), and by serial coil (6), bilateral scanning can be carried out.
CN201811358472.9A 2018-11-14 2018-11-14 A kind of no cable type bilateral scanning device Pending CN109270805A (en)

Priority Applications (1)

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CN201811358472.9A CN109270805A (en) 2018-11-14 2018-11-14 A kind of no cable type bilateral scanning device

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Publications (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109968052A (en) * 2019-04-01 2019-07-05 哈尔滨工业大学 A kind of no cable Linear motor feeding system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102880013A (en) * 2012-09-28 2013-01-16 清华大学 Reticle stage worktable
CN103019045A (en) * 2012-12-11 2013-04-03 清华大学 Silicon wafer platform with anti-collision function
CN103454864A (en) * 2013-08-30 2013-12-18 清华大学 Coarse-fine motion integrated magnetic-levitation mask platform system
CN103926805A (en) * 2014-04-28 2014-07-16 清华大学 Planar motor-driven coarse motion and fine motion integrated mask platform
US9768722B1 (en) * 2017-01-25 2017-09-19 Hiwin Mikrosystem Corp. Reaction force counteracting device for a metrology tool

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102880013A (en) * 2012-09-28 2013-01-16 清华大学 Reticle stage worktable
CN103019045A (en) * 2012-12-11 2013-04-03 清华大学 Silicon wafer platform with anti-collision function
CN103454864A (en) * 2013-08-30 2013-12-18 清华大学 Coarse-fine motion integrated magnetic-levitation mask platform system
CN103926805A (en) * 2014-04-28 2014-07-16 清华大学 Planar motor-driven coarse motion and fine motion integrated mask platform
US9768722B1 (en) * 2017-01-25 2017-09-19 Hiwin Mikrosystem Corp. Reaction force counteracting device for a metrology tool

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109968052A (en) * 2019-04-01 2019-07-05 哈尔滨工业大学 A kind of no cable Linear motor feeding system

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