CN109166789A - Multistation cell piece dicing device - Google Patents

Multistation cell piece dicing device Download PDF

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Publication number
CN109166789A
CN109166789A CN201811072488.3A CN201811072488A CN109166789A CN 109166789 A CN109166789 A CN 109166789A CN 201811072488 A CN201811072488 A CN 201811072488A CN 109166789 A CN109166789 A CN 109166789A
Authority
CN
China
Prior art keywords
station
cell piece
dicing
feeding
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811072488.3A
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Chinese (zh)
Inventor
陆瑜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Maxwell Technologies Co Ltd
Original Assignee
Suzhou Maxwell Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Maxwell Technologies Co Ltd filed Critical Suzhou Maxwell Technologies Co Ltd
Priority to CN201811072488.3A priority Critical patent/CN109166789A/en
Publication of CN109166789A publication Critical patent/CN109166789A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04Cleaning by suction, with or without auxiliary action
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041Cleaning
    • H01L21/02057Cleaning during device manufacture
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers

Abstract

The invention discloses a kind of multistation cell piece dicing devices, including turntable mechanism, turntable mechanism includes rotary table and multiple workbenches for being arranged on rotary table, feeding station is sequentially on the track that rotary table drives each workbench to rotate, scribing station and discharge station, the first absorption station for carrying out adsorption treatment to the dust on workbench is additionally provided on the track of workbench rotation and for adsorbing station to second of dust and slag progress adsorption treatment on the cell piece after processing, first absorption station is arranged before feeding station, second absorption station is arranged between scribing station and discharge station.The dicing device structure is simple, and turntable mechanism has multiple station positions, can carry out dicing operation to multiple cell pieces simultaneously, production capacity and working efficiency can be improved in this way;Moreover, the dicing device has the function of second adsorption, cleaning adsorption treatment can be carried out to workbench and cell piece respectively.

Description

Multistation cell piece dicing device
Technical field
The present invention relates to cell piece manufacturing technology fields, and in particular to a kind of multistation cell piece dicing device.
Background technique
Solar battery is more and more applied as a kind of absorption energy in today of global energy anxiety.? Under the strength of world's photovoltaic market pulls, Chinese solar battery manufacturing industry is obtained by introducing, digesting, absorb and innovate again Significant progress.
Currently, the scale of solar battery secondary industry, constantly promotes the generating efficiency of solar battery sheet, The target pursued as industry.In this way, the equipment of one of important link processed as solar battery, laser scribing device, Higher requirements are also raised.
Existing laser scribing device is primarily present following problem in use: (1) it by sucker and manipulator is combined, it is right Cell piece before cutting and after cutting is carried, and is to carry to will cause fragment rate increase after laser cutting by it;(2) because The individual difference of every cell piece can not know the thickness of cell piece before cutting, to cut when cell piece being caused to cut deep It spends unreasonable;(3) vacuum glass platform is not big enough, flat cell piece can not be thoroughly inhaled, to influence cutting effect;(4) without special For the second adsorption of cell piece and glass table top dust;(5) existing turntable mechanism table top quantitative design is unreasonable, leads to efficiency It is lower.
Summary of the invention
The purpose of the present invention is provide a kind of improved multistation cell piece dicing device for the problems of the prior art.
In order to achieve the above objectives, the technical solution adopted by the present invention is that:
A kind of multistation cell piece dicing device, including turntable mechanism, the turntable mechanism include that rotary table and setting exist Multiple workbenches on the rotary table, the rotary table drive on the track of each workbench rotation It is sequentially with feeding station, scribing station and discharge station, is additionally provided on the track of the workbench rotation for institute State dust on workbench carry out adsorption treatment the first absorption station and for on the cell piece after processing dust and Slag carries out the second absorption station of adsorption treatment, and the first absorption station is arranged before the feeding station, and described the Two absorption stations are arranged between the scribing station and the discharge station.
Preferably, backup station is additionally provided between the discharge station and the first absorption station.
Preferably, the dicing device further includes feeding transport mechanism and blanking transport mechanism, and the feeding station is located at The front of the feeding transport mechanism direction of transfer, the discharge station are being located at the blanking transport mechanism direction of transfer just Rear.
Preferably, the dicing device further includes feeding transport mechanism and feeding transfer device, the feeding transfer device For cell piece to be transferred to the turntable mechanism from the feeding transport mechanism, the feeding transfer device includes sucker Mechanism, the sucking disc mechanism can be rotated or are moved in the horizontal plane at the feeding station position.
Further, the feeding transfer device includes bracket, and the bracket is rotatably arranged, the sucking disc mechanism Two groups are provided with, sucking disc mechanism described in two groups is separately positioned on the opposite sides of the bracket, and the feeding transfer device also wraps Hold-down mechanism is included, on the bracket, the hold-down mechanism is for putting down cell piece and the work for the hold-down mechanism setting Platform mutually compresses, and the sucking disc mechanism is arranged on the hold-down mechanism.
Preferably, the dicing device further includes blanking transport mechanism and blanking transfer device, the blanking transfer device For cell piece to be transferred to the blanking transport mechanism from the turntable mechanism, the blanking transfer device includes belt Transport mechanism, the belt transmission agency being capable of oscilaltions.
Preferably, the first absorption work bit positions are provided with the first dust-extraction unit, and the scribing work bit positions are set It is equipped with laser processing mould group, the second absorption work bit positions are provided with the second dust-extraction unit.
Preferably, the front and back of cell piece is provided with mark point, and the dicing device further includes the first detection machine Structure, first testing agency are arranged at the feeding station position for detecting to the position of the mark point.
Preferably, the dicing device further includes feeding transport mechanism and the second testing agency, second testing agency It is arranged in the feeding transport mechanism for being detected to the thickness of cell piece.
Preferably, the vacuum adsorption mechanism for adsorbing cell piece is provided on each workbench.
Due to the application of the above technical scheme, compared with the prior art, the invention has the following advantages: multiplexing of the invention Position cell piece dicing device structure is simple, and turntable mechanism has multiple station positions, can carry out scribing to multiple cell pieces simultaneously Operation, can be improved production capacity and working efficiency in this way;Moreover, the dicing device has the function of second adsorption, it can be flat to work respectively Platform and cell piece carry out cleaning adsorption treatment.
Detailed description of the invention
Attached drawing 1 is the perspective view of cell piece dicing device of the invention;
Attached drawing 2 is the main view of cell piece dicing device of the invention;
Attached drawing 3 is the top view of cell piece dicing device of the invention;
Attached drawing 4 is partial enlarged view at A in attached drawing 1;
Attached drawing 5 is the structural schematic diagram of turntable mechanism of the invention;
Attached drawing 6 is the structural schematic diagram of feeding transfer device of the invention;
Attached drawing 7 is the structural schematic diagram of feeding transport mechanism of the invention;
Attached drawing 8 is structural schematic diagram when sucking disc mechanism of the invention adsorbs cell piece;
Attached drawing 9 is partial enlarged view at A in attached drawing 8.
Wherein: 10, supporting table;20, feeding transport mechanism;21, feeding feed belt;30, feeding transfer device;31, it inhales Disc mechanism;32, bracket;33, hold-down mechanism;34, supporting table;40, turntable mechanism;41, rotary table;42, workbench; 50, mould is laser machined;Group 60, blanking transport mechanism;61, blanking feed belt;70, blanking transfer device;71, transfer transmission skin Band;81, the first dust-extraction unit;82, the second dust-extraction unit;90, the first testing agency;91, CCD camera;100, the second detection machine Structure.
Specific embodiment
The technical solution of the present invention will be further described below with reference to the accompanying drawings.
As shown in Fig. 1 ~ Fig. 4, cell piece dicing device of the invention includes supporting table 10, is separately positioned in supporting table 10 Feeding transport mechanism 20, feeding transfer device 30, turntable mechanism 40, laser processing mould group 50, blanking transport mechanism 60, blanking Transfer device 70 and controller.
Feeding transport mechanism 20 and blanking transport mechanism 60 are all made of belt transmission agency, and feeding transport mechanism 20 includes two Item feeding feed belt 21 disposed in parallel, blanking transport mechanism 60 include two blanking feed belts 61 disposed in parallel.
As shown in figure 5, turntable mechanism 40 includes the rotary table 41 being rotatably arranged in supporting table 10, is used for Driving rotary table 41 the first driving mechanism rotated and the multiple workbenches 42 being arranged on rotary table 41, rotation Feeding station, scribing station and blankers are at least sequentially on the track that workbench 41 drives each workbench 42 to rotate Position, rotary table 41 can drive each workbench 42 to circuit sequentially in the horizontal plane and turn to feeding station, scribing station And discharge station.
In the present embodiment, feeding station is located at the front of 20 direction of transfer of feeding transport mechanism, under discharge station is located at Expect the dead astern of 60 direction of transfer of transport mechanism, the first driving mechanism uses DD motor.
The first absorption station and second are additionally provided on the track that rotary table 41 drives each workbench 42 to rotate Adsorb station.First absorption station is arranged before feeding station, in the first absorption work bit positions on workbench 42 Dust etc. is adsorbed.Second absorption station is arranged between scribing station and discharge station, adsorbs work bit positions second To on the cell piece after laser machining dust and slag etc. adsorb.
In the present embodiment, successively it is sequentially set on the track that rotary table 41 drives each workbench 42 to rotate pre- Standby station, the first absorption station, feeding station, scribing station, second absorption six station positions of station and discharge station, six Station is uniformly arranged along the circumferencial direction that rotary table 41 rotates, corresponding, and rotary table 41 is along the circumference side of its rotation Workbench 42 there are six being uniformly arranged upwards.
The vacuum adsorption mechanism for adsorbing cell piece, the upper end of workbench 42 are provided on each workbench 42 It is provided with vacuum hole on face, can make to generate vacuum at each vacuum hole by vacuum adsorption mechanism, so that cell piece is adsorbed on work Make on platform 42.
The setting of mould group 50 is laser machined in scribing work bit positions, mould group 50 is laser machined and is used to carry out laser to cell piece Scribing.The dicing device further includes the first dust-extraction unit 81 and the second dust-extraction unit 82, and the first dust-extraction unit 81 is arranged first Work bit positions are adsorbed, for carrying out adsorption treatment to the dust etc. on workbench 42.The setting of second dust-extraction unit 82 is the Two absorption work bit positions, for carrying out adsorption treatment to the dust and slag etc. that carry out on scribing treated cell piece.
As shown in Fig. 1 ~ Fig. 3, the first testing agency 90 is additionally provided at feeding station, the front and back of cell piece is equal It is provided with mark point, the first testing agency 90 is for detecting the position of the mark point on cell piece, to pass through control Cutting position of the device control laser processing mould group 50 on cell piece.In the present embodiment, the first testing agency 90 includes CCD camera 91, multiple CCD cameras 91 are provided with below the positive top of cell piece and the back side to detect the label on cell piece The position of point.
The work that feeding transfer device 30 is used to for cell piece being transferred to turntable mechanism 40 from feeding transport mechanism 20 is put down On platform 42.Specifically, feeding transfer device 30 includes sucking disc mechanism 31, and sucking disc mechanism 31 can be in level as shown in Fig. 6 ~ Fig. 9 Rotation in surface is moved at feeding station position.
Feeding transfer device 30 further includes hold-down mechanism 33, and sucking disc mechanism 31 is arranged on hold-down mechanism 33, in this way when logical It crosses after cell piece is placed on workbench 42 by sucking disc mechanism 31, hold-down mechanism 33 acts, and sucking disc mechanism 31 is pushed, thus Cell piece can be pressed on workbench 42, can prevent dicing operation caused by cell piece warpage is inaccurate to ask in this way Topic.In the present embodiment, hold-down mechanism 33 uses cylinder.
A kind of specific embodiment, feeding transfer device 30 further include the branch that can be rotationally arranged with respect to supporting table 10 Frame 32 and the second driving mechanism rotated for driving arm 32, sucking disc mechanism 31 are provided with two groups, corresponding, hold-down mechanism 33 Two groups are also equipped with, two groups of hold-down mechanisms 33 are separately positioned on the opposite sides of bracket 32, and sucking disc mechanism 31 is separately positioned on often On a hold-down mechanism 33.
When cell piece is after feeding transport mechanism 20 transmits in place, sucking disc mechanism 31 is acted, and draws cell piece, then makes to prop up Frame 32 rotates 180 degree relative to supporting table 10, and hold-down mechanism 33 drives sucking disc mechanism 31 to push and cell piece is placed into work and puts down On platform 42, when sucking disc mechanism 31 pushes, it is pressed on cell piece on workbench 42.In this way, just realizing cell piece from upper It is transferred on turntable mechanism 40 in material transport mechanism 20.When sucking disc mechanism 31 is arranged two groups, two groups of sucking disc mechanisms 31 can move simultaneously Make, specifically: one group of sucking disc mechanism 31 draws cell piece from feeding transport mechanism 20, and another group of sucking disc mechanism 31 is by battery Piece is placed on workbench 42, in this way, can be saved, to improve working efficiency the time of transfer cell piece.
Every group of sucking disc mechanism 31 includes multiple suction nozzles 311, and feeding transfer device 30 further includes setting in feeding transmission skin Supporting table 34 with 21 lower sections, when drawing cell piece from feeding transport mechanism 20 by suction nozzle 311, supporting table 34, which is located at, inhales It when can reduce the absorption cell piece of suction nozzle 311, due to 311 height of suction nozzle or is inhaled by the way that supporting table 34 is arranged the underface of mouth 311 The incidence of cell piece fragment caused by power is improper.
Blanking transfer device 70 is used to cell piece being transferred to blanking transport mechanism 60 from workbench 42.Blanking turns The setting of telephone-moving structure 70 includes belt transmission agency in blankers' bit positions, blanking transfer device 70, and belt transmission agency includes Two transfer feed belts 71 disposed in parallel, when rotary table 41 drives workbench 42 to rotate, belt transmission agency Positioned at the lower section of rotary table 41, each workbench 42 can be driven by rotary table 41 and turn in the horizontal plane Between two transfer feed belts 71, blanking transfer device 70 further includes for driving the belt transmission agency oscilaltion Elevating mechanism, when cell piece is in blankers' bit positions, a workbench 42 is located at two transfer feed belts 71 Between, belt transmission agency moves upwards under the action of elevating mechanism, when the upper surface of transfer feed belt 71 is higher than work When the upper surface of platform 42, cell piece is just transferred on belt transmission agency from workbench 42, at this point, belt transmission agency It is connected to each other with blanking transport mechanism 60, so that cell piece is transmitted in blanking transport mechanism 60 from belt transmission agency.
The dicing device further includes the second testing agency 100, and the second testing agency 100 is arranged in feeding transport mechanism 20 On, it is detected for the thickness to cell piece, then controller is accurately controlled according to the data of the second testing agency 100 detection Laser machine depth of cut of the mould group 50 on cell piece.
The workflow of the dicing device is introduced in detail below:
(1) cell piece is transmitted through feeding transport mechanism 20 to the direction close to turntable mechanism 40;
(2) cell piece detects present battery piece by the second testing agency 100 during transmitting in feeding transport mechanism 20 Thickness, and will test data and be sent in controller;
(3) when cell piece is after feeding transport mechanism 20 transmits in place, sucking disc mechanism 31 draws cell piece, and the second driving mechanism is driven Make bracket 32 that sucking disc mechanism 31 be driven to rotate 180 degree to the surface for being located at feeding station, then hold-down mechanism 33 drives sucker Mechanism 31 pushes and cell piece is pressed on the workbench 42 at feeding station, this workbench 42 is on turning to When expecting work bit positions, the first dust-extraction unit 81 is had been subjected to the adsorption treatment of dust on workbench 42 etc.;
(4) at feeding station position, the position of the mark point on cell piece is detected by the first testing agency 90, and by data It is sent in controller;
(5) rotary table 41 drives workbench 42 to rotate 60 degree of arrival scribing work bit positions, laser machines 50 work of mould group Make, laser processing mould group 50 is controlled to the cutting position and depth of cut of cell piece by controller, completes cutting operation;
(6) rotary table 41 drives workbench 42 to continue to rotate 60 degree and reaches the second absorption work bit positions, starting second Dust-extraction unit 82 on cell piece dust and slag etc. carry out adsorption treatment;
(7) rotary table 41 drives workbench 42 to continue to rotate 60 degree of arrival blankers' bit positions, at this time workbench 42 are located between two transfer feed belts 71, drive belt transmission agency to rise by elevating mechanism, until transfer transmission skin Upper surface with 71 is higher than the upper surface of workbench 42, and cell piece is just located on belt transmission agency;
(8) cell piece is transmitted in blanking transport mechanism 60 by belt transmission agency.
In this way, just completing the dicing operation of a piece of cell piece, the persistent loop rotation of turntable mechanism 40 can be simultaneously to multiple electricity Pond piece carries out dicing operation, and production capacity can be improved in high degree of automation.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art Scholar can understand the contents of the present invention and be implemented, and it is not intended to limit the scope of the present invention, it is all according to the present invention Equivalent change or modification made by Spirit Essence, should be covered by the scope of protection of the present invention.

Claims (10)

1. a kind of multistation cell piece dicing device, including turntable mechanism, the turntable mechanism include rotary table and setting Multiple workbenches on the rotary table, the rotary table drive the track of each workbench rotation On be sequentially with feeding station, scribing station and discharge station, it is characterised in that: also set on the track of workbench rotation It is equipped with for carrying out the first absorption station of adsorption treatment to the dust on the workbench and for the battery after processing The dust and slag of on piece carry out the second absorption station of adsorption treatment, and the first absorption station is arranged in the feeding station Before, the second absorption station is arranged between the scribing station and the discharge station.
2. multistation cell piece dicing device according to claim 1, it is characterised in that: the discharge station and described Backup station is additionally provided between one absorption station.
3. multistation cell piece dicing device according to claim 1 or 2, it is characterised in that: the dicing device also wraps Include feeding transport mechanism and blanking transport mechanism, the feeding station be located at the feeding transport mechanism direction of transfer just before Side, the discharge station are located at the dead astern of the blanking transport mechanism direction of transfer.
4. multistation cell piece dicing device according to claim 1, it is characterised in that: on the dicing device further includes Expect transport mechanism and feeding transfer device, the feeding transfer device from the feeding transport mechanism for shifting cell piece Onto the turntable mechanism, the feeding transfer device includes sucking disc mechanism, and the sucking disc mechanism can move up and down, and can It rotates or is moved in the horizontal plane at the feeding station position.
5. multistation cell piece dicing device according to claim 4, it is characterised in that: the feeding transfer device includes Bracket, the bracket are rotatably arranged, and the sucking disc mechanism is provided with two groups, and sucking disc mechanism described in two groups is separately positioned on The opposite sides of the bracket, the feeding transfer device further includes hold-down mechanism, and the hold-down mechanism is arranged in the bracket On, for mutually compressing cell piece and the workbench, the sucking disc mechanism is arranged in the compacting machine hold-down mechanism On structure.
6. multistation cell piece dicing device according to claim 1, it is characterised in that: under the dicing device further includes Expect that transport mechanism and blanking transfer device, the blanking transfer device are used to cell piece being transferred to institute from the turntable mechanism It states in blanking transport mechanism, the blanking transfer device includes belt transmission agency, and the belt transmission agency can rise up and down Drop.
7. multistation cell piece dicing device according to claim 1, it is characterised in that: first absorption station position Place is provided with the first dust-extraction unit, and the scribing work bit positions are provided with laser processing mould group, second absorption station position The place of setting is provided with the second dust-extraction unit.
8. multistation cell piece dicing device according to claim 1, it is characterised in that: the front and back of cell piece is equal It is provided with mark point, the dicing device further includes the first testing agency, and first testing agency is arranged in the feeding work Bit positions are for detecting the position of the mark point.
9. multistation cell piece dicing device according to claim 1, it is characterised in that: on the dicing device further includes Expect that transport mechanism and the second testing agency, second testing agency are arranged in the feeding transport mechanism for cell piece Thickness detected.
10. multistation cell piece dicing device according to claim 1, it is characterised in that: on each workbench It is provided with the vacuum adsorption mechanism for adsorbing cell piece.
CN201811072488.3A 2018-09-14 2018-09-14 Multistation cell piece dicing device Pending CN109166789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811072488.3A CN109166789A (en) 2018-09-14 2018-09-14 Multistation cell piece dicing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811072488.3A CN109166789A (en) 2018-09-14 2018-09-14 Multistation cell piece dicing device

Publications (1)

Publication Number Publication Date
CN109166789A true CN109166789A (en) 2019-01-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811072488.3A Pending CN109166789A (en) 2018-09-14 2018-09-14 Multistation cell piece dicing device

Country Status (1)

Country Link
CN (1) CN109166789A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109570771A (en) * 2019-01-28 2019-04-05 宁波高新区起兴机电有限公司 A kind of marking device for cooling fin
CN109759755A (en) * 2019-02-28 2019-05-17 武汉三工智能装备制造有限公司 AI intelligent process anomalous identification processing system and solar cell chip bonding machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109570771A (en) * 2019-01-28 2019-04-05 宁波高新区起兴机电有限公司 A kind of marking device for cooling fin
CN109759755A (en) * 2019-02-28 2019-05-17 武汉三工智能装备制造有限公司 AI intelligent process anomalous identification processing system and solar cell chip bonding machine

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