CN109119444B - Display substrate and manufacturing method thereof - Google Patents
Display substrate and manufacturing method thereof Download PDFInfo
- Publication number
- CN109119444B CN109119444B CN201810932281.2A CN201810932281A CN109119444B CN 109119444 B CN109119444 B CN 109119444B CN 201810932281 A CN201810932281 A CN 201810932281A CN 109119444 B CN109119444 B CN 109119444B
- Authority
- CN
- China
- Prior art keywords
- electrode
- layer
- controllable
- electrodes
- pixel
- Prior art date
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- 239000000758 substrates Substances 0.000 title claims abstract description 56
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000010410 layers Substances 0.000 claims abstract description 111
- 230000002209 hydrophobic Effects 0.000 claims abstract description 18
- 238000001035 drying Methods 0.000 claims abstract description 14
- 229920000642 polymers Polymers 0.000 claims abstract description 14
- 239000000976 inks Substances 0.000 claims description 32
- 239000010409 thin films Substances 0.000 claims description 22
- 230000000875 corresponding Effects 0.000 claims description 21
- 239000010408 films Substances 0.000 claims description 14
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 8
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 8
- 125000004093 cyano group Chemical group 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*C#N 0.000 claims description 4
- 125000001997 phenyl group Chemical group 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[H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 4
- 238000007641 inkjet printing Methods 0.000 abstract description 23
- 230000000694 effects Effects 0.000 abstract description 14
- 238000001704 evaporation Methods 0.000 description 7
- 238000000034 methods Methods 0.000 description 6
- 238000010586 diagrams Methods 0.000 description 4
- 239000000463 materials Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 230000001276 controlling effects Effects 0.000 description 2
- 238000005516 engineering processes Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006011 modification reactions Methods 0.000 description 2
- 239000004020 conductors Substances 0.000 description 1
- 239000004973 liquid crystal related substances Substances 0.000 description 1
- 239000007788 liquids Substances 0.000 description 1
- 239000011159 matrix materials Substances 0.000 description 1
- 239000002245 particles Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/28—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
- H01L27/32—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
- H01L27/3241—Matrix-type displays
- H01L27/3244—Active matrix displays
- H01L27/3246—Pixel defining structures, e.g. banks
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2227/00—Indexing scheme for devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate covered by group H01L27/00
- H01L2227/32—Devices including an organic light emitting device [OLED], e.g. OLED display
- H01L2227/323—Multistep processes for AMOLED
Abstract
Description
Technical Field
The invention belongs to the technical field of display, and particularly relates to a display substrate and a manufacturing method thereof.
Technical Field
Currently, the O L ED display technology is an industry hotspot, but the problems of high cost and low yield are difficult to meet the market demand, and from the technical point of view, the O L ED display panel is mainly an FMM evaporation process (FMM, Fine Metal Mask), but the cost is high due to the disadvantages of low material utilization rate, poor uniformity and the like, and the inkjet printing process is a more efficient technology, and has the advantages of high material utilization rate, large area and the like, and fig. 1 is a schematic diagram of the existing inkjet printing process.
When a pixel is manufactured by an inkjet printing process, a Bank structure (Bank) must be provided on the substrate base 01 to restrict the flow of ink. As shown in fig. 2, the height of the wall 11 is about 2 μm, and the wall 11 has a certain width limitation (usually more than about 25 μm) to avoid the merging phenomenon of the ink 031 between adjacent pixels caused by the close proximity of adjacent pixels or the printing misalignment during printing. Therefore, the utilization rate of the visible area is limited, and it is difficult to manufacture a high-resolution display.
In addition, the coffee ring effect is a common phenomenon in ink jet printing processes, which can lead to uneven deposition of material, affecting the resolution of the printed pattern and the performance of the prepared device. The reason is that since the solvent evaporation rate at the edge of the droplet of ink 031 is greater than the central evaporation rate, a flow is created inside the droplet to carry suspended solute particles to the edge of the droplet and deposit a thicker annular dry film at the edge. One way to reduce the coffee ring effect is to control the evaporation behavior of the droplets so that the droplets gradually decrease with evaporation, rather than just the liquid level, so that the dried film thickness is more uniformly distributed, as shown in fig. 3.
Disclosure of Invention
In order to solve the technical problems, the invention provides a display substrate, which can achieve the effect of carrying out patterned ink-jet printing without a retaining wall and solve the problems of ink-jet printing deviation and coffee ring effect, and also provides a manufacturing method of the display substrate.
The technical scheme provided by the invention is as follows:
the invention discloses a display substrate, which comprises a substrate and a transistor array layer positioned on the substrate, wherein the transistor array layer comprises scanning lines and data lines which are criss-cross and a plurality of pixel units which are defined by the scanning lines and the data lines in a crossed manner, and each pixel unit is internally provided with a thin film transistor and a first electrode connected with the thin film transistor; further comprising:
the pixel definition layer is positioned on the transistor array layer, one side of the pixel definition layer, which is far away from the transistor array layer, is a controllable surface, and the controllable surface comprises a first surface above the first electrode; when a first voltage is input into the first electrode, the first surface above the first electrode has hydrophilicity; when a second voltage is input to the first electrode, the first surface above the first electrode has hydrophobicity; the first voltage and the second voltage have opposite positive and negative polarities;
a first film layer on the pixel definition layer, the first film layer including a plurality of color patches, the color patches being in contact with the first surface, each color patch being spaced apart from the pixel definition layer opposite the first electrode.
The invention also discloses a display substrate, which comprises a substrate and a transistor array layer positioned on the substrate, wherein the transistor array layer comprises criss-cross scanning lines, data lines and a plurality of pixel units defined by the scanning lines and the data lines in a crossed manner, and each pixel unit is internally provided with a thin film transistor and a first electrode connected with the thin film transistor; further comprising:
the pixel definition layer is positioned on the transistor array layer, one side of the pixel definition layer, which is far away from the transistor array layer, is a controllable surface, and the controllable surface comprises a first surface above the first electrode;
a plurality of second electrodes on the pixel defining layer, the first electrode in each pixel unit corresponding to at least one of the second electrodes; when the voltage input into the first electrode is smaller than the voltage input into the corresponding second electrode, the first surface above the first electrode has hydrophilicity; when the voltage input to a first electrode is greater than the voltage input to a corresponding second electrode, the first surface above the first electrode has hydrophobicity;
a first film layer on the pixel definition layer, the first film layer including a plurality of color patches, the color patches being in contact with the first surface, each color patch being spaced apart from the pixel definition layer opposite the first electrode.
Preferably, the controllable surface further comprises a second surface in addition to the first surface, the second surface being hydrophobic.
Preferably, the pixel defining layer comprises at least one polymer molecule comprising a first end and a second end, the controllable surface having a hydrophilic property when the first end of the polymer molecule is in contact with the controllable surface, the controllable surface having a hydrophobic property when the second end of the polymer molecule is in contact with the controllable surface.
Preferably, the pixel defining layer includes at least one liquid crystal polymer molecule having a benzene ring and a cyano chain.
The invention discloses a manufacturing method of a display substrate, which comprises the following steps:
forming a transistor array layer on a substrate, wherein the transistor array layer comprises scanning lines and data lines which are criss-cross and a plurality of pixel units defined by the scanning lines and the data lines in a crossed manner, and a thin film transistor and a first electrode connected with the thin film transistor are arranged in each pixel unit;
forming a pixel definition layer on the transistor array layer, wherein one surface of the pixel definition layer, which is far away from the transistor array layer, is a controllable surface; the controllable surface comprises a first surface over the first electrode; when a first voltage is input into the first electrode, the first surface above the first electrode has hydrophilicity; when a second voltage is input to the first electrode, the first surface above the first electrode has hydrophobicity; the first voltage and the second voltage have opposite positive and negative polarities; the controllable surface further comprises a second surface, other than the first surface, the second surface being hydrophobic;
and inputting a first voltage to the plurality of first electrodes, and dripping ink to the first surface.
Preferably, a fourth step after the third step is further included;
the fourth step: and applying a second voltage to the plurality of first electrodes, and drying and baking the ink to form color blocks by the ink.
The invention also discloses a manufacturing method of the display substrate, which comprises the following steps:
forming a transistor array layer on a substrate, wherein the transistor array layer comprises scanning lines and data lines which are criss-cross and a plurality of pixel units which are defined by the scanning lines and the data lines in a crossed manner, and a thin film transistor and a first electrode connected with the thin film transistor are arranged in each pixel unit;
forming a pixel definition layer on the transistor array layer, wherein one surface of the pixel definition layer, which is far away from the transistor array layer, is a controllable surface; the controllable surface comprises a first surface over the first electrode; the controllable surface further comprises a second surface, other than the first surface, the second surface being hydrophobic;
the third step: forming a second electrode on the pixel defining layer, wherein the first electrode in each pixel unit corresponds to at least one second electrode; when the voltage input into the first electrode is smaller than the voltage input into the corresponding second electrode, the first surface above the first electrode has hydrophilicity; when the voltage input to a first electrode is greater than the voltage input to a corresponding second electrode, the first surface above the first electrode has hydrophobicity;
and fourthly, inputting voltage to the plurality of first electrodes and the plurality of second electrodes, wherein the voltage input to the first electrodes is smaller than the voltage input to the corresponding second electrodes, and dripping ink on the first surface above the first electrodes.
Preferably, a fifth step after the fourth step is also included;
the fifth step: inputting voltage to the first electrodes and the second electrodes, wherein the voltage input to the first electrodes is greater than that input to the corresponding second electrodes, drying and baking the ink to form color blocks
Compared with the prior art, the invention can bring at least one of the following beneficial effects:
1. the pixel definition layer capable of electrically controlling the hydrophilicity and hydrophobicity of the surface is adopted, so that the effect of carrying out patterned ink-jet printing without a retaining wall is achieved;
2. the first surface of the pixel definition layer has hydrophilicity in the ink-jet printing step, so that the problem of ink-jet printing deviation is effectively solved;
3. the first surface of the pixel definition layer has hydrophobicity in the drying and baking step, and the problem of coffee ring effect is effectively solved.
Drawings
The present invention will be further described in the following detailed description of preferred embodiments, which is to be read in connection with the accompanying drawings.
FIG. 1 is a schematic illustration of a prior art inkjet printing process;
FIG. 2 is a schematic diagram of a conventional inner barrier structure of a display substrate;
FIG. 3 is a schematic illustration of controlling droplet evaporation behavior to mitigate coffee ring effects;
FIG. 4 is a schematic view of a display substrate according to the present invention;
FIG. 5 is a schematic diagram of the automatic movement of ink after the deviation of ink-jet printing according to the present invention;
fig. 6 is a schematic structural diagram of a display substrate according to another embodiment of the invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description will be made with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.
For the sake of simplicity, the drawings only schematically show the parts relevant to the present invention, and they do not represent the actual structure as a product. In addition, in order to make the drawings concise and understandable, components having the same structure or function in some of the drawings are only schematically illustrated or only labeled. In this document, "one" means not only "only one" but also a case of "more than one".
The structure of the display substrate of the present invention is shown in fig. 4, and includes a substrate 01, a transistor array layer (not shown) on the substrate 01, and a pixel defining layer 02 covering the transistor array layer; the transistor array layer includes criss-cross scan lines and data lines, and a plurality of pixel units defined by the intersections of the scan lines and the data lines, and each pixel unit is provided with a Thin Film Transistor (TFT) and a first electrode (not shown) connected to the TFT. The display substrate further includes a first film layer on the pixel defining layer 02, and the first film layer is formed by drying and baking ink 031 dropped on the upper surface of the pixel defining layer 02.
Due to the precision of ink-jet printing and the phenomenon of ink 031 merging between adjacent pixels, the projections of the first electrodes on the substrate base 01 are spaced apart by a certain distance. One side of the pixel defining layer 02 far away from the transistor array layer is a controllable surface, the property and arrangement mode of polymer molecules in the pixel defining layer are influenced by an electric field, and then the controllable surface above the first electrode is controlled to have hydrophilicity in the ink-jet printing step and hydrophobicity in the drying and baking step, so that the effect of performing patterned ink-jet printing without a retaining wall (Bank) is achieved, and the resolution of the display substrate is improved.
Example 1:
as shown in fig. 4, the controllable surface of the pixel defining layer 02 includes a first surface 021 over the first electrode and a second surface 022 excluding the first surface 021, wherein a projection of the first surface 021 on the substrate 01 coincides with a projection of the first electrode on the substrate 01, i.e., the first surface 021 is opposite to the first electrode with the pixel defining layer 02 interposed therebetween, and the second surface 022 is the remaining region of the controllable surface.
The pixel defining layer 02 includes one or more polymer molecules having a first end and a second end, the controllable surface having a hydrophilic property when the first end of the polymer molecule is in contact with the controllable surface, and a hydrophobic property when the second end of the polymer molecule is in contact with the controllable surface.
When a first voltage is input to a first electrode in a certain pixel unit, a first surface 021 above the first electrode is a hydrophilic surface. When a second voltage is inputted to the first electrode in a certain pixel unit, the first surface 021 above the first electrode is a hydrophobic surface, i.e., the pixel defining layer 02 is a polymer film with an electrically controllable surface hydrophilicity and hydrophobicity. Wherein the first voltage and the second voltage have opposite signs.
For example: the first voltage of the first electrode is +5V, the first electric field formed by the first electrode has electric field lines pointing from the first electrode to the first surface 021, the polymer molecules in the pixel definition layer 02 are rearranged under the first electric field, so that the first end is in contact with the first surface 021, and the first surface 021 above the first electrode is a hydrophilic surface; the second voltage of the first electrode is-5V, the second electric field formed by the first electrode has electric field lines pointing from the first surface 021 to the first electrode, and the polymer molecules in the pixel defining layer 02 are rearranged under the second electric field, so that the second end is in contact with the first surface 021, and the first surface 021 above the first electrode is a hydrophobic surface.
Since the second surface 022 is hardly affected by the first electrode, the second surface 022 is always kept hydrophobic. It should be noted that due to the influence of the electric field, the hydrophilic and hydrophobic properties at the interface between the first surface 021 and the second surface 022 may be uniformly transited.
When the display substrate in this embodiment is used as a color filter substrate of a display, the first film layer includes a plurality of discrete color blocks, each color block is in direct contact with the first surface 021 of the pixel definition layer 02 and is opposite to the first electrode at an interval of the pixel definition layer 02, and the color block is formed by drying and baking ink 031 dropped on the controllable surface. The first electrode can be in various shapes such as a circle, a rectangle or a rounded rectangle, and the shape and the arrangement of the color blocks are defined through the shape and the arrangement of the first electrode.
Preferably, the color layer includes a first color block formed by dropping red ink 031 on the controllable surface through a nozzle and drying and baking, a second color block formed by dropping green ink 031 on the controllable surface through a nozzle and drying and baking, and a third color block formed by dropping blue ink 031 on the controllable surface through a nozzle and drying and baking.
When ink-jet printing is carried out, the voltage of a first electrode of a part is controlled to be a first voltage through a thin film transistor, so that the controllable surface above the first electrode has hydrophilicity; the remaining controllable surfaces are hydrophobic. As shown in fig. 5, when a certain deviation occurs in the inkjet printing, a portion of the ink 031 falls outside the first surface 021 defined by the first electrode, and due to factors such as cohesion and surface tension, the ink 031 automatically moves to the hydrophilic first surface 021, thereby achieving high-precision printing.
When the ink 031 is dried and baked, the voltage of the first electrode is adjusted to the second voltage, the controllable surface above the first electrode is changed from hydrophilic to hydrophobic, so as to reduce the adhesion of the ink 031 to the substrate and control the evaporation behavior of the ink 031, as shown in fig. 3, the droplets are gradually reduced along with the evaporation, so that the dried film thickness is more uniformly distributed, and the adverse effect of the coffee ring effect is reduced.
The method for manufacturing a display substrate in this embodiment includes the following steps:
forming a transistor array layer on a substrate (01), wherein the transistor array layer comprises scanning lines and data lines which are criss-cross and a plurality of pixel units which are defined by the scanning lines and the data lines in a crossed manner, and each pixel unit is internally provided with a thin film transistor and a first electrode connected with the thin film transistor;
secondly, forming a pixel defining layer 02 on the transistor array layer, wherein one side of the pixel defining layer 02, which is far away from the transistor array layer, is a controllable surface; the controllable surface comprises a first surface 021 above the first electrode, i.e. the projection of the first surface 021 on the substrate base plate 01 coincides with the projection of the first electrode on the substrate base plate 01; when a first voltage is input to the first electrode, the first surface 021 above the first electrode has hydrophilicity; when a second voltage is input to the first electrode, the first surface 021 above the first electrode has hydrophobicity; the first voltage and the second voltage have opposite positive and negative polarities; the controllable surface further comprises a second surface 022 in addition to the first surface 021, the second surface 022 being hydrophobic;
thirdly, applying a first voltage to the plurality of first electrodes to make the first surfaces 021 above the first electrodes hydrophilic, and dripping ink 031 on the first surfaces;
the fourth step: adjusting the voltages of the first electrodes to a second voltage to make the first surface 021 above the first electrodes have hydrophobicity, and drying and baking the ink 031 to make the ink 031 form color blocks.
The dripping of the ink 031 in the third step may be performed in different regions according to the requirements of the manufacturing process, or may be performed in different steps according to the type of the ink 031.
Example 2:
on the basis of embodiment 1, the pixel defining layer 02 in this embodiment is specifically a liquid crystal polymer film, wherein the liquid crystal polymer molecules have benzene rings and cyano chains, so that the first end of the sagittal axis of the liquid crystal polymer molecules has hydrophilicity, and the second end of the sagittal axis has hydrophobicity.
As shown in fig. 6, the display substrate further includes a second electrode 041 on the pixel definition layer 02, and the first electrode in each pixel unit corresponds to at least one second electrode 041. A voltage is applied to the first electrode (not shown) and the second electrode 041, so as to form an electric field in a predetermined direction in the pixel defining layer 02, and the end group contacting the controllable surface is switched by changing the direction of the electric field line to change the director of the liquid crystal vector, thereby changing the hydrophilic and hydrophobic properties of the first surface 021 above the first electrode.
When the voltage input to the first electrode is less than the voltage input to the corresponding second electrode 041, the first electric field generated in the pixel definition layer 02 has electric field lines pointing from the second electrode 041 to the first electrode, the cyano-group chain of the liquid crystal polymer molecule contacts the controllable surface, and the first surface 021 above the first electrode has hydrophilicity; when the voltage inputted to the first electrode is greater than the voltage inputted to the corresponding second electrode 041, the second electric field generated in the pixel definition layer 02 has electric field lines pointing from the first electrode to the second electrode 041, the benzene ring surface of the liquid crystal polymer molecule contacts the controllable surface, and the first surface 021 above the first electrode has hydrophobicity.
The specific form of the electric field lines in the first electric field and the second electric field is determined by factors such as the shapes of the first electrode and the second electrode 041 and the voltage between the first electrode and the second electrode 041.
Specifically, each of the second electrodes 041 is made of a conductive material surrounding the first surface 021, and the second electrodes 041 may have various shapes such as a circular ring or a rectangular frame. When ink-jet printing is performed, ink 031 falls in an inner area defined by a circular ring or a rectangular frame. The pixel definition layer 02 is provided with first electrode lines and second electrode 041 lines which are criss-cross, and second pixel units arranged in a matrix shape are defined by the intersection of the first electrode lines and the second electrode 041 lines. Each second pixel unit is provided with a second thin film transistor and a second electrode 041, and the first electrode line and the second electrode line apply voltage to the second electrode 041 through the second thin film transistor. Since the projections of the first electrode lines, the second electrode lines and the second thin film transistors on the substrate base plate 01 can be respectively overlapped with the projections of the scanning lines, the data lines and the thin film transistors in the transistor array layer on the substrate base plate 01, the resolution or the aperture ratio of the display base plate cannot be reduced by the design.
The method for manufacturing a display substrate in this embodiment includes the following steps:
forming a transistor array layer on a substrate (01), wherein the transistor array layer comprises scanning lines and data lines which are criss-cross and a plurality of pixel units which are defined by the scanning lines and the data lines in a crossed manner, and each pixel unit is internally provided with a thin film transistor and a first electrode connected with the thin film transistor;
secondly, forming a pixel defining layer 02 on the transistor array layer, wherein one side of the pixel defining layer 02, which is far away from the transistor array layer, is a controllable surface; the controllable surface comprises a first surface 021 over the first electrode; the controllable surface further comprises a second surface 022 in addition to the first surface 021, the second surface 022 being hydrophobic; preferably, the pixel defining layer 02 includes one or more liquid crystal polymer molecules;
the third step: forming a second electrode 041 on the pixel defining layer 02, where the first electrode in each pixel unit corresponds to at least one second electrode 041; when the voltage input to the first electrode is less than the voltage input to the corresponding second electrode 041, the first surface 021 above the first electrode has hydrophilicity; when the voltage input to the first electrode is greater than the voltage input to the corresponding second electrode 041, the first surface 021 above the first electrode has hydrophobicity;
a fourth step of applying a voltage to the plurality of first electrodes and the plurality of second electrodes 041, wherein the voltage input to the first electrodes is smaller than the voltage input to the corresponding second electrodes 041, and dripping ink 031 on the first surfaces 021 above the plurality of first electrodes;
the fifth step: and applying voltages to the plurality of first electrodes and the plurality of second electrodes 041, wherein the voltage input to the first electrode is greater than the voltage input to the corresponding second electrode 041, and drying and baking the ink 031 to form color blocks in the ink 031.
The display substrate comprises the pixel definition layer 02 with the surface hydrophilicity and hydrophobicity capable of being electrically controlled, the effect of carrying out patterned ink-jet printing without a retaining wall is achieved, the first surface 021 of the pixel definition layer 02 has different surface hydrophilicity and hydrophobicity in the steps of ink-jet printing and drying and baking, the problems of ink-jet printing deviation and coffee ring effect are effectively solved, and the invention also discloses a corresponding manufacturing method of the display substrate.
It should be noted that the above mentioned embodiments are only preferred embodiments of the present invention, but the present invention is not limited to the details of the above embodiments, and it should be noted that, for those skilled in the art, it is possible to make various modifications and amendments within the technical concept of the present invention without departing from the principle of the present invention, and various modifications, amendments and equivalents of the technical solution of the present invention should be regarded as the protection scope of the present invention.
Claims (6)
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