CN109088303B - Method and device for adjusting output power of pulse laser and pulse laser - Google Patents

Method and device for adjusting output power of pulse laser and pulse laser Download PDF

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Publication number
CN109088303B
CN109088303B CN201810965898.4A CN201810965898A CN109088303B CN 109088303 B CN109088303 B CN 109088303B CN 201810965898 A CN201810965898 A CN 201810965898A CN 109088303 B CN109088303 B CN 109088303B
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China
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current value
pulse laser
optical path
power
stage
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CN201810965898.4A
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Chinese (zh)
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CN109088303A (en
Inventor
何高锋
蒋峰
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深圳市创鑫激光股份有限公司
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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming

Abstract

The embodiment of the invention relates to the technical field of pulse lasers, in particular to a method and a device for adjusting output power of a pulse laser and the pulse laser. When the input power percentage of the pulse laser is equal to zero, controlling the current value in the first-stage light path of the pulse laser and the current value in the second-stage light path of the pulse laser to be zero; when the input power percentage of the pulse laser is larger than zero and smaller than or equal to the reference ratio, controlling the current value in the first-stage light path to be in a linear relation with the input power percentage, and controlling the current value in the second-stage light path to be zero; when the input power percentage is larger than the reference ratio, the current value in the first-stage light path is controlled to be a first current value, and the current value in the second-stage light path is controlled to be in a linear relation with the input power percentage. The method realizes the zero adjustment of the output power of the pulse laser, and ensures that the output power can be adjusted to a smaller ideal output power in a precise application occasion.

Description

Method and device for adjusting output power of pulse laser and pulse laser

Technical Field

The embodiment of the invention relates to the technical field of pulse lasers, in particular to a method and a device for adjusting output power of a pulse laser and the pulse laser.

Background

Pulsed lasers are characterized relative to continuous lasers in that the output laser shape is a single spike, and have several parameters, pulse width, pulse energy, pulse frequency, average power, etc. The pulse laser is generally composed of two-stage laser paths, the first stage laser path is used for forming seed light, i.e. seed laser with required wavelength, frequency and pulse width, the second stage laser path is used for amplifying the power of the first stage, and most of the average power output by the laser is the power from the second stage laser path.

In the process of implementing the invention, the inventor of the invention finds the following problems in the prior art: in the prior art, as shown in fig. 1, fig. 1 is a graph of a relationship between output power and input power percentage of a pulse laser in the prior art, where an X axis is the input power percentage, a Y axis is actual power output, and the input power percentage of the pulse laser is a value obtained by dividing the input power of a current pulse laser by a rated input power, as can be seen from fig. 1, after the pulse laser is powered on and a power-on command is given, the actual output power of the pulse laser is not 0 but a power of a point, the power of the point is Wa, the power of the point is actually the output power of a primary optical path, and since the output power of the pulse laser is at least the power of the point a, or the power is not turned on, the light to be turned on is at least Wa, and the power interval of 0-Wa is not adjustable. When the constant value of the current of the first stage optical path is larger, the corresponding value of the first stage power is larger, and the power influence on the whole pulse laser is larger. The laser output power cannot be adjusted to be smaller on the basis of the power at the point a, which may cause trouble in use in precision applications, and sometimes even does not allow the laser output of the power at the point a, especially in materials sensitive to light, which may cause adverse effects on these materials.

Disclosure of Invention

The technical problem mainly solved by the embodiment of the invention is to provide a method and a device for adjusting the output power of a pulse laser, the pulse laser and a laser marking machine, aiming at solving the problem that the output power of the existing pulse laser cannot be adjusted from zero.

In order to solve the above technical problem, in a first aspect, an embodiment of the present invention adopts a technical solution that: there is provided a method of regulating output power of a pulsed laser, comprising:

judging whether the input power percentage of the pulse laser is smaller than or equal to a reference ratio;

if yes, judging whether the input power percentage of the pulse laser is equal to zero or not;

when the input power percentage of the pulse laser is equal to zero, controlling the current value in the first-stage light path of the pulse laser and the current value in the second-stage light path of the pulse laser to be zero;

when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value in the first-stage light path to be in a linear relation with the input power percentage, and controlling the current value in the second-stage light path to be zero, and when the input power percentage is equal to the reference ratio, controlling the current value of the first-stage light path to be equal to a first current value, wherein the reference ratio is the ratio of the first-stage power of the pulse laser to the rated power.

Optionally, when the input power percentage is greater than the reference ratio, controlling a current value in the first-stage optical path to be a first current value, controlling a current value in the second-stage optical path to be in a linear relationship with the input power percentage, and when the input power percentage is equal to one, controlling a current value of the second-stage optical path to be equal to a second current value;

the current value of the first-stage optical path determines the output power of the first-stage optical path, the current value of the second-stage optical path and the output power of the first-stage optical path determine the output power of the second-stage optical path, and the output power of the second-stage optical path determines the output power of the pulse laser.

Optionally, before the step of controlling the current value in the first-stage optical path of the pulse laser and the current value in the second-stage optical path of the pulse laser to be both zero when the percentage of the input power of the pulse laser is equal to zero, the method further includes:

acquiring a corresponding first current value when the output power of the pulse laser is primary power, wherein the first current value is a current value acting on a primary light path of the pulse laser;

and acquiring a corresponding second current value when the output power of the pulse laser is the rated power, wherein the second current value is a current value acting on a second-stage light path of the pulse laser.

Optionally, the step of obtaining a corresponding first current value when the output power of the pulse laser is a first-level power includes:

adjusting the output power of the first-stage optical path to the first-stage power;

and acquiring a current value in the first-stage optical path as a first current value.

Optionally, the step of obtaining a second current value corresponding to the output power of the pulse laser when the output power is the rated power includes:

keeping the current value in the first-stage light path as a first current value, and adjusting the output power of the pulse laser to a rated power;

and acquiring a current value in the second-stage light path as a second current value.

In order to solve the above technical problem, according to a second aspect of the present invention, another technical solution is: there is provided an apparatus for adjusting output power of a pulsed laser, comprising:

the first judgment module is used for judging whether the input power percentage of the pulse laser is smaller than or equal to a reference ratio;

a second judging module, configured to judge whether the input power percentage of the pulse laser is equal to zero if the input power percentage of the pulse laser is smaller than or equal to a reference ratio;

the first control module is used for controlling the current value in the first-stage optical path of the pulse laser and the current value in the second-stage optical path of the pulse laser to be zero when the input power percentage of the pulse laser is equal to zero;

the second control module is used for controlling a current value in the first-stage optical path to be in a linear relation with the input power percentage when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value in the second-stage optical path to be zero, and controlling the current value of the first-stage optical path to be equal to a first current value when the input power percentage is equal to the reference ratio, wherein the reference ratio is the ratio of the first-stage power of the pulse laser to the rated power.

Optionally, the apparatus further comprises:

a third control module, configured to control a current value in the first-stage optical path to be a first current value and control a current value in the second-stage optical path to be in a linear relationship with the input power percentage when the input power percentage is greater than the reference ratio, and when the input power percentage is equal to one, the current value in the second-stage optical path is equal to a second current value;

the current value of the first-stage optical path determines the output power of the first-stage optical path, the current value of the second-stage optical path and the output power of the first-stage optical path determine the output power of the second-stage optical path, and the output power of the second-stage optical path determines the output power of the pulse laser.

Optionally, the apparatus further comprises:

the first acquisition module is used for acquiring a corresponding first current value when the output power of the pulse laser is primary power, and the first current value is a current value acting on a primary optical path of the pulse laser; the first obtaining module comprises a first adjusting unit and a first obtaining unit, wherein the first adjusting unit is used for adjusting the output power of the first-stage optical path to the first-stage power; the first acquisition unit is used for acquiring a current value in the first-stage light path and taking the current value as a first current value;

the second acquisition module is used for acquiring a corresponding second current value when the output power of the pulse laser is rated power, and the second current value is a current value acting on a second-stage light path of the pulse laser; the second acquisition module comprises a second adjusting unit and a second acquisition unit, wherein the second adjusting unit is used for keeping the current value in the first-stage light path as a first current value and adjusting the output power of the pulse laser to a rated power; the second acquisition unit is used for acquiring the current value in the second-stage light path as a second current value.

In order to solve the above technical problem, another technical solution adopted by the embodiments of the present invention is: there is provided a pulse laser including:

a first stage optical path including a first stage pump source;

a second stage optical path including a secondary pump source;

the controller is respectively connected with the first-stage optical path and the second-stage optical path and is used for controlling the current value of the first-stage pumping source and the current value of the second-stage pumping source to be zero when the input power percentage of the pulse laser is equal to zero; when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value of the primary pump source to be in a linear relation with the input power percentage, and controlling the current value of the secondary pump source to be zero, and when the input power percentage is equal to the reference ratio, controlling the current value of the primary pump source to be equal to a first current value, wherein the reference ratio is the ratio of the primary power of the pulse laser to the rated power; when the input power percentage is larger than the reference ratio, controlling the current value of the primary pump source to be a first current value, controlling the current value of the secondary pump source to be in a linear relation with the input power percentage, and when the input power percentage is equal to one, controlling the current value of the secondary pump source to be equal to a second current value; the current value of the primary pump source determines the output power of the first-stage optical path, the current value of the secondary pump source and the output power of the first-stage optical path determine the output power of the second-stage optical path, and the output power of the second-stage optical path determines the output power of the pulse laser.

Optionally, the controller is further configured to obtain a corresponding first current value when the output power of the pulse laser is a primary power, where the first current value is a current value acting on a primary optical path of the pulse laser; and acquiring a corresponding second current value when the output power of the pulse laser is the rated power, wherein the second current value is a current value acting on a second-stage light path of the pulse laser.

In order to solve the above technical problem, a fourth aspect of the present invention is a method for processing a semiconductor device, including: the utility model provides a laser marking machine, laser marking machine includes above-mentioned pulse laser.

The beneficial effects of the embodiment of the invention are as follows: in contrast to the prior art, in an embodiment of the present invention, a method of adjusting output power of a pulsed laser comprises: judging whether the input power percentage of the pulse laser is smaller than or equal to a reference ratio; if yes, judging whether the input power percentage of the pulse laser is equal to zero or not; when the input power percentage of the pulse laser is equal to zero, controlling the current value in the first-stage light path of the pulse laser and the current value in the second-stage light path of the pulse laser to be zero; when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value in the first-stage light path to be in a linear relation with the input power percentage, and controlling the current value in the second-stage light path to be zero, and when the input power percentage is equal to the reference ratio, controlling the current value of the first-stage light path to be equal to a first current value, wherein the reference ratio is the ratio of the first-stage power of the pulse laser to the rated power. Therefore, the method can realize the adjustment of the output power of the pulse laser from zero, and ensure that the output power can be adjusted to a smaller ideal output power under the precise application occasion.

Drawings

One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.

FIG. 1 is a graph of prior art pulsed laser output power versus input power percentage;

FIG. 2 is a graph of current changes in the first stage optical path and the second stage optical path of a prior art pulsed laser;

FIG. 3 is a flow chart of a method for adjusting the output power of a pulsed laser according to an embodiment of the present invention;

FIG. 4 is a graph illustrating the variation of current in the first and second optical paths of a pulsed laser in a method of adjusting the output power of a pulsed laser according to an embodiment of the present invention;

FIG. 5 is a schematic flow chart of a method for adjusting the output power of a pulsed laser according to an embodiment of the present invention;

FIG. 6 is a flowchart illustrating a step of obtaining a first current value when the output power of the pulse laser is a first level power according to a first embodiment of the present invention;

FIG. 7 is a flowchart illustrating a step of obtaining a second current value when the output power of the pulse laser is a rated power according to the first embodiment of the present invention;

FIG. 8 is a schematic structural diagram of an apparatus for adjusting output power of a pulsed laser according to a second embodiment of the present invention;

fig. 9 is a schematic structural diagram of a pulse laser according to an embodiment of the present invention;

fig. 10 is a schematic structural diagram of a laser marking machine according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.

Referring to fig. 2, fig. 2 is a graph of current variation in a first-stage optical path and a second-stage optical path of a pulse laser in the prior art, where an X-axis is an input power percentage, a Y-axis is a current value, an a-line is a current curve of the first-stage optical path, a B-line is a current curve of the second-stage optical path, a current of the first-stage optical path in the related art is a constant value, the current of the first-stage optical path is used for generating laser light of the first-stage optical path, and the current of the first-stage optical path is in a linear relationship with the input power percentage, and increases with the increase of the input power percentage, so that when the constant value of the current of the first-stage optical path is larger, the corresponding value of the first-stage power is larger, and the power influence. It can be seen from fig. 1 and 2 that the output power of the entire laser is not a complete linearization, but a partial linearization, so that the laser output power cannot be adjusted to be smaller based on the power at point a.

The pulse laser is a pulse fiber laser, and particularly can be an acousto-optic Q-switched pulse fiber laser.

Implementation mode one

Referring to fig. 3, fig. 3 is a schematic flow chart of a method for adjusting output power of a pulse laser according to an embodiment of the present invention, in which the method for adjusting output power of a pulse laser according to an embodiment of the present invention includes:

step 101: judging whether the input power percentage of the pulse laser is smaller than or equal to a reference ratio, wherein the reference ratio is the ratio of the primary power and the rated power of the pulse laser;

the type of the pulse laser determines a primary power W1 and a rated power W2 of the pulse laser, wherein the primary power W1 is the rated power of the first-stage optical path, the rated power W2 of the pulse laser is the rated power of the whole pulse laser, and the primary power W1 of the pulse laser is smaller than the rated power W2 of the pulse laser. The input power percentage of the pulse laser is a value obtained by dividing the input power of the current pulse laser by the rated input power, the input power of the current pulse laser is the required output power contained in a power instruction given to the laser according to actual needs, and the instruction is generally embodied in the form of power input analog quantity. When the input power of the current pulse laser is zero, the input power percentage of the pulse laser is also zero, and when the input power of the current pulse laser is equal to the rated input power, the input power percentage of the pulse laser is one;

referring to fig. 4, fig. 4 is a graph illustrating current changes in the first optical path and the second optical path of the pulse laser in the method for adjusting the output power of the pulse laser according to the embodiment of the present invention, where the X axis is the input power percentage, the Y axis is the current value, the line a is the current curve of the first optical path, the line B is the current curve of the second optical path, k is the reference ratio, k is equal to the ratio of the first power W1 to the rated power W2 of the pulse laser, I1 is the first current value, and I2 is the second current value. Specifically, in the embodiment of the present invention, the first-stage optical path of the pulse laser includes a first-stage pump source, a first-stage beam combiner, a first-stage amplifier, and a first-stage optical isolator. The second-stage optical path of the pulse laser comprises a secondary pump optical fiber, a secondary pump source, a secondary beam combiner and a secondary passive optical fiber. The primary pump source and the secondary pump source are respectively composed of one or more pump sources. Further, line a in fig. 4 is a driving current curve of the primary pump source of the first-stage optical path, and line B is a driving current curve of the secondary pump source of the second-stage optical path.

Step 102: if the input power percentage of the pulse laser is smaller than or equal to the reference ratio, judging whether the input power percentage of the pulse laser is equal to zero or not;

step 103: when the input power percentage of the pulse laser is equal to zero, controlling the current value in the first-stage light path of the pulse laser and the current value in the second-stage light path of the pulse laser to be zero;

when the input power percentage of the pulse laser is zero, the current values in the first-stage light path and the second-stage light path are both zero.

Step 104: when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value in the first-stage light path and the input power percentage to be in a linear relation, and controlling the current value in the second-stage light path to be zero, and when the input power percentage is equal to the reference ratio, controlling the current value of the first-stage light path to be equal to a first current value, wherein the reference ratio is the ratio of the first-stage power of the pulse laser to the rated power;

referring to fig. 4, in step 104, the input power percentage of the pulse laser is greater than zero and less than or equal to the reference ratio k, the current value in the first optical path is linearly related to the input power percentage, when the input power percentage is equal to the reference ratio k, the current value in the first optical path is equal to the first current value, and the current value in the second optical path is still zero.

Step 105: when the input power percentage is larger than the reference ratio, controlling the current value in the first-stage light path to be a first current value, controlling the current value in the second-stage light path to be in a linear relation with the input power percentage, and when the input power percentage is equal to one, controlling the current value of the second-stage light path to be equal to a second current value;

referring to fig. 4, in step 105, when the input power percentage of the pulse laser is greater than the reference ratio k and less than or equal to 1, the current value in the first-stage optical path is always a constant value I1, when the input power percentage is equal to the reference ratio k, the current value in the first-stage optical path is equal to the first current value, the current value in the second-stage optical path is in a linear relationship with the input power percentage, and when the input power percentage is equal to one, the current value in the second-stage optical path is equal to the second current value;

the current value of the first-stage light path determines the output power of the first-stage light path, the current value of the second-stage light path and the output power of the first-stage light path determine the output power of the second-stage light path, and the output power of the second-stage light path determines the output power of the pulse laser.

Further, although the first power of the different types of pulse lasers is the same, the first current value and the second current value of the different types of pulse lasers are different, and therefore, referring to fig. 5, fig. 5 is another flow chart of a method for adjusting the output power of the pulse laser according to the first embodiment of the present invention, in the method according to the first embodiment of the present invention, step 101 may further include the following steps 106 to 107 for obtaining the first current value and the second current value of each type of pulse laser:

step 106: and acquiring a corresponding first current value when the output power of the pulse laser is primary power, wherein the first current value is a current value acting on a primary optical path of the pulse laser. Referring further to fig. 6, step 106 further includes the following steps 1061 and 1062:

step 1061: adjusting the output power of the first-stage optical path to first-stage power;

step 1062: and acquiring the current value in the first-stage optical path at the moment as a first current value.

Step 107: and acquiring a corresponding second current value when the output power of the pulse laser is the rated power, wherein the second current value is a current value acting on a second-stage optical path of the pulse laser. Referring further to fig. 7, step 107 further includes the following steps 1071 and 1072:

step 1071: keeping the current value in the first-stage light path as a first current value, and adjusting the output power of the pulse laser to a rated power;

the method specifically comprises the steps of keeping the current value of a primary pump source in a first-stage light path as a first current value, and adjusting the current value of a secondary pump source in a second-stage light path until the output power of the pulse laser is adjusted to the rated power.

Step 1072: and acquiring the current value in the second-stage light path at the moment and taking the current value as a second current value.

In one embodiment of the present invention, a method for adjusting output power of a pulsed laser includes: acquiring a corresponding first current value when the output power of the pulse laser is primary power; acquiring a corresponding second current value when the output power of the pulse laser is the rated power; when the input power percentage of the pulse laser is equal to zero, controlling the current value in the first-stage light path of the pulse laser and the current value in the second-stage light path of the pulse laser to be zero; when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value in the first-stage light path to be in a linear relation with the input power percentage, and controlling the current value in the second-stage light path to be zero, and when the input power percentage is equal to the reference ratio, the current value of the first-stage light path is equal to a first current value; when the input power percentage is larger than the reference ratio, the current value in the first-stage light path is controlled to be a first current value, the current value in the second-stage light path is controlled to be in a linear relation with the input power percentage, and when the input power percentage is equal to one, the current value of the second-stage light path is equal to a second current value. Therefore, the output power of the pulse laser can be adjusted from zero to adjust to an ideal smaller output power, the smaller ideal output power can be adjusted in precise application occasions, more user requirements are met, and user experience is improved. Moreover, because the output power of the first-stage optical path can be adjusted from zero, the selectable power range of the pump source of the first-stage optical path in the pulse laser is wider, for example, a pump source with lower power can be selected originally, and higher power output can be obtained by forward pumping or reverse pumping or forward and reverse pumping of a plurality of pump sources.

Second embodiment

Referring to fig. 8, fig. 8 is a schematic structural diagram of an apparatus for adjusting output power of a pulse laser according to a second embodiment of the present invention, where the second embodiment of the present invention provides an apparatus 20 for adjusting output power of a pulse laser, the apparatus 20 includes: the device comprises a first control module 21, a second control module 22, a third control module 23, a first obtaining module 24, a second obtaining module 25, a first judging module 26 and a second judging module 27.

An apparatus for regulating output power of a pulsed laser, comprising:

a first judging module 26, configured to judge whether the input power percentage of the pulse laser is smaller than or equal to a reference ratio;

a second determining module 27, configured to determine whether the input power percentage of the pulse laser is equal to zero if the input power percentage of the pulse laser is less than or equal to the reference ratio; the first control module 21 is configured to control a current value in a first-stage optical path of the pulse laser and a current value in a second-stage optical path of the pulse laser to be zero when the input power percentage of the pulse laser is equal to zero;

the second control module 22 is configured to control a current value in the first-stage optical path to be in a linear relationship with the input power percentage when the input power percentage of the pulse laser is greater than zero and less than or equal to a reference ratio, and control a current value in the second-stage optical path to be zero, and when the input power percentage is equal to the reference ratio, the current value of the first-stage optical path is equal to a first current value, where the reference ratio is a ratio of the first-stage power of the pulse laser to a rated power;

a third control module 23, configured to control a current value in the first-stage optical path to be a first current value and control a current value in the second-stage optical path to be in a linear relationship with the input power percentage when the input power percentage is greater than the reference ratio, and control the current value in the second-stage optical path to be equal to a second current value when the input power percentage is equal to one;

the current value of the first-stage light path determines the output power of the first-stage light path, the current value of the second-stage light path and the output power of the first-stage light path determine the output power of the second-stage light path, and the output power of the second-stage light path determines the output power of the pulse laser.

Optionally, the first obtaining module 24 is configured to obtain a corresponding first current value when the output power of the pulse laser is a first-stage power, where the first current value is a current value acting on a first-stage optical path of the pulse laser;

and a second obtaining module 25, configured to obtain a corresponding second current value when the output power of the pulse laser is the rated power, where the second current value is a current value applied to the second-stage optical path of the pulse laser.

Optionally, the first obtaining module 24 includes:

a first adjusting unit 241 for adjusting the output power of the first stage optical path to a first stage power;

a first acquisition unit 242 for acquiring a current value in the first-stage optical path as a first current value.

Optionally, the second obtaining module 25 includes:

a second adjusting unit 251 for maintaining the current value in the first-stage optical path as a first current value and adjusting the output power of the pulse laser to a rated power;

and a second acquiring unit 252 for acquiring the current value in the second-stage optical path as a second current value.

Optionally, the primary power and the rated power are determined by the kind of the pulse laser, wherein the primary power is smaller than the rated power.

The device implementation manner of the second embodiment of the present invention and the method implementation manner of the first embodiment of the present invention are based on the same inventive concept, and for specific contents and advantageous effects of the second embodiment of the present invention, reference is made to the contents of the first embodiment of the present invention, which is not described herein in detail.

It is worth mentioning that: it will further be appreciated by those skilled in the art that the various steps of the method of adjusting the output power of a pulsed laser described in connection with the embodiments disclosed herein can be embodied in electronic hardware, computer software, or combinations of both, and that the components or steps of the various embodiments have been described in the foregoing description generally in terms of their functionality in terms of hardware or software, depending upon the particular application of the technology and design constraints, for clarity of explanation of interchangeability of hardware and software.

Referring to fig. 9, fig. 9 is a schematic structural diagram of a pulse laser according to an embodiment of the present invention. As shown in fig. 9, the pulse laser 100 includes: a controller 11, a first-stage light path 11 and a second-stage light path 12;

wherein, the first-stage optical path 11 includes a first-stage pumping source; the second stage optical path 12 includes a secondary pump source; the controller 11 is respectively connected with the first-stage optical path 11 and the second-stage optical path 12, and the controller 11 is used for controlling the current value of the first-stage pumping source and the current value of the second-stage pumping source to be zero when the input power percentage of the pulse laser 100 is equal to zero; when the input power percentage of the pulse laser 100 is greater than zero and less than or equal to a reference ratio, controlling the current value of the primary pump source to be in a linear relationship with the input power percentage, and controlling the current value of the secondary pump source to be zero, and when the input power percentage is equal to the reference ratio, controlling the current value of the primary pump source to be equal to a first current value, wherein the reference ratio is the ratio of the primary power of the pulse laser 100 to the rated power; when the input power percentage is larger than the reference ratio, controlling the current value of the primary pump source to be a first current value, controlling the current value of the secondary pump source to be in a linear relation with the input power percentage, and when the input power percentage is equal to one, controlling the current value of the secondary pump source to be equal to a second current value; the current value of the primary pump source determines the output power of the first-stage optical path 11, the current value of the secondary pump source and the output power of the first-stage optical path 11 determine the output power of the second-stage optical path 12, and the output power of the second-stage optical path 12 determines the output power of the pulse laser 100. Optionally, the controller 11 is further configured to obtain a corresponding first current value when the output power of the pulse laser 100 is a first-stage power, where the first current value is a current value acting on the first-stage optical path 11 of the pulse laser 100; and acquiring a corresponding second current value when the output power of the pulse laser 100 is the rated power, wherein the second current value is a current value applied to the second-stage optical path 12 of the pulse laser 100.

In an embodiment of the present invention, the pulsed laser 100 includes: controller 11, first order light path 11, second order light path 12. The first stage optical path 11 includes a first stage pump source (not shown), a first stage beam combiner (not shown), a first stage amplifier (not shown), and a first stage optical isolator (not shown). The second stage optical path 12 includes a secondary pump fiber (not shown), a secondary pump source (not shown), a secondary beam combiner (not shown), and a secondary passive fiber (not shown). The primary pump source and the secondary pump source are respectively composed of one or more pump sources. Further, line a in fig. 4 is a driving current curve of the primary pump source of the first-stage optical path, and line B is a driving current curve of the secondary pump source of the second-stage optical path. The controller 11 is used for controlling the currents in the first-stage optical path 11 and the second-stage optical path 12, so that the output power of the pulse laser can be adjusted from zero, an ideal smaller output power can be adjusted, the ideal smaller output power can be adjusted on precise application occasions, more user requirements can be met, and user experience can be improved.

Referring to fig. 10, fig. 10 is a schematic structural diagram of a laser marking machine according to an embodiment of the present invention. As shown in fig. 10, the laser marker 200 includes: host computer 201, beat mark platform 202 and mirror subassembly 203 that shakes, host computer 201 is including beating mark integrated circuit board 2011, beat mark integrated circuit board 2011 respectively with host computer 201 and pulse laser 100's control circuit connection, host computer 201 controls pulse laser 100 through beating mark integrated circuit board 2011, beat mark platform 202 and be used for bearing by the mark thing (not marking), beat the support frame that mark platform 202 can go up and down according to focusing needs, installs on the support frame mirror subassembly 203 shakes. The pulse laser 100 further includes a laser output head 13, and the laser of the pulse laser 100 is output to the galvanometer assembly 203 through the laser output head 13, and is marked on the marked object on the marking table 202 through the galvanometer assembly 203. The galvanometer assembly 203 includes a galvanometer (not shown) and a field lens (not shown). The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment.

Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented by software plus a general hardware platform, and certainly can also be implemented by hardware. It will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by hardware related to instructions of a computer program, which can be stored in a computer readable storage medium, and when executed, can include the processes of the embodiments of the methods described above. The storage medium may be a magnetic disk, an optical disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), or the like.

The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (11)

1. A method of regulating output power of a pulsed laser, comprising:
judging whether the input power percentage of the pulse laser is smaller than or equal to a reference ratio, wherein the reference ratio is the ratio of the primary power and the rated power of the pulse laser;
if yes, judging whether the input power percentage of the pulse laser is equal to zero or not;
when the input power percentage of the pulse laser is equal to zero, controlling the current value in the first-stage light path of the pulse laser and the current value in the second-stage light path of the pulse laser to be zero;
when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value in the first-stage optical path to be in a linear relation with the input power percentage, and controlling the current value in the second-stage optical path to be zero, and when the input power percentage is equal to the reference ratio, controlling the current value of the first-stage optical path to be equal to a first current value, wherein the input power percentage of the pulse laser is the value obtained by dividing the input power of the pulse laser by the rated input power.
2. The method of claim 1, further comprising:
when the input power percentage is greater than the reference ratio, controlling the current value in the first-stage light path to be a first current value, controlling the current value in the second-stage light path to be in a linear relation with the input power percentage, and when the input power percentage is equal to one, controlling the current value of the second-stage light path to be equal to a second current value;
the current value of the first-stage optical path determines the output power of the first-stage optical path, the current value of the second-stage optical path and the output power of the first-stage optical path determine the output power of the second-stage optical path, and the output power of the second-stage optical path determines the output power of the pulse laser.
3. The method of claim 2, wherein prior to the step of controlling the current value in the first stage optical path of the pulsed laser and the current value in the second stage optical path of the pulsed laser to be both zero when the percentage of input power to the pulsed laser equals zero, the method further comprises:
acquiring a corresponding first current value when the output power of the pulse laser is primary power, wherein the first current value is a current value acting on a primary light path of the pulse laser;
and acquiring a corresponding second current value when the output power of the pulse laser is the rated power, wherein the second current value is a current value acting on a second-stage light path of the pulse laser.
4. The method of claim 3,
the step of obtaining a corresponding first current value when the output power of the pulse laser is a first-level power includes:
adjusting the output power of the first-stage optical path to the first-stage power;
and acquiring a current value in the first-stage optical path as a first current value.
5. The method of claim 4,
the step of obtaining a second current value corresponding to the output power of the pulse laser when the output power is the rated power includes:
keeping the current value in the first-stage light path as a first current value, and adjusting the output power of the pulse laser to a rated power;
and acquiring a current value in the second-stage light path as a second current value.
6. An apparatus for regulating output power of a pulsed laser, comprising:
the first judgment module is used for judging whether the input power percentage of the pulse laser is smaller than or equal to a reference ratio;
a second judging module, configured to judge whether the input power percentage of the pulse laser is equal to zero if the input power percentage of the pulse laser is smaller than or equal to a reference ratio;
the first control module is used for controlling the current value in the first-stage optical path of the pulse laser and the current value in the second-stage optical path of the pulse laser to be zero when the input power percentage of the pulse laser is equal to zero;
the second control module is configured to control a current value in the first-stage optical path to be in a linear relationship with the input power percentage when the input power percentage of the pulse laser is greater than zero and less than or equal to a reference ratio, and control the current value in the second-stage optical path to be zero, and when the input power percentage is equal to the reference ratio, the current value of the first-stage optical path is equal to a first current value, where the reference ratio is a ratio of a first-stage power of the pulse laser to a rated power, and the input power percentage of the pulse laser is a value obtained by dividing the current input power of the pulse laser by the rated input power.
7. The apparatus of claim 6, further comprising:
a third control module, configured to control a current value in the first-stage optical path to be a first current value and control a current value in the second-stage optical path to be in a linear relationship with the input power percentage when the input power percentage is greater than the reference ratio, and when the input power percentage is equal to one, the current value in the second-stage optical path is equal to a second current value;
the current value of the first-stage optical path determines the output power of the first-stage optical path, the current value of the second-stage optical path and the output power of the first-stage optical path determine the output power of the second-stage optical path, and the output power of the second-stage optical path determines the output power of the pulse laser.
8. The apparatus of claim 7, further comprising:
the first acquisition module is used for acquiring a corresponding first current value when the output power of the pulse laser is primary power, and the first current value is a current value acting on a primary optical path of the pulse laser; the first obtaining module comprises a first adjusting unit and a first obtaining unit, wherein the first adjusting unit is used for adjusting the output power of the first-stage optical path to the first-stage power; the first acquisition unit is used for acquiring a current value in the first-stage light path and taking the current value as a first current value;
the second acquisition module is used for acquiring a corresponding second current value when the output power of the pulse laser is rated power, and the second current value is a current value acting on a second-stage light path of the pulse laser; the second acquisition module comprises a second adjusting unit and a second acquisition unit, wherein the second adjusting unit is used for keeping the current value in the first-stage light path as a first current value and adjusting the output power of the pulse laser to a rated power; the second acquisition unit is used for acquiring the current value in the second-stage light path as a second current value.
9. A pulsed laser, comprising:
a first stage optical path including a first stage pump source;
a second stage optical path including a secondary pump source;
the controller is respectively connected with the first-stage optical path and the second-stage optical path and is used for controlling the current value of the first-stage pumping source and the current value of the second-stage pumping source to be zero when the input power percentage of the pulse laser is equal to zero; when the input power percentage of the pulse laser is larger than zero and smaller than or equal to a reference ratio, controlling the current value of the primary pump source to be in a linear relation with the input power percentage, and controlling the current value of the secondary pump source to be zero, and when the input power percentage is equal to the reference ratio, controlling the current value of the primary pump source to be equal to a first current value, wherein the reference ratio is the ratio of the primary power of the pulse laser to the rated power; when the input power percentage is larger than the reference ratio, controlling the current value of the primary pump source to be a first current value, controlling the current value of the secondary pump source to be in a linear relation with the input power percentage, and when the input power percentage is equal to one, controlling the current value of the secondary pump source to be equal to a second current value, wherein the input power percentage of the pulse laser is the value obtained by dividing the input power of the pulse laser at present by the rated input power;
the current value of the primary pump source determines the output power of the first-stage optical path, the current value of the secondary pump source and the output power of the first-stage optical path determine the output power of the second-stage optical path, and the output power of the second-stage optical path determines the output power of the pulse laser.
10. The pulsed laser of claim 9,
the controller is further configured to obtain a corresponding first current value when the output power of the pulse laser is a primary power, where the first current value is a current value acting on a primary optical path of the pulse laser; and acquiring a corresponding second current value when the output power of the pulse laser is the rated power, wherein the second current value is a current value acting on a second-stage light path of the pulse laser.
11. A laser marking machine, comprising:
the pulsed laser of claim 9 or 10.
CN201810965898.4A 2018-08-23 2018-08-23 Method and device for adjusting output power of pulse laser and pulse laser CN109088303B (en)

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