CN109027560A - A kind of high-precision XY mobile platform and its implementation - Google Patents

A kind of high-precision XY mobile platform and its implementation Download PDF

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Publication number
CN109027560A
CN109027560A CN201811068757.9A CN201811068757A CN109027560A CN 109027560 A CN109027560 A CN 109027560A CN 201811068757 A CN201811068757 A CN 201811068757A CN 109027560 A CN109027560 A CN 109027560A
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CN
China
Prior art keywords
driving
screw rod
axis
movement
mobile platform
Prior art date
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Granted
Application number
CN201811068757.9A
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Chinese (zh)
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CN109027560B (en
Inventor
夏民
徐位光
吴耀军
徐文丹
吴献军
伍先炜
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Shenzhen Three Step Micro Control Industry Co Ltd
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Shenzhen Three Step Micro Control Industry Co Ltd
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Priority to CN201811068757.9A priority Critical patent/CN109027560B/en
Publication of CN109027560A publication Critical patent/CN109027560A/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/04Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/043Allowing translations
    • F16M11/045Allowing translations adapted to left-right translation movement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • F16H25/2018Screw mechanisms with both screw and nut being driven, i.e. screw and nut are both rotating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/04Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/043Allowing translations
    • F16M11/048Allowing translations adapted to forward-backward translation movement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/18Heads with mechanism for moving the apparatus relatively to the stand
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06Means for converting reciprocating motion into rotary motion or vice versa

Abstract

The present invention provides a kind of high-precision XY mobile platform and its implementation, by the way that the X-axis driving mechanism for being equipped with the first driving part and the second driving part and the Y-axis driving mechanism for being equipped with third driving part and fourth drive part part is arranged;First driving part drives the slide block movement to drive the slide block movement different power in the same direction from the second driving part;The third driving part drives the Y-axis driving mechanism movement to drive the Y-axis driving mechanism to move different power in the same direction from fourth drive part part.Contact condition is in sliding block since the first driving part and the second driving part or third driving part and fourth drive part part control driving always, and it is moved along a direction, the backlash phenomenon occurred during moving back and forth is eliminated, to realize the high-precision control to sliding block.

Description

A kind of high-precision XY mobile platform and its implementation
Technical field
The present invention relates to nano-positioning device technical field more particularly to a kind of high-precision XY mobile platform and in fact Existing method.
Background technique
High-precision motor it is expensive, and it realizes more difficult, such as precision controlling of microscopical glass slide, a side Face needs accurate adaptation, such as motor to drive screw rod, and screw rod band movable slider, the gap between sliding block and screw rod needs accurate suitable Match, however there are remainings for the cooperation of the two, especially under the requirement of high-precision driving, sliding block is adapted to remaining with screw rod and wants It is small, and on the other hand, the tensity that will cause driving when remaining is too small again is excessive, abrasion be easy seriously, cause service life by Limit, further increases cost.
Existing screw rod is adapted to sliding block there is always the cooperation allowance of 40-50 silk (silk is equal to 10 microns), Therefore, ideal that gapless is cooperated to be extremely difficult in the high-precision control to sliding block, it is driven in this way in sliding block to side When, the control of motor driving can be very accurate, but when controlling round about, it finds that the cooperation of sliding block and screw rod is well-to-do Degree is the serious problems for influencing precision: the presence due to cooperating allowance causes sliding block there are certain backlash phenomenon, causes The position of sliding block is accurately controlled to being difficult to realize in the accurate control of motor.
It include that X-axis controls the drive motor in direction and the drive motor in Y-axis control direction in existing XY mobile platform, because This two drive motors similarly influence entire XY mobile platform to the accurate of slide position to the accurate control of slide position Control, the backlash phenomenon generated when how to overcome motor control slide block movement, the accurate control for improving slide position is current position Set problem to be solved in control.
Therefore, the existing technology needs further improvement.
Summary of the invention
In view of the above shortcomings in the prior art, it is an object of the invention to provide a kind of high-precision XY shifting for user Moving platform and its implementation, overcome in the prior art XY mobile platform when driving slide block movement since there are backlash phenomenons to lead The defect for causing slide position to be unable to accurately control.
Technical solution disclosed in this invention is as follows:
A kind of high-precision XY mobile platform, wherein include: X-axis driving mechanism and Y-axis driving mechanism;
The Y-axis driving mechanism includes: Y-axis guide rail and sliding block;The X-axis driving mechanism includes: Y-axis pedestal and X-axis guide rail; The Y-axis driving mechanism is arranged above the X-axis driving mechanism, and the X-axis driving mechanism drives the Y-axis driving mechanism band Move the slide block movement;
The Y-axis driving mechanism further include:
The first driving part and the second driving part above the Y-axis guide rail are set;First driving part drives institute The direction and the second driving part for stating slide block movement drive the contrary of the slide block movement;And first driving part exists After driving slide block movement to the terminal of Y-axis guide rail, driven using elder generation by the impedance of the first driving part and by the second driving part Backlash is eliminated, the slide block movement is then driven by the second driving part again;
The X-axis driving mechanism includes:
Third driving part and fourth drive part part above the X-axis guide rail are set;The third driving part drives institute It states the movement of Y-axis driving mechanism and drives the Y-axis driving mechanism to move different power in the same direction from fourth drive part part.
Optionally, first driving part includes: the first screw rod being arranged in the Y-axis guide rail and is arranged described First driving motor of the first screw rod one end;
Second driving part includes: the second screw rod being arranged in the Y-axis guide rail and is arranged in second screw rod one Second driving motor of end side;
First driving motor, for when the XY mobile platform is in the first station, driving the first screw rod movement;
Second driving motor, for when the XY mobile platform is in second station, driving the second screw rod movement;
First driving motor drives the movement of the first screw rod to drive the second screw rod to move different power in the same direction from the second driving motor.
Optionally, first screw rod and the second screw rod are arranged side by side.
Optionally, the third driving part includes: the third screw rod being arranged in the X-axis guide rail and is arranged described The third driving motor of third screw rod one end;
The fourth drive part part includes: the 4th screw rod being arranged in the X-axis guide rail and is arranged in the 4th screw rod one 4th driving motor of end side;
The third driving motor, for when the XY mobile platform is in 3rd station, driving the third screw rod to move;
4th driving motor, for when the XY mobile platform is in four stations, driving the 4th screw rod movement;
The third driving motor driving third screw rod movement moves different power in the same direction from the 4th driving the 4th screw rod of motor driven.
Optionally, the third screw rod and the 4th screw rod are arranged side by side.
Optionally, first driving motor and the second driving motor are separately positioned on the two of the first screw rod and the second screw rod End;Or first driving motor and the second driving motor are arranged at phase the same end of the first screw rod and the second screw rod.
Optionally, the third driving motor and the 4th driving motor are separately positioned on the two of third screw rod and the 4th screw rod End;Or the third driving motor and the 4th driving motor are arranged at phase the same end of third screw rod and the 4th screw rod.
Optionally, the sliding block further include: top plate, the first locating piece being respectively sleeved on the first screw rod and the second screw rod With the second locating piece, and the first sliding shoe below the first locating piece and the second sliding below the second locating piece Block.
Optionally, the Y-axis driving mechanism is additionally provided with: the third being respectively sleeved on third screw rod and the 4th screw rod is fixed Position block and the 4th locating piece, and the third sliding shoe below third locating piece and the below the 4th locating piece the 4th Sliding shoe;
The third sliding shoe and the 4th sliding shoe are flexibly connected with the X-axis driving mechanism slide rail.
On the basis of above-mentioned XY mobile platform, the invention also discloses a kind of realization sides of high-precision XY mobile platform Method, wherein include:
The X-axis driving mechanism for being equipped with the first driving part and the second driving part is set and third driving part and the are installed The Y-axis driving mechanism of four driving parts;
First driving part described in controlling when XY mobile platform is in the first station drives slide block movement, or control when XY shifting The second driving part drives slide block movement when moving platform is in second station;
And/or control the side of the third driving part driving Y-axis driving mechanism movement when XY mobile platform 3rd station To, or control fourth drive part part driving Y-axis driving mechanism movement when XY mobile platform is in four stations;
Wherein, first driving part does not drive the slide block movement and the second driving part driving slide block movement in the same direction not Same power;The third driving part drives the Y-axis driving mechanism movement to drive the Y-axis driving mechanism with fourth drive part part Movement different power in the same direction;
And first driving part is after terminal of the driving slide block movement to Y-axis guide rail, using elder generation by the first driving part Impedance simultaneously drives backlash by the second driving part, then drives the slide block movement by the second driving part again.
Beneficial effect, the present invention provides a kind of high-precision XY mobile platform and its implementation, are driven by setting X-axis Mechanism and Y-axis driving mechanism;First driving part described in controlling when XY mobile platform is in the first station drives slide block movement From the second driving part driving slide block movement different power in the same direction when motor is in second station, or control is when XY mobile platform The third driving part driving Y-axis driving mechanism movement and the fourth drive part when motor is in four stations when 3rd station Part drives Y-axis driving mechanism movement different power in the same direction.Since the first driving part or the second driving part are in drive control sliding block Movement, or in third driving part and the driving Y-axis driving mechanism movement of fourth drive part part, the direction of driving is remained It is constant, and before motion switch track, the backlash of current kinetic track is eliminated by the driving force of impedance and component to be driven, Motion switch track opens the movement of opposite direction again, the backlash phenomenon occurred during moving back and forth is eliminated, to realize High-precision control to sliding block.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of high-precision XY mobile platform provided by the present invention;
Fig. 2 is the structural schematic diagram of Y-axis driving mechanism in XY mobile platform of the present invention;
Fig. 3 is the configuration schematic diagram of the Y-axis driving mechanism provided by the present invention;
Fig. 4 is the step flow chart of the implementation method provided by the present invention.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer and more explicit, right as follows in conjunction with drawings and embodiments The present invention is further described.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, and do not have to It is of the invention in limiting.
Since the high-precision control of sliding block position back and forth is realized usually using motor in the prior art, and due to driving It can not be completely bonded between component and sliding block, need certain fitness, therefore cause to exist during driving back and forth Backlash phenomenon will lead to very high expense, therefore the present invention is for reality by the accurate accuracy for being adapted to raising position control It now mentions high control precision and avoids high cost again, provide a kind of high-precision XY mobile platform and its implementation.
A kind of high-precision XY mobile platform disclosed in this invention, as depicted in figs. 1 and 2, comprising: X-axis driving mechanism 20 With Y-axis driving mechanism 10;The Y-axis driving mechanism 10 includes: Y-axis guide rail and sliding block;The X-axis driving mechanism includes: Y-axis Pedestal and X-axis guide rail.
The Y-axis driving mechanism 10 is arranged above the X-axis driving mechanism 20;The X-axis driving mechanism 20 drives institute Stating Y-axis driving mechanism 10 drives the sliding block 110 to move;
The Y-axis driving mechanism 10 further include:
The first driving part and the second driving part for the side of being arranged on the guide rail;First driving part drives the cunning Direction and the second driving part of block movement drive the direction of the slide block movement different power in the same direction;
The X-axis driving mechanism 20 includes:
The third driving part and fourth drive part part for the side of being arranged on the guide rail;The third driving part drives the Y The movement of axis driving mechanism drives the Y-axis driving mechanism to move different power in the same direction from fourth drive part part.
Specifically, first driving part drives the direction of the slide block movement and the second driving part to drive the cunning The direction for meaning that the first driving part driving slide block movement of different power and the drive of the second driving part in the same direction of the direction of block movement Movable slider movement direction be it is identical, that is to say that the direction of two driving forces is identical during driving slide block movement, but It is the of different sizes of driving force, when the first driving part driving sliding block moves in a first direction, the first driving part at this time Driving force is main driving force, and the driving force of the second driving part is secondary driving force, and main driving force is greater than secondary driving, and pair driving can be with It is interpreted as tunable load.When real work load is larger, it can also be used as driving and use.
Similarly, the third driving part drives the direction of the Y-axis driving mechanism movement and fourth drive part part to drive Moving the direction of Y-axis driving mechanism movement, different power mean that the driving Y-axis driving mechanism movement of third driving part in the same direction Direction and fourth drive part part driving Y-axis driving mechanism movement direction be it is identical, that is to say driving Y-axis driving mechanism During movement, the direction of two driving forces is identical, but driving force is of different sizes, when third driving part drives Y-axis When driving mechanism moves in a first direction, the driving force of third driving part is main driving force, the drive of fourth drive part part at this time Power is secondary driving force, and main driving force is greater than secondary driving, and pair driving can be understood as tunable load.It is loaded in real work larger When, it can also be used as driving and use.
From the above, it is seen that XY stage apparatus disclosed in this invention tool is there are four station, when can respectively by Sliding block is there are four the directions that different driving part drives, respectively along two opposite directions of Y-axis and along two phases of X-axis Opposite direction.It is realized since sliding block moves in one direction by specific one driving part, each driving mechanism is slided in control It, can't be there is a phenomenon where moving back and forth in block motion process, and work as sliding block and be transformed into second sliding from the first sliding rail Before track movement, the first driving part is eliminated first with the impedance and second driving part driving of first driving part The backlash generated in driving movement, before second sliding rail opening movement, after being accurately positioned to second sliding rail, The driving campaign for starting the second driving part again is avoided caused when being moved back and forth using same driving part driving sliding block Backlash.And above method implementation method is simple, and expense is low.Likewise, in X-axis driving mechanism, third driving part and Four difference components are when driving the movement of Y-axis driving mechanism, before tracks switching occurs, to generating in current kinetic track Backlash eliminated after, be then turned on the first track movement determine, thus realize to driving movement accurate control.
As shown in Fig. 2, Y-axis driving mechanism disclosed in this invention includes: pedestal 150 and Y-axis guide rail 140, further includes: sliding Block 110;And the first driving part and the second driving part of 140 top of Y-axis guide rail are set;
First driving part includes: the first screw rod 120 and the first driving motor 160 being arranged in the Y-axis guide rail;
Second driving part includes: the second screw rod 130 and the second driving motor 170 being arranged in the Y-axis guide rail;
First driving motor 160, for driving first screw rod when the motor realization device is in the first station 120 movements;
Second driving motor 170, for driving second screw rod when the motor realization device is in second station 130 movements;
First driving motor 160 drives the direction of the first screw rod movement 120 and the second driving motor 170 to drive the second screw rod Movement 130 it is contrary.
Similarly, the third driving part includes: the third screw rod being arranged in the X-axis guide rail and is arranged described The third driving motor of third screw rod one end;
The fourth drive part part includes: the 4th screw rod being arranged in the X-axis guide rail and is arranged in the 4th screw rod one 4th driving motor of end side;
The third driving motor, for when the XY mobile platform is in 3rd station, driving the third screw rod to move;
4th driving motor, for when the XY mobile platform is in four stations, driving the 4th screw rod movement;
The third driving motor driving third screw rod movement moves different power in the same direction from the 4th driving the 4th screw rod of motor driven.
Preferably, first screw rod 120 is set side by side with the second screw rod 130 in order to realize that equivalent front and back drives effect It sets.Preferably, the third screw rod and the 4th screw rod are arranged side by side.
It is envisioned that first driving motor 160 and the second driving motor 170 are separately positioned on the first screw rod 120 and second screw rod 130 both ends;Or first driving motor 160 and the second driving motor 170 are arranged at first The same side of bar 120 and the second screw rod 130.It that is to say, the first driving motor 160 and the second driving motor 170 can be set Phase the same end of screw rod can also be separately positioned on the both ends of the first screw rod 120 and the second screw rod 130, as long as meeting control first The direction of screw rod movement moves different power in the same direction from the second screw rod.
Identical, the third driving motor and the 4th driving motor are separately positioned on the two of third screw rod and the 4th screw rod End;Or the third driving motor and the 4th driving motor are arranged at phase the same end of third screw rod and the 4th screw rod.
Specifically, as shown in figure 3, being the explosive view of above-mentioned straight line mould group, wherein the first screw rod and the second screw rod are side by side Setting, sliding block include: top plate, the first locating piece being respectively sleeved on the first screw rod and the second screw rod and the second locating piece, and The first fixed block and the second fixed block being respectively sleeved on Y-axis driving sliding rail.It is available from Fig. 3, wherein the first locating piece It is symmetrical arranged with the second locating piece, the first fixed block and the second fixed block are also symmetrical arranged, and top plate, the first locating piece, second Locating piece is fixed, the first fixed block and the second fixed block are fixedly connected.First driving motor and the second driving motor are respectively with One screw rod and the second screw rod are connected.
When needing to drive sliding block to a specific direction, can be set using two driving parts one of them, Then sliding block moves under the drive of the first screw rod or the second screw rod, when needing sliding block to the side opposite with the specific direction To when driving, then the driving that opposite direction is carried out with another screw rod can be used, so that the movement of both direction is different It is realized under driving part, avoids the same driving part and need backlash phenomenon caused by driving back and forth.
The X-axis driving mechanism is additionally provided with pedestal;The third positioning being respectively sleeved on third screw rod and the 4th screw rod Block and the 4th locating piece, and the third sliding shoe below third locating piece and the below the 4th locating piece the 4th are slided Motion block;The third sliding shoe and the 4th sliding shoe are flexibly connected with the X-axis guide rail.X-axis guide rail includes that a symmetrical left side is led Rail and right guide rail, third sliding shoe and the 4th sliding shoe are connected with left and right rail respectively.When the XY platform executes third work Position and when four stations, then sliding block can respectively in the both direction of X-axis under the drive of third screw rod and the 4th screw rod Left and right rail.
On the basis of above-mentioned XY mobile platform, the invention also discloses a kind of realization sides of high-precision XY mobile platform Method, as shown in Figure 4, comprising:
Step S1, setting is equipped with the X-axis driving mechanism of the first driving part and the second driving part and is equipped with third driving The Y-axis driving mechanism of component and fourth drive part part;
Step S2, the first driving part described in controlling when XY mobile platform is in the first station drives slide block movement, or control System second driving part when XY mobile platform is in second station drives slide block movement;
And/or control the side of the third driving part driving Y-axis driving mechanism movement when XY mobile platform 3rd station To, or control fourth drive part part driving Y-axis driving mechanism movement when XY mobile platform is in four stations;
Wherein, first driving part does not drive the slide block movement and the second driving part driving slide block movement in the same direction not Same power;The third driving part drives the Y-axis driving mechanism movement to drive the Y-axis driving mechanism with fourth drive part part Movement different power in the same direction;
And first driving part is after terminal of the driving slide block movement to Y-axis guide rail, using elder generation by the first driving part Impedance simultaneously drives elimination backlash by the second driving part, then drives the slide block movement by the second driving part again.
When that is to say above-mentioned control operation, one of four stations can individually open use, can also be respectively from X-axis A station starting is selected to use in driving mechanism and Y-axis driving mechanism.
A kind of high-precision XY stage apparatus disclosed by the invention and its implementation, since the first driving part or second drive Dynamic component is moved in drive control slide block movement, or in third driving part and fourth drive part part driving Y-axis driving mechanism When, the direction of driving remains constant, and before motion switch track, is disappeared by the driving force of impedance and component to be driven Except the movement of opposite direction is opened in the backlash of current kinetic track, then motion switch track, eliminate to go out during moving back and forth Existing backlash phenomenon, to realize the high-precision control to sliding block and Y-axis driving mechanism.
It, can according to the technique and scheme of the present invention and its hair it is understood that for those of ordinary skills Bright design is subject to equivalent substitution or change, and all these changes or replacement all should belong to the guarantor of appended claims of the invention Protect range.

Claims (10)

1. a kind of high-precision XY mobile platform characterized by comprising X-axis driving mechanism and Y-axis driving mechanism;
The Y-axis driving mechanism includes: Y-axis guide rail and sliding block;The X-axis driving mechanism includes: Y-axis pedestal and X-axis guide rail;
The Y-axis driving mechanism is arranged above the X-axis driving mechanism, and the X-axis driving mechanism drives the Y-axis driving machine Structure drives the slide block movement;
The Y-axis driving mechanism further include:
The first driving part and the second driving part above the Y-axis guide rail are set;First driving part drives institute It states slide block movement and drives the slide block movement different power in the same direction from the second driving part;
And first driving part is after terminal of the driving slide block movement to Y-axis guide rail, using the impedance of the first driving part And driven by the second driving part and eliminate backlash, the slide block movement is then driven by the second driving part again;
The X-axis driving mechanism includes:
Third driving part and fourth drive part part above the X-axis guide rail are set;The third driving part drives institute It states the movement of Y-axis driving mechanism and drives the Y-axis driving mechanism to move different power in the same direction from fourth drive part part.
2. high-precision XY mobile platform according to claim 1, which is characterized in that first driving part includes: to set It sets the first screw rod in the Y-axis guide rail and the first driving motor of the first screw rod one end is set;
Second driving part includes: the second screw rod being arranged in the Y-axis guide rail and is arranged in second screw rod one Second driving motor of end side;
First driving motor, for when the XY mobile platform is in the first station, driving the first screw rod movement;
Second driving motor, for when the XY mobile platform is in second station, driving the second screw rod movement;
First driving motor drives the movement of the first screw rod to drive the second screw rod to move different power in the same direction from the second driving motor.
3. high-precision XY mobile platform according to claim 1, which is characterized in that first screw rod and the second screw rod are simultaneously Row's setting.
4. high-precision XY mobile platform according to claim 1, which is characterized in that the third driving part includes: to set It sets the third screw rod in the X-axis guide rail and the third driving motor of the third screw rod one end is set;
The fourth drive part part includes: the 4th screw rod being arranged in the X-axis guide rail and is arranged in the 4th screw rod one 4th driving motor of end side;
The third driving motor, for when the XY mobile platform is in 3rd station, driving the third screw rod to move;
4th driving motor, for when the XY mobile platform is in four stations, driving the 4th screw rod movement;
The third driving motor driving third screw rod movement moves different power in the same direction from the 4th driving the 4th screw rod of motor driven.
5. high-precision XY mobile platform according to claim 4, which is characterized in that the third screw rod and the 4th screw rod are simultaneously Row's setting.
6. high-precision XY mobile platform according to claim 5, which is characterized in that first driving motor and second drives Dynamic motor is separately positioned on the both ends of the first screw rod and the second screw rod;Or first driving motor and the second driving motor it is equal Phase the same end of first screw rod and the second screw rod is set.
7. high-precision XY mobile platform according to claim 1, which is characterized in that the third driving motor and 4 wheel driven Dynamic motor is separately positioned on the both ends of third screw rod and the 4th screw rod;Or the third driving motor and the 4th driving motor it is equal Phase the same end of third screw rod and the 4th screw rod is set.
8. high-precision XY mobile platform according to claim 1, which is characterized in that the sliding block further include: top plate, difference The first locating piece and the second locating piece being set on the first screw rod and the second screw rod, and below the first locating piece One sliding shoe and the second sliding shoe below the second locating piece.
9. high-precision XY mobile platform according to claim 1, which is characterized in that the Y-axis driving mechanism is also set up: point It is not set in third screw rod and third locating piece and the 4th locating piece on the 4th screw rod, and below third locating piece Third sliding shoe and the 4th sliding shoe below the 4th locating piece;
The third sliding shoe and the 4th sliding shoe are flexibly connected with the X-axis driving mechanism slide rail.
10. a kind of implementation method of high-precision XY mobile platform, which is characterized in that comprising steps of
The X-axis driving mechanism for being equipped with the first driving part and the second driving part is set and third driving part and the are installed The Y-axis driving mechanism of four driving parts;
First driving part described in controlling when XY mobile platform is in the first station drives slide block movement, or control when XY shifting The second driving part drives slide block movement when moving platform is in second station;
And/or control the side of the third driving part driving Y-axis driving mechanism movement when XY mobile platform 3rd station To, or control fourth drive part part driving Y-axis driving mechanism movement when XY mobile platform is in four stations;
Wherein, first driving part does not drive the slide block movement and the second driving part driving slide block movement in the same direction not Same power;The third driving part drives the Y-axis driving mechanism movement to drive the Y-axis driving mechanism with fourth drive part part Movement different power in the same direction;
And first driving part is after terminal of the driving slide block movement to Y-axis guide rail, using the impedance of the first driving part And driven by the second driving part and eliminate backlash, the slide block movement is then driven by the second driving part again.
CN201811068757.9A 2018-09-13 2018-09-13 High-precision XY moving platform and implementation method thereof Active CN109027560B (en)

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Application Number Priority Date Filing Date Title
CN201811068757.9A CN109027560B (en) 2018-09-13 2018-09-13 High-precision XY moving platform and implementation method thereof

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Application Number Priority Date Filing Date Title
CN201811068757.9A CN109027560B (en) 2018-09-13 2018-09-13 High-precision XY moving platform and implementation method thereof

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CN109027560A true CN109027560A (en) 2018-12-18
CN109027560B CN109027560B (en) 2020-09-15

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