CN108983382A - A kind of multiple degrees of freedom optics zeroing device and adjust dress method - Google Patents

A kind of multiple degrees of freedom optics zeroing device and adjust dress method Download PDF

Info

Publication number
CN108983382A
CN108983382A CN201810983769.8A CN201810983769A CN108983382A CN 108983382 A CN108983382 A CN 108983382A CN 201810983769 A CN201810983769 A CN 201810983769A CN 108983382 A CN108983382 A CN 108983382A
Authority
CN
China
Prior art keywords
glass
pointer
adjusting
adjusts
freedom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810983769.8A
Other languages
Chinese (zh)
Other versions
CN108983382B (en
Inventor
骆颖欣
段会宗
李祝
薛超
叶贤基
梅健伟
罗俊
覃璇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sun Yat Sen University
National Sun Yat Sen University
Original Assignee
National Sun Yat Sen University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Sun Yat Sen University filed Critical National Sun Yat Sen University
Priority to CN201810983769.8A priority Critical patent/CN108983382B/en
Publication of CN108983382A publication Critical patent/CN108983382A/en
Application granted granted Critical
Publication of CN108983382B publication Critical patent/CN108983382B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

Abstract

The invention discloses a kind of multiple degrees of freedom optics zeroing device and dress method is adjusted, which includes fixed station, freedom degree decomposition mechanism, and the freedom degree is decomposed mechanism and is arranged on fixed station;It includes glass base, the first glass elements, the second glass elements that the freedom degree, which decomposes mechanism,;First glass elements are vertically set in the one side of glass base, and can horizontal direction translation or angular turn;Second glass elements are vertically set on the another side of the first glass elements, and can up and down direction translation or pitch angle rotation connection setting, the second glass elements are parallel with glass base;It is described to be arranged to adjustable optical element in the second glass elements upper surface;The glass base lower surface is connect with fixed station.The present invention can treat adjustable optical element multiple degrees of freedom adjusting simultaneously, feature easy to operate, accuracy is high, and the present invention is filled suitable for one chip high-precision integrated optical circuit precision tune.

Description

A kind of multiple degrees of freedom optics zeroing device and adjust dress method
Technical field
It is integrated in optical path more particularly, to one kind the present invention relates to high-precision optical path tune dress and integration field Optics in situ adjusts optimization tune dress method and device thereof to multiple degrees of freedom in technology simultaneously.
Background technique
Integrated super steady integrated optics system is the core technology in the fields such as precision optics measurement, high-precision optical instrument Component, especially the portable super steady optical system needed for the application fields such as aerospace is to geoscience, space science It is of great significance.
Integrated optical circuit includes the optical system commonly based on devices such as optical fiber, waveguides, its advantage is that it is light and convenient for dress Match, but its stability is easier to by ambient noise interference.It is higher for optical path complexity and more demanding to optical stabilization degree System, such as high-precision laser interferometer, the integrated optical platform of one chip are the super steady optical systems being more suitable for.One chip Integrated optical circuit refer to it is glued or using modes such as chemical catalysis bondings using adhesive agent, by glass reflector, lens, point The optical elements such as beam/light combination mirror are fixed in the same glass base according to required optical path, form a stable integration collection At space optical path.Since optical element and pedestal all use same glass material, and optical path will be complete after adhesive solidification It is fixed, keep its sufficiently stable without vulnerable to ambient noise interference.
Since one chip integrated optical circuit is non-adjustable after being adhesively fixed, the precision positioning of optical element and tune dress are its keys Technological difficulties.Bonding assembling between optical element lower for positioning accuracy request in optical path and pedestal, can be used template Auxiliary positioning is carried out to it;And critical optical elements higher for positioning accuracy request, as laser light combination mirror, fiber coupling or Collimation lens, laser imaging system etc. then need in the optical path to carry out it before bonding high-precision laser alignment and adjust.To one Beam gauss laser carries out adjusting at least five freedom degrees of needs relative to the alignment of other optical paths including: that bidimensional translates, bidimensional refers to Lengthwise position to angle and Gauss waist spot is adjustable.
Dress is adjusted generally to use high-precision ancillary equipment the accurate of key element in one chip integrated optical platform at present Such as three-coordinate instrument carries out accurate measurement by geometric coordinate to key element, in combination with optical path coordinate setting software into The assembling of row optical path.However, even if carrying out auxiliary adjustment using three-coordinate instrument, also can only for the integrated optical circuit of one chip The positioning that one degree of freedom translation and one degree of freedom rotation are carried out on light path plane is adjusted.Since susceptor surface and element are viscous Be between junction it is nonadjustable, for the optical axis height and pitch angle of third and fourth dimension, generally require torn open using freedom degree at present The mode divided, measures and adjusts to the coordinate of different freedom degrees several times.
But the above method is only applicable to the feelings that optical axis can accurately be estimated according to element geometric coordinate measured value Condition, for the optical effect face of nonplanar, non-perfect spherical surface, optical axis has imponderable inclined with geometry axle center Difference can not directly be carried out the true positioning and adjusting of laser beam by the measurement of geometric coordinate, can only be surveyed in real time by optics The mode of amount carries out multiple degrees of freedom in situ to optical path and adjusts simultaneously and assembly.
For above situation, this field be badly in need of one kind can to one chip integrated optical circuit carry out it is multivariant, real-time, Optics that is in situ and simply easily realizing adjusts and assembly method.
Summary of the invention
For the present invention in order to solve at present in integrated optics field, the optical element of nonplanar, non-perfect spherical surface is high-precision The case where degree adjusts dress that can not be measured by mechanical coordinate, and multiple degrees of freedom is difficult to realize for the integrated optical circuit of one chip The case where adjusting in situ simultaneously, the present invention provides one kind multiple degrees of freedom optics zeroing device and to adjust dress method, can mostly from It is adjusted by optics spending, real-time, in situ.
To realize aforementioned present invention purpose, the technical solution adopted is as follows: a kind of multiple degrees of freedom optics zeroing device, special Sign is: decomposing mechanism including fixed station, freedom degree, the freedom degree is decomposed mechanism and is arranged on fixed station;The freedom degree Decomposing mechanism includes glass base, the first glass elements, the second glass elements;First glass elements are vertically set on glass The upper surface of pedestal, and can horizontal direction translation or rotation;Second glass elements are vertically set on the first glass elements On another side, and can up and down direction translation or pitch angle rotation connection setting, the second glass elements are parallel with glass base;Institute It states and is arranged on the second glass elements to adjustable optical element;The glass base lower surface is connect with fixed station.
It preferably, further include the first adjusting pointer, the second adjusting pointer, third adjusting pointer, the 4th adjusting pointer, the 5th Adjust pointer, the 6th adjusting pointer;Described first side for adjusting pointer, the second adjusting pointer and the first glass elements can Dismantling connection;The third adjusts pointer, the lower surface of the 4th adjusting pointer and the second glass elements is detachably connected;Described Another side of five adjusting pointers, the 6th adjusting pointer respectively with the first glass elements and the second glass elements detachably connects It connects;The first adjusting pointer, the second adjusting pointer set are loaded on and move horizontally and rotate on mechanical adjusting mechanism, the third tune Loaded on moving up and down on pitching mechanical adjusting mechanism, the described 5th adjusts pointer, the 6th tune for section pointer, the 4th adjusting pointer set Pointer set is saved to be loaded on axial dimension regulating mechanism, it is described to move horizontally and rotate mechanical adjusting mechanism, move up and down and pitching Mechanical adjusting mechanism, axial dimension regulating mechanism are both secured on fixed station.
Preferably, the fixed station is set as inclination corner structure, wherein 45 ° of one side setting inclination, the adjacent other side 3 ~ 5 ° of face setting inclination, and the minimum angle of inclined surface is adjacent.
Preferably, the glass base and the first glass elements bonding connection, the second glass elements and the first glass elements Bonding connection, to adjustable optical element and the second glass elements bonding connection.
Preferably, mechanical adjusting mechanism is moved horizontally and rotates by operation, so that adjusting first adjusts pointer and second Adjust pointer make it is accurate moves horizontally, if described first adjust pointer and second adjust pointer to a direction it is mobile it is identical away from From when, the first glass elements and the second glass elements will translate in the horizontal direction;It is adjusted if described first adjusts pointer and second When pointer moving distance is not identical or moves in the opposite direction, the first glass elements and the second glass elements will be along level angle directions Rotation.
Preferably, by operation move up and down with pitching mechanical adjusting mechanism, thus adjust third adjust pointer and the 4th Adjust pointer make it is accurate moves up and down, if the third adjust pointer and the 4th adjust pointer to a direction it is mobile it is identical away from From when, the second glass elements will translate along the vertical direction;If the third adjusts pointer and the 4th and adjusts pointer moving distance not Identical or when moving in the opposite direction, the second glass elements will be rotated along pitch angle direction.
Preferably, by operating axial dimension regulating mechanism, so that adjusting the 5th adjusts pointer and the 6th adjusting pointer is made Accurate axial movement, if the described 5th adjust pointer and the 6th adjust pointer to same a direction it is mobile it is identical apart from when, the One glass elements and the second glass elements will be moved along light beam axial direction direction position.
A kind of tune dress method based on above-described multiple degrees of freedom zeroing device, it is as follows which fills method and step:
1) fixed station is selected: according to the fixed station of optical path composition and the size selection suitable dimension of optical platform;
2) it assembles: will move horizontally and rotate dimension mechanical adjusting mechanism and be loaded on the first adjusting pointer and the second adjusting pointer set One, will move up and down with pitching dimension mechanical adjusting mechanism and third adjust pointer and the 4th adjust pointer be assembled into one, Axial dimension mechanical adjusting mechanism and the 5th adjusting pointer and the 6th adjusting pointer are assembled into one;
3) fixed: to move horizontally and rotate dimension mechanical adjusting mechanism by what is be completed, move up and down and pitching dimension machinery Regulating mechanism and axial dimension mechanical adjusting mechanism are fixed on fixed station together with glass base, and make regulating mechanism with Suitable relative position and angle are between pedestal;
4) it is put into adjustable optical element: being put into optical platform by the first glass elements, the second glass elements and to adjustable optical element In optical path, the first glass elements, the second glass elements are connect with respective adjusting pointer, are fixed on to adjustable optical element The upper surface of two glass elements;
5) multiple degrees of freedom is adjusted: being carried out observation and optical parameter measurement to optical path on one side, is passed through on one side while operating three sets of differences The mechanical adjusting mechanism of dimension adjusts six different corresponding fine adjustment pointers, treats adjustable optical element and carries out five degree of freedom It is adjusted in situ while position and angle, optimizes optical path;
6) optical path is bonded: after the completion of optical path optimizing regulation, in the contact surface of glass base and the first glass elements, the first glass member Binding liquid is instilled at the contact surface of part and the second glass elements with fixed optical path, completes to adjust dress.
Beneficial effects of the present invention are as follows: glass base, the first glass elements, the second glass elements are respectively provided in the present invention It can relatively rotate, make the multiple degrees of freedom rotation in complicated optical beam path to adjustable optical element, realize multiple degrees of freedom tune dress.This hair Bright multiple degrees of freedom optics zeroing device does not need to assist using costly and complicated coordinate-measuring instrument, and structure and operation are opposite Simply, easy to accomplish.The method that multiple degrees of freedom optics zeroing device uses freedom degree spatial decomposition, makes to adjustable optical element not Tune dress with freedom degree can carry out simultaneously, without executing in time to its gradation, reduce the operating time, also increase the standard of adjusting True property.
Detailed description of the invention
Fig. 1 is that a kind of freedom degree of the present invention decomposes structural scheme of mechanism.
Fig. 2 is that a kind of freedom degree of the present invention decomposes mechanical adjustment pointer connection schematic diagram in mechanism.
Fig. 3 is a kind of multiple degrees of freedom of present invention structural block diagram in situ for adjusting dress method simultaneously.
In figure, member is learned wait dim in 1. fixed stations, 2. glass bases, 5. first glass elements, 6. second glass elements, 7. Part, the contact surface of 8. first glass elements and glass base, the contact surface of 9. first glass elements and the second glass elements, 10. First adjust pointer, 11. second adjust pointers, 12. thirds adjust pointer, 13. the 4th adjust pointers, 14. the 5th adjust pointers, 15. the 6th adjusting pointer, 16. move horizontally and rotate dimension mechanical adjusting mechanism, 17. move up and down and pitching dimension machinery tune Save mechanism, 18. axial dimension mechanical adjusting mechanisms.
Specific embodiment
The present invention will be described in detail with reference to the accompanying drawings and detailed description.
Embodiment 1
As shown in Figure 1, a kind of multiple degrees of freedom optics zeroing device, including fixed station 1, freedom degree decompose mechanism, the freedom degree Mechanism is decomposed to be arranged on fixed station 1;It includes glass base 2, the first glass elements 5, the second glass that the freedom degree, which decomposes mechanism, Glass element 6;First glass elements 5 are vertically set on the upper surface of glass base 2, and can horizontal direction translation or rotation; Second glass elements 6 are vertically set on the another side of the first glass elements 5, and can up and down direction translation or pitch angle Rotation, the second glass elements 6 are parallel with glass base 2;It is described to be arranged on the second glass elements 6 to adjustable optical element 7;It is described 2 lower surface of glass base is fixed on fixed station 1.Dress precision, first glass are adjusted in the present embodiment in order to improve experiment The perpendicularity deviation of element 5 and the second glass elements 6 is required less than 5 rads, to reduce the residual degree of freedom after freedom degree is decomposed Couple deviation.5 bonding connection of the glass base 2 and the first glass elements, the second glass elements 6 and the first glass elements 5 are viscous Knot connection, to 6 bonding connection of adjustable optical element 7 and the second glass elements.The freedom degree decomposes mechanism and is used for multiple freedom degrees Positioning adjusts the optical element optical path for optimizing dress to be adjusted.
The fixed station 1 is set as inclination corner structure, wherein 45 ° of one side setting inclination, adjacent another side setting 3 ~ 5 ° of inclination, and the minimum angle of inclined surface is adjacent, 1 bottom of fixed station is rectangle.The fixed station 1 is for fixing freedom degree Mechanism is decomposed, moves horizontally and rotates dimension regulating mechanism, move up and down and pitching dimension regulating mechanism and axial dimension tune Save mechanism.
As shown in Figure 2 and Figure 3, pointer 10, second is adjusted the invention also includes first adjust pointer 11, third adjusting pointer 12, the 4th the adjusting adjusting pointer 15 of pointer the 14, the 6th of pointer the 13, the 5th is adjusted;The first adjusting adjusting of pointer 10, second refers to Needle 11 and a side of the first glass elements 5 are detachably connected;The third adjusts pointer 12, the 4th adjusts pointer 13 and the The lower surface of two glass elements 6 is detachably connected;It is described 5th adjust pointer the 14, the 6th adjust pointer 15 respectively with the first glass Another side of element 5 and the second glass elements 6 is detachably connected;Described first, which adjusts pointer 10, second, adjusts pointer 11 It is assembled in and moves horizontally and rotate on mechanical adjusting mechanism 16, the third adjusts the adjusting pointer 13 of pointer the 12, the 4th and is assembled in It moves up and down on pitching mechanical adjusting mechanism 17, the 5th adjusting pointer the 14, the 6th adjusts pointer 15 and is assembled in axial dimension Spend regulating mechanism 18 on, it is described move horizontally and rotate mechanical adjusting mechanism 16, move up and down with pitching mechanical adjusting mechanism 17, Axial dimension regulating mechanism 18 is both secured on fixed station 1.
The present embodiment moves horizontally and rotates mechanical adjusting mechanism 16 by operation, so that adjusting first adjusts 10 He of pointer Second adjusting pointer 11 makees moving horizontally for precision, if described first adjusts pointer 10 and the second adjusting pointer 11 to same a direction When mobile same distance, the first glass elements 5 and the second glass elements 6 will translate in the horizontal direction;If first adjusting refers to Needle 10 and the second adjusting 11 moving distance of pointer be not identical or when moving in the opposite direction, the first glass elements 5 and the second glass member Part 6 will be rotated along level angle direction.
The present embodiment by operation move up and down with pitching mechanical adjusting mechanism 17, thus adjust third adjust 12 He of pointer 4th adjusting pointer 13 makees moving up and down for precision, if the third adjusts pointer 12 and the 4th and adjusts pointer 13 to same a direction When mobile same distance, the second glass elements 6 will translate along the vertical direction;If the third adjusts pointer 12 and the 4th adjusting refers to When 13 moving distance of needle is not identical or moves in the opposite direction, the second glass elements 6 will be rotated along pitch angle direction.
This implementation adjusts pointer by operating axial dimension regulating mechanism 18, to adjust the 5th and adjust pointer 14 and the 6th 15 make accurate axial movement, if the described 5th adjust pointer 14 and the 6th adjust pointer 15 to same a direction it is mobile it is identical away from From when, the first glass elements 5 and the second glass elements 6 will be moved along light beam axial direction direction position.
Tune based on the above multiple degrees of freedom optics zeroing device fills method, and it is specific as follows which fills step:
1) fixed station is selected: according to the fixed station 1 of optical path composition and the size selection suitable dimension of optical platform;
2) it assembles: will move horizontally and rotate dimension mechanical adjusting mechanism 16 and first and adjust pointer 10 and the second adjusting pointer 11 It is assembled into one, will move up and down and pitching dimension mechanical adjusting mechanism 17 and third adjusting pointer 12 and the 4th adjusting pointer 13 It is assembled into one, axial dimension mechanical adjusting mechanism 18 and the 5th adjusting pointer 14 and the 6th adjusting pointer 15 is assembled in one Body;
3) fixed: to move horizontally and rotate dimension mechanical adjusting mechanism 16 by what is be completed, move up and down and pitching dimension machine Tool regulating mechanism 17 and axial dimension mechanical adjusting mechanism 18 are fixed on fixed station 1 together with glass base 2, and to adjust It saves and is in suitable relative position and angle between mechanism and pedestal 2;
4) it is put into adjustable optical element: by the first glass elements 5, the second glass elements 6 and being put into optics to adjustable optical element 7 and put down In platform optical path.First glass elements 5, the second glass elements 6 and respective mechanical adjustment pointer are detachably connected, wait dim Learn the upper surface that element 7 is fixed on the second glass elements 6;
5) multiple degrees of freedom is adjusted: being carried out observation and optical parameter measurement to optical path on one side, is passed through on one side while operating three sets of differences The mechanical adjusting mechanism of dimension adjusts six different corresponding fine adjustment pointers, treats adjustable optical element and carries out five degree of freedom It is adjusted in situ while position and angle, optimizes optical path;Coupled optical power, spot size, light beam are referred to during fine adjustment Real-time measurement observation is carried out to equal optical parameters;
6) optical path is bonded: after the completion of optical path optimizing regulation, in the contact surface 8 of glass base 2 and the first glass elements 5, the first glass Binding liquid is instilled at the contact surface 9 of glass element 5 and the second glass elements 6 with fixed optical path, completes to adjust dress.The binding liquid can be with Using the epoxy resin of particular characteristic parameter, or there is the alkaline solution etc. of chemical adhesion effect to glass.
The present invention is to utilize the first glass elements 5 and the second glass member using 1 main function of fixed station of inclination corner structure The mutual extrusion under gravity of part 6, and it is close to corresponding mechanical adjustment pointer simultaneously, so that it is past to allow optical element to realize Return the possibility of adjusting.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair The restriction of embodiments of the present invention.Any modification done within the spirit and principles of the present invention and changes equivalent replacement Into etc., it should all be included in the scope of protection of the claims of the present invention.

Claims (8)

1. a kind of multiple degrees of freedom optics zeroing device, it is characterised in that: including fixed station (1), freedom degree decompose mechanism, it is described from Mechanism is decomposed by degree to be arranged on fixed station (1);It includes glass base (2), the first glass elements that the freedom degree, which decomposes mechanism, (5), the second glass elements (6);First glass elements (5) are vertically set on the upper surface of glass base (2), and can be horizontal Direction translation or rotation;Second glass elements (6) are vertically set on the another side of the first glass elements (5), and can on Lower direction translation or pitch angle rotation connection setting, the second glass elements (6) are parallel with glass base (2);It is described wait dim Element (7) are learned to be arranged on the second glass elements (6);Glass base (2) lower surface is connect with fixed station (1).
2. multiple degrees of freedom optics zeroing device according to claim 1, it is characterised in that: further include the first adjusting pointer (10), second pointer (11), third adjusting pointer (12), the 4th adjusting pointer (13), the 5th adjusting pointer (14), the 6th are adjusted It adjusts pointer (15);Described first adjusts a side of pointer (10), the second adjusting pointer (11) and the first glass elements (5) It is detachably connected;It is removable that the third adjusts pointer (12), the 4th adjusting pointer (13) and the lower surface of the second glass elements (6) Unload connection;5th adjusting pointer (14), the 6th adjusting pointer (15) are first with the first glass elements (5) and the second glass respectively Another side of part (6) is detachably connected;Described first adjusts pointer (10), the second adjusting pointer (11) is assembled in horizontal shifting In dynamic and rotation mechanical adjusting mechanism (16), the third adjusts pointer (12), the 4th adjusting pointer (13) is assembled in and moves down On dynamic and pitching mechanical adjusting mechanism (17), the described 5th adjusts pointer (14), the 6th adjusting pointer (15) is assembled in axial dimension It spends on regulating mechanism (18), it is described to move horizontally and rotate mechanical adjusting mechanism (16), move up and down and pitching mechanical adjustment machine Structure (17), axial dimension regulating mechanism (18) are both secured on fixed station (1).
3. multiple degrees of freedom optics zeroing device according to claim 1, it is characterised in that: the fixed station (1) is set as Corner structure is tilted, wherein 45 ° of one side setting inclination, 3 ~ 5 ° adjacent of another side setting inclination, and the minimum angle of inclined surface It is adjacent.
4. multiple degrees of freedom optics zeroing device according to claim 1, it is characterised in that: the glass base (2) and the One glass elements (5) bonding connection, the second glass elements (6) and the first glass elements (5) bonding connection, to adjustable optical element (7) with the second glass elements (6) bonding connection.
5. multiple degrees of freedom optics zeroing device according to claim 2, it is characterised in that: move horizontally and turn by operation Dynamic mechanical adjusting mechanism (16), so that adjusting the first adjusting pointer (10) and second adjusts the accurate horizontal shifting of pointer (11) work It is dynamic, if first adjusting pointer (10) and the second adjusting pointer (11) move same distance to same a direction, the first glass Element (5) and the second glass elements (6) will translate in the horizontal direction;If described first, which adjusts pointer (10) and second, adjusts pointer (11) when moving distance is not identical or moves in the opposite direction, the first glass elements (5) and the second glass elements (6) will be along horizontal angles Spend direction rotation.
6. multiple degrees of freedom optics zeroing device according to claim 2, it is characterised in that: move up and down and bow by operation Face upward mechanical adjusting mechanism (17), thus adjust third adjust pointer (12) and the 4th adjust pointer (13) make precision on move down It is dynamic, if third adjusting pointer (12) and the 4th adjusting pointer (13) move same distance to same a direction, the second glass Element (6) will translate along the vertical direction;If the third adjusts pointer (12) and the 4th and adjusts pointer (13) moving distance not phase When moving together or in the opposite direction, the second glass elements (6) will be rotated along pitch angle direction.
7. multiple degrees of freedom optics zeroing device according to claim 2, it is characterised in that: adjusted by operating axial dimension Mechanism (18) adjusts the axial movement that pointer (15) make precision to adjust the 5th and adjust pointer (14) and the 6th, if described the Five adjust pointer (14) and the 6th adjust pointer (15) to same a direction move it is identical apart from when, the first glass elements (5) and Second glass elements (6) will be moved along light beam axial direction direction position.
8. one kind fills method based on the tune of any one of claim 1 ~ 7 described device, it is characterised in that: the tune fills method and step such as Under:
1) fixed station is selected: according to the fixed station (1) of optical path composition and the size selection suitable dimension of optical platform;
2) it assembles: will move horizontally and rotate dimension mechanical adjusting mechanism (16) and refer to the first adjusting pointer (10) and the second adjusting Needle (11) is assembled into one, will move up and down and pitching dimension mechanical adjusting mechanism (17) and third adjusting pointer (12) and the 4th Pointer (13) are adjusted to be assembled into one, axial dimension mechanical adjusting mechanism (18) is adjusted pointer (14) and the 6th adjusting with the 5th Pointer (15) is assembled into one;
3) fixed: to move horizontally and rotate dimension mechanical adjusting mechanism (16) by what is be completed, move up and down and pitching dimension Mechanical adjusting mechanism (17) and axial dimension mechanical adjusting mechanism (18) and glass base (2) are fixed on together on fixed station (1), And make between regulating mechanism and pedestal (2) in suitable relative position and angle;
4) it is put into adjustable optical element: being put by the first glass elements (5), the second glass elements (6) and to adjustable optical element (7) In optical platform optical path, the first glass elements (5), the second glass elements (6) are connect with respective adjusting pointer, wait dim Learn the upper surface that element (7) are fixed on the second glass elements (6);
5) multiple degrees of freedom is adjusted: being carried out observation and optical parameter measurement to optical path on one side, is passed through on one side while operating three sets of differences The mechanical adjusting mechanism of dimension adjusts six different corresponding fine adjustment pointers, treats adjustable optical element and carries out five degree of freedom It is adjusted in situ while position and angle, optimizes optical path;
6) bond optical path: after the completion of optical path optimizing regulation, glass base (2) and the first glass elements (5) contact surface (8), Binding liquid is instilled at first glass elements (5) and the contact surface (9) of the second glass elements (6) with fixed optical path, completes to adjust dress.
CN201810983769.8A 2018-08-27 2018-08-27 Multi-degree-of-freedom optical adjusting device and adjusting method Active CN108983382B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810983769.8A CN108983382B (en) 2018-08-27 2018-08-27 Multi-degree-of-freedom optical adjusting device and adjusting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810983769.8A CN108983382B (en) 2018-08-27 2018-08-27 Multi-degree-of-freedom optical adjusting device and adjusting method

Publications (2)

Publication Number Publication Date
CN108983382A true CN108983382A (en) 2018-12-11
CN108983382B CN108983382B (en) 2020-05-29

Family

ID=64547104

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810983769.8A Active CN108983382B (en) 2018-08-27 2018-08-27 Multi-degree-of-freedom optical adjusting device and adjusting method

Country Status (1)

Country Link
CN (1) CN108983382B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111381335A (en) * 2018-12-28 2020-07-07 中国科学院长春光学精密机械与物理研究所 Light path component alignment device used in optical system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003007022A2 (en) * 2001-07-10 2003-01-23 Corning Incorporated Method and structure for aligning optical elements
CN2727700Y (en) * 2004-09-28 2005-09-21 上海大学 Multiple freedom degree precision optical measurement objective platform
CN101114057A (en) * 2007-07-25 2008-01-30 中国科学院上海技术物理研究所 5 dimensions optical adjusting rack coordinate decoupling method
CN201589883U (en) * 2009-12-30 2010-09-22 东莞华中科技大学制造工程研究院 Five-degree-of-freedom lens adjusting device
CN106291855A (en) * 2016-09-23 2017-01-04 上海理工大学 The manual adjustment mechanism of five degree of freedom can be realized

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003007022A2 (en) * 2001-07-10 2003-01-23 Corning Incorporated Method and structure for aligning optical elements
CN2727700Y (en) * 2004-09-28 2005-09-21 上海大学 Multiple freedom degree precision optical measurement objective platform
CN101114057A (en) * 2007-07-25 2008-01-30 中国科学院上海技术物理研究所 5 dimensions optical adjusting rack coordinate decoupling method
CN201589883U (en) * 2009-12-30 2010-09-22 东莞华中科技大学制造工程研究院 Five-degree-of-freedom lens adjusting device
CN106291855A (en) * 2016-09-23 2017-01-04 上海理工大学 The manual adjustment mechanism of five degree of freedom can be realized

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111381335A (en) * 2018-12-28 2020-07-07 中国科学院长春光学精密机械与物理研究所 Light path component alignment device used in optical system
CN111381335B (en) * 2018-12-28 2021-06-15 中国科学院长春光学精密机械与物理研究所 Light path component alignment device used in optical system

Also Published As

Publication number Publication date
CN108983382B (en) 2020-05-29

Similar Documents

Publication Publication Date Title
CN107543495B (en) Spacecraft equipment autocollimation measuring system, alignment method and measurement method
CN102333700B (en) Device for manufacturing aircraft structure
CN106908961B (en) Optical module adjustment method and tool based on infrared imaging
CN106043736A (en) Series-parallel connection mechanical structure for posture adjustment of components of airplane and posture adjusting method
CN109141223A (en) A kind of efficiently accurate calibration method of the laser interferometer light path based on PSD
CN107957626B (en) A kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip
CN103837080B (en) Sub-micrometer precision coaxial confocal towards micro assemby is directed at detection method and device
CN103411681B (en) Multimode area array infrared detector three-dimensional splicing structure and implementation method
CN108983382A (en) A kind of multiple degrees of freedom optics zeroing device and adjust dress method
CN106052570A (en) Nanometer-displacement-bench six-degree-of-freedom calibrating device
Zhong et al. An optimal method for improving volumetric error compensation in machine tools based on squareness error identification
CN209470666U (en) A kind of on-line detecting system applied to the micro- part automatic assembling of complicated multi-configuration
CN110285816A (en) A kind of moonlet on-board equipment high-precision attitude measuring system and method
CN108196133B (en) System and method for adjusting space alignment of three-axis turntable and spherical scanning device
CN109211112A (en) Detection device, screen-tensioning machine
CN107270837B (en) Drilling machine spindle deflection test system and method
CN111102918B (en) Automatic measuring system of cubic mirror coordinate system
CN109682396A (en) A kind of efficient assembling & adjusting system of benchmark prism and Method of Adjustment of star sensor
CN205674230U (en) A kind of mechanical hand fine adjustment type sighting device
CN109539989A (en) A kind of on-line detecting system applied to the micro- part automatic assembling of complicated multi-configuration
CN107320125A (en) It is a kind of to be used for toy or prosthese detecting location and the control device and its control method of posture
CN103594398B (en) A kind of chip controls method for multiple degrees of freedom flip-chip bonding process
CN110345870B (en) Five-degree-of-freedom error measuring device of precise linear displacement table
CN207081483U (en) A kind of attachment means
CN106052656A (en) Demarcation device laser module and laser demarcation device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant