CN108977668A - The heat shield structure of atom vapor - Google Patents
The heat shield structure of atom vapor Download PDFInfo
- Publication number
- CN108977668A CN108977668A CN201810633679.6A CN201810633679A CN108977668A CN 108977668 A CN108977668 A CN 108977668A CN 201810633679 A CN201810633679 A CN 201810633679A CN 108977668 A CN108977668 A CN 108977668A
- Authority
- CN
- China
- Prior art keywords
- heat shield
- cover board
- shell
- pedestal
- shield structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 32
- 238000007493 shaping process Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000003723 Smelting Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/04—Refining by applying a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
Abstract
The invention discloses a kind of heat shield structures of atom vapor, shell and setting including U-shaped structure are in the intracorporal heat shield of the shell, the shell includes sequentially connected left side arm, linking arm and right arm, and the channel passed through for atom vapor is formed between the left side arm, right arm；The heat shield includes the longitudinal inserted sheet being arranged in the left side arm and right arm and the lateral inserted sheet that is arranged in the linking arm.With good heat-insulation effect, the high advantage of vacuum degree.
Description
Technical field
The present invention relates to material science and technology fields, more particularly to a kind of heat shield structure of atom vapor.
Background technique
In existing vacuum metal smelting technique, atom vapor apparatus for shaping can provide metering function for atom vapor,
Move atom vapor according to certain track.But it is evaporated to the metallic vapour of atom vapor apparatus for shaping inner surface, when long
Between accumulate under will form certain metal accumulation, it is therefore desirable to control atom vapor apparatus for shaping heat itself scatter and disappear, to protect
Card atom vapor apparatus for shaping is in certain temperature field, so that vapor deposition arrives the gold of atom vapor apparatus for shaping inner wall surface
Molten state can be in by belonging to accumulation, be flowed back into crucible molten bath along atom vapor apparatus for shaping inner wall.Thermal conductivity is very low
Ceramic material becomes the first choice of heat shield structure, but ceramic material not shock resistance itself, easily loss and porous structure, can shadow
Ring the vacuum degree for arriving vacuum tank.The reliability of whole equipment can be had an impact, there are some potential safety problemss.
The atom vapor apparatus for shaping heat shield structure of existing structure is as shown in Figure 1, wrap up ceramic insulation block by tantalum shell
It constitutes, the ceramic insulation block is to be spliced into U-shaped structure by three parts, is embedded in tantalum shell.The tantalum shell includes by U-shaped
The sidewall paneling 11 of structure, be arranged in 11 bottom of sidewall paneling U-shaped structure bottom plate 12, the U-shaped knot at the top of sidewall paneling 11 is set
The top plate 12 of structure and the flanging 14 that 12 inside of bottom plate is arranged in, the inner wall of ceramic insulation block are directly in contact with atom vapor,
Leakproofness is barely satisfactory.
Summary of the invention
In view of the technical drawbacks of the prior art, it is an object of the present invention to provide a kind of heat shieldings of atom vapor
Structure, using the structure of inserted sheet, heat shielding effects are good, and avoid influence of the material for vacuum degree itself.
The technical solution adopted to achieve the purpose of the present invention is:
A kind of heat shield structure of atom vapor of the invention, shell and setting including U-shaped structure are in the shell
Multilayer insulation piece, the shell includes sequentially connected left side arm, linking arm and right arm, the left side arm, right arm it
Between form the channel that passes through for atom vapor；The heat shield includes the longitudinal inserted sheet being arranged in the left side arm and right arm
With the lateral inserted sheet being arranged in the linking arm.
In the above-mentioned technical solutions, longitudinal inserted sheet is equipped with 4-5 piece, and the transverse direction inserted sheet is equipped with 3-4 piece.The longitudinal direction
The piece number of inserted sheet is greater than the piece number of the lateral inserted sheet, to improve heat shielding effects.
In the above-mentioned technical solutions, the material of the shell is metal tantalum, and the material of the heat shield is metal molybdenum.
In the above-mentioned technical solutions, the heat shield is movably arranged in shell.
In the above-mentioned technical solutions, the heat shield is plugged in the slot being formed in inner walls.
In the above-mentioned technical solutions, the shell includes that pedestal is constituted with the cover board for being movably arranged on pedestal top, described
The bottom surface of cover board and the bottom surface of the pedestal are equipped with the slot for heat shield described in grafting.
In the above-mentioned technical solutions, the inside edge of the cover board and the interior plate of the pedestal align, the cover board
Outer ledge protrude from the outer panel of the pedestal.
In the above-mentioned technical solutions, the heat shield is equipped with screw hole, and heat shield is spirally connected on the base.
In the above-mentioned technical solutions, the pedestal and the corresponding position of heat shield are equipped with the fixation for fixing thermocouple
Hole, the thermocouple are threadedly secured on the heat shield structure, for detecting the temperature on atom vapor apparatus for shaping surface
Degree.
In the above-mentioned technical solutions, the shell include be in U-shape structure pedestal and the cover board on pedestal top is set, institute
Stating cover board includes left side arm cover board, right arm cover board and linking arm cover board.
In the above-mentioned technical solutions, the left side arm cover board, right arm cover board and linking arm cover board, which are equipped with, is used for grafting
The positioning tube of positioning pin, it is described longitudinal direction inserted sheet on position corresponding with the positioning tube be equipped with notch.
In the above-mentioned technical solutions, the bottom end of the shell is planar structure, and the top of the shell is equipped with to be set with connection
The standby groove to match.
Compared with prior art, the beneficial effects of the present invention are:
1. according to the thermal shield apparatus of the present invention program processing and fabricating, in conjunction with melting kettle, atom vapor apparatus for shaping and
Vacuum tank improves the safety and reliability of equipment for the technology of vacuum metal smelting purification.
2. heat shield structure is independent, applied widely, suitable for inside the vacuum tank and field of any required heat shielding
It closes.
3. the size of heat shield structure can be modified according to the difference of atom vapor apparatus for shaping structure, it is various to realize
The adaptation of Elemental composition steam apparatus for shaping.
4. can configure temperature measuring point in thermal shield apparatus side wall and rear, facilitate the detection each position of atom vapor apparatus for shaping
Temperature regime.
Detailed description of the invention
Fig. 1 is the schematic diagram of heat shield structure in the prior art.
Fig. 2 show the assembling schematic diagram of heat shield structure of the invention.
Fig. 3 show the decomposition diagram of heat shield structure of the invention
Fig. 4 show the structural schematic diagram of linking arm cover board of the invention.
Fig. 5 show the structural schematic diagram of right arm cover board of the invention.
Fig. 6 show the structural schematic diagram of left side arm cover board of the invention.
In figure: 1- pedestal, 2- slot, the longitudinal direction 3- inserted sheet, 4- transverse direction inserted sheet, the left side 5- arm cover board, 6- right arm cover board, 7-
Linking arm cover board, 8- positioning tube, 9- screw hole, 10- third fixation hole, the 4th fixation hole of 11-, the first fixation hole of 12-, 13- second
Fixation hole.
Specific embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.It should be appreciated that described herein
Specific embodiment be only used to explain the present invention, be not intended to limit the present invention.
Embodiment 1
The heat shield structure of atom vapor of the invention, shell and setting including U-shaped structure are intracorporal more in the shell
Layer heat shield, the shell includes sequentially connected left side arm, linking arm and right arm, shape between the left side arm, right arm
At the channel passed through for atom vapor；The heat shield includes 3 He of longitudinal inserted sheet being arranged in the left side arm and right arm
Lateral inserted sheet 4 in the linking arm is set.The shape of U-shaped structure makes what device was suitable for be mounted on atom vapor shaping
On device.
It is preferred that the piece number of the heat shield is 2-6 piece, to improve heat-proof quality.
It is preferred that the longitudinal direction inserted sheet is equipped with 4-5 piece, the transverse direction inserted sheet is equipped with 3-4 piece.The longitudinal direction inserted sheet
The piece number be greater than the piece number of the lateral inserted sheet, to improve heat shielding effects.
It is preferred that the material of the shell is metal tantalum, the material of the heat shield is metal molybdenum.The shell
With the selection of the heat shield material, integrally-built durability had both been enhanced, has reduced integrally-built weight, and avoid
Influence of the material for vacuum degree itself.
Embodiment 2
For the operability and practicability of prolongation structure, the present embodiment improves on the basis of embodiment 1, described
Heat shield is movably arranged in shell.The flexibility in use of the present apparatus can be improved in dismountable assembly method, can be according to practical need
Select the number of plies and material of heat shield.
It is preferred that the heat shield is plugged in the slot being formed in inner walls.Realize heat shield
Easy disassembly is conveniently replaceable the heat shield of a variety of materials, pattern.Molding can plug metallic insulation piece heat shielding, expansion finishes
The operability and practicability of structure.
It is preferred that the shell includes pedestal 1 and the cover board composition for being movably arranged on pedestal top, the cover board
Bottom surface and the bottom surface of the pedestal be equipped with the slot 2 for heat shield described in grafting.The marginal position of the cover board is spirally connected
On the top of the pedestal, dismountable pedestal is more convenient the dismounting of heat shield.
It is preferred that the inside edge of the cover board and the interior plate of the pedestal 1 align, outside the cover board
Side edge is equipped with upper screw hole, and pedestal top flanging is equipped with lower screw hole corresponding with the upper screw hole.Connect spiral shell
Nail sequentially passes through the upper screw hole and lower screw hole attaching nut, and the cover board is fixed on the base.
It is preferred that the heat shield is equipped with screw hole 9, to be spirally connected on the base.One side of heat shield
Face is positioned by slot, is on the other hand fixed by screw, two kinds of fixed forms improve fixed stability.
Embodiment 3
In order to optimize the structure of this heat shield structure, the shell include be in U-shape structure pedestal and be arranged on pedestal top
The cover board at end, the cover board include left side arm cover board 5, right arm cover board 6 and linking arm cover board 7.The cover board is screwed onto described
The top of pedestal.
It is preferred that the pedestal and the corresponding position of heat shield are equipped with the fixation hole for fixing thermocouple,
The thermocouple is threadedly secured on the heat shield structure, for detecting the temperature on atom vapor apparatus for shaping surface.
The pedestal includes that left base, right side pedestal and connection pedestal, the left base are equipped with the first fixation hole
12, longitudinal direction corresponding with first fixation hole 12 position of inserted sheet is equipped with the second fixation hole 13, first fixation
Hole 12 and the second fixation hole 13 are for fixing a thermocouple.
The connection pedestal is equipped with third fixation hole 10, and the transverse direction inserted sheet is corresponding with the third fixation hole 10
Position is equipped with the 4th fixation hole 11, and the third fixation hole 10, the 4th fixation hole 11 match for fixing another thermocouple.
In this way, can configure temperature measuring point in thermal shield apparatus side wall and rear, facilitate detection atom vapor apparatus for shaping each
The temperature regime at position.
It is positioned it is preferred that the left side arm cover board, right arm cover board and linking arm cover board are equipped with for grafting
The positioning tube 8 of pin, it is described longitudinal direction inserted sheet on position corresponding with the positioning tube 8 be equipped with notch.
This heat shield structure and steam apparatus for shaping can be fixed together by the positioning pin.
It is preferred that the bottom end of the shell is planar structure, the top of the shell is equipped with whole with atom vapor
Shape dress sets the groove to match.
The above is only a preferred embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (12)
1. the heat shield structure of atom vapor, which is characterized in that shell including U-shaped structure and setting the shell it is intracorporal every
Backing, the shell include sequentially connected left side arm, linking arm and right arm, are formed and are supplied between the left side arm, right arm
The channel that atom vapor passes through；The heat shield includes that the longitudinal inserted sheet being arranged in the left side arm and right arm and setting exist
Lateral inserted sheet in the linking arm.
2. heat shield structure as described in claim 1, which is characterized in that the longitudinal direction inserted sheet is equipped with 4-5 piece, and the transverse direction is inserted
Piece is equipped with 3-4 piece.
3. heat shield structure as described in claim 1, which is characterized in that the material of the shell is metal tantalum, described heat-insulated
The material of piece is metal molybdenum.
4. heat shield structure as described in claim 1, which is characterized in that the heat shield is movably arranged in shell.
5. heat shield structure as claimed in claim 4, which is characterized in that the heat shield, which is plugged on, to be formed in inner walls
Slot in.
6. heat shield structure as claimed in claim 4, which is characterized in that the shell includes pedestal and is movably arranged on pedestal
The cover board on top is constituted, and the bottom surface of the bottom surface of the cover board and the pedestal is equipped with the slot for heat shield described in grafting.
7. heat shield structure as claimed in claim 6, which is characterized in that the inside edge of the cover board is interior with the pedestal
Side plate aligns, and the outer ledge of the cover board protrudes from the outer panel of the pedestal.
8. heat shield structure as claimed in claim 6, which is characterized in that it is described to be screwed onto that the heat shield is equipped with screw hole
On pedestal.
9. heat shield structure as described in claim 1, which is characterized in that the pedestal and the corresponding position of heat shield are equipped with
For fixing the fixation hole of thermocouple.
10. heat shield structure as described in claim 1, which is characterized in that the shell include be in U-shape structure pedestal and set
The cover board on pedestal top is set, the cover board includes left side arm cover board, right arm cover board and linking arm cover board.
11. heat shield structure as claimed in claim 10, which is characterized in that the left side arm cover board, right arm cover board and company
It connects arm cover board and is equipped with the positioning tube for being used for grafting positioning pin, on the longitudinal direction inserted sheet on position corresponding with the positioning tube
Equipped with notch.
12. heat shield structure as described in claim 1, which is characterized in that the bottom end of the shell is planar structure, the shell
The top of body is equipped with the groove to match with atom vapor apparatus for shaping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810633679.6A CN108977668B (en) | 2018-06-20 | 2018-06-20 | Heat shield structure for atomic vapor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810633679.6A CN108977668B (en) | 2018-06-20 | 2018-06-20 | Heat shield structure for atomic vapor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108977668A true CN108977668A (en) | 2018-12-11 |
| CN108977668B CN108977668B (en) | 2024-04-26 |
Family
ID=64540773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810633679.6A Active CN108977668B (en) | 2018-06-20 | 2018-06-20 | Heat shield structure for atomic vapor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108977668B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0220086A1 (en) * | 1985-09-19 | 1987-04-29 | Commissariat A L'energie Atomique | Liquefied-gas transfer line comprising a thermal screen provided with a heat exchanger |
| CN1608147A (en) * | 2001-03-23 | 2005-04-20 | Memc电子材料有限公司 | Heat shield assembly for crystal puller |
| US20060162662A1 (en) * | 2005-01-21 | 2006-07-27 | Mitsubishi Heavy Industries, Ltd. | Vacuum vapor deposition apparatus |
| RU2005127408A (en) * | 2005-08-31 | 2007-03-10 | Федеральное государственное унитарное предпри тие"Сибирский химический комбинат" (RU) | Smelting crucible |
| US20140007814A1 (en) * | 2012-07-04 | 2014-01-09 | Riber | Evaporation device for a vaccum deposition apparatus and vacuum deposition apparatus comprising such an evaporation device |
| CN104582438A (en) * | 2014-12-25 | 2015-04-29 | 苏州佳世达光电有限公司 | Cooling structure |
| US20150375299A1 (en) * | 2014-06-25 | 2015-12-31 | Halliburton Energy Services, Inc. | Insulation enclosure with a radiant barrier |
| JP2016003812A (en) * | 2014-06-17 | 2016-01-12 | 明智セラミックス株式会社 | Graphite crucible |
| CN105704852A (en) * | 2016-04-08 | 2016-06-22 | 核工业理化工程研究院 | Ultrahigh temperature heat shielding device for vacuum electromagnetic induction heating |
| CN106893981A (en) * | 2017-03-30 | 2017-06-27 | 南京大学 | A kind of crucible for improving evaporation line stability and the source stove with the crucible |
| US20180245208A1 (en) * | 2015-08-21 | 2018-08-30 | Flisom Ag | Evaporation source |
| CN208501075U (en) * | 2018-06-20 | 2019-02-15 | 核工业理化工程研究院 | A kind of heat shield structure of atom vapor |
-
2018
- 2018-06-20 CN CN201810633679.6A patent/CN108977668B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0220086A1 (en) * | 1985-09-19 | 1987-04-29 | Commissariat A L'energie Atomique | Liquefied-gas transfer line comprising a thermal screen provided with a heat exchanger |
| CN1608147A (en) * | 2001-03-23 | 2005-04-20 | Memc电子材料有限公司 | Heat shield assembly for crystal puller |
| US20060162662A1 (en) * | 2005-01-21 | 2006-07-27 | Mitsubishi Heavy Industries, Ltd. | Vacuum vapor deposition apparatus |
| RU2005127408A (en) * | 2005-08-31 | 2007-03-10 | Федеральное государственное унитарное предпри тие"Сибирский химический комбинат" (RU) | Smelting crucible |
| US20140007814A1 (en) * | 2012-07-04 | 2014-01-09 | Riber | Evaporation device for a vaccum deposition apparatus and vacuum deposition apparatus comprising such an evaporation device |
| CN103526163A (en) * | 2012-07-04 | 2014-01-22 | 瑞必尔 | Evaporation device for a vacuum-deposition apparatus and vacuum-deposition apparatus including such an evaporation device |
| JP2016003812A (en) * | 2014-06-17 | 2016-01-12 | 明智セラミックス株式会社 | Graphite crucible |
| US20150375299A1 (en) * | 2014-06-25 | 2015-12-31 | Halliburton Energy Services, Inc. | Insulation enclosure with a radiant barrier |
| CN104582438A (en) * | 2014-12-25 | 2015-04-29 | 苏州佳世达光电有限公司 | Cooling structure |
| US20180245208A1 (en) * | 2015-08-21 | 2018-08-30 | Flisom Ag | Evaporation source |
| CN105704852A (en) * | 2016-04-08 | 2016-06-22 | 核工业理化工程研究院 | Ultrahigh temperature heat shielding device for vacuum electromagnetic induction heating |
| CN106893981A (en) * | 2017-03-30 | 2017-06-27 | 南京大学 | A kind of crucible for improving evaporation line stability and the source stove with the crucible |
| CN208501075U (en) * | 2018-06-20 | 2019-02-15 | 核工业理化工程研究院 | A kind of heat shield structure of atom vapor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108977668B (en) | 2024-04-26 |
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