CN108872261A - The defect detecting device of film surface - Google Patents
The defect detecting device of film surface Download PDFInfo
- Publication number
- CN108872261A CN108872261A CN201810365670.1A CN201810365670A CN108872261A CN 108872261 A CN108872261 A CN 108872261A CN 201810365670 A CN201810365670 A CN 201810365670A CN 108872261 A CN108872261 A CN 108872261A
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- China
- Prior art keywords
- light
- measurement object
- illumination portion
- film surface
- detecting device
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention is the detection device of the defect on detection measurement object surface, it is related to a kind of defects detection dress of film surface, the pattern of the acquisition is analyzed by generation light and by the pattern acquisition unit for the pattern that the light of the generation is generated to the illumination portion of the measurement object surface incidence and acquisition by the light of the incidence, detect the defect of film surface, also, the central axis of the illumination portion is consistent with the central axis of the pattern acquisition unit.
Description
Technical field
The present invention relates to the defect detecting devices of film surface, in particular, being related to a kind of to the irradiation of the measurement object of test object
Oblique illumination, to detect the defect detecting device in the film surface of the defect of the Surface Creation of the measurement object.
Background technique
In general, the type in the defect of the film surface generation for the object to be measured has protrusion, recess, scratch etc.,
In the past in order to confirm that above-mentioned defect has used various defect detecting systems.
Above-mentioned detection system installs ring illumination in order to detect defect, in detection device, from various angles to object
Surface irradiation light, to measure defect.
But the above-mentioned defects detection is applicable to larger-size measurement object, and the lesser measurement object of size, nothing
Method installs the ring illumination, and is not available the ring illumination.
Also, lower tilt angle is formed for surface, by the common axis optical system of vertical direction incident ray
Technology can not detect the defect.
Advanced technical literature
Patent document
(patent document 1) Korean Patent Laid publication number the 10-2007-0024393rd
The content of invention
Technical problems to be solved by the inivention
In order to solve the problem above-mentioned, the present invention provides a kind of film table of measurement object for being substituted for measurement larger size
The ring illumination of the defect in face, and the illumination with effect identical with the ring illumination.
To which, the present invention provides a kind of detection device of the defect on detection measurement object surface, by generating light and by institute
The light for stating generation is obtained to the illumination portion of measurement object surface incidence and acquisition by the pattern of the pattern of the photogenerated of the incidence
Portion and the pattern for analyzing acquisition, detect the defect of film surface, also, between the illumination portion and the measurement object, install
The light separation unit that the light generated by the illumination portion is separated, so that from the light that the illumination portion generates to the measurement object
Can be obliquely incident when the incidence of surface, as a result, from various angle incidence oblique lights, and the measurement object can be seen clearly
Defect.
But the purpose of the present invention is not limited to the above-mentioned purpose being related to, and those skilled in the art of the invention answer
When the other purposes that understanding is not directed to.
The technical solution solved the problems, such as
To achieve the goals above, detection device of the present invention as the defect on detection measurement object surface, by generating light
And the light of the generation to the illumination portion of the measurement object surface incidence and is obtained into the figure generated by the light of the incidence
The pattern acquisition unit of case analyzes the pattern of the acquisition, detects the defect of film surface, also, in the top shape of the measurement object
At there is object lens.
At this point, by the vertical center axis at the center at the center and object lens of the pattern acquisition unit with pass through the photograph
The horizontal middle spindle at the center in bright portion meets between the pattern acquisition unit and the object lens, is also formed through the level
Place that central axis and the vertical center axis meet and make reflecting surface tilt the beam splitters of 45 ° of ground configurations, by the illumination
The light that portion generates is by the beam splitter reflection, and incident to the surface of the measurement object, the light reflected from the measurement object penetrates
The beam splitter is incident to the pattern acquisition unit.
Also, it is formed with light separation unit between the illumination portion and the measurement object, will be generated by the illumination portion
Light separated, enable from the light that the illumination portion generates to obliquely incident when the measurement object surface incidence.
At this point, the smooth separation unit is formed by rounded slot piece, the central axis of the rounded slot piece and the illumination portion
Central axis it is consistent.
Also, it is formed in the rounded slot piece so that the light that passes through of the light of the illumination portion is by portion, also, described
Light is formed between the outer peripheral surface and inner peripheral surface that are formed on the basis of the central axis of the rounded slot piece by portion, the inner circumferential
The inside in face and the outside of the outer peripheral surface form the structure of blocking.
Also, the donut shape with inner peripheral surface and outer peripheral surface, institute are formed by the wavefront of the light in portion by the light
The light for stating donut shape passes through object lens to when the surface incidence for measuring object, has the inner circumferential of the light of the donut shape
The diameter of face and outer peripheral surface gradually becomes smaller incidence, and makes the imaging of the light of the donut shape obliquely to the table of measurement object
Face is incident.
Also, between the measurement object and the pattern acquisition unit be configured with aperture, the aperture can adjust so that
The aperture bore that light passes through.
Also, the illumination portion is formed by light source and illuminating lens, and the pattern acquisition unit is by camera and imaging len
It is formed.
Feature and benefit of the invention by by the following detailed description referring to attached drawing definitely.
Also, this specification and right to go term and word used in book cannot with the meaning interpretation of dictionary,
To illustrate the invention of its own in most preferred method based on inventor and the concept that can suitably define term
Principle is explained with meeting meaning and the concept of technical thought of the invention.
The effect of invention
According to such as above-mentioned present invention, have the following effects that：When detection is formed in the defect on the surface of measurement object, so that
The light generated from illumination portion is obliquely incident, and is able to detect the defect for being formed in the surface of the measurement object.
Further, it is possible to which the light that freely adjustment is generated from the illumination portion is obliquely separated to the light of the measurement object incidence
The length in portion, thus, it is possible to various angle incident lights.
Also, it is also formed with the aperture for according to size depth of focus being converted, and it is fuzzy or clear to adjust object,
The size and angle of aperture and inclination angle are adjusted, and compactly detection can be become apparent from and be formed in lacking for the surface for measuring object
It falls into.
Detailed description of the invention
Fig. 1 is the attached drawing for showing the defect detecting device of previous film surface；
Fig. 2 is the attached drawing for showing the detection device of the embodiment of the present invention；
Fig. 3 is the attached drawing for showing the detection device of the embodiment of the present invention；
Fig. 4 is the attached drawing for showing the rounded slot piece for the detection device for being formed in the embodiment of the present invention；
Fig. 5 is the attached drawing for showing the aperture for the detection device for being formed in the embodiment of the present invention.
Symbol description
110:Pattern acquisition unit 111:Camera
112:Imaging len 120:Object lens
130:Beam splitter 140:Aperture
200:Illumination portion 210:Light source
220:Illuminating lens 230:Rounded slot piece
231:Light separation unit 300:Measure object
Specific embodiment
Hereinafter, being described with reference to the preferred embodiment of the present invention.The thickness of the line illustrated during this in the accompanying drawings or
Size of constituent element etc. can be greatly exaggerated to show, and advantageously be illustrated so as to clear.
Also, aftermentioned term be according to the present invention in function and the term that defines, can be according to the intention of fortune user
Or convention and difference.Therefore, to be given a definition based on the content that entire chapter illustrates for above-mentioned term.
To following embodiments and non-limiting interest field of the invention, only in claim of the invention
The illustrative item of the constituent element of proposition, is contained in the technical idea in entire description of the invention, and includes that can set
The embodiment for changing the constituent element of the equipollent of the constituent element of claims belongs to interest field of the invention.
The defect detecting device for the film surface that the preferred embodiments of the present invention are described in detail referring to the drawings, but, this
Invention is not limited to following examples.
Fig. 1 is the attached drawing for showing the defect detecting device of previous film surface；Fig. 2 is to show the embodiment of the present invention
The attached drawing of detection device；Fig. 3 is the attached drawing for showing the detection device of the embodiment of the present invention；Fig. 4 is to show to be formed in the present invention
Embodiment detection device rounded slot piece attached drawing；Fig. 5 is to show the detection device for being formed in the embodiment of the present invention
Aperture attached drawing.
Referring to Fig.1, the defect detecting device on the surface used in the past, by camera 11, imaging len 12, beam splitter 30,
Illuminating lens 41, the illumination 40 that light source occurs and the formation of object lens 20 positioned at the top of object, the surface of observed objects 10 lack
It falls into.
But the light source of the detection device used in the past is only by vertical direction incidence, therefore, detection should not be suitble to have lower
The defect of angle.
In order to solve the problem above-mentioned, the defect detecting device of film surface of the invention is formed as follows.
Referring to Fig. 2 and Fig. 3, the detection device of the defect as detection measurement object surface, by generating light and by the life
At light obtained to the illumination portion 200 of measurement object surface incidence and acquisition by the pattern of the pattern of the photogenerated of the incidence
It takes portion 110 to analyze the pattern of the acquisition, detects the defect of film surface, also, be formed with object on the top of the measurement object
Mirror.
At this point, the film surface is formed at the film on the surface for the measurement object 300 to be detected, the illumination portion 200
It is made of light source 210 and illuminating lens 220, the pattern acquisition unit 110 is made of camera 111 and imaging len 112.
Also, by the vertical center axis CA1 at the center at the center and object lens 120 of the pattern acquisition unit 110 with
By the horizontal middle spindle CA2 at the center of the illumination portion 200 between the pattern acquisition unit 110 and the object lens 120 phase
It meets.
Also, it is also formed with beam splitter 130, is met by the horizontal middle spindle CA2 and the vertical center axis CA1
Place, and reflecting surface is made to tilt 45 °, the light generated by the illumination portion 200 is reflected from the beam splitter 130, to described
The surface for measuring object 300 is incident, and the light reflected from the measurement object 300 penetrates the beam splitter 130, to the pattern acquisition unit
110 is incident.
At this point, it is formed with light separation unit 231 between the illumination portion 200 and the measurement object 300, it will be by the photograph
The light that bright portion 200 generates is separated, so as to be injected from the light that the illumination portion 200 generates to the surface of the measurement object 300
When obliquely inject.
The smooth separation unit 231 is made of rounded slot piece 230, the central axis and the photograph of the rounded slot piece 230
The central axis in bright portion 200 is consistent.
Also, it is formed in the rounded slot piece 230 so that the light that passes through of the light of the illumination portion 200 is by portion 240,
The light is located at the outer peripheral surface 242 and inner peripheral surface that are formed on the basis of the central axis of the rounded slot piece 230 by portion 240
Between 241, the outside of the inside of the inner peripheral surface 241 and the outer peripheral surface 242 forms the structure of blocking.
At this point, the size of the smooth separation unit 231 can be adjusted.
The distance r1 of the light separation unit formed in described Fig. 2 and the length l 1 of rounded slot are different from described Fig. 3
The distance r2 of the light separation unit of the diagram and length l2 of rounded slot.
At this point, the distance r1, r2 of the smooth separation unit length l 1 according to the rounded slot piece, l2 and it is different, with
The difference of the distance r1, r2 of the smooth separation unit are reflected towards inclining for the incident light of the object lens 120 by the beam splitter 130
Gradient is different.
To by adjusting the distance length of the smooth separation unit 231, so that by the illuminating lens 220 to institute
The angle for stating the incident light source of measurement object 300 is form differently, and can from various angles the film surface, with accurate
Ground measures the defect for being formed in surface.
Also, it if removing the rounded slot piece 230 from the defect detecting device of the film surface, can coaxially shine
Bright use can be used if being formed with the rounded slot piece 230 with oblique illumination, and with coaxial-illuminating or be inclined as needed
Oblique illumination uses.
Referring to Fig. 4, the sweet tea with inner peripheral surface 241 and outer peripheral surface 242 is formed by the wavefront of the light in portion 240 by the light
Sweet tea loop-shaped, the light of the donut shape have described when being injected by object lens 120 to the surface of the measurement object 300
The inner peripheral surface 241 of the light of donut shape and the reduced diameter of outer peripheral surface 242 are incident, and make the donut shape
The surface of the imaging of light to measurement object 300 is obliquely incident.
Also, by adjusting the distance length of the smooth separation unit 231, the size of the inner peripheral surface 241 and outer peripheral surface 242
It converts, and the amount by light by the light source in portion 240 can be adjusted.
Also, aperture 140, the aperture 140 are configured between the measurement object 300 and the pattern acquisition unit 110
140 bore of aperture by light can be adjusted.
Referring to Fig. 5, by adjusting the size of the aperture 140, and depth of focus is changed, thereby, it is possible to adjust so that object mould
Paste is distinct.
At this point, the size of aperture 140 is smaller, depth of focus is deeper.
The defect detecting device of the film surface through the invention as a result, adjusts the size of aperture 140 and inclination angle
And angle, and more accurate can meticulously detect the defect for being formed in the surface of the measurement object.
The present invention is described in detail above by detailed embodiment, but, it is intended merely to explain the present invention in detail, this
Invention is not limited to this, and the those of ordinary skill of technical field of the invention within the scope of the technical idea of the present invention can be right
It changes or improves.
The simple change that is deformed into of the invention belongs to scope of the invention, and detailed protection scope of the invention passes through
Claims of Shenfu and definitely.
Claims (7)
1. a kind of defect detecting device of film surface, the detection device of the defect as detection measurement object surface, feature exist
In,
By generating light and the light of the generation being passed through the incidence to the illumination portion of the measurement object surface incidence and acquisition
Light and the pattern acquisition unit of pattern that generates analyzes the pattern of the acquisition, detect the defect of film surface,
Also, object lens are formed on the top of the measurement object.
2. the defect detecting device of film surface according to claim 1, which is characterized in that
By the vertical center axis at the center at the center and object lens of the pattern acquisition unit and by the illumination portion
The horizontal middle spindle of the heart meets between the pattern acquisition unit and the object lens,
It is also formed through the place that the horizontal middle spindle and the vertical center axis meet and reflecting surface is made to tilt 45 ° of ground
The beam splitter of configuration,
The beam splitter reflection is passed through by the light that the illumination portion generates, it is incident to the surface of the measurement object,
The light reflected from the measurement object is incident to the pattern acquisition unit through the beam splitter.
3. the defect detecting device of film surface according to claim 1, which is characterized in that
It is formed with light separation unit between the illumination portion and the measurement object, the light generated by the illumination portion is divided
From enabling from the light that the illumination portion generates to obliquely incident when the measurement object surface incidence.
4. the defect detecting device of film surface according to claim 3, which is characterized in that
The smooth separation unit is formed by rounded slot piece, the central axis of the rounded slot piece and the central axis one of the illumination portion
It causes.
5. the defect detecting device of film surface according to claim 4, which is characterized in that
It is formed in the rounded slot piece so that the light that passes through of the light of the illumination portion is by portion,
Also, the light is formed in the outer peripheral surface and inner peripheral surface that are formed on the basis of the central axis of the rounded slot piece by portion
Between, the outside of the inside of the inner peripheral surface and the outer peripheral surface forms the structure of blocking.
6. according to right to go 1 to 5 described in film surface defect detecting device, which is characterized in that
Aperture is configured between the measurement object and the pattern acquisition unit,
The aperture can adjust so that the aperture bore that light passes through.
7. the defect detecting device of film surface according to claim 1, which is characterized in that
The illumination portion is formed by light source and illuminating lens,
The pattern acquisition unit is formed by camera and imaging len.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0058905 | 2017-05-11 | ||
| KR1020170058905A KR101937187B1 (en) | 2017-05-11 | 2017-05-11 | Apparatus for detecting error of surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108872261A true CN108872261A (en) | 2018-11-23 |
Family
ID=64326885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810365670.1A Pending CN108872261A (en) | 2017-05-11 | 2018-04-23 | The defect detecting device of film surface |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101937187B1 (en) |
| CN (1) | CN108872261A (en) |
| TW (1) | TWI708213B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110508499A (en) * | 2019-08-29 | 2019-11-29 | 江苏盛矽电子科技有限公司 | A kind of auto-split silk-screen halftone detection device and its detection method |
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-
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- 2018-05-01 TW TW107114802A patent/TWI708213B/en active
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110508499A (en) * | 2019-08-29 | 2019-11-29 | 江苏盛矽电子科技有限公司 | A kind of auto-split silk-screen halftone detection device and its detection method |
| CN110508499B (en) * | 2019-08-29 | 2021-08-13 | 江苏盛矽电子科技有限公司 | Automatic separation type silk screen printing plate detection device and detection method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180124425A (en) | 2018-11-21 |
| KR101937187B1 (en) | 2019-01-14 |
| TWI708213B (en) | 2020-10-21 |
| TW201901617A (en) | 2019-01-01 |
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Application publication date: 20181123 |