CN108862284A - A kind of production of polysilicon link slurry processing unit and method - Google Patents
A kind of production of polysilicon link slurry processing unit and method Download PDFInfo
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- CN108862284A CN108862284A CN201810789673.8A CN201810789673A CN108862284A CN 108862284 A CN108862284 A CN 108862284A CN 201810789673 A CN201810789673 A CN 201810789673A CN 108862284 A CN108862284 A CN 108862284A
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10778—Purification
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
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Abstract
The present invention relates to a kind of production of polysilicon link slurry processing unit and methods.This technique mainly uses diatomite place mat to vacuum-type drum filter drum surface, then is passed through chlorosilane slurry and will wherein filter residue separate with filtrate, and filter residue is discharged after entering hydrolytic decomposition pot hydrolysis after separation；Filter liquor enters filtrate receiver after Drainage tank collection, collects after a large amount of flash-off steam to condenser condensation in filtrate, fixed gas to exhaust gas recovery system.The present invention is using continuous operation, chlorosilane reusable in slurry can be separated and recovered from as far as possible by way of vacuum filter, it greatly improves the chlorosilane rate of recovery and largely saves water resource and hydrolysis milk of lime, with easy to operate, stablize safety, economical and environmentally friendly benefit is extremely prominent for the advantages that operating cost is cheap and recovery efficiency is high, the technique and its equipment bring, has boundless market prospects.
Description
Technical field
The present invention relates to technical field of polysilicon production more particularly to a kind of production of polysilicon link slurry processing units.
Background technique
Demand of the whole world to polysilicon rapid growth due to the sustainable development of electronics and information industry.Polycrystalline silicon material is main
Applied to two aspects：Semiconductor and solar photovoltaic industry.Current energy day is becoming tight, environmental pressure increases increasingly
In the case of, the development and utilization of renewable energy are paid attention to by national governments, and many countries are all using renewable energy as national energy
The important component of source strategy.Currently, producing the most mature method of polysilicon is third generation improved Siemens, it is more producing
During crystal silicon, many by-products are quite serious to the pollution of environment, such as silicon tetrachloride.Improved Siemens produce polycrystalline
Silicon technology mainly includes following several procedures:Cold hydrogenation, rectifying, reduction restore tail gas recycle, disproportionation etc..In production process
Cold hydrogenation, rectifying and purification workshop section can generate a large amount of slurry and raffinate, and main component is silicon tetrachloride（Silicon tetrachloride contains
Amount >=85%）.
The slurry processing system of most domestic enterprise enters subsequent water after being all made of direct hydrolysis or simple distillation at present
Neutralized system is solved, most silicon tetrachlorides carry out neutralization reaction with milk of lime in hydrolysis neutralized system, eventually by subsequent
Press filteration system filters pressing is at doing harmless treatment after cake；The overwhelming majority can be used as the four of production trichlorosilane raw material by the processing mode
Silicon chloride consumes a large amount of milk of lime and water resource as waste processing during processing, does not generate any economic benefit
And a large amount of milk of lime buying expenses need to be paid, hydrolysis need to consume the metal generated in a large amount of water resource and reaction process
Chloride pollutes water resource.In addition, due to the presence of high-boiling components, silicon powder and metal chloride, if silicon tetrachloride steams
Excessively, raffinate viscosity can be very high, and remaining raffinate is very easy to occluding device and pipeline, and in container inner wall fouling, reduces heat transfer,
Aggravation blocking and fouling.Optimization is improved and undoubtedly all there are many shortcoming needs in these types of method.
Summary of the invention
The purpose of invention：In order to provide a kind of better production of polysilicon link slurry processing unit of effect, specific purposes
See multiple substantial technological effects of specific implementation part.
In order to reach purpose as above, the present invention is adopted the following technical scheme that：
A kind of production of polysilicon link slurry processing unit, which is characterized in that processing unit includes agitator tank；The agitator tank
The feeding port of lower section leads to vacuum-type drum filter；Lead to hydrolytic decomposition pot below the vacuum-type drum filter；It also include chlorine silicon
The thick component of alkane carrys out pipe, carrys out pipe and leads to agitator tank, vacuum-type drum filter side is connected to overflow tank；The overflow tank stretches out pipeline
Lead to the thick component of chlorosilane and carrys out pipe；The vacuum-type drum filter leads to Drainage tank；The Drainage tank passes through two-way pipeline
It is connected to condenser；Filtrate receiver is connected to below Drainage tank；The filtrate receiver is connected to just divide tower by clear liquid delivery pump.
The further technical solution of the present invention is that the condenser is connected to screw vacuum pump；The screw vacuum
Pump is connected to exhaust gas recovery system；The condenser is connected to from cooling circulating water pipe and removes cooling cycle water pipe.
The further technical solution of the present invention is that the agitator tank is connected to diatom native tank and rotary feeder.
The further technical solution of the present invention is that the diatom native tank is for laying in filtering diatomite；
Rotary feeder is for the diatomite of deposit to be uniformly delivered in agitator tank；
Precoated diatomite precoated shet before agitator tank is driven for device, and for being stored in driving process from upstream workshop section
Chlorosilane slurry, with stirring operation, to prevent slurry from precipitating；
Form of the vacuum-type drum filter for filtering slurry carries out solid-liquid two-phase laminated flow；
Overflow tank is used to recycle the slurry overflow for being higher than liquid level or more for failing to handle in time in vacuum-type drum filter, squeezes into
Agitator tank re-starts filter operation again；
Rotary valve is for the filter residue after the completion of filtering to be delivered to hydrolytic decomposition pot；
Hydrolytic decomposition pot will be hydrolyzed by vacuum-type drum filter bring filter residue, remove a small amount of chlorosilane group wherein also contained
Point；
The filtrate that Drainage tank is completed for temporarily storing vacuum-type drum filter operation, wherein being steamed containing a certain amount of chlorosilane
Vapour；
Condenser passes through bottom in and top out condensed water（Or deep cooling medium）, with steam indirect heat exchange, condensation is in Drainage tank tail gas
Chlorosilane；
Screw vacuum pump is the condition of negative pressure for maintaining the follow-up equipment connected inside vacuum-type drum filter rotary drum with it, and
It extracts condenser residue fixed gas out, send to exhaust treatment system and handled；
Filtrate receiver is used to store the liquid-phase chlorosilane that Drainage tank is collected,；
Clear liquid delivery pump is used to transfer out the liquid-phase chlorosilane being stored in filtrate receiver battery limit (BL) and divides tower to first.
A kind of production of polysilicon link slurry processing method, which is characterized in that be first turned on screw vacuum pump, tie up system
Subnormal ambient is held, rotary feeder is reused by the diatomite in diatom native tank and is delivered to agitator tank, is mixed in proportion with slurry
After uniformly, it is delivered to vacuum-type drum filter and is precoated, spread diatomite as phase on filter cloth using rotary drum inside and outside differential pressure
Answer the drainage layer of thickness；
Next, stirring evenly from the chlorosilane slurry of upstream workshop section into agitator tank, vacuum-type drum filter progress is entered back into
Filter operation adjusts scraper discharging according to filter cake thickness in operating process, if blanking velocity exceeds the rate of filtration, the slurry of spilling
Overflow tank will be entered, agitator tank is returned in such a way that nitrogen pressurizes and filter again；
It filters out silicon powder and neutralisation treatment is hydrolyzed using milk of lime into hydrolytic decomposition pot by rotary valve；Filtrate and flash distillation chlorosilane steam
Enter Drainage tank under vacuum action, tail gas is suitable for reading after condenser condenses by Drainage tank, and the liquid phase condensed out returns to
In Drainage tank, fixed gas drains into exhaust system through screw vacuum pump, and filtrate flow to filtrate receiver certainly through mouth pipeline under Drainage tank, then uses
Liquid-phase chlorosilane is transferred out battery limit (BL) and divides tower to first by clear liquid delivery pump.
Using the present invention of technical solution as above, have the advantages that compared with the existing technology：For production of polysilicon
Characteristic, industrial practice and the research of processing requirement and chlorosilane to slurry, the recycling for chlorosilane slurry, relative to
Preceding flash distillation process, using new process.First it will be evacuated to subnormal ambient inside filter rotary drum with screw vacuum pump, then
Diatomite is beaten and is applied on rotary drum filter cloth, utilizes rotary drum inside and outside differential pressure later（Positive and negative pressure）Slurry is filtered, to the greatest extent
To Drainage tank, tail gas is discharged chlorosilane component in possible recycling slurry after condenser secondary recovery；Filter residue then enters water
Solution tank is hydrolyzed.The present invention solves the problems having in polysilicon tailings processing links, for example needs to hydrolyze
With great lot of water resources, hydrolysis milk of lime, a large amount of thermal resources is needed to exchange heat etc., the economic benefit of highly significant is provided, and
It is continuous simple with operation, stablize the features such as pollution-free.
The present invention uses device advantageously：
（1）The present apparatus is driven using continuous, and recovery efficiency is high, remarkable in economical benefits.
（2）The vacuum-type drum filter that the present apparatus uses, is covered with diatomite filter cake above, can effectively make the solid-liquid in slurry
Mutually separate.
（3）The vacuum-type drum filter that the present apparatus uses eliminates thermal resource due to using filter operation（Vapor, heat
Oil or electric tracing）Use, reduce cost.
（4）Because the operation not flashed using flash tank, remaining filter residue will not make equipment, line clogging, be conducive to out
Vehicle operation, is convenient to clean.
（5）Isolated solid phase liquid holdup is only 10% or so, and when which is hydrolyzed, heat release is few, and operation is more
Safety.
Detailed description of the invention
In order to further illustrate the present invention, it is further illustrated with reference to the accompanying drawing：
Fig. 1 is process flow chart of the invention；
Wherein：1- diatom native tank；2- rotary feeder；3- agitator tank；4- vacuum-type drum filter；5- overflow tank；6- rotation
Valve；7- hydrolytic decomposition pot；8- Drainage tank；9- condenser；10- screw vacuum pump；11- filtrate receiver；12- clear liquid delivery pump.
Specific embodiment
With reference to the accompanying drawings and detailed description, the present invention is furture elucidated, it should be understood that following specific embodiments are only
For illustrating the present invention rather than limiting the scope of the invention.In the description of the present invention, it should be noted that term " in
The orientation of the instructions such as the heart ", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outside", "top", "bottom" or position are closed
System is merely for convenience of description of the present invention and simplification of the description to be based on the orientation or positional relationship shown in the drawings, rather than indicates
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitation of the present invention.Furthermore unless specifically defined or limited otherwise, term " installation ", " connected ", " connection " should be done extensively
Reason and good sense solution may be a detachable connection for example, it may be being fixedly connected, or be integrally connected；It can be mechanical connection,
It can be electrical connection；It can be directly connected, the company inside two elements can also be can be indirectly connected through an intermediary
It is logical.For the ordinary skill in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
Patent provides a variety of concomitant regimens, and different expression place belongs to the modified scheme based on basic scheme either
Parallel type scheme.Every kind of scheme has the unique features of oneself.
The technical solution adopted is that providing a kind of production of polysilicon link slurry processing method, include the following steps：
It is first turned on screw vacuum pump, so that system is maintained subnormal ambient, reuses rotary feeder for the diatom in diatom native tank
Soil is delivered to agitator tank, after mixing in proportion with slurry, is delivered to vacuum-type drum filter and is precoated, using in rotary drum
The drainage layer that external differential spreads diatomite on filter cloth as respective thickness.
Start to be filtered operation, from the slurry liquid of upstream workshop section, rotating drum vacuum filtration device is entered by agitator tank, into
Row filtering, its working principle is that：Taking out inside vacuum drum is negative pressure, and outside has nitrogen pressurising to maintain micro-positive pressure, due to pressure difference, slag
Slurry outside rotary drum then by internally flowing, and wherein solid phase is left in chlorosilane precoating layer surface, and liquid phase then enters inside rotary drum
Into follow-up equipment, in the course of work, doctor position is adjusted according to filter cake thickness, the solid phase that layer surface filters out will be precoated at any time and scraped
It descends and drains into hydrolytic decomposition pot, if blanking velocity exceeds the rate of filtration, the slurry of spilling will flow into overflow tank, the side pressurizeed with nitrogen
It is returned agitator tank and filtered again by formula；
The filter residue scraped is sent into hydrolytic decomposition pot using rotary valve and neutralisation treatment is hydrolyzed, and battery limit (BL) enters filters pressing list out after the reaction was completed
Member；Filtrate enters Drainage tank under the action of vacuumizing, due to pressure reduction, wherein having part chlorosilane to flash at normal temperature to be
Gas is condensed from the tank body condenser suitable for reading that enters, and condensed liquid reflux, fixed gas is gone by screw vacuum pump discharge battery limit (BL)
Exhaust gas recovery system；Residual filtrate flows into filtrate receiver by lower mouth in Drainage tank, gets battery limit (BL) by pump and divides tower into first.
Realize the above method device include：
（1）Diatom native tank is for laying in filtering diatomite；
（2）Rotary feeder is especially suitable for dust, small particles material, so for the diatomite of deposit to be uniformly delivered to
In agitator tank；
（3）Precoated diatomite precoated shet before agitator tank is driven for device, and upstream work is come from for storage in driving process
The chlorosilane slurry of section, with stirring operation, to prevent slurry from precipitating；
（4）Vacuum-type drum filter is to make filtered driving force with pressure difference, and continuous type of the filtering surface on cylindrical drum surface filters
Machine.It has a horizontal rotary drum, drum wall aperture, and drum surface upper berth constitutes filtering surface with support plate and filter cloth.Space point under filtering surface
At several fan-shaped filter chambers separated.Each filter chamber has conduit to communicate with distributing valve.Rotary drum often rotates a circle, and each filter chamber passes through distributing valve
Connect vacuum system and compressed air system in turn, sequence is completed filtering, washery slag, blotted, slag dumping and filter medium（Filter cloth）Again
The operation such as raw.Form for filtering slurry carries out solid-liquid two-phase laminated flow；
（5）Overflow tank is used to recycle the slurry overflow for being higher than liquid level or more for failing to handle in time in vacuum-type drum filter,
It squeezes into agitator tank and re-starts filter operation again, because containing solid-liquid two-phase in slurry, overflow tank is equally grasped with stirring
Make；
（6）Filter residue after the completion of filtering is delivered to hydrolysis with it because being suitable for the conveying of small particles material by rotary valve
Tank；
（7）Hydrolytic decomposition pot will be hydrolyzed by vacuum-type drum filter bring filter residue, remove a small amount of chlorosilane wherein also contained
Component；
（8）The filtrate that Drainage tank is completed for temporarily storing vacuum-type drum filter operation, wherein containing a certain amount of chlorosilane
Steam；
（9）Condenser condenses the chlorosilane in Drainage tank tail gas with steam indirect heat exchange by bottom in and top out condensed water；
（10）Screw vacuum pump is for maintaining the negative pressure item inside vacuum-type drum filter rotary drum with the follow-up equipment of its connection
Part, and extract condenser residue fixed gas out, it send to exhaust treatment system and is handled；
（11）Filtrate receiver is used to store the liquid-phase chlorosilane that Drainage tank is collected,；
（12）Clear liquid delivery pump is used to transfer out the liquid-phase chlorosilane being stored in filtrate receiver battery limit (BL) and divides tower to first.
A kind of chlorosilane slurry recycling disposal method, it is characterized in that：
Before operation starts, one to two vacuum pumps are connected in rotary drum first, will be vacuumized in rotary drum, then are existed by diatom native tank 1
The diatomite of respective thickness is precoated on the rotary drum of vacuum-type drum filter 3.
Start filter operation, from the chlorosilane slurry of upstream workshop section, prevents slurry from precipitating into the stirring of agitator tank 3, then into
Enter vacuum-type drum filter 4 and be filtered operation, under differential pressure action, continuous feed filtering, filter residue is left on drum surface quilt
Scraper strikes off to filter residue discharge outlet, scraper discharging is adjusted according to filter cake thickness in operating process, if blanking velocity exceeded filtering velocity
The slurry of degree, spilling will enter overflow tank 5, return agitator tank 3 in such a way that nitrogen pressurizes and filter again；
It filters out silicon powder and is hydrolyzed into hydrolytic decomposition pot 7 using milk of lime by rotary valve 6；Due to pressure reduction, wherein there is part chlorine
It is gas that silane flashes at normal temperature, adulterates a certain amount of gas in filtrate, Drainage tank 8, tail gas are entered under differential pressure action
Exhaust system is drained into through screw vacuum pump 10 after the condensation of condenser 9 by the way that Drainage tank is suitable for reading, condensate liquid is back to Drainage tank 8,
Filtrate is pumped to filtrate receiver 11 through mouth under Drainage tank, then liquid-phase chlorosilane is transferred out battery limit (BL) to first point with clear liquid delivery pump 12
Tower.
It should be noted that multiple schemes that this patent provides include the basic scheme of itself, independently of each other, not mutually
It restricts, but it can also be combined with each other in the absence of conflict, reach multiple effects and realize jointly.
The basic principles, main features and advantages of the present invention have been shown and described above.The technology of this field
Personnel should be recognized that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this hairs
Bright principle, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these variations
It is both fallen in claimed range with improving.
Claims (6)
1. a kind of production of polysilicon link slurry processing unit, which is characterized in that the device includes agitator tank（3）；Described stirs
Mix tank（3）The feeding port of lower section leads to vacuum-type drum filter（4）；The vacuum-type drum filter（4）Hydrolysis is led in lower section
Tank；Also carry out pipe comprising the thick component of chlorosilane, carrys out pipe and lead to agitator tank（3）, vacuum-type drum filter（4）While being connected to overflow tank
（5）；The overflow tank（5）Stretching pipeline leads to the thick component of chlorosilane and carrys out pipe；The vacuum-type drum filter（4）Lead to row
Flow container（8）；The Drainage tank（8）Condenser is connected to by two-way pipeline（9）；Drainage tank（8）Lower section is connected to filtrate receiver
（11）；The filtrate receiver passes through clear liquid delivery pump（12）It is connected to just divide tower.
2. a kind of production of polysilicon link slurry processing unit as described in claim 1, which is characterized in that the condenser
（9）It is connected to screw vacuum pump（10）；The screw vacuum pump（10）It is connected to exhaust gas recovery system；The condenser
（9）It is connected to from cooling circulating water pipe and removes cooling cycle water pipe.
3. a kind of production of polysilicon link slurry processing unit as claimed in claim 2, which is characterized in that the agitator tank
（3）It is connected to diatom native tank（1）And rotary feeder（2）.
4. a kind of production of polysilicon link slurry processing unit as claimed in claim 3, which is characterized in that the diatomite
Tank（1）For laying in filtering diatomite；
Rotary feeder（2）For the diatomite of deposit to be uniformly delivered to agitator tank（3）In；
Agitator tank（3）Precoated diatomite precoated shet before driving for device, and upstream work is come from for storage in driving process
The chlorosilane slurry of section, with stirring operation, to prevent slurry from precipitating.
5. vacuum-type drum filter（4）Form for filtering slurry carries out solid-liquid two-phase laminated flow；
Overflow tank（5）For by vacuum-type drum filter（4）In the slurry for being higher than liquid level or more that fails to handle in time overflow back
It receives, squeezes into agitator tank（2）Filter operation is re-started again；
Rotary valve（6）It is for the filter residue after the completion of filtering to be delivered to hydrolytic decomposition pot（7）；
Hydrolytic decomposition pot（7）It will be by vacuum-type drum filter（4）Bring filter residue is hydrolyzed, and removes a small amount of chlorosilane wherein contained
Component；
Drainage tank（8）For temporarily storing vacuum-type drum filter（4）The filtrate completed is operated, wherein containing a certain amount of chlorine silicon
Alkane steam；
Condenser（9）By bottom in and top out condensed water or deep cooling medium, with chlorosilane steam indirect heat exchange, condensation comes from Drainage tank
（8）Chlorosilane in tail gas；
Screw vacuum pump（10）It is for maintaining vacuum-type drum filter（4）The negative pressure of the follow-up equipment connected inside rotary drum with it
Condition, and extract condenser out（9）Remaining fixed gas, send to exhaust treatment system and is handled；
Filtrate receiver（11）Liquid-phase chlorosilane for collecting Drainage tank stores,；
Clear liquid delivery pump（12）For filtrate receiver will to be stored in（11）In liquid-phase chlorosilane transfer out battery limit (BL) to just dividing tower.
6. a kind of production of polysilicon link slurry processing method, which is characterized in that be first turned on screw vacuum pump（10）, make system
Subnormal ambient is maintained, rotary feeder is reused（2）By diatom native tank（1）In diatomite be delivered to agitator tank（3）, with slurry
After mixing in proportion, it is delivered to vacuum-type drum filter（4）It is precoated, is being filtered diatomite using rotary drum inside and outside differential pressure
The drainage layer for respective thickness is spread on cloth；
Next, from the chlorosilane slurry of upstream workshop section, into agitator tank（3）It stirs evenly, enters back into vacuum-type drum filter
（4）It is filtered operation, is overflow according to filter cake thickness adjustment scraper discharging if blanking velocity exceeds the rate of filtration in operating process
Slurry out will enter overflow tank（5）, agitator tank is returned in such a way that nitrogen pressurizes（3）Again it filters；
It filters out silicon powder and passes through rotary valve（6）Into hydrolytic decomposition pot（7）Neutralisation treatment is hydrolyzed using milk of lime；Filtrate and flash distillation chlorine silicon
Alkane steam enters Drainage tank under the action of negative pressure（8）, it is suitable for reading through condenser that tail gas passes through Drainage tank（9）After condensation, condense out
Liquid phase return to Drainage tank（8）In, fixed gas is through screw vacuum pump（10）Exhaust system is drained into, filtrate is through mouth pipeline under Drainage tank
From flowing to filtrate receiver（11）, then with clear liquid delivery pump（12）Liquid-phase chlorosilane is transferred out into battery limit (BL) and divides tower to first.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810789673.8A CN108862284A (en) | 2018-07-18 | 2018-07-18 | A kind of production of polysilicon link slurry processing unit and method |
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| CN201810789673.8A CN108862284A (en) | 2018-07-18 | 2018-07-18 | A kind of production of polysilicon link slurry processing unit and method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110950342A (en) * | 2019-11-29 | 2020-04-03 | 天华化工机械及自动化研究设计院有限公司 | Polysilicon slag slurry non-hydration treatment process |
| CN111072032A (en) * | 2020-01-19 | 2020-04-28 | 中国恩菲工程技术有限公司 | System and method for filtering chlorosilane residual liquid |
| CN111905438A (en) * | 2020-09-01 | 2020-11-10 | 新疆协鑫新能源材料科技有限公司 | Process and device for drying and mixing residue and filter residue of slurry |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010053339A1 (en) * | 2000-06-20 | 2001-12-20 | Degussa Ag | Separation of metal chlorides from gaseous reaction mixtures from the synthesis of chlorosilane |
| CN103420381A (en) * | 2012-05-15 | 2013-12-04 | 天华化工机械及自动化研究设计院有限公司 | Method for recycling disposal of silicon tetrachloride slag slurry produced in polycrystalline silicon production and device thereof |
| CN204973312U (en) * | 2015-08-14 | 2016-01-20 | 江苏中能硅业科技发展有限公司 | A device system that is used for liquid solid separation of polycrystalline silicon by -product sediment thick liquid |
| CN205953537U (en) * | 2016-08-26 | 2017-02-15 | 江苏中能硅业科技发展有限公司 | Polycrystal white residue thick liquid processing system |
-
2018
- 2018-07-18 CN CN201810789673.8A patent/CN108862284A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010053339A1 (en) * | 2000-06-20 | 2001-12-20 | Degussa Ag | Separation of metal chlorides from gaseous reaction mixtures from the synthesis of chlorosilane |
| CN103420381A (en) * | 2012-05-15 | 2013-12-04 | 天华化工机械及自动化研究设计院有限公司 | Method for recycling disposal of silicon tetrachloride slag slurry produced in polycrystalline silicon production and device thereof |
| CN204973312U (en) * | 2015-08-14 | 2016-01-20 | 江苏中能硅业科技发展有限公司 | A device system that is used for liquid solid separation of polycrystalline silicon by -product sediment thick liquid |
| CN205953537U (en) * | 2016-08-26 | 2017-02-15 | 江苏中能硅业科技发展有限公司 | Polycrystal white residue thick liquid processing system |
Non-Patent Citations (1)
| Title |
|---|
| 张春伟 等: ""多晶硅生产过程中硅渣浆的处理"", 《化工设计通讯》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110950342A (en) * | 2019-11-29 | 2020-04-03 | 天华化工机械及自动化研究设计院有限公司 | Polysilicon slag slurry non-hydration treatment process |
| CN111072032A (en) * | 2020-01-19 | 2020-04-28 | 中国恩菲工程技术有限公司 | System and method for filtering chlorosilane residual liquid |
| CN111072032B (en) * | 2020-01-19 | 2023-12-15 | 中国恩菲工程技术有限公司 | Chlorosilane raffinate filtration system and method |
| CN111905438A (en) * | 2020-09-01 | 2020-11-10 | 新疆协鑫新能源材料科技有限公司 | Process and device for drying and mixing residue and filter residue of slurry |
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Application publication date: 20181123 |