CN108621025A - 一种研磨机 - Google Patents
一种研磨机 Download PDFInfo
- Publication number
- CN108621025A CN108621025A CN201810454692.5A CN201810454692A CN108621025A CN 108621025 A CN108621025 A CN 108621025A CN 201810454692 A CN201810454692 A CN 201810454692A CN 108621025 A CN108621025 A CN 108621025A
- Authority
- CN
- China
- Prior art keywords
- disk
- tablet
- vortex
- pipe
- lappingout
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 41
- 239000007788 liquid Substances 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000007790 scraping Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000003350 kerosene Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810454692.5A CN108621025B (zh) | 2018-05-14 | 2018-05-14 | 一种研磨机 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810454692.5A CN108621025B (zh) | 2018-05-14 | 2018-05-14 | 一种研磨机 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108621025A true CN108621025A (zh) | 2018-10-09 |
| CN108621025B CN108621025B (zh) | 2020-05-08 |
Family
ID=63693096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810454692.5A Active CN108621025B (zh) | 2018-05-14 | 2018-05-14 | 一种研磨机 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108621025B (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111097207A (zh) * | 2020-03-07 | 2020-05-05 | 杭州富阳伟文环保科技有限公司 | 一种污泥沉砂装置 |
| CN111097206A (zh) * | 2020-03-07 | 2020-05-05 | 杭州富阳伟文环保科技有限公司 | 一种污泥沉砂方法 |
| CN113183023A (zh) * | 2021-05-14 | 2021-07-30 | 嘉兴星微纳米科技有限公司 | 半导体晶圆研磨设备 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060121497A (ko) * | 2005-05-24 | 2006-11-29 | 주식회사 하이닉스반도체 | 연마패드 및 이를 이용한 화학적기계적연마장치 |
| CN201380430Y (zh) * | 2009-04-23 | 2010-01-13 | 湖南城市学院 | 平面研磨机的双层研磨盘 |
| CN104707688A (zh) * | 2015-02-12 | 2015-06-17 | 天津市弘亚润滑粉制造有限公司 | 一种双层研磨机 |
| CN105881197A (zh) * | 2016-06-05 | 2016-08-24 | 山东东阿钢球集团有限公司 | 一种新型钢球磨盘及其磨球方法 |
| CN206778551U (zh) * | 2017-05-19 | 2017-12-22 | 浙江欣苗化工有限公司 | 一种具有二次研磨功能的研磨机 |
-
2018
- 2018-05-14 CN CN201810454692.5A patent/CN108621025B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060121497A (ko) * | 2005-05-24 | 2006-11-29 | 주식회사 하이닉스반도체 | 연마패드 및 이를 이용한 화학적기계적연마장치 |
| CN201380430Y (zh) * | 2009-04-23 | 2010-01-13 | 湖南城市学院 | 平面研磨机的双层研磨盘 |
| CN104707688A (zh) * | 2015-02-12 | 2015-06-17 | 天津市弘亚润滑粉制造有限公司 | 一种双层研磨机 |
| CN105881197A (zh) * | 2016-06-05 | 2016-08-24 | 山东东阿钢球集团有限公司 | 一种新型钢球磨盘及其磨球方法 |
| CN206778551U (zh) * | 2017-05-19 | 2017-12-22 | 浙江欣苗化工有限公司 | 一种具有二次研磨功能的研磨机 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111097207A (zh) * | 2020-03-07 | 2020-05-05 | 杭州富阳伟文环保科技有限公司 | 一种污泥沉砂装置 |
| CN111097206A (zh) * | 2020-03-07 | 2020-05-05 | 杭州富阳伟文环保科技有限公司 | 一种污泥沉砂方法 |
| CN113183023A (zh) * | 2021-05-14 | 2021-07-30 | 嘉兴星微纳米科技有限公司 | 半导体晶圆研磨设备 |
| CN113183023B (zh) * | 2021-05-14 | 2022-06-17 | 嘉兴星微纳米科技有限公司 | 半导体晶圆研磨设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108621025B (zh) | 2020-05-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200109 Address after: 236000 118 households, houtianzi village, Baimiao village, Quanying office, Yingquan District, Fuyang City, Anhui Province Applicant after: Fuyang zhanqianli Intellectual Property Operation Co.,Ltd. Address before: 233000 north side warehouse, No. 849, Tu Shan Road, bengshan mountain, Bengbu, Anhui Applicant before: BENGBU HONGHU PRECISION MACHINERY Co.,Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231017 Address after: 044000 Within Huajin Metallurgical Foundry in Jiangxian Development Zone, Yuncheng City, Shanxi Province Patentee after: Shanxi Kerui Renewable Resources Comprehensive Utilization Co.,Ltd. Address before: 236000 118 households in Baimiao village, Quanying office, Yingquan District, Fuyang City, Anhui Province Patentee before: Fuyang zhanqianli Intellectual Property Operation Co.,Ltd. |