CN108593154B - 一种三维精密压电传感装置 - Google Patents
一种三维精密压电传感装置 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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CN109632057B (zh) * | 2019-02-27 | 2020-07-31 | 北京航空航天大学 | 一种基于柔性机构的质量测量装置 |
CN111308130B (zh) * | 2020-03-17 | 2022-01-28 | 清华大学 | 压电式位移装置及原子力显微镜 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103225728A (zh) * | 2013-04-24 | 2013-07-31 | 山东大学 | 一种压电陶瓷驱动的二维并联微动平台 |
CN106057250A (zh) * | 2016-07-05 | 2016-10-26 | 昆明理工大学 | 一种二自由度微定位平台 |
CN107504895A (zh) * | 2017-08-03 | 2017-12-22 | 山东大学 | 面向光栅型微纳定位平台的零点微调装置 |
CN107906315A (zh) * | 2017-12-19 | 2018-04-13 | 山东大学 | 一种动态频率实时可调的微位移运动平台 |
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KR100497729B1 (ko) * | 2003-02-21 | 2005-06-28 | 한국과학기술원 | 유연기구 메커니즘을 이용한 3축 직선운동 스테이지 |
KR101680784B1 (ko) * | 2015-04-01 | 2016-11-29 | 한국과학기술원 | 유연기구 메커니즘을 이용한 중공형 3축 평면운동 스테이지 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103225728A (zh) * | 2013-04-24 | 2013-07-31 | 山东大学 | 一种压电陶瓷驱动的二维并联微动平台 |
CN106057250A (zh) * | 2016-07-05 | 2016-10-26 | 昆明理工大学 | 一种二自由度微定位平台 |
CN107504895A (zh) * | 2017-08-03 | 2017-12-22 | 山东大学 | 面向光栅型微纳定位平台的零点微调装置 |
CN107906315A (zh) * | 2017-12-19 | 2018-04-13 | 山东大学 | 一种动态频率实时可调的微位移运动平台 |
Non-Patent Citations (2)
Title |
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三维一体化超微定位系统性能的研究;胡晓东 等;《中国机械工程》;19991130;第10卷(第11期);1201-1203 |
基于桥式放大机构的柔顺微定位平台的研究;杜志元 等;《机器人》;20160331;第38卷(第2期);185-192 |
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