CN108531297A - A kind of environment friendly silicon chip detergent and preparation method - Google Patents
A kind of environment friendly silicon chip detergent and preparation method Download PDFInfo
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- CN108531297A CN108531297A CN201810613316.6A CN201810613316A CN108531297A CN 108531297 A CN108531297 A CN 108531297A CN 201810613316 A CN201810613316 A CN 201810613316A CN 108531297 A CN108531297 A CN 108531297A
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/044—Hydroxides or bases
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/046—Salts
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/166—Organic compounds containing borium
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2079—Monocarboxylic acids-salts thereof
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2082—Polycarboxylic acids-salts thereof
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2086—Hydroxy carboxylic acids-salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2093—Esters; Carbonates
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/22—Carbohydrates or derivatives thereof
- C11D3/221—Mono, di- or trisaccharides or derivatives thereof
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/34—Organic compounds containing sulfur
- C11D3/3472—Organic compounds containing sulfur additionally containing -COOH groups or derivatives thereof
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/37—Polymers
- C11D3/3746—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C11D3/3757—(Co)polymerised carboxylic acids, -anhydrides, -esters in solid and liquid compositions
- C11D3/3765—(Co)polymerised carboxylic acids, -anhydrides, -esters in solid and liquid compositions in liquid compositions
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/48—Medical, disinfecting agents, disinfecting, antibacterial, germicidal or antimicrobial compositions
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Abstract
The invention discloses a kind of environment friendly silicon chip detergent and preparation method, environment friendly silicon chip detergent is formulated by the component of following concentration：05 parts of 0 99.9 parts of water, 0.1 100 parts of alkali, 0 10 parts of surfactant, 0 10 parts of antirust agent, 0 10 parts of chelating agent, 0 10 parts of dispersant, 05 parts of fungicide and antifoaming agent, the number are parts by weight.The preparation method of environment friendly silicon chip detergent is that 1. water and alkali are added in mixing kettle, stirs 30 60 minutes, obtains homogeneous transparent solution；2. antirust agent is added in mixing kettle, stirs 30 60 minutes, obtain homogeneous transparent solution；3. surfactant, dispersant, fungicide and antifoaming agent are added in mixing kettle, it is mixed 30 60 minutes, obtains homogeneous transparent solution.Integral cleaning is had excellent performance, and use cost is low, not phosphorous, not nitrogenous, is free of phenol, is free of nitrite, and the poisonous and harmful raw material such as heavy metal ensures that worker's body is without damage, ensures environment damage.
Description
【Technical field】
The present invention relates to the technical field of cleaning agent, the technology of especially a kind of environment friendly silicon chip detergent and preparation method
Field.
【Background technology】
With the development of super large-scale integration, integrated level is continuously improved, and the characteristic size of device constantly reduces, to silicon
The requirement of substrate surface cleanliness factor is also relatively stringenter, and Wafer Cleaning early causes the height weight of people in the importance of semi-conductor industry
Depending on super large-scale integration technological requirement adsorbate on the substrate slice of offer is not more than 500/m2 × 0.12 μm, metal
Pollutant is less than 1010atom/cm2, and the pollutant of surface of silicon will seriously affect the physical property and electrical property of silicon substrate
Matter, and the yield rate of integrated circuit is eventually affected, potential pollution existing for each procedure, may all cause in silicon chip production
The generation of defect and the failure of device, in the manufacturing process of super large-scale integration, the surface state of silicon chip collects after being
At the basis that circuit flatness ensures, if the bad yield rate that will have a direct impact on device of cleaning performance, Performance And Reliability.
Cleaning agent largely uses phosphorous, nitrogenous, (NP) containing phenol at present, and the poisonous and harmful raw material containing nitrite etc. is made
Phosphorous for main cleaning agent additive, nitrogenous, cleaning additive containing phenol has the spy that cleaning can be good as cleaning additive
Point, nitrite have favorable rust preventing effect as cleaning anti-rust agent, and feature at low cost, but phosphorous is nitrogenous, adds containing phenol
Add agent to pollute environment, contains nitrite, phenol additive is also toxic, has been forbidden to use phenol additive both at home and abroad.
【Invention content】
The purpose of the present invention is exactly to solve the problems of the prior art, proposes a kind of environment friendly silicon chip detergent and preparation side
Method plays cleaning action by alkali and surfactant, effectively cleans the greasy dirt of all kinds of workpiece surfaces, the impurity such as powder；By anti-
Become rusty agent effective protection machine and workpiece non-corrosive；By chelating agent play a part of chelating, the metals such as effective chelated iron, calcium, magnesium from
Son enables its chelate to be dissolved in water, reaches the softening water hardness, improves cleaning performance；Dispersion inorganic salts are played by dispersant
With the effect of inorganic mineral；Play sterilization by fungicide；Play defoaming, Integral cleaning performance by antifoaming agent
Excellent, use cost is low, not phosphorous, not nitrogenous, is free of phenol, is free of nitrite, and the poisonous and harmful raw material such as heavy metal is protected
It is without damage to demonstrate,prove worker's body, ensures environment damage.
To achieve the above object, the present invention proposes a kind of environment friendly silicon chip detergent, the environment friendly silicon chip detergent
It is formulated by the component of following concentration：0-99.9 parts of water, 0.1-100 parts of alkali, 0-10 parts of surfactant, antirust agent 0-10
Part, 0-10 parts of chelating agent, 0-10 parts of dispersant, 0-5 parts of fungicide and 0-5 parts of antifoaming agent, the number are parts by weight.
Preferably, the environment friendly silicon chip detergent is formulated by the component of following concentration：20 parts of alkali, surface-active
2 parts of agent, 4 parts of antirust agent, 2 parts of chelating agent, 1 part of dispersant, 2 parts of fungicide, 0.1 part of antifoaming agent, remaining is water, and the number is
Parts by weight.
Preferably, the environment friendly silicon chip detergent is formulated by the component of following concentration：30 parts of alkali, surface-active
2 parts of agent, 2 parts of chelating agent, 2 parts of dispersant, 2 parts of fungicide, 0.1 part of antifoaming agent, remaining is water, and the number is parts by weight.
Preferably, described its is formulated by the component of following concentration：40 parts of alkali, 4 parts of surfactant, antirust agent 4
Part, 1 part of chelating agent, 2 parts of fungicide, remaining is water, and the number is parts by weight.
Preferably, the alkali is inorganic base, such as sodium hydroxide, potassium hydroxide and calcium hydroxide.
Preferably, the surfactant is ionic surfactant, nonionic surface active agent or both sexes
Ionic surface active agent, the ionic surfactant are fatty alcohol ether sulfate salt, fatty alcohol sulfate salt, alkyl sulfonic acid
Sodium, alkyl (aromatic radical) ether carboxylic acid, fatty alcohol carboxylate, petroleum sodium sulfonate, oil sulphur calcium, nekal, lignin
Sulfonate or octadecyl trimethyl chlorine (bromine) change ammonium etc., and the nonionic surface active agent is polyethylene glycol oxide fatty alcohol
Ether, polyethylene glycol oxide propylene fatty alcohol ether, polyoxyethylene fatty acid esters, sorbitan fatty acid ester or fatty acid methyl ester are poly-
Ethylene oxide ether etc., the zwitterionic surfactant are alkyl betaine or hydroxyl sulfo betaine etc., and the surface is lived
Property agent is one such or several combination.
Preferably, the antirust agent is acylate, acylate ester, borate, borate, laurylene base fourth two
Hydrochlorate or dodecenylsuccinic acid salt ester, such as 12 binary acid receive salt, 11 binary acid and receive salt, ternary acid and receive salt and boric acid is received
Salt etc., the antirust agent are one such or several combinations, and the chelating agent is organic quasi-chelate compound or inorganic
Chelating agent, as calcium acetate, citric acid and its calcium, potassium, sodium salt, the calcium of gluconic acid, sodium salt, glucopyrone, oxidation are stearic
Essence, sodium Acid Acetate, tartaric acid and its k-na salt, thio-acid sodium and D-sorbite etc., the chelating agent be it is one such or
Several combination of person, the dispersant are polycarboxylic acid dispersants, such as maleic acid-acrylic acid copolymer, poly, polypropylene
Sour sodium, carboxylic acid-co-polymer of sulfonate, acrylic acid-acrylic ester-sulfonate terpolymer and polyepoxy sodium succinate etc., institute
State the combination that dispersant is one such or several, the fungicide is organic series bactericidal agent or inorganic series bactericidal agent, such as
BK, BIT, BBIT, MBM and MOB etc., the fungicide are one such or several combinations, and the antifoaming agent is organic
Silicon class antifoaming agent or polyethers antifoaming agent, such as FOAM BAN HP720, FOAM BAN MS550 and DF-20, the antifoaming agent
It is one such or several combination.
A kind of preparation method of environment friendly silicon chip detergent is made of following step：
1. water and alkali are added in mixing kettle, stir 30-60 minutes, obtain homogeneous transparent solution；
2. antirust agent is added in mixing kettle, stirs 30-60 minutes, obtain homogeneous transparent solution；
3. surfactant, dispersant, fungicide and antifoaming agent are added in mixing kettle, it is mixed 30-60 minutes, obtains
To homogeneous transparent solution.
Beneficial effects of the present invention：The present invention plays cleaning action by alkali and surfactant, effectively cleans all kinds of workpiece
The greasy dirt on surface, the impurity such as powder；Pass through antirust agent effective protection machine and workpiece non-corrosive；The work of chelating is played by chelating agent
With the metal ions such as effective chelated iron, calcium, magnesium enable its chelate to be dissolved in water, reach the softening water hardness, improve cleaning effect
Fruit；Play a part of to disperse inorganic salts and inorganic mineral by dispersant；Play sterilization by fungicide；Pass through defoaming
Agent plays defoaming, and Integral cleaning is had excellent performance, and use cost is low, not phosphorous, not nitrogenous, is free of phenol, is free of nitrous
Hydrochlorate, the poisonous and harmful raw material such as heavy metal ensure that worker's body is without damage, ensure environment damage.
The feature and advantage of the present invention will be described in detail by embodiment.
【Specific implementation mode】
The present invention proposes a kind of environment friendly silicon chip detergent, the environment friendly silicon chip detergent by following concentration component
It is formulated：0-99.9 parts of water, 0-10 parts of surfactant, 0-10 parts of antirust agent, 0-10 parts of chelating agent, divides 0.1-100 parts of alkali
0-5 parts of 0-10 parts of powder, 0-5 parts of fungicide and antifoaming agent, the number be parts by weight, the environment friendly silicon chip detergent by
The component of following concentration is formulated：20 parts of alkali, 4 parts of antirust agent, 2 parts of chelating agent, 1 part of dispersant, kills at 2 parts of surfactant
2 parts of microbial inoculum, 0.1 part of antifoaming agent, remaining is water, and the number is parts by weight, and the environment friendly silicon chip detergent is by following dense
The component of degree is formulated：30 parts of alkali, 2 parts of surfactant, 2 parts of chelating agent, 2 parts of dispersant, 2 parts of fungicide, antifoaming agent 0.1
Part, remaining is water, and the number is parts by weight, and the environment friendly silicon chip detergent is formulated by the component of following concentration：
40 parts of alkali, 4 parts of surfactant, 4 parts of antirust agent, 1 part of chelating agent, 2 parts of fungicide, remaining is water, and the number is parts by weight
Number, the alkali is inorganic base, such as sodium hydroxide, potassium hydroxide and calcium hydroxide, and the surfactant is ionic
Surfactant, nonionic surface active agent or zwitterionic surfactant, the ionic surfactant are fat
Alcohol ether sulphates salt, fatty alcohol sulfate salt, sodium alkyl sulfonate, alkyl (aromatic radical) ether carboxylic acid, fatty alcohol carboxylate, oil sulphur
Sour sodium, oil sulphur calcium, nekal, lignosulfonates or octadecyl trimethyl chlorine (bromine) change ammonium etc., described non-
Ionic surfactant is polyoxyethylene aliphatic alcohol ether, polyethylene glycol oxide propylene fatty alcohol ether, polyethylene glycol oxide aliphatic acid
Ester, sorbitan fatty acid ester or fatty acid methyl ester APEO etc., the zwitterionic surfactant are alkyl sweet teas
Dish alkali or hydroxyl sulfo betaine etc., the surfactant are one such or several combination, the antirust
Agent is acylate, acylate ester, borate, borate, dodecenylsuccinic acid salt or dodecenylsuccinic acid salt ester,
Such as 12 binary acid receive salt, 11 binary acid and receive salt, ternary acid and receive salt and boric acid receives salt, and the antirust agent is therein one
Kind or several combinations, the chelating agent be organic quasi-chelate compound or inorganic quasi-chelate compound, as calcium acetate, citric acid and its
Calcium, potassium, sodium salt, the calcium of gluconic acid, sodium salt, glucopyrone, oxystearin, sodium Acid Acetate, tartaric acid and its potassium sodium
Salt, thio-acid sodium and D-sorbite etc., the chelating agent are one such or several combinations, and the dispersant is poly- carboxylic
Acids dispersant, such as maleic acid-acrylic acid copolymer, poly, Sodium Polyacrylate, carboxylic acid-co-polymer of sulfonate, propylene
Acid-acrylate-sulfonate terpolymer and polyepoxy sodium succinate etc., the dispersant are one such or several
Combination, the fungicide is organic series bactericidal agent or inorganic series bactericidal agent, such as BK, BIT, BBIT, MBM and MOB, described to kill
Microbial inoculum is one such or several combination, and the antifoaming agent is organic silicon antifoaming agent or polyethers antifoaming agent, such as
FOAM BAN HP720, FOAM BAN MS550 and DF-20 etc., the antifoaming agent are one such or several combinations,
It is made of following step：
1. water and alkali are added in mixing kettle, stir 30-60 minutes, obtain homogeneous transparent solution；
2. antirust agent is added in mixing kettle, stirs 30-60 minutes, obtain homogeneous transparent solution；
3. surfactant, dispersant, fungicide and antifoaming agent are added in mixing kettle, it is mixed 30-60 minutes, obtains
To homogeneous transparent solution.
Specific embodiments of the present invention are：
Embodiment 1-8：
A kind of environment friendly silicon chip detergent of the present invention and preparation method play cleaning action by alkali and surfactant, have
Effect cleans the greasy dirt of all kinds of workpiece surfaces, the impurity such as powder；Pass through antirust agent effective protection machine and workpiece non-corrosive；Pass through chela
Mixture plays chelating, and the metal ions such as effective chelated iron, calcium, magnesium enable its chelate to be dissolved in water, reach softening hydraulic
Degree improves cleaning performance；Play a part of to disperse inorganic salts and inorganic mineral by dispersant；Sterilization is played by fungicide
Effect；Play defoaming by antifoaming agent, Integral cleaning is had excellent performance, and use cost is low, not phosphorous, not nitrogenous, is free of benzene
Phenols is free of nitrite, and the poisonous and harmful raw material such as heavy metal ensures that worker's body is without damage, ensures environment damage,
In addition to Wafer Cleaning is also applicable to require workpiece in the various room temperature to medium temperature cleaning such as spray, ultrasonic wave, craft, machinery
The cleaning of the workpiece surface greasy dirt of short time antirust, simultaneously can be used for ground, workbench, glass, kitchen, ceramics etc. after cleaning
Greasy dirt cleaning.Usage：It is used after being diluted with water mixing.The amount of recommending：Light oil is dirty：1-5%；Middle heavy oil is dirty：6-12%.
Product of the present invention has selected environmentally protective additive, and cleaning performance is excellent, can reduce environmental pollution, and has apparent economic benefit
And social benefit.
Above-described embodiment is the description of the invention, is not limitation of the invention, it is any to simple transformation of the present invention after
Scheme all belong to the scope of protection of the present invention.
Claims (8)
1. a kind of environment friendly silicon chip detergent, it is characterised in that：The environment friendly silicon chip detergent is distributed by the group of following concentration
It makes：0-99.9 parts of water, 0.1-100 parts of alkali, 0-10 parts of surfactant, 0-10 parts of antirust agent, 0-10 parts of chelating agent, dispersion
0-5 parts of 0-10 parts of agent, 0-5 parts of fungicide and antifoaming agent, the number are parts by weight.
2. a kind of environment friendly silicon chip detergent as described in claim 1, it is characterised in that：The environment friendly silicon chip detergent by
The component of following concentration is formulated：20 parts of alkali, 4 parts of antirust agent, 2 parts of chelating agent, 1 part of dispersant, kills at 2 parts of surfactant
2 parts of microbial inoculum, 0.1 part of antifoaming agent, remaining is water, and the number is parts by weight.
3. a kind of environment friendly silicon chip detergent as described in claim 1, it is characterised in that：The environment friendly silicon chip detergent by
The component of following concentration is formulated：30 parts of alkali, 2 parts of surfactant, 2 parts of chelating agent, 2 parts of dispersant, 2 parts of fungicide, disappear
0.1 part of infusion, remaining is water, and the number is parts by weight.
4. a kind of environment friendly silicon chip detergent as described in claim 1, it is characterised in that：The environment friendly silicon chip detergent by
The component of following concentration is formulated：40 parts of alkali, 4 parts of surfactant, 4 parts of antirust agent, 1 part of chelating agent, 2 parts of fungicide,
Yu Weishui, the number are parts by weight.
5. a kind of environment friendly silicon chip detergent as described in claim 1, it is characterised in that：The alkali is inorganic base, such as hydrogen
Sodium oxide molybdena, potassium hydroxide and calcium hydroxide.
6. a kind of environment friendly silicon chip detergent as described in claim 1, it is characterised in that：The surfactant is ion
Type surfactant, nonionic surface active agent or zwitterionic surfactant, such as fatty alcohol ether sulfate salt, polyoxygenated
Ethylene fatty alcohol ether and alkyl betaine.
7. a kind of environment friendly silicon chip detergent as described in claim 1, it is characterised in that：The antirust agent is organic acid
Salt, acylate ester, borate, borate, dodecenylsuccinic acid salt or dodecenylsuccinic acid salt ester, such as 12 binary
Acid receives salt, 11 binary acid and receives salt, ternary acid and receive salt and boric acid receives salt, and the antirust agent is one such or several
Combination, the chelating agent is organic quasi-chelate compound or inorganic quasi-chelate compound, such as calcium acetate, citric acid and its calcium, potassium, sodium salt, Portugal
Calcium, sodium salt, glucopyrone, oxystearin, sodium Acid Acetate, tartaric acid and its k-na salt of saccharic acid, thio-acid sodium and
D-sorbite, the chelating agent are one such or several combinations, and the dispersant is polycarboxylic acid dispersant, such as horse
Come sour-acrylic copolymer, poly, Sodium Polyacrylate, carboxylic acid-co-polymer of sulfonate, acrylic acid-acrylic ester-sulfonic acid
Salt terpolymer and polyepoxy sodium succinate, the dispersant are one such or several combination, the fungicide
Organic series bactericidal agent or inorganic series bactericidal agent, such as BK, BIT, BBIT, MBM and MOB, the fungicide be it is one such or
Several combination of person, the antifoaming agent is organic silicon antifoaming agent or polyethers antifoaming agent, such as FOAM BAN HP720, FOAM
BAN MS550 and DF-20, the antifoaming agent are one such or several combinations.
8. a kind of preparation method of environment friendly silicon chip detergent as described in claim 1, it is characterised in that：The preparation method
It has steps of：
1. water and alkali are added in mixing kettle, stir 30-60 minutes, obtain homogeneous transparent solution；
2. antirust agent is added in mixing kettle, stirs 30-60 minutes, obtain homogeneous transparent solution；
3. surfactant, dispersant, fungicide and antifoaming agent are added in mixing kettle, it is mixed 30-60 minutes, obtains
Even clear solution.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109679771A (en) * | 2019-01-22 | 2019-04-26 | 上海毅诺生物科技有限公司 | Aqueous cleaning agent and preparation method thereof comprising polyhedral oligomeric silsesquioxane |
| CN110484387A (en) * | 2019-09-12 | 2019-11-22 | 河北工业大学 | It is a kind of alkalinity integrated circuit wiring polishing after low k dielectric cleaning agent and its cleaning method |
| CN111423847A (en) * | 2020-04-18 | 2020-07-17 | 陈玮 | Dispersant for hydraulic classification of superfine abrasive and preparation method thereof |
| CN112410135A (en) * | 2020-12-10 | 2021-02-26 | 深圳市恒纬祥科技有限公司 | Industrial cleaning agent universal for spraying and soaking |
| CN115461437A (en) * | 2020-04-23 | 2022-12-09 | 雷克特本克斯尔菲尼施公司 | Automatic dishwashing composition |
| CN115537272A (en) * | 2022-10-26 | 2022-12-30 | 新疆晶科能源有限公司 | Monocrystalline silicon sample wafer cleaning agent and cleaning method |
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