CN108519665B - Cell detection microscope - Google Patents

Cell detection microscope Download PDF

Info

Publication number
CN108519665B
CN108519665B CN201810723355.1A CN201810723355A CN108519665B CN 108519665 B CN108519665 B CN 108519665B CN 201810723355 A CN201810723355 A CN 201810723355A CN 108519665 B CN108519665 B CN 108519665B
Authority
CN
China
Prior art keywords
axis
lens
support frame
plate
bottom plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810723355.1A
Other languages
Chinese (zh)
Other versions
CN108519665A (en
Inventor
殷跃锋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN201810723355.1A priority Critical patent/CN108519665B/en
Priority to PCT/CN2018/096135 priority patent/WO2020006781A1/en
Publication of CN108519665A publication Critical patent/CN108519665A/en
Application granted granted Critical
Publication of CN108519665B publication Critical patent/CN108519665B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/248Base structure objective (or ocular) turrets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/362Mechanical details, e.g. mountings for the camera or image sensor, housings

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The invention discloses a cell detection microscope, which comprises a reference bottom plate, wherein one side of the top of the reference bottom plate is provided with a Z-axis support frame, the top of the Z-axis support frame is provided with a first servo motor, a screw rod axially connected with the first servo motor is rotationally arranged in the Z-axis support frame, a shooting support is sleeved on the screw rod in a sliding manner, and a shooting mechanism is arranged at the top of the shooting support frame; a Z-axis support frame at the side part of the photographing mechanism is provided with a driving piezoelectric component, and the bottom of the Z-axis support frame is provided with a lens device; an oil containing groove is arranged on the reference bottom plate below the shooting bracket, and a light source corresponding to the lens device is arranged at the top of the oil containing groove; the X-axis translation device is arranged at the top of the Y-axis translation device, the slide rack and the slide rack vertical adjusting device are arranged at the top of the X-axis translation device, the vertical direction stress application is improved, the vertical oscillation scanning focal length of the lens is increased, the imaging definition is improved, and the imaging position precision is improved.

Description

Cell detection microscope
Technical Field
The invention relates to the technical field of electron microscopes, in particular to a cell detection microscope.
Background
For a cell detection microscope, the device is an instrument which can amplify a cell sample specimen to be detected to a certain extent and then carry out microscopic observation detection. At present, people use a cell detection microscope to conduct microscopic study on human body cell tissues and blood samples, and the microscopic structures need to be photographed by the cell detection microscope to obtain clear photos, but when the current microscope is used for high-power microscope observation, two problems exist: firstly, the up-and-down oscillation scanning focal length of the lens is very small, and if the image plane of the lens is not overlapped with the sample plane, half of the imaging is clear and half of the imaging is blurred; secondly, vibration in the Y-axis direction of the current cell detection microscope is transmitted to the X-axis sliding device when the current cell detection microscope moves horizontally, and the vibration in the Y-axis direction can cause larger height error between a lens and a glass slide and affect the imaging position precision because the X-axis sliding device is in direct contact with the glass slide; thirdly, the stress applied to the current cell detection microscope in the vertical direction is small.
Disclosure of Invention
In order to solve the above technical problems, we propose a cell detection microscope, which aims to: the vertical direction stress application is improved, the imaging definition is improved, and the imaging position accuracy is improved.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
The cell detection microscope comprises a reference bottom plate, wherein a Z-axis support frame is arranged on one side of the top of the reference bottom plate, a first servo motor is arranged at the top of the Z-axis support frame, a screw rod axially connected with the first servo motor is rotatably arranged in the Z-axis support frame, a shooting support is sleeved on the screw rod in a sliding manner, a laser barrel is arranged at the top of the shooting support, a lens barrel communicated with the laser barrel is arranged at the top of the laser barrel, and a camera communicated with the lens barrel is arranged at the top of the lens barrel;
A driving piezoelectric component is arranged on a Z-axis support frame at the side part of the laser cylinder, a lens gusset plate contacted with the driving piezoelectric component is arranged at the bottom of the Z-axis support frame, a self-animal mirror wheel is rotatably arranged on the lens gusset plate, at least one lens communicated with the laser cylinder is arranged on the self-animal mirror wheel, and a second servo motor axially connected with the automatic objective lens is arranged at the side part of the lens gusset plate;
An oil containing groove is arranged on the reference bottom plate below the shooting bracket, and a light source corresponding to the lens is arranged at the top of the oil containing groove;
The top of the Y-axis translation device is provided with an X-axis translation device, and the top of the X-axis translation device is provided with a slide frame and a slide frame vertical adjusting device.
Preferably, the number of the lenses is one.
Preferably, the X-axis translation device comprises an X-axis support, a fixed plate connected with the glass slide frame is arranged on the X-axis support in a sliding mode, a third servo motor axially connected with the fixed plate through a soft connecting rope is arranged on the side portion of the X-axis support, and a regulator for regulating the tightness of the soft connecting rope is further arranged at the top of the X-axis support.
Preferably, the Y-axis translation device comprises a moving plate and a passive driving support, wherein the moving plate and the passive driving support are arranged on a reference bottom plate in a sliding mode, limiting rods close to the side parts of the moving plate are respectively arranged at two ends of the passive driving support, limiting blocks corresponding to the moving plate are arranged on the reference bottom plate, the top of the passive driving support is fixed with the X-axis support, and universal wheels which are in contact with the moving plate are arranged on the side surfaces, close to the moving plate, of the two limiting rods.
Preferably, the vertical direction stressing workpiece for driving the piezoelectric component is a large-thrust piezoelectric pile made of piezoelectric ceramics, and the control power supply for driving the piezoelectric component, the large-thrust piezoelectric pile made of piezoelectric ceramics, the 0.1um precision grating ruler and the lens stressing plate form a closed loop system.
Preferably, the sum of the weights of the animal mirror wheel and the at least one lens is 5KG.
Preferably, the high-thrust piezoelectric stack made of piezoelectric ceramic reciprocates at 600HZ frequency with accuracy within 0.2um per second.
Preferably, the translation speed of the X-axis fixing plate is 30mm per second, and the height error of the slide rack caused by vibration in the translation process of the fixing plate is within 0.2 um.
Preferably, the flexible connecting rope is a steel wire rope.
Through the technical scheme, the driving piezoelectric component is electrified, the high-thrust piezoelectric stack can apply force along the Z axis (namely the vertical direction), the high-thrust piezoelectric stack and the 0.1um precision grating ruler form a closed loop system, the self-animal mirror wheel with the weight of 5KG and the lens are controlled to do reciprocating motion at the frequency of 600HZ with the precision of less than 0.2um per second, the scanning function is realized, the vertical direction application force is improved, the up-and-down oscillation scanning focal length of the lens is increased, and the imaging definition is improved; the regulator can improve the precision that X axis direction moved, and the universal wheel can eliminate Z axis direction force, has prevented on the vibration transmission that appears under traditional transmission mode in the removal process to Y axis translation device and X axis translation device, has guaranteed that the machine is in X axis with 30 mm/second scanning process, and the high error that arouses because of vibrations between camera lens and the slide is within 0.2um, and then has improved the position accuracy of formation of image.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic perspective view of a cell detection microscope according to the present disclosure;
Fig. 2 is an enlarged view at a of fig. 1.
Corresponding part names are indicated by numerals and letters in the drawings:
1. Reference base plate 2.Z shaft support 21, first servo motor 22, camera mount 23, laser barrel 24, lens barrel 25, camera 3, drive piezoelectric element 31, lens gusset 32, animal mirror wheel 33, lens 34, second servo motor 4, oil sump 41, light source 5.Y shaft translation device 51, kinematic plate 52, stop bar 6.X shaft translation device 62, fixed plate 63, X-axis mount 64, flexible connection cord 65, regulator 7, slide mount 71, slide mount vertical adjustment device.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The following describes the embodiments of the present invention in further detail with reference to the drawings.
As shown in fig. 1 and 2, a cell detection microscope comprises a reference bottom plate 1, wherein a Z-axis support 2 is arranged on one side of the top of the reference bottom plate 1, a first servo motor 21 is arranged on the top of the Z-axis support 2, a screw rod axially connected with the first servo motor 21 is rotatably arranged in the Z-axis support 2, a shooting support 22 is sleeved on the screw rod in a sliding manner, a laser cylinder 23 is arranged on the top of the shooting support 22, a lens barrel 24 communicated with the laser cylinder 23 is arranged on the top of the laser cylinder 23, and a camera 25 communicated with the top of the lens barrel 24 is arranged.
The Z-axis support frame 2 at the side of the laser cylinder 23 is provided with a driving piezoelectric component 3, the bottom of the Z-axis support frame 2 is provided with a lens reinforcing plate 31 contacted with the driving piezoelectric component 3, the lens reinforcing plate 31 is rotatably provided with a self-mirror wheel 32, the self-mirror wheel 32 is provided with a lens 33 communicated with the laser cylinder 23, and the side of the lens reinforcing plate 31 is provided with a second servo motor 34 axially connected with the self-mirror wheel 32.
The reference base plate 1 below the photographing bracket 22 is provided with an oil accommodating groove 4, and the top of the oil accommodating groove 4 is provided with a light source 41 corresponding to the lens 33.
The Y-axis translation device 5 of the reference bottom plate 1, the top of the Y-axis translation device 5 is provided with an X-axis translation device 6, and the top of the X-axis translation device 6 is provided with a slide frame 7 and a slide frame vertical adjustment device 71.
The X-axis translation device 6 comprises an X-axis support 63, a fixed plate 62 connected with the slide frame 7 is arranged on the X-axis support 63 in a sliding manner, a third servo motor axially connected with the fixed plate 62 through a soft connecting rope 64 is arranged on the side portion of the X-axis support 63, and a regulator 65 for regulating the tightness of the soft connecting rope 64 is further arranged on the top of the X-axis support 63.
The Y-axis translational device 5 comprises a moving plate 51 and a passive driving bracket which are slidably arranged on the reference bottom plate 1, wherein two ends of the passive driving bracket are respectively provided with a limiting rod 52 which abuts against the side part of the moving plate 51, the reference bottom plate 1 is provided with a limiting block corresponding to the moving plate 51, the top of the passive driving bracket is fixed with an X-axis bracket 63, the side surfaces of the two limiting rods 52, which are close to the moving plate 51, are all universal wheels which are contacted with the moving plate 51, a swinging passive translational moving device is formed by the moving plate 51, the passive driving bracket, the limiting rods 52 and the universal wheels, the passive driving bracket is pushed to move by component force generated by the X-axis translational device 6 along the Y axis and the Z axis during movement, and then the force in the Z axis direction is eliminated by the universal wheels, so that the passive driving bracket pushes the moving plate 51 to move along the Y axis direction, and vibration between the lens 33 and a slide is reduced.
The vertical direction stress application work piece of the driving piezoelectric component 3 is a control power supply of the driving piezoelectric component 3 of the high-thrust piezoelectric stack made of piezoelectric ceramics, the 0.1um precision grating ruler and the lens stress application plate 31 form a closed loop system.
The sum of the weights of the animal mirror wheel 32, the second servomotor 34 and the at least one lens 33 is 5KG.
The high-thrust piezoelectric stack made of piezoelectric ceramic reciprocates at 600HZ frequency with an accuracy within 0.2um per second.
The translation speed of the X-axis fixing plate 62 is 30mm per second, and the height error of the slide rack 7 caused by vibration during the translation of the fixing plate 62 is within 0.2 um.
The flexible connecting cord 64 is a steel cord.
The driving piezoelectric component 3 is electrified, the high-thrust piezoelectric stack is stressed along the Z axis (namely the vertical direction), a closed loop system is formed by the high-thrust piezoelectric stack and the 0.1um precision grating ruler, the automatic objective lens wheel 32 with the weight of 5KG and the lens 33 are controlled to reciprocate at the frequency of 600HZ with the precision of less than 0.2um per second, the scanning function is realized, the stress in the vertical direction is improved, the up-down oscillation scanning focal length of the lens is increased, and the imaging definition is improved; the regulator 65 can improve the accuracy of X-axis direction movement, and the universal wheel can eliminate Z-axis direction force, so that vibration generated in a traditional transmission mode in the moving process is prevented from being transmitted to the Y-axis translation device and the X-axis translation device, the height error between the lens and the glass slide caused by vibration in the X-axis scanning process of 30 mm/s is ensured to be within 0.2um, and the imaging position accuracy is further improved.
The above is the structural characteristics and the action effects of the cell detection microscope, and has the advantages that: the vertical direction stress application is improved, the imaging definition is improved, and the imaging position accuracy is improved.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present invention.

Claims (7)

1. The cell detection microscope is characterized by comprising a reference bottom plate (1), wherein one side of the top of the reference bottom plate (1) is provided with a Z-axis support frame (2), the top of the Z-axis support frame (2) is provided with a first servo motor (21), a screw rod axially connected with the first servo motor (21) is rotationally arranged in the Z-axis support frame (2), a shooting support (22) is sleeved on the screw rod in a sliding manner, the top of the shooting support (22) is provided with a laser cylinder (23), the top of the laser cylinder (23) is provided with a lens cone (24) communicated with the laser cylinder (23), and the top of the lens cone (24) is provided with a camera (25) communicated with the camera; a driving piezoelectric component (3) is arranged on a Z-axis support frame (2) at the side part of the laser cylinder (23), a lens gusset (31) which is contacted with the driving piezoelectric component (3) is arranged at the bottom of the Z-axis support frame (2), a self-animal mirror wheel (32) is rotatably arranged on the lens gusset (31), at least one lens (33) which is communicated with the laser cylinder (23) is arranged on the automatic mirror wheel (32), and a second servo motor (34) which is axially connected with the automatic mirror wheel (32) is arranged at the side part of the lens gusset (31); an oil containing groove (4) is arranged on the reference bottom plate (1) below the shooting bracket (22), and a light source (41) corresponding to the lens (33) is arranged at the top of the oil containing groove (4); the device comprises a Y-axis translation device (5) of a reference bottom plate (1), wherein an X-axis translation device (6) is arranged at the top of the Y-axis translation device (5), and a glass slide frame (7) and a glass slide frame vertical adjustment device (71) are arranged at the top of the X-axis translation device (6); the X-axis translation device (6) comprises an X-axis bracket (63), a fixed plate (62) connected with the glass slide frame (7) is arranged on the X-axis bracket (63) in a sliding manner, a third servo motor axially connected with the fixed plate (62) through a soft connecting rope (64) is arranged on the side part of the X-axis bracket (63), and a regulator (65) for regulating the tightness of the soft connecting rope (64) is also arranged at the top of the X-axis bracket (63); the Y-axis translation device (5) comprises a moving plate (51) and a passive driving support, wherein the moving plate (51) and the passive driving support are arranged on a reference bottom plate (1) in a sliding mode, limiting rods (52) close to the side portions of the moving plate (51) are respectively arranged at two ends of the passive driving support, limiting blocks corresponding to the moving plate (51) are arranged on the reference bottom plate (1), the top of the passive driving support is fixed with an X-axis support (63), and universal wheels which are contacted with the moving plate (51) are arranged on the side faces, close to the moving plate (51), of the limiting rods (52).
2. A cell detection microscope according to claim 1 characterised in that the number of lenses (33) is one.
3. A cell inspection microscope according to claim 1 characterised in that the vertical direction forcing work piece driving the piezo-element (3) is a high-force piezo-stack of piezo-ceramic, the inspection work piece driving the piezo-element (3) is a 0.1um precision grating ruler, the control power supply driving the piezo-element (3), the high-force piezo-stack of piezo-ceramic, the 0.1um precision grating ruler and the lens forcing plate (31) form a closed loop system.
4. A cell detection microscope according to claim 1 characterised in that the sum of the weights of the automatic objective wheel (32) and the at least one lens (33) is 5KG.
5. A cell detection microscope according to claim 3 wherein the high-thrust piezoelectric stack of piezoelectric ceramic reciprocates at a frequency of 600HZ with an accuracy of less than 0.2um per second.
6. A cell detection microscope according to claim 1 characterised in that the X-axis mounting plate (62) translates at a speed of 30mm per second and the slide holder (7) has a height error of less than 0.2um due to vibration during translation of the mounting plate (62).
7. A cell detection microscope according to claim 1 characterised in that the flexible connecting cord (64) is a steel cord.
CN201810723355.1A 2018-07-04 2018-07-04 Cell detection microscope Active CN108519665B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201810723355.1A CN108519665B (en) 2018-07-04 2018-07-04 Cell detection microscope
PCT/CN2018/096135 WO2020006781A1 (en) 2018-07-04 2018-07-18 Cell detection microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810723355.1A CN108519665B (en) 2018-07-04 2018-07-04 Cell detection microscope

Publications (2)

Publication Number Publication Date
CN108519665A CN108519665A (en) 2018-09-11
CN108519665B true CN108519665B (en) 2024-06-07

Family

ID=63428557

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810723355.1A Active CN108519665B (en) 2018-07-04 2018-07-04 Cell detection microscope

Country Status (2)

Country Link
CN (1) CN108519665B (en)
WO (1) WO2020006781A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108519665B (en) * 2018-07-04 2024-06-07 殷跃锋 Cell detection microscope
CN109669261A (en) * 2019-01-26 2019-04-23 殷跃锋 A kind of cell detection microscope
CN111504885B (en) * 2020-04-04 2022-03-15 电子科技大学 Analysis method of full-automatic blood smear morphological analysis device based on machine vision
CN113021052A (en) * 2021-03-29 2021-06-25 宁波市凯博数控机械有限公司 Large-scale rack and pinion transmission formula digit control machine tool

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003255234A (en) * 2002-03-05 2003-09-10 Lasertec Corp Microscope and imaging method
CN202710836U (en) * 2012-07-31 2013-01-30 广州市道真生物科技有限公司 Microscopic image automatic acquisition apparatus
CN104181685A (en) * 2014-07-29 2014-12-03 杭州卓腾信息技术有限公司 Automatic digital slide focusing device and method based on microscope
CN205787340U (en) * 2016-05-25 2016-12-07 珠海科域生物工程股份有限公司 A kind of multilamellar camera system of sediments microscope inspection
CN207008174U (en) * 2017-06-29 2018-02-13 深圳市森美协尔科技有限公司 A kind of focusing arrangement of microscope detection board
CN208297826U (en) * 2018-07-04 2018-12-28 殷跃锋 A kind of cell detection microscope
CN109669261A (en) * 2019-01-26 2019-04-23 殷跃锋 A kind of cell detection microscope
WO2020006781A1 (en) * 2018-07-04 2020-01-09 殷跃锋 Cell detection microscope

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4680052B2 (en) * 2005-12-22 2011-05-11 シスメックス株式会社 Specimen imaging apparatus and specimen analyzer including the same
JP4810251B2 (en) * 2006-02-16 2011-11-09 キヤノン株式会社 Atomic force microscope
CN103364937B (en) * 2013-07-11 2016-05-04 四川美生科技有限公司 Full-automatic check analysis microscope
CN104932092B (en) * 2015-06-15 2017-09-08 上海交通大学 Auto-focusing microscope and its focusing method based on eccentric pencil method
CN106842533A (en) * 2017-01-24 2017-06-13 宁波江丰生物信息技术有限公司 A kind of high accuracy microscopie unit

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003255234A (en) * 2002-03-05 2003-09-10 Lasertec Corp Microscope and imaging method
CN202710836U (en) * 2012-07-31 2013-01-30 广州市道真生物科技有限公司 Microscopic image automatic acquisition apparatus
CN104181685A (en) * 2014-07-29 2014-12-03 杭州卓腾信息技术有限公司 Automatic digital slide focusing device and method based on microscope
CN205787340U (en) * 2016-05-25 2016-12-07 珠海科域生物工程股份有限公司 A kind of multilamellar camera system of sediments microscope inspection
CN207008174U (en) * 2017-06-29 2018-02-13 深圳市森美协尔科技有限公司 A kind of focusing arrangement of microscope detection board
CN208297826U (en) * 2018-07-04 2018-12-28 殷跃锋 A kind of cell detection microscope
WO2020006781A1 (en) * 2018-07-04 2020-01-09 殷跃锋 Cell detection microscope
CN109669261A (en) * 2019-01-26 2019-04-23 殷跃锋 A kind of cell detection microscope

Also Published As

Publication number Publication date
CN108519665A (en) 2018-09-11
WO2020006781A1 (en) 2020-01-09

Similar Documents

Publication Publication Date Title
CN108519665B (en) Cell detection microscope
US5142145A (en) Composite scanning tunneling microscope
JP6074429B2 (en) Focus and imaging systems and techniques using error signals
CN102540394B (en) Driving means, lens barrel and include the Optical devices of lens barrel
WO2020151039A1 (en) Cell detection microscope
US6909540B2 (en) Microscope objective, microscope, and method for imaging a specimen
US8000008B2 (en) Optical device with controllable deflection element for vibration compensation
JPH08136961A (en) Camera shake correction device
JP2008511845A (en) Scanner apparatus and method for optically scanning an object
US11287631B2 (en) Device for moving a microscope stage and microscope comprising such a device
US11513329B2 (en) Varying an illumination path of a selective plane illumination microscopy
CN112825541A (en) Camera module and electronic equipment
CN106707488A (en) Quick focusing microscope
US10511237B2 (en) Method of driving a driving apparatus
JP6038144B2 (en) Method and apparatus for operating a dynamic nanofocus system
JP4914537B2 (en) Sample support device applied to an inverted microscope
CN208297826U (en) A kind of cell detection microscope
CN105596088B (en) Adjustable three imaging shaft mechanisms based on skin confocal system
CN211928292U (en) Detection microscope with complete set slide glass
EP1978403A2 (en) Lens device
CN207487602U (en) A kind of micro-displacement measuring device
US20080055739A1 (en) Device For Vibration-Free Mounting Of A Drive Motor In A Stand Of A Surgical Microscope
JP3217396B2 (en) Microscopic coarse / fine movement mechanism
JP6514508B2 (en) microscope
CN216561199U (en) Microscope focusing mechanism based on friction drive

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant