CN108493168A - A kind of multi-cavity encapsulating structure of electrical isolation - Google Patents

A kind of multi-cavity encapsulating structure of electrical isolation Download PDF

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Publication number
CN108493168A
CN108493168A CN201810524238.2A CN201810524238A CN108493168A CN 108493168 A CN108493168 A CN 108493168A CN 201810524238 A CN201810524238 A CN 201810524238A CN 108493168 A CN108493168 A CN 108493168A
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CN
China
Prior art keywords
cavity
electrical isolation
ceramic dielectric
coupled transfer
encapsulating structure
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Pending
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CN201810524238.2A
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Chinese (zh)
Inventor
张峰
赵婷
李金良
汪鑫悦
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Beijing Kege Li Micro Science And Technology Co Ltd
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Beijing Kege Li Micro Science And Technology Co Ltd
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Priority to CN201810524238.2A priority Critical patent/CN108493168A/en
Publication of CN108493168A publication Critical patent/CN108493168A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/66High-frequency adaptations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6644Packaging aspects of high-frequency amplifiers
    • H01L2223/6655Matching arrangements, e.g. arrangement of inductive and capacitive components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Near-Field Transmission Systems (AREA)

Abstract

The present invention relates to a kind of multi-cavity encapsulating structure of electrical isolation, includes two or more cavitys for carrying out electrical isolation by ceramic dielectric, the coupled transfer structure realized and communicated between the affiliated power domain of two cavity of arbitrary neighborhood is provided in the ceramic dielectric.The multi-cavity encapsulating structure of the electrical isolation of the present invention, the electrical isolation between cavity is carried out using ceramic dielectric, by coupled transfer structure, realizes the communication between neighboring chambers, good insulation preformance can take into account demand of both the communication of high reliability number xegregating unit and electrical isolation simultaneously.

Description

A kind of multi-cavity encapsulating structure of electrical isolation
Technical field
The present invention relates to integrated antenna package fields, and in particular to a kind of multi-cavity encapsulating structure of electrical isolation.
Background technology
The number xegregating unit such as power supply power supply, bus interface and gate driving allows multiple power domains to coexist and communicate, and is Prevent that data are disturbed, resist high-voltage transient and tolerance high pressure, it is necessary to carry out electrical isolation.In military and aircraft industry application Field ensures high reliability and the long-life of high-grade component to completely cut off steam dust, prevent from aoxidizing, it is necessary to use gas Sealing dress.Common plastic packaging belongs to non-airtight encapsulation, and Metal Packaging, ceramic package and metal-ceramic package belong to airtight Encapsulation, inside are cavity structure.Therefore, for the high reliability packaging of digital xegregating unit, how to ensure air-tightness and realize Communication and electrical isolation between different cavitys are urgent problems.
A kind of lamination-type two-chamber encapsulating structure is proposed application No. is the United States Patent (USP) of US9209121B2, above and below the structure The chip of cavity is connected to same packaging pin by bonding line, realizes the communication of upper and lower cavities, improves integrated level.Application Number propose a kind of dual chamber three-dimension packaging structure for the Chinese patent of CN204696114U, which uses metallic shield partition board Upper and lower cavities are subjected to signal shielding, by coaxial vertical interconnection structure the circuit of upper and lower cavities is communicated, improves The integrated level of system.Above-mentioned encapsulating structure solves the problems, such as two-chamber communication and level of integrated system, but two-chamber communication uses The method of the direct-connected metal of bonding line cannot achieve the purpose that electrical isolation between two cavitys.
It can be seen that although existing two-chamber encapsulating structure can realize level Hermetic Package, cannot take into account simultaneously highly reliable Property number xegregating unit communication and electrical isolation of both demand.
Invention content
The technical problem to be solved by the present invention is to the encapsulating structures for the prior art cannot take into account high reliability simultaneously Demand of both digital xegregating unit communication and electrical isolation, provides a kind of multi-cavity encapsulating structure of electrical isolation.
The technical solution that the present invention solves above-mentioned technical problem is as follows:A kind of multi-cavity encapsulating structure of electrical isolation, including by Ceramic dielectric carries out two or more cavitys of electrical isolation, is provided in the ceramic dielectric and realizes two chamber of arbitrary neighborhood The coupled transfer structure communicated between the affiliated power domain of body.
The beneficial effects of the invention are as follows:The multi-cavity encapsulating structure of the electrical isolation of the present invention carries out cavity using ceramic dielectric Between electrical isolation, the communication between neighboring chambers is realized by coupled transfer structure, good insulation preformance can take into account simultaneously High reliability number xegregating unit communicates and electrical isolation both sides demand.
Based on the above technical solution, the present invention can also be improved as follows.
Further, the coupled transfer structure using transformer coupled principle or giant magnetoresistance coupling principle, using electric energy and Energy mutually converts realization signal transmission between magnetic energy.
Advantageous effect using above-mentioned further scheme is:Using transformer coupled principle or giant magnetoresistance coupling principle, profit Realization signal transmission is mutually converted with energy between electric energy and magnetic energy, and communication process need not use the direct-connected metal of bonding line Method can effectively achieve the purpose that electrical isolation between two cavitys.
Further, the coupled transfer structure is transformer coupled transmission structure, including is arranged at intervals on the ceramics and is situated between The first wire coil in matter and the second wire coil.
Advantageous effect using above-mentioned further scheme is:Using spaced first wire coil and the second metal wire Circle, two coils need not use metal connection can be achieved with communicating, and effectively reached and have been situated between by ceramics between adjacent two cavity Matter carries out the purpose of electrical isolation.
Further, the coupled transfer structure is giant magnetoresistance coupled transfer structure, including is arranged at intervals on the ceramics and is situated between Third wire coil in matter and giant magnetoresistance.
Advantageous effect using above-mentioned further scheme is:Using spaced third wire coil and giant magnetoresistance, Metal connection need not be used to can be achieved with communicating between three wire coils and giant magnetoresistance, effectively reached between adjacent two cavity The purpose of electrical isolation is carried out by ceramic dielectric.
Further, the coupled transfer structure realizes signal transmission using capacitive coupling transmission principle, using electric field change.
Advantageous effect using above-mentioned further scheme is:Using capacitive coupling transmission principle, and it is real using electric field change Existing signal transmission, the method that communication process need not use the direct-connected metal of bonding line can effectively reach electrical between two cavitys The purpose of isolation.
Further, the coupled transfer structure is capacitive coupling transmission structure, including is spaced and is arranged in parallel in the pottery The first metal polar plate in ceramic dielectric and the second metal polar plate.
Advantageous effect using above-mentioned further scheme is:Using two metal polar plates disposed in parallel, electricity can be utilized Hold coupled transfer principle, transmits signal using the variation of electric field between two metal polar plates, be not required between two metal polar plates It to use metal connection can be achieved with communicating, effectively reach and electrical isolation is carried out by ceramic dielectric between adjacent two cavity Purpose.
Further, it is equipped with the coupled transfer structure in the ceramic dielectric between two cavity of arbitrary neighborhood.
Advantageous effect using above-mentioned further scheme is:It is respectively provided in ceramic dielectric between two cavity of arbitrary neighborhood The communication between two cavity of arbitrary neighborhood may be implemented in coupled transfer structure.
Further, IC chip is equipped in the cavity, described IC chip one end is connected with and outside reality The outer package lead now communicated, the other end are connected with the coupled transfer structure communicated between neighboring chambers is realized.
Further, the cavity includes the groove structure formed by the ceramic dielectric and is encapsulated in the groove structure The metal cover board of open end.
Advantageous effect using above-mentioned further scheme is:The cavity is formed using groove structure and metal cover board, it can The electric elements being convenient for changing in cavity with as needed opening cavity or installation and maintenance etc..
Further, the cavity is two and is set as up-down structure or tiled configuration.
Advantageous effect using above-mentioned further scheme is:Arrangement shape that can be according to package requirements to select cavity different Formula.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of embodiment of multi-cavity encapsulating structure that the present invention is electrically insulated;
Fig. 2 is the structural schematic diagram for the multi-cavity encapsulating structure another embodiment that the present invention is electrically insulated;
Fig. 3 is a kind of structural schematic diagram of embodiment of coupled transfer structure in the present invention;
Fig. 4 is the structural schematic diagram of coupled transfer structure another embodiment in the present invention.
In attached drawing, parts list represented by the reference numerals are as follows:
1, ceramic cartridge;11, the first cavity;12, the second cavity;13, the first IC chip;14, the second integrated electricity Road chip;15, PAD pads;16, bonding line;17, line conduction band is crossed;18, the first metal cover board;19, the second metal cover board;
2, transformer coupled transmission structure;21, the first wire coil;22, the second wire coil;
3, giant magnetoresistance coupled transfer structure;31, third wire coil;32, giant magnetoresistance;
4, capacitive coupling transmission structure;41, the first metal polar plate;42, the second metal polar plate;
5, outer package lead;6, the first power domain;7, second source domain.
Specific implementation mode
The principle and features of the present invention will be described below with reference to the accompanying drawings, and illustrated embodiment is served only for explaining the present invention, It is not intended to limit the scope of the present invention.
As Figure 1-Figure 4, the multi-cavity encapsulating structure of a kind of electrical isolation of the present embodiment, including electricity is carried out by ceramic dielectric Air bound from two or more cavitys, be provided in the ceramic dielectric realize the affiliated power domain of two cavity of arbitrary neighborhood it Between the coupled transfer structure that communicates.
Coupling is also known as commissure, and coupling refers to the input and output of two or more circuit elements or circuit network etc. Between exist be fitted close with influence each other, and pass through interaction from a side to the other side transmission energy the phenomenon that.Specific coupling When conjunction phenomenon is that two or more circuits constitute a network, wherein the current or voltage of on a rare occasion a circuit changes, Influencing other circuits, there is a phenomenon where respective changes, that is to say, that by the effect of coupling, by a certain circuit or electric elements Energy or information are transferred in other circuits or electric elements.Generally, coupling refer to just two entities interdepend in The measurement of other side.
In the present embodiment, by the way that coupled transfer structure is arranged in the ceramic dielectric of insulation, it will be able to realize adjacent two Communication between a affiliated power domain of cavity, good insulation preformance, can take into account simultaneously high reliability number xegregating unit communication and Demand of both electrical isolation.
In the present embodiment, specifically there are three types of embodiments for coupled transfer structure, as follows respectively.
Embodiment one:The coupled transfer structure uses transformer coupled principle, utilizes energy between electric energy and magnetic energy Mutually convert realization signal transmission.Using transformer coupled principle, reality is mutually converted using energy between electric energy and magnetic energy Existing signal transmission, the method that communication process need not use the direct-connected metal of bonding line can effectively reach electrical between two cavitys The purpose of isolation.
Specifically, the coupled transfer structure is transformer coupled transmission structure 2, including it is arranged at intervals on the ceramics and is situated between The first wire coil 21 in matter and the second wire coil 22.Using 21 and second metal wire of spaced first wire coil Electric energy in power domain where it is become magnetic energy using the first wire coil 21, is transmitted to from the first wire coil 21 by circle 22 Second wire coil 22, power domain where the second wire coil 22 converts the magnetic energy received to electric energy again and is transferred to are real The transmission of existing signal need not use metal connection to can be achieved with leading between the first wire coil 21 and the second wire coil 22 Letter has effectively achieved the purpose that carry out electrical isolation by ceramic dielectric between adjacent two cavity.
Embodiment two:The coupled transfer structure uses giant magnetoresistance coupling principle, utilizes energy between electric energy and magnetic energy Mutually convert realization signal transmission.Using giant magnetoresistance coupling principle, reality is mutually converted using energy between electric energy and magnetic energy Existing signal transmission, the method that communication process need not use the direct-connected metal of bonding line can effectively reach electrical between two cavitys The purpose of isolation.
Specifically, the coupled transfer structure is giant magnetoresistance coupled transfer structure 3, including it is arranged at intervals on the ceramics and is situated between Third wire coil 31 in matter and giant magnetoresistance 32.Using spaced third wire coil 31 and giant magnetoresistance 32, is utilized Three wire coils 31 convert the electric energy of power domain where it to magnetic energy, and giant magnetoresistance 32 is transmitted to from third wire coil 31, huge Power domain where magnetic resistance 32 converts the magnetic energy received to electric energy again and is transferred to, realizes the transmission of signal, third metal wire Metal connection need not be used to can be achieved with communicating between circle 31 and giant magnetoresistance 32, effectively reach and passed through between adjacent two cavity Ceramic dielectric carries out the purpose of electrical isolation.
Embodiment three:The coupled transfer structure realizes signal using capacitive coupling transmission principle, using electric field change Transmission.Realize that signal transmission, communication process need not use bonding line using capacitive coupling transmission principle, and using electric field change The method of direct-connected metal can effectively achieve the purpose that electrical isolation between two cavitys.
Specifically, the coupled transfer structure is capacitive coupling transmission structure 4, including it is spaced and is arranged in parallel in the pottery The first metal polar plate 41 in ceramic dielectric and the second metal polar plate 42.Using two metal polar plates disposed in parallel, can utilize Capacitive coupling transmission principle transmits signal using the variation of electric field between two metal polar plates, between two metal polar plates not It needs to can be achieved with communicating using metal connection, has effectively reached and electrical isolation is carried out by ceramic dielectric between adjacent two cavity Purpose.
In the present embodiment, the coupled transfer structure is equipped in the ceramic dielectric between two cavity of arbitrary neighborhood.It is in office It anticipates and is respectively provided with coupled transfer structure in the ceramic dielectric between adjacent two cavity, may be implemented logical between two cavity of arbitrary neighborhood Letter.
In the present embodiment, IC chip is equipped in the cavity, described IC chip one end is connected with covering Dress lead 5 is communicated with realizing the communication with IC chip in cavity and outside between the other end and realization neighboring chambers The coupled transfer structure connection.
In the present embodiment, the cavity includes the groove structure formed by the ceramic dielectric and is encapsulated in the groove The metal cover board of structure open end.The cavity is formed using groove structure and metal cover board, can as needed be beaten cavity It opens, the electric elements being convenient for changing in cavity or installation and maintenance etc..
Below by taking two cavitys as an example, the multi-cavity encapsulating structure of electrical isolation is illustrated.It, can be with when cavity is two It is arranged using up-down structure or tiled configuration, to facilitate user according to different package requirements the arrangement that selects cavity different Form.
As depicted in figs. 1 and 2, two cavitys are respectively the first cavity 11 and the second cavity 12 formed by ceramic dielectric, The structure type of ceramic cartridge 1 may be used in ceramic dielectric, i.e., each in the top of the both sides up and down of ceramic cartridge 1 or the left and right sides One groove structure is set, and the first metal cover board 18 is arranged to be packaged to it in the open-mouth of the groove structure of top, lower section The open-mouth of groove structure second metal cover board 19 is set it is packaged.First cavity, 11 region and its in Electric elements belong to the first power domain 6,12 region of the second cavity and the electric elements in it belong to second source domain 7。
As depicted in figs. 1 and 2, the first IC chip 13, the first integrated circuit are provided in first cavity 11 13 both ends of chip are bonded in using bonding line 16 (i.e. metallic bond plying) on two PAD pads 15 of 11 bottom of the first cavity, the The outer package lead 5 of one power domain 6 connects one of PAD pads 15 to realize the first integrated circuit by crossing line conduction band 17 Chip 13 and external communication, the first wire coil 21 or third wire coil 31 or the first of transformer coupled transmission structure 2 Metal polar plate 41 connects another PAD pad 15 by crossing line conduction band 17.
As depicted in figs. 1 and 2, the second IC chip 14, the second integrated circuit are provided in second cavity 12 14 both ends of chip are bonded in using bonding line 16 (i.e. metallic bond plying) on two PAD pads 15 of 12 bottom of the second cavity, the The outer package lead 5 of two power domains 7 connects one of PAD pads 15 to realize the second integrated circuit by crossing line conduction band 17 Chip 14 and external communication, the second wire coil 22 or giant magnetoresistance 32 of transformer coupled transmission structure 2 or the second metal pole Plate 42 connects another PAD pad 15 by crossing line conduction band 17.
Specifically, the first cavity 11 in Fig. 1 is located at right over the second cavity 12, the groove structure of the first cavity 11 is formed Opening up arrangement forms the opening down arrangement of groove structure of the second cavity 12.The first integrated circuit in first cavity 11 The slot bottom in 11 groove structure of the first cavity is arranged in chip 13, and the setting of the second IC chip 14 in the second cavity 12 is the The slot bottom of two cavitys, 12 groove structure, the first IC chip 13 are correspondingly arranged with the second IC chip 14, the first chamber The slot bottom of groove structure where the PAD pads 15 in PAD pads 15 and the second cavity 12 in body 11 are all disposed within, and positioned at the The both sides of one IC chip 13 or the second IC chip 15.Ceramic dielectric between the slot bottom of two groove structures In be embedded with the first coil wire coil 21 arranged up and down and the second wire coil 22,21 one end of the first wire coil and first The PAD pads 15 on 11 right side of cavity are connected by crossing line conduction band 17, and the outer package lead 5 on the left of multi-cavity encapsulating structure passes through Line conduction band 17 is crossed to connect with the PAD pads 15 in 11 left side of the first cavity;Second wire coil, 22 one end and 12 left side of the second cavity PAD pads 15 by cross line conduction band 17 connect, be located at multi-cavity encapsulating structure on the right side of outer package lead 5 passed through cross line conduction band 17 It is connect with the PAD pads 15 on 12 right side of the second cavity.The first wire coil 21 in Fig. 1 can be substituted for third wire coil 31, the second wire coil 22 can be substituted for giant magnetoresistance 32, and third wire coil 31 is corresponding with about 32 giant magnetoresistance and interval is set It sets to carry out signal transmission, it is specific as shown in Figure 3;Alternatively, the first wire coil 21 in Fig. 1 can be substituted for the first metal pole Plate 41, the second wire coil 22 can be substituted for the second metal polar plate 42, on the first metal polar plate 41 and the second metal polar plate 42 Lower correspondence and spaced and parallel setting carries out signal transmission, it is specific as shown in Figure 4.
Left and right arrangement, the first cavity 11 are located at the second cavity 12 side by side for the first cavity 11 and the second cavity 12 in Fig. 2 Left side, the groove structure opening for forming the second cavity 12 of groove structure and formation of the first cavity 11 is upwardly disposed, and first 11 bottom of cavity is wholely set with 12 bottom of the second cavity and is located at same level height.The first integrated electricity in first cavity 11 The slot bottom in 11 groove structure of the first cavity is arranged in road chip 13, and the second IC chip 14 setting in the second cavity 12 exists The slot bottom of second cavity, 12 groove structure, the PAD pads 15 in PAD pads 15 and the second cavity 12 in the first cavity 11 are all set The slot bottom in place groove structure is set, and positioned at the both sides of the first IC chip 13 or the second IC chip 14. The first wire coil 21 and the second wire coil 22 arranged up and down are embedded in ceramic dielectric between two groove structures, the One wire coil, 21 one end is connect with the PAD pads 15 on 11 right side of the first cavity by crossing line conduction band 17, is located at multi-cavity encapsulation knot Outer package lead 5 on the left of structure is connect by crossing line conduction band 17 with the PAD pads 15 in 11 left side of the first cavity;Second wire coil 22 one end are connect with the PAD pads 15 in 12 left side of the second cavity by crossing line conduction band 17, are located at outer on the right side of multi-cavity encapsulating structure Package lead 5 is connect by crossing line conduction band 17 with the PAD pads 15 on 12 right side of the second cavity.The first wire coil 21 in Fig. 2 Can be substituted for third wire coil 31, the second wire coil 22 can be substituted for giant magnetoresistance 32, third wire coil 31 with it is huge About 32 magnetic resistance is corresponding and interval is arranged to carry out signal transmission, specific as shown in Figure 3;Alternatively, the first wire coil in Fig. 2 21 can be substituted for the first metal polar plate 41, and the second wire coil 22 can be substituted for the second metal polar plate 42, the first metal pole Plate 41 and the second about 42 metal polar plate be corresponding and spaced and parallel setting carries out signal transmission, it is specific as shown in Figure 4.
The multi-cavity encapsulating structure of the electrical isolation of the present embodiment, using the coupled transfer structure being embedded in ceramic dielectric into When row signal transmission, not by the method for the direct-connected metal of bonding line, directly pass through transformer coupled principle or capacitive coupling principle Or giant magnetoresistance coupling principle realizes signal transmission so that between each cavity independently of each other, has reached truly electrical Isolation.
In the description of the present invention, it is to be understood that, term "center", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time The orientation or positional relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be orientation based on ... shown in the drawings or Position relationship is merely for convenience of description of the present invention and simplification of the description, and does not indicate or imply the indicated device or element must There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply relative importance Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or Implicitly include at least one this feature.In the description of the present invention, the meaning of " plurality " is at least two, such as two, three It is a etc., unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc. Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral;Can be that machinery connects It connects, can also be electrical connection;It can be directly connected, can also can be indirectly connected through an intermediary in two elements The interaction relationship of the connection in portion or two elements, unless otherwise restricted clearly.For those of ordinary skill in the art For, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be with "above" or "below" second feature It is that the first and second features are in direct contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be One feature is directly under or diagonally below the second feature, or is merely representative of fisrt feature level height and is less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office It can be combined in any suitable manner in one or more embodiments or example.In addition, without conflicting with each other, the skill of this field Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned Embodiment is changed, changes, replacing and modification.

Claims (10)

1. a kind of multi-cavity encapsulating structure of electrical isolation, which is characterized in that include by ceramic dielectric carry out two of electrical isolation or More than two cavitys are provided in the ceramic dielectric and realize that the coupling communicated between the affiliated power domain of two cavity of arbitrary neighborhood passes Defeated structure.
2. the multi-cavity encapsulating structure of a kind of electrical isolation according to claim 1, which is characterized in that the coupled transfer structure is adopted Realize that signal passes with transformer coupled principle or giant magnetoresistance coupling principle, using mutually converting for energy between electric energy and magnetic energy It is defeated.
3. the multi-cavity encapsulating structure of a kind of electrical isolation according to claim 2, which is characterized in that the coupled transfer structure is Transformer coupled transmission structure, including the first wire coil and the second wire coil that are arranged at intervals in the ceramic dielectric.
4. the multi-cavity encapsulating structure of a kind of electrical isolation according to claim 2, which is characterized in that the coupled transfer structure is Giant magnetoresistance coupled transfer structure, including the third wire coil and giant magnetoresistance that are arranged at intervals in the ceramic dielectric.
5. the multi-cavity encapsulating structure of a kind of electrical isolation according to claim 1, which is characterized in that the coupled transfer structure is adopted Signal transmission is realized with capacitance coupled transfer principle, using electric field change.
6. the multi-cavity encapsulating structure of a kind of electrical isolation according to claim 5, which is characterized in that the coupled transfer structure is Capacitive coupling transmission structure, including be spaced and be arranged in parallel in the first metal polar plate in the ceramic dielectric and the second metal pole Plate.
7. according to a kind of any one of claim 1 to 6 multi-cavity encapsulating structure of electrical isolation, which is characterized in that arbitrary neighborhood The coupled transfer structure is equipped in ceramic dielectric between two cavitys.
8. according to a kind of any one of claim 1 to 6 multi-cavity encapsulating structure of electrical isolation, which is characterized in that the cavity In be equipped with IC chip, described IC chip one end be connected with the external outer package lead realized and communicated, it is another It holds and is connected with the coupled transfer structure communicated between neighboring chambers is realized.
9. according to a kind of any one of claim 1 to 6 multi-cavity encapsulating structure of electrical isolation, which is characterized in that the cavity Include the groove structure formed by the ceramic dielectric and is encapsulated in the metal cover board of the groove structure open end.
10. according to a kind of any one of claim 1 to 6 multi-cavity encapsulating structure of electrical isolation, which is characterized in that the cavity For two and it is set as up-down structure or tiled configuration.
CN201810524238.2A 2018-05-28 2018-05-28 A kind of multi-cavity encapsulating structure of electrical isolation Pending CN108493168A (en)

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CN111599790A (en) * 2020-05-13 2020-08-28 中国电子科技集团公司第十三研究所 Ceramic leadless chip type packaging shell
CN111627864A (en) * 2020-06-03 2020-09-04 西安卫光科技有限公司 High junction temperature SiC ceramic packaging silicon stack shell structure
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CN109952011A (en) * 2019-02-25 2019-06-28 中国科学院理化技术研究所 Production method, electromagnetic shielding system and the chip detecting equipment of electromagnetic shielding system
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CN115864666B (en) * 2022-11-22 2024-03-15 中国人民解放军海军工程大学 Capacitive wireless power transmission coupler, wireless power transmission system and design method of capacitive wireless power transmission coupler

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