CN108459078A - A kind of sonic surface wave gas sensors air-sensitive test system - Google Patents
A kind of sonic surface wave gas sensors air-sensitive test system Download PDFInfo
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Abstract
一种声表面波气体传感器气敏测试系统，属于传感器及气敏元件性能测试交叉领域。包括釜体、信号采集分析系统，气体质量流量控制系统，温度控制系统，釜内压强检测装置，真空排气装置，及防爆装置；釜体放置于温度控制系统的筒状加热腔内，釜体上设有进气口与排气口，进气口与气体质量流量控制系统相连，排气口与釜内压强检测装置及真空排气装置连接，防爆装置一端连接到釜体内，另一端与真空排气装置末端接入通风橱；所述的信号采集分析系统由网络分析仪和测试台组成，测试台设置在釜体内。该系统可对气体浓度，测试温度，环境气压，干扰项等因素进行同时监控，为SAW气体传感器测试提供良好的密闭环境，且操作性良好，提高了研究的效率。
A surface acoustic wave gas sensor gas sensitivity test system belongs to the cross field of sensor and gas sensor performance test. Including the kettle body, signal acquisition and analysis system, gas mass flow control system, temperature control system, pressure detection device inside the kettle, vacuum exhaust device, and explosion-proof device; the kettle body is placed in the cylindrical heating chamber of the temperature control system, the kettle body There is an air inlet and an exhaust port on the top, the air inlet is connected to the gas mass flow control system, the exhaust port is connected to the pressure detection device in the kettle and the vacuum exhaust device, one end of the explosion-proof device is connected to the kettle body, and the other end is connected to the vacuum The end of the exhaust device is connected to the fume hood; the signal acquisition and analysis system is composed of a network analyzer and a test bench, and the test bench is set in the kettle body. The system can monitor gas concentration, test temperature, ambient air pressure, interference items and other factors at the same time, providing a good airtight environment for SAW gas sensor testing, and has good operability, which improves the efficiency of research.
Description
技术领域technical field
本发明涉及一种为声表面波(SAW)气体传感器测试设计的多功能气敏测试系统，属于传感器及气敏元件性能测试交叉领域。The invention relates to a multifunctional gas-sensing testing system designed for surface acoustic wave (SAW) gas sensor testing, which belongs to the interdisciplinary field of performance testing of sensors and gas-sensing components.
背景技术Background technique
人类生存环境中存在多种多样的气体，有些气体在生产和生活中广泛使用，但对人类健康有害或对环境造成污染，例如一些化工原料、燃气等；还有一些气体是人类生产或生活活动中所产生的废气。气体很难通过目视或触摸来感知，而气体的成分及含量却影响人的健康甚至危及生命，目前的气体检测主要以仪器分析为主，包括气相色谱、质谱、光谱、离子迁移谱等方法。这些仪器分析方法灵敏度高、精度高，但是，价格昂贵、体积较大、维护困难。SAW气体传感器，具有小型化、低成本、在线和快速检测的优点，足以满足不同场景的需求。SAW气体传感器是众多传感器中涉及面较广的传感器类型，该类型传感器由三部分组成：敏感膜、SAW器件、转换电路，而SAW器件通常有延迟线型和谐振器型两种结构。SAW气体传感器其实质是SAW的传播特性会随着外界因素的变化而改变，将温度、压力、湿度、浓度等被测因素的变化量转换为SAW器件的频率偏移、相位变化或延迟时间的改变。与其他类型的气体传感器相比，SAW气体传感器具有以下一些独特的优点：输出信号为振荡器频率的变化，易于与计算机接口组成自适用适时处理系统；灵敏度高；采用集成电路中的平面工艺制作，体积小，易于集成化、智能化、低成本和大批量生产。There are a variety of gases in the human living environment. Some gases are widely used in production and life, but they are harmful to human health or pollute the environment, such as some chemical raw materials, gas, etc.; some gases are used in human production or living activities. exhaust gas produced in the. Gases are difficult to perceive by sight or touch, but the composition and content of gases affect human health and even endanger life. The current gas detection is mainly based on instrumental analysis, including gas chromatography, mass spectrometry, spectroscopy, ion mobility spectrometry and other methods . These instrument analysis methods have high sensitivity and high precision, but are expensive, bulky and difficult to maintain. SAW gas sensor has the advantages of miniaturization, low cost, online and rapid detection, which is enough to meet the needs of different scenarios. SAW gas sensor is a sensor type that involves a wide range of sensors. This type of sensor consists of three parts: sensitive film, SAW device, and conversion circuit. SAW devices usually have two structures: delay line type and resonator type. The essence of the SAW gas sensor is that the propagation characteristics of SAW will change with the change of external factors, and the change of measured factors such as temperature, pressure, humidity, concentration, etc. will be converted into the frequency offset, phase change or delay time of the SAW device. Change. Compared with other types of gas sensors, SAW gas sensors have the following unique advantages: the output signal is the change of the oscillator frequency, and it is easy to interface with the computer to form a self-adaptive and timely processing system; it has high sensitivity; it is manufactured by planar technology in integrated circuits , small size, easy integration, intelligence, low cost and mass production.
只有建立了精确可靠的SAW气体传感器的检测模型及数据库，才能运用高频SAW气体传感器获得准确的分析数据。由于高频SAW传感器对外界环境变化的响应极为敏感，故而其测试系统需要良好的密闭环境，能够对待测气体浓度，测试温度，环境气压同时进行严格控制，并在测试过程中加入适量的干扰气体以研究其抗干扰能力，同时要具有较高的可操作性，能够节省测试需要的人力与时间。Only when an accurate and reliable SAW gas sensor detection model and database are established, can the high-frequency SAW gas sensor be used to obtain accurate analysis data. Since the high-frequency SAW sensor is extremely sensitive to changes in the external environment, its test system requires a good airtight environment, which can strictly control the concentration of the gas to be tested, the test temperature, and the ambient air pressure at the same time, and add an appropriate amount of interfering gas during the test. In order to study its anti-interference ability, it must have high operability and save manpower and time required for testing.
发明内容Contents of the invention
针对以上问题本发明设计了一套新型SAW气体传感器测试系统，该气敏测试系统可用于对SAW气敏传感器研究的各个阶段的测试，集气体浓度，环境温度，压力，气体干扰等多项测试功能于一体，降低了测试过程人力及成本的消耗，提高了气敏测试的效率。Aiming at the above problems, the present invention designs a new SAW gas sensor test system, which can be used to test various stages of SAW gas sensor research, including multiple tests such as gas concentration, ambient temperature, pressure, gas interference, etc. The function is integrated, which reduces the consumption of manpower and cost in the testing process, and improves the efficiency of gas sensitivity testing.
本发明通过下述技术方案实现：The present invention realizes through following technical scheme:
一种声表面波气体传感器气敏测试系统，其特征在于包括釜体、信号采集分析系统，气体质量流量控制系统，温度控制系统，釜内压强检测装置，真空排气装置，及防爆装置；釜体放置于温度控制系统的筒状加热腔内，釜体上设有进气口与排气口，其中的进气口与气体质量流量控制系统相连，其中的排气口与釜内压强检测装置及真空排气装置连接，防爆装置一端连接到釜体内，另一端与真空排气装置末端接入通风橱；所述的信号采集分析系统由网络分析仪、测试台及其连接的射频电缆组成，测试台设置在釜体内。A surface acoustic wave gas sensor gas sensitive testing system, characterized in that it includes a kettle body, a signal acquisition and analysis system, a gas mass flow control system, a temperature control system, a pressure detection device inside the kettle, a vacuum exhaust device, and an explosion-proof device; The body is placed in the cylindrical heating chamber of the temperature control system. There are air inlets and exhaust ports on the kettle body. The air inlet is connected to the gas mass flow control system, and the exhaust port is connected to the pressure detection device inside the kettle. and the vacuum exhaust device, one end of the explosion-proof device is connected to the kettle body, and the other end is connected to the fume hood with the end of the vacuum exhaust device; the signal acquisition and analysis system is composed of a network analyzer, a test bench and connected radio frequency cables, The test bench is set in the kettle body.
进一步的，测试台底部设有高频阻抗匹配模块，顶部设有SAW传感器插口，设有内部信号传输线与高频阻抗匹配模块及测试台上设有的射频电缆连接口相连接，并通过射频电缆连接网络分析仪。Further, there is a high-frequency impedance matching module at the bottom of the test bench, and a SAW sensor socket at the top, and an internal signal transmission line is connected to the high-frequency impedance matching module and the RF cable connection port on the test bench, and the radio frequency cable Connect a network analyzer.
进一步的，所述的釜体为不锈钢打造，容积为500ml，内径64mm，内高162mm，耐高压高温，气密性良好。Further, the kettle body is made of stainless steel, with a volume of 500ml, an inner diameter of 64mm, and an inner height of 162mm, which is resistant to high pressure and high temperature, and has good airtightness.
进一步的，测试台为长方体，尺寸25*20*25mm，放置在釜体底部，黄铜材质，内含匹配电路，用于测试传感器信号及屏蔽外来电磁干扰；网络分析仪以耐高温射频电缆与测试台连接进行气敏传感器响应信号的实时采集与分析。Furthermore, the test bench is a cuboid with a size of 25*20*25mm, placed at the bottom of the kettle body, made of brass, and contains matching circuits for testing sensor signals and shielding external electromagnetic interference; the network analyzer uses high-temperature resistant radio frequency cables and The test bench is connected to collect and analyze the response signal of the gas sensor in real time.
进一步的，温度控制系统设有用于放置釜体的筒状加热腔，通过温度传感器同时检测釜内温度和釜壁温度，通过筒状加热腔的筒状加热壁进行均匀加热，可加热至300℃并进行连锁控制，带有256段程序升温控制段，最终加热功率为0％-100％设定，防止温度过冲。Further, the temperature control system is equipped with a cylindrical heating chamber for placing the kettle body. The temperature inside the kettle and the temperature of the kettle wall are simultaneously detected by the temperature sensor, and the cylindrical heating wall of the cylindrical heating chamber is used for uniform heating, which can be heated to 300°C And carry out chain control, with 256 sections of programmed temperature control section, the final heating power is set at 0%-100%, to prevent temperature overshoot.
进一步的，气体质量流量控制系统集控制，数显于一体，可同时控制三路气体，包含1l/min，50ml/min两种量程，控制精度达0.5ml/min，检测气体浓度为0ppm～500000ppm范围内。Furthermore, the gas mass flow control system integrates control and digital display, and can control three channels of gas at the same time, including two ranges of 1l/min and 50ml/min, with a control accuracy of 0.5ml/min and a detection gas concentration of 0ppm to 500000ppm within range.
进一步的，真空排气装置速率可调，从而可以调节釜内压强，并使测试过程中釜内气体处于动态流动状态，利于SAW气体传感器吸附检测。Further, the speed of the vacuum exhaust device is adjustable, so that the pressure inside the kettle can be adjusted, and the gas in the kettle is in a dynamic flow state during the test, which is beneficial to the adsorption detection of the SAW gas sensor.
本发明测试系统所测器件为高频SAW气体传感器元件，该SAW气体传感器，为单通道、双通道的谐振器或延迟线SAW器件，可测类型包括谐振型，延迟线型。The device tested by the test system of the present invention is a high-frequency SAW gas sensor element. The SAW gas sensor is a single-channel, dual-channel resonator or delay line SAW device, and the measurable types include resonance type and delay line type.
本发明的特点是：The features of the present invention are:
该系统可对气体浓度，测试温度，环境气压，干扰项等因素进行同时监控，为SAW气体传感器测试提供良好的密闭环境，且操作性良好，提高了研究的效率。The system can monitor gas concentration, test temperature, ambient air pressure, interference items and other factors at the same time, providing a good airtight environment for SAW gas sensor testing, and has good operability, which improves the efficiency of research.
附图说明Description of drawings
图1：本发明所述的一种新型SAW气体传感器测试系统的结构示意图；Fig. 1: the structural representation of a kind of novel SAW gas sensor test system of the present invention;
图2：为本发明图1中SAW气体传感器测试台俯视结构示意图；Fig. 2: is the schematic diagram of the top view structure of the SAW gas sensor test bench in Fig. 1 of the present invention;
图3：为本发明图1中SAW气体传感器测试台仰视结构示意图。Fig. 3 is a schematic view of the structure of the SAW gas sensor test bench in Fig. 1 of the present invention viewed from above.
图中：(1)釜体，(2)测试台，(3)温度控制系统,(4)气源,(5)气体质量流量控制系统，(6)网络分析仪,(7)釜内压强检测装置，(8)真空排气装置，(9)防爆装置，(10)通风橱，(11)SAW传感器，(12)射频电缆连接口(13)SAW传感器插口(14)内部信号传输线(15)高频阻抗匹配模块。In the figure: (1) kettle body, (2) test bench, (3) temperature control system, (4) gas source, (5) gas mass flow control system, (6) network analyzer, (7) pressure inside the kettle Detection device, (8) Vacuum exhaust device, (9) Explosion-proof device, (10) Fume hood, (11) SAW sensor, (12) RF cable connection port (13) SAW sensor socket (14) Internal signal transmission line (15) ) High frequency impedance matching module.
具体实施方式Detailed ways
下面结合附图对本发明做进一步地说明。The present invention will be further described below in conjunction with the accompanying drawings.
实施例1Example 1
参见附图1，本发明声表面波(SAW)气体传感器气敏测试系统包括釜体1、信号采集分析系统，气体质量流量控制系统5，温度控制系统3，釜内压强检测装置7，真空排气装置8，及防爆装置9；信号采集分析系统由网络分析仪6和测试台2组成，网络分析仪6和测试台2通过射频电缆连接，SAW传感器11固定在上2，测试台2设置在釜体1内，釜体1放置于温度控制系统3设有的筒状加热腔内，温度控制系统3上设有进气口和排气口，其中进气口与气体质量流量控制系统5相连，排气口与压强检测装置7及真空装置8连接，釜口设有防爆装置9以免实验者由于操作不当导致釜内压强过高引起釜体爆裂，防爆装置9一端连接到釜体1内，另一端与真空排气装置8末端接入通风橱10。防爆装置9另一端与通风橱10连接的目的是避免防爆膜破裂时待测有毒气体泄漏。Referring to accompanying drawing 1, surface acoustic wave (SAW) gas sensor gas sensing test system of the present invention comprises kettle body 1, signal acquisition and analysis system, gas mass flow control system 5, temperature control system 3, pressure detection device 7 in the kettle, vacuum exhaust gas device 8, and explosion-proof device 9; signal acquisition and analysis system is made up of network analyzer 6 and test bench 2, network analyzer 6 and test bench 2 are connected by radio frequency cable, SAW sensor 11 is fixed on upper 2, and test bench 2 is arranged on In the kettle body 1, the kettle body 1 is placed in the cylindrical heating chamber provided by the temperature control system 3. The temperature control system 3 is provided with an air inlet and an exhaust port, wherein the air inlet is connected to the gas mass flow control system 5 , the exhaust port is connected with the pressure detection device 7 and the vacuum device 8, and the kettle mouth is provided with an explosion-proof device 9 to prevent the experimenter from causing the kettle body to burst due to improper operation due to excessive pressure in the kettle. One end of the explosion-proof device 9 is connected to the kettle body 1. One end and the end of the vacuum exhaust device 8 are connected to the fume hood 10 . The purpose of connecting the other end of the explosion-proof device 9 with the fume hood 10 is to prevent the poisonous gas to be measured from leaking when the explosion-proof membrane is broken.
所述的釜体1为不锈钢打造,容积为500ml，内径64mm，内高162mm，耐高压高温,气密性良好。The kettle body 1 is made of stainless steel, has a volume of 500ml, an inner diameter of 64mm, and an inner height of 162mm, is resistant to high pressure and high temperature, and has good airtightness.
同时参见附图2和3，测试台2为长方体，测试台2底部设有高频阻抗匹配模块15，顶部设有SAW传感器插口13，与高频阻抗匹配模块15连接的内部信号传输线14与测试台2上设有的射频电缆连接口12相连接，并通过射频电缆连接网络分析仪6。本发明测试台2尺寸为25*20*25mm，黄铜材质，放置在釜体1底部，内含匹配电路，用于测试传感器信号及屏蔽外来电磁干扰；网络分析仪6以耐高温射频电缆与测试台连接进行气敏传感器响应信号的实时采集与分析。Referring to accompanying drawings 2 and 3 simultaneously, test bench 2 is a cuboid, and the bottom of test bench 2 is provided with high-frequency impedance matching module 15, and the top is provided with SAW sensor socket 13, and the internal signal transmission line 14 that is connected with high-frequency impedance matching module 15 and test The radio frequency cable connection port 12 provided on the platform 2 is connected, and the network analyzer 6 is connected through the radio frequency cable. The test bench 2 of the present invention has a size of 25*20*25mm and is made of brass. It is placed on the bottom of the kettle body 1 and contains a matching circuit for testing sensor signals and shielding external electromagnetic interference; the network analyzer 6 uses high temperature resistant radio frequency cables and The test bench is connected to collect and analyze the response signal of the gas sensor in real time.
温度控制系统3通过温度传感器同时检测釜内温度和釜壁温度，通过筒状加热壁进行高精度均匀加热，可加热至300℃并进行连锁控制，从而使任何一路超过设定值均不会加热，自带256段程序升温控制段，使用者可以从0％-100％自行设定最终加热功率，有效防止温度过冲。The temperature control system 3 simultaneously detects the temperature inside the kettle and the temperature of the kettle wall through the temperature sensor, and conducts high-precision and uniform heating through the cylindrical heating wall, which can be heated to 300°C and is chain-controlled, so that any path exceeding the set value will not be heated , Comes with 256 sections of programmed temperature control section, the user can set the final heating power from 0%-100%, effectively preventing the temperature from overshooting.
气体质量流量控制系统5集控制，数显于一体，可同时控制三路气体，包含1l/min，50ml/min两种量程，大量程用以控制标准气体，小量程可以对微量待测气体及干扰气体进行精确控制，控制精度达0.5ml/min。配合500mL的釜体，检测气体浓度可以控制在0ppm～50000ppm范围内。因本发明中气体质量流量控制系统5可同时控制三路气体，因此通过阀门与提供三路气体的气源4相连接，本发明中气源4可提供N2和CO2气体，或测试需要的其他气体。The gas mass flow control system 5 integrates control and digital display, and can control three channels of gas at the same time, including two ranges of 1l/min and 50ml/min. The large range is used to control the standard gas, and the small range can control the trace gas and Precise control of interfering gas with a control accuracy of 0.5ml/min. With a 500mL kettle body, the detection gas concentration can be controlled within the range of 0ppm to 50000ppm. Because the gas mass flow control system 5 in the present invention can control the three-way gas at the same time, it is therefore connected to the gas source 4 that provides the three-way gas through a valve. The gas source 4 in the present invention can provide N2 and CO2 gas, or the test needs of other gases.
真空排气装置8速率可调，从而可以调节釜内压强，并使测试过程中釜内气体处于动态流动状态，利于SAW气体传感器吸附检测。本发明的SAW气体传感器11，可以是单通道、双通道的谐振器、延迟线等SAW器件。The speed of the vacuum exhaust device 8 is adjustable, so that the pressure in the kettle can be adjusted, and the gas in the kettle is in a dynamic flow state during the test process, which is beneficial to the adsorption detection of the SAW gas sensor. The SAW gas sensor 11 of the present invention may be SAW devices such as single-channel or dual-channel resonators and delay lines.
本发明的特点是：The features of the present invention are:
该系统可对气体浓度，测试温度，环境气压，干扰项等因素进行同时监控，为SAW气体传感器测试提供良好的密闭环境，且操作性良好，提高了研究的效率。The system can monitor gas concentration, test temperature, ambient air pressure, interference items and other factors at the same time, providing a good airtight environment for SAW gas sensor testing, and has good operability, which improves the efficiency of research.
实施例2：Example 2:
以下为利用本发明系统探究SAW CO2气体传感器的工作特性的具体实例。The following is a specific example of using the system of the present invention to explore the working characteristics of the SAW CO2 gas sensor.
将制备好的器件用超纯水冲洗3min，N2吹干。Rinse the prepared device with ultrapure water for 3 min, and blow dry with N2 .
将器件安置于测试台2上，确认测试台2与网络分析仪6妥善连接后，封闭釜体1并检查密封性。打开网络分析仪6，调整至测量所需状态。Place the device on the test bench 2, and after confirming that the test bench 2 is properly connected to the network analyzer 6, close the kettle body 1 and check the airtightness. Turn on the network analyzer 6 and adjust to the state required for measurement.
依次打开真空排气装置8的真空泵、排气阀，气源4的气瓶总压阀、分压阀、气体质量流量控制系统5及进气阀。将气体质量流量控制系统5各气路切换至清洗模式，排出气路和釜体1中的残余气体。Turn on the vacuum pump and the exhaust valve of the vacuum exhaust device 8, the total pressure valve of the cylinder of the gas source 4, the partial pressure valve, the gas mass flow control system 5 and the intake valve. Switch each gas path of the gas mass flow control system 5 to the cleaning mode, and discharge the residual gas in the gas path and kettle body 1 .
将气体质量流量控制系统5除N2以外的气路关闭，并将N2流量调整至500mL/min。调节真空泵抽气量，将釜体1中压力抽至80kPa。Close the gas path of the gas mass flow control system 5 except for N2 , and adjust the N2 flow rate to 500mL/min. Adjust the pumping capacity of the vacuum pump, and the pressure in the still body 1 is pumped to 80kPa.
打开温度控制系统3，将釜体1内温度升至最佳测试温度，温度控制系统3的温度表读数稳定后开始进行气体试验。Turn on the temperature control system 3, raise the temperature in the kettle body 1 to the optimum test temperature, and start the gas test after the temperature gauge reading of the temperature control system 3 is stable.
打开气源4的CO2气路，调整CO2浓度，由0升至40000ppm，每升200ppm为一个测试点，待网络分析仪6读数稳定后记录对应测试点读数。Open the CO2 gas path of the gas source 4, adjust the CO2 concentration from 0 to 40000ppm, 200ppm per liter is a test point, and record the corresponding test point reading after the network analyzer 6 reading is stable.
本测试系统可视实验需求，在改变待测气体浓度的同时，改变压强，温度，或加入干扰气体等影响因素，以此来研究在不同的复杂环境下，SAW气体传感器的工作动、静态特性，稳定性，以及抗干扰性。According to the experimental requirements, the test system can change the pressure, temperature, or add interfering gas and other influencing factors while changing the concentration of the gas to be tested, so as to study the dynamic and static characteristics of the SAW gas sensor in different complex environments. , stability, and anti-interference.
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| CN116930315A (en) * | 2022-04-01 | 2023-10-24 | 中国科学院声学研究所 | Surface acoustic wave gas sensor adopting multilayer film medium |
| CN117288899A (en) * | 2023-09-25 | 2023-12-26 | 重庆科华安全设备有限责任公司 | Closed detection system and detection method for sensor diffusion gas collection analysis performance |
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