CN108181296A - Optical fiber surface enhancing Raman microprobe based on surface phasmon effect and preparation method thereof - Google Patents
Optical fiber surface enhancing Raman microprobe based on surface phasmon effect and preparation method thereof Download PDFInfo
- Publication number
- CN108181296A CN108181296A CN201810208209.5A CN201810208209A CN108181296A CN 108181296 A CN108181296 A CN 108181296A CN 201810208209 A CN201810208209 A CN 201810208209A CN 108181296 A CN108181296 A CN 108181296A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- metal
- array
- micro
- phasmon effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 48
- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 26
- 230000000694 effects Effects 0.000 title claims abstract description 18
- 230000002708 enhancing effect Effects 0.000 title claims abstract description 17
- 238000002360 preparation method Methods 0.000 title abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 239000004005 microsphere Substances 0.000 claims abstract description 17
- 238000003491 array Methods 0.000 claims abstract description 14
- 239000003292 glue Substances 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims abstract description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 11
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 11
- 229920002120 photoresistant polymer Polymers 0.000 claims description 8
- 238000001237 Raman spectrum Methods 0.000 claims description 6
- 239000000084 colloidal system Substances 0.000 claims description 6
- 239000011806 microball Substances 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 239000010410 layer Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000008367 deionised water Substances 0.000 claims description 4
- 229910021641 deionized water Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 239000002344 surface layer Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000000835 fiber Substances 0.000 abstract description 10
- 238000004458 analytical method Methods 0.000 abstract description 4
- 230000009471 action Effects 0.000 abstract description 3
- 230000005284 excitation Effects 0.000 abstract description 3
- 238000004528 spin coating Methods 0.000 abstract description 3
- 238000000227 grinding Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 abstract description 2
- 229920000642 polymer Polymers 0.000 abstract 1
- 239000004793 Polystyrene Substances 0.000 description 19
- 229920002223 polystyrene Polymers 0.000 description 18
- 239000000523 sample Substances 0.000 description 10
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 6
- 238000004416 surface enhanced Raman spectroscopy Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002082 metal nanoparticle Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
Landscapes
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention discloses a kind of optical fiber surface enhancing Raman microprobes based on surface phasmon effect and preparation method thereof.The structure of the present invention is the periodical metal structure of one layer of attachment on the fiber end face of grinding.Making step includes：Spin coating PS micro-sphere arrays on substrate, partial etching and the metal-coated films at the top of PS microballoons, form hemispherical metal structure, then in its surface spin on polymers and cure, and remove substrate；By obtained film and fiber end face glue curing, PS microballoons are removed after curing completely, the geometric dimension that RIE etchings adjust metal structure makes its resonance wavelength and excitation laser consistent wavelength, only remaining metal hemispherical array at the top of optical fiber.Sample to be tested is adsorbed in metal hemispherical array surface, light source is coupled into from optical fiber one end, metal structure is irradiated from inside of optical fibre, laser generates measurable Raman signal under the action of metal structure, is exported after optical fiber is collected from the other end by spectrometer analysis.The configuration of the present invention is simple, suitable for processing.
Description
Technical field
The present invention relates to a kind of optical fiber surface enhancing Raman microprobe based on surface phasmon effect and its making sides
Method belongs to Optochemical sensor technical field.
Background technology
In traditional Raman spectrum spectrum analysis, for samples such as liquid, film and powder, it is special to be not required to
Sample treatment can obtain satisfied spectrogram, but to some non-uniform samples or be not easy to the sample of direct sample, need
Fiber Raman is popped one's head in.Through fiber Raman probe collection Raman scattering signal, signal is passed to by detector by optical fiber and obtains Raman
Spectrum.Trace detection repeats detection.It is detected in local organization.Application of the optical fiber in Raman spectrum, greatly simplifies
The optical system of transmission spectra method improves the measurement range of spectral instrument, especially suitable for telemetry so that online
Analysis, analysis, in-vivo analysis, field monitoring, multimetering in real time etc. are possibly realized.
SERS (Surface enhanced Raman scattering) signal is that spatial orientation is unrelated, is consistent with conventional Raman signal,
Therefore the angle of optical fiber can be collected by change, excitation signal and the light efficiency of collection signal is maximized, can reduce
The background interference caused by fiber raman scattering.
The SERS mechanism that academic circles at present is generally accepted mainly has physics to enhance two class of mechanism and Chemical enhancement mechanism.
Physics enhancing is also known as Electromagnetic enhancement, it is believed that SERS effects derive from the enhancing of metal surface local electric field, molecule
There was only physical absorption between metallic substrates almost without interaction, thus determine enhancement factor and Metal Substrate
Bottom state is related, to binding molecule without selectivity.Electromagnetic enhancement model mainly has surface plasma resonance body Model, antenna
Resonate submodel and mirror image field model.The specific mechanism that these model differences are embodied in respective local area electric-field enhancing has
Institute is different.
Chemical enhancement mechanism thinks Molecular Adsorption in textured metal nano grain surface, nano surface particle plasma
Electric charge transfer or stronger chemical action has occurred with binding molecule in body between the two, causes the polarization of metal nanoparticle
Rate changes, and greatly affects or change resonance characteristics of the metal-surface nano particle as plasma, so as to cause
The enhancing of Raman scattering signal.Chemical enhancement is acted on by binding molecule, molecule and plasma group key and exciting light
The profound influence of the factors such as frequency, the main theory model about Chemical enhancement mechanism include bit model and electric charge transfer mould living
Type.
Invention content
It is an object of the invention to overcome deficiency of the prior art, provide a kind of based on surface phasmon effect
Optical fiber surface enhancing Raman microprobe and preparation method thereof, solve this technical problem of background interference in the prior art, in addition
This scheme causes detection easy, and the position for being not suitable for microscopic system for tiny area can directly be visited using optical fiber
Needle sampler is detected, while takes into account portability, trace detection and low-noise characteristic.
To achieve the above object, the present invention adopts the following technical scheme that：
A kind of optical fiber surface enhancing Raman microprobe based on surface phasmon effect, including optical fiber, the one of the optical fiber
End is connected with metal nano waveguide array, and the other end connects light source and light spectrum detecting apparatus by coupler；The optical fiber is by light
Metal nano waveguide array described in the incident light directing that source generates forms surface on the surface of the metal nano waveguide array
Phasmon effect；The metal nano waveguide array is placed in sample to be tested, the molecule of adsorption sample to be tested；Institute
It states incident light and irradiates the scattering light generated after the molecule of the sample to be tested by the optical fiber guiding coupler, Ran Houyou
The light spectrum detecting apparatus measures Raman spectrum.
Preferably, it is hemispheric metal array that the metal nano waveguide array, which is surface, resonance wavelength with it is described
The consistent wavelength of incident light.
Preferably, the material of the metal nano waveguide array is gold, silver or copper.
A kind of production method for preparing Raman microprobe as described above, includes the following steps：
A) the nanoscale microballoon of configuration PS materials and the colloid micro ball solution of deionized water mixing；
B) the colloid micro ball solution obtained in a) is added drop-wise on planar substrates, the surface for making the planar substrates is uniform
Arrange PS micro-sphere arrays；
C) by b) the middle PS microballoon partial etchings prepared, then one layer of nano level metal film of array surface layer sputtering, makes
PMMA photoresists are uniformly filled between PS micro-sphere arrays；Planar substrates are removed after curing to obtain film；
D) one section of optical fiber is intercepted, after described optical fiber one end is ground, the metal film of the film one side and light that will obtain in c)
End face after fibre grinding is cured with glue, and film is fixed on optical fiber with this, is then just putting optical fiber, PS microballoon battle arrays
Row upward, obtain device；
E) top of device in d) is subjected to reactive ion etching, makes at the top of optical fiber the only hemispherical metal of remaining separation
Array is to form the optical fiber surface enhancing Raman microprobe based on surface phasmon effect.
Compared with prior art, the advantageous effect that is reached of the present invention is：
The device of the invention has metal hemispherical array, and detected sample is adsorbed in metal hemispherical array surface,
Light source is coupled into from optical fiber one end, irradiates metal structure from inside of optical fibre, laser is generated under the action of metal structure and can be surveyed
The Raman signal of amount；Sample is conventionally necessary to be placed in optical path, can just obtain satisfied spectrogram；And
Introduce the present apparatus after, can by optical fiber will detect light from light source draw, with sample interact, and the collection through optical fiber and
Transmission, flashlight is sent to monitoring system.The configuration of the present invention is simple, suitable for processing.
Description of the drawings
Fig. 1 is the schematic diagram of SERS substrate fabrications method flow of the present invention.
Fig. 2 is the schematic diagram of the production method flow of Raman microprobe of the present invention.
Fig. 3 is the structure diagram of Raman microprobe of the present invention.
Fig. 4 is the Raman spectrogram of Raman microprobe of the present invention in Fig. 3.
Reference numeral：1st, PS micro-sphere arrays；2nd, quartz substrate；3rd, metal silverskin；4th, PMMA photoresists；5th, Noa glue；
6th, multimode fibre.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.Following embodiment is only used for clearly illustrating this hair
Bright technical solution, and be not intended to limit the protection scope of the present invention and limit the scope of the invention.
As shown in Figure 1, being the schematic diagram of SERS substrates, including quartz substrate 2, polystyrene is provided on quartz substrate 2
(PS) nanoscale micro-sphere array, the tops of PS micro-sphere arrays 1 is also covered with metal silverskin 3, forms hemispherical metallic silver battle array
Row, micro-sphere array can have certain defect.
The flow chart of the present invention is as shown in Fig. 2, PMMA photoresists 4 are uniformly filled between PS micro-sphere arrays 1, Noa
Glue 5 is the surface coated in PMMA photoresists 4, is reacted after the film for removing quartz substrate 2 is transferred on optical fiber
This structure can be obtained after ion etching.
Fig. 3 is a kind of schematic diagram of optical fiber surface enhancing Raman microprobe based on surface phasmon effect of the present invention,
It is characterized in that PS micro-sphere arrays 1 are removed completely, while part eliminates 3 structure of metal silverskin and PMMA photoresists 5, more
The end face of mode fiber 6 forms the metallic silver hemispherical array of separation.
Fig. 4 is that signal is passed to the 4ATP molecule Raman spectrum obtained after light spectrum detecting apparatus by optical fiber.
It is as follows that the present embodiment prepares the step of this device：
A) one 2.5 cun of quartz substrates are taken, respectively with acetone (purity 99.7%), alcohol (purity 99.9%), deionized water
(resistivity 18.2M Ω) ultrasound (40W) is cleaned 10 minutes, is then dried up with nitrogen (purity 99.7%), then use plasma cleaning
Machine handles quartz substrate 5 minutes, and by treated, quartz substrate is placed on sol evenning machine pallet, and setting 500rpm/min turns
Speed, time 20s；
B) a diameter of 690nm of the colloid micro ball solution 20ml, wherein PS microballoons of configuration polystyrene (PS) microballoon, directly
Diameter deviation ratio 0.2%, concentration of volume percent 0.05%, solvent are deionized water；
C) b) the middle colloid micro ball solution being configured is added drop-wise on substrate, starts sol evenning machine, uniformly revolved on the surface layer of substrate
Coat PS micro-sphere arrays；
D) after the solvent of microsphere suspension liquid is evaporated completely, first PS top sections are etched, then will using magnetron sputtering coater
The metal silverskin that one layer of 200nm thickness is sputtered at the top of PS microballoons forms hemispherical metal structure, then by spin coating PMMA on its surface
Photoresist (administered 2.5ml/cm2), rotating speed 2500rpm/min, time 40s, spin coating three times, make PMMA glue uniformly fill out
It fills between PS micro-sphere arrays；Then in 150 DEG C of front bakings 1 hour, PMMA glue and array is made to have good adhesiving effect, then
Substrate is torn；
E) intercept one section of multimode fibre, 200 μm of fibre core, 220 μm of covering, by optical fiber one end it is ground after, then on PMMA
One layer of Noa glue is applied, then with the silverskin gone at the top of viscous PS micro-sphere arrays of fiber perpendicular, a ultraviolet lamp is placed in its side
Irradiation 10 seconds, is fully cured its bonding place, and top is PS micro-sphere arrays, there is one layer of Noa glue between silverskin and optical fiber
Water；If need to be checked after precuring it is problematic, can use METHYLENE CHLORIDE into units detach, a usual night；
F) structure obtained in e) is subjected to reactive ion etching, Ar RIE etchings, portion while removing PS microballoons completely
Divide removal part PMMA photoresists and metal structure, adjusting the distance between etch period, control hemispherical metallic silver makes its humorous
Vibration wave is grown and excitation laser consistent wavelength makes only to be left the hemispherical metal array of separation at the top of optical fiber, so as to be formed based on table
The optical fiber surface enhancing Raman microprobe of face phasmon effect.
The above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (4)
1. a kind of optical fiber surface enhancing Raman microprobe based on surface phasmon effect, which is characterized in that described including optical fiber
One end of optical fiber is connected with metal nano waveguide array, and the other end connects light source and light spectrum detecting apparatus by coupler；It is described
Metal nano waveguide array described in the incident light directing that optical fiber generates light source, in the surface shape of the metal nano waveguide array
Into surface phasmon effect；The metal nano waveguide array is placed in sample to be tested, point of adsorption sample to be tested
Son；The incident light irradiates the scattering light generated after the molecule of the sample to be tested and is oriented to the coupler by the optical fiber, so
Raman spectrum is measured by the light spectrum detecting apparatus afterwards.
2. a kind of optical fiber surface enhancing Raman microprobe based on surface phasmon effect according to claim 1, special
Sign is, the metal nano waveguide array is hemispherical metal array, spacing-controllable between hemispherical metal, resonance wavelength with
The consistent wavelength of the incident light.
3. a kind of optical fiber surface enhancing Raman microprobe based on surface phasmon effect according to claim 1, special
Sign is that the material of the metal nano waveguide array is gold, silver or copper.
4. a kind of production method for preparing Raman microprobe as described in claim 1, which is characterized in that include the following steps：
A) the nanoscale microballoon of configuration PS materials and the colloid micro ball solution of deionized water mixing；
B) the colloid micro ball solution obtained in a) is added drop-wise on planar substrates, the surface of the planar substrates is made to be evenly arranged PS
Micro-sphere array；
C) by b) the middle PS microballoon partial etchings prepared, one layer of nano level metal film then is sputtered on PS micro-sphere arrays surface layer,
PMMA photoresists is made uniformly to be filled between PS micro-sphere arrays；Planar substrates are removed after curing to obtain film；
D) one section of optical fiber is intercepted, after described optical fiber one end is ground, the metal film one side of the film obtained in c) is ground with optical fiber
End face after mill is cured with glue, and film is fixed on optical fiber with this, obtains device；
E) film portion of device in d) is subjected to reactive ion etching, the end face of optical fiber is made only to be left the hemispherical metal of separation
Array is to form the optical fiber surface enhancing Raman microprobe based on surface phasmon effect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810208209.5A CN108181296B (en) | 2018-03-14 | 2018-03-14 | Optical fiber surface enhanced Raman probe based on surface plasmon effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810208209.5A CN108181296B (en) | 2018-03-14 | 2018-03-14 | Optical fiber surface enhanced Raman probe based on surface plasmon effect |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108181296A true CN108181296A (en) | 2018-06-19 |
| CN108181296B CN108181296B (en) | 2024-03-19 |
Family
ID=62553536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810208209.5A Active CN108181296B (en) | 2018-03-14 | 2018-03-14 | Optical fiber surface enhanced Raman probe based on surface plasmon effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108181296B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844924A (en) * | 2018-07-17 | 2018-11-20 | 河南师范大学 | Capillary pipe structure local surface plasma resonance biochemical sensor |
| CN108896528A (en) * | 2018-06-25 | 2018-11-27 | 南京信息工程大学 | Online molecular detector and production method based on D-type optical fiber and nanometer annular chamber |
| CN110044871A (en) * | 2019-04-28 | 2019-07-23 | 南京信息工程大学 | The online substance qualitative detection device and production method of surface phasmon effect |
| CN110146482A (en) * | 2019-05-13 | 2019-08-20 | 上海大学 | A kind of novel near-field raman scattering detection device |
| CN111077120A (en) * | 2018-10-19 | 2020-04-28 | 恩德莱斯和豪瑟尔分析仪表两合公司 | Optical chemical sensor unit and method for determining an analyte in a measurement medium using the same |
| CN111650181A (en) * | 2020-06-12 | 2020-09-11 | 上海大学 | Detection device is preceding to optic fibre SERS |
| CN111708110A (en) * | 2020-06-18 | 2020-09-25 | 欧菲微电子技术有限公司 | Preparation method of diffuser, diffuser and camera module |
| CN113218531A (en) * | 2021-03-05 | 2021-08-06 | 广东工业大学 | Optical fiber temperature sensor and preparation method thereof |
Citations (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005111558A1 (en) * | 2004-05-14 | 2005-11-24 | Koninklijke Philips Electronics N. V. | Fiber optic probe |
| JP2007024506A (en) * | 2005-07-12 | 2007-02-01 | Systems Engineering Inc | Optical fiber probe, and light measuring instrument |
| CN101161378A (en) * | 2007-11-23 | 2008-04-16 | 暨南大学 | Silicon dioxide monocaryon bismuth-silver double cap shaped complex nanometer particle and its preparing method |
| CN101248985A (en) * | 2008-04-01 | 2008-08-27 | 东南大学 | Raman surface reinforced fiber-optic catheter sensor used for cancer diagnose |
| CN101691207A (en) * | 2009-09-28 | 2010-04-07 | 中山大学 | Method for preparing micro-nano structure |
| CN102097208A (en) * | 2009-12-09 | 2011-06-15 | 吉林师范大学 | Preparation method of magnetic multilayer-film nano bowl monolayer array |
| JP2011232220A (en) * | 2010-04-28 | 2011-11-17 | Waseda Univ | Surface enhanced raman spectroscopy |
| US20120050732A1 (en) * | 2010-08-25 | 2012-03-01 | Weixing Lu | Sensor system with plasmonic nano-antenna array |
| CN102530855A (en) * | 2012-02-14 | 2012-07-04 | 中国人民解放军国防科学技术大学 | Preparation method of crescent nanometer metal structures |
| CN102910576A (en) * | 2012-11-16 | 2013-02-06 | 重庆绿色智能技术研究院 | Method for producing high-sensitivity surface reinforcement Raman sensor chip |
| CN102947681A (en) * | 2010-04-20 | 2013-02-27 | 惠普发展公司，有限责任合伙企业 | A self-arranging, luminescence-enhancement device for surface-enhanced luminescence |
| CN102954957A (en) * | 2011-08-25 | 2013-03-06 | 福州高意光学有限公司 | Raman spectrometer probe and manufacturing method thereof |
| US20130120748A1 (en) * | 2010-07-30 | 2013-05-16 | Zhiyong Li | Optical fiber surface enhanced raman spectroscopy (sers) probe |
| US20130293884A1 (en) * | 2012-05-01 | 2013-11-07 | University Of Maryland, College Park | Nanoparticle array with tunable nanoparticle size and separation |
| CN103626119A (en) * | 2013-12-08 | 2014-03-12 | 中国科学院光电技术研究所 | Preparation method of nano metal ball bowl array structure |
| CN104865236A (en) * | 2015-04-24 | 2015-08-26 | 天津理工大学 | Terahertz wave band semiconductor material surface enhanced Raman scattering substrate |
| CN105842228A (en) * | 2016-05-17 | 2016-08-10 | 南京信息工程大学 | Nanometer annular cavity SERS substrate based on surface plasmon effect and manufacturing method thereof |
| CN106053393A (en) * | 2016-05-18 | 2016-10-26 | 南京信息工程大学 | Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof |
| JP2016212117A (en) * | 2016-08-09 | 2016-12-15 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. | Apparatus having surface-enhanced spectroscopy element on exterior surface |
| CN106353296A (en) * | 2016-08-11 | 2017-01-25 | 华南师范大学 | Method for preparing surface-enhanced raman activity substrate with high uniformity |
| CN106784225A (en) * | 2017-01-11 | 2017-05-31 | 华东师范大学 | A kind of method that nano patterned Sapphire Substrate is prepared based on polymer microballoon |
| CN107478640A (en) * | 2017-08-04 | 2017-12-15 | 中国科学院合肥物质科学研究院 | A kind of enhanced Portable Raman spectrometer of optical fiber probe |
| CN207882154U (en) * | 2018-03-14 | 2018-09-18 | 南京信息工程大学 | Optical fiber surface based on surface phasmon effect enhances Raman microprobe |
| CN109592635A (en) * | 2019-01-22 | 2019-04-09 | 杭州电子科技大学 | A kind of method of controllable preparation composite nano figure line array |
-
2018
- 2018-03-14 CN CN201810208209.5A patent/CN108181296B/en active Active
Patent Citations (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005111558A1 (en) * | 2004-05-14 | 2005-11-24 | Koninklijke Philips Electronics N. V. | Fiber optic probe |
| JP2007024506A (en) * | 2005-07-12 | 2007-02-01 | Systems Engineering Inc | Optical fiber probe, and light measuring instrument |
| CN101161378A (en) * | 2007-11-23 | 2008-04-16 | 暨南大学 | Silicon dioxide monocaryon bismuth-silver double cap shaped complex nanometer particle and its preparing method |
| CN101248985A (en) * | 2008-04-01 | 2008-08-27 | 东南大学 | Raman surface reinforced fiber-optic catheter sensor used for cancer diagnose |
| CN101691207A (en) * | 2009-09-28 | 2010-04-07 | 中山大学 | Method for preparing micro-nano structure |
| CN102097208A (en) * | 2009-12-09 | 2011-06-15 | 吉林师范大学 | Preparation method of magnetic multilayer-film nano bowl monolayer array |
| CN102947681A (en) * | 2010-04-20 | 2013-02-27 | 惠普发展公司，有限责任合伙企业 | A self-arranging, luminescence-enhancement device for surface-enhanced luminescence |
| JP2011232220A (en) * | 2010-04-28 | 2011-11-17 | Waseda Univ | Surface enhanced raman spectroscopy |
| US20130120748A1 (en) * | 2010-07-30 | 2013-05-16 | Zhiyong Li | Optical fiber surface enhanced raman spectroscopy (sers) probe |
| US20120050732A1 (en) * | 2010-08-25 | 2012-03-01 | Weixing Lu | Sensor system with plasmonic nano-antenna array |
| CN102954957A (en) * | 2011-08-25 | 2013-03-06 | 福州高意光学有限公司 | Raman spectrometer probe and manufacturing method thereof |
| CN102530855A (en) * | 2012-02-14 | 2012-07-04 | 中国人民解放军国防科学技术大学 | Preparation method of crescent nanometer metal structures |
| US20130293884A1 (en) * | 2012-05-01 | 2013-11-07 | University Of Maryland, College Park | Nanoparticle array with tunable nanoparticle size and separation |
| CN102910576A (en) * | 2012-11-16 | 2013-02-06 | 重庆绿色智能技术研究院 | Method for producing high-sensitivity surface reinforcement Raman sensor chip |
| CN103626119A (en) * | 2013-12-08 | 2014-03-12 | 中国科学院光电技术研究所 | Preparation method of nano metal ball bowl array structure |
| CN104865236A (en) * | 2015-04-24 | 2015-08-26 | 天津理工大学 | Terahertz wave band semiconductor material surface enhanced Raman scattering substrate |
| CN105842228A (en) * | 2016-05-17 | 2016-08-10 | 南京信息工程大学 | Nanometer annular cavity SERS substrate based on surface plasmon effect and manufacturing method thereof |
| CN106053393A (en) * | 2016-05-18 | 2016-10-26 | 南京信息工程大学 | Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof |
| JP2016212117A (en) * | 2016-08-09 | 2016-12-15 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. | Apparatus having surface-enhanced spectroscopy element on exterior surface |
| CN106353296A (en) * | 2016-08-11 | 2017-01-25 | 华南师范大学 | Method for preparing surface-enhanced raman activity substrate with high uniformity |
| CN106784225A (en) * | 2017-01-11 | 2017-05-31 | 华东师范大学 | A kind of method that nano patterned Sapphire Substrate is prepared based on polymer microballoon |
| CN107478640A (en) * | 2017-08-04 | 2017-12-15 | 中国科学院合肥物质科学研究院 | A kind of enhanced Portable Raman spectrometer of optical fiber probe |
| CN207882154U (en) * | 2018-03-14 | 2018-09-18 | 南京信息工程大学 | Optical fiber surface based on surface phasmon effect enhances Raman microprobe |
| CN109592635A (en) * | 2019-01-22 | 2019-04-09 | 杭州电子科技大学 | A kind of method of controllable preparation composite nano figure line array |
Non-Patent Citations (2)
| Title |
|---|
| 刘飞飞;张新平: ""光纤端面集成金属光子结构传感器"", 《激光与光电子学进展》, pages 020001 - 1 * |
| 郭阳光;杨穆;吴强;: "碗形胶体颗粒/阵列薄膜的制备及性能研究进展", 化学学报, no. 05 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896528A (en) * | 2018-06-25 | 2018-11-27 | 南京信息工程大学 | Online molecular detector and production method based on D-type optical fiber and nanometer annular chamber |
| CN108844924A (en) * | 2018-07-17 | 2018-11-20 | 河南师范大学 | Capillary pipe structure local surface plasma resonance biochemical sensor |
| CN111077120A (en) * | 2018-10-19 | 2020-04-28 | 恩德莱斯和豪瑟尔分析仪表两合公司 | Optical chemical sensor unit and method for determining an analyte in a measurement medium using the same |
| US11644423B2 (en) | 2018-10-19 | 2023-05-09 | Endress+Hauser Conducta Gmbh+Co. Kg | Optochemical sensor unit and a method for the qualitative and/or quantitative determination of an analyte in a measuring medium with the sensor unit |
| CN110044871A (en) * | 2019-04-28 | 2019-07-23 | 南京信息工程大学 | The online substance qualitative detection device and production method of surface phasmon effect |
| CN110146482A (en) * | 2019-05-13 | 2019-08-20 | 上海大学 | A kind of novel near-field raman scattering detection device |
| CN111650181A (en) * | 2020-06-12 | 2020-09-11 | 上海大学 | Detection device is preceding to optic fibre SERS |
| CN111708110A (en) * | 2020-06-18 | 2020-09-25 | 欧菲微电子技术有限公司 | Preparation method of diffuser, diffuser and camera module |
| CN113218531A (en) * | 2021-03-05 | 2021-08-06 | 广东工业大学 | Optical fiber temperature sensor and preparation method thereof |
| CN113218531B (en) * | 2021-03-05 | 2023-09-29 | 广东工业大学 | Optical fiber temperature sensor and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108181296B (en) | 2024-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108181296A (en) | Optical fiber surface enhancing Raman microprobe based on surface phasmon effect and preparation method thereof | |
| CN103630515B (en) | A kind of nano Au particle sensor and preparation method thereof | |
| TW201329436A (en) | Metal nanopillars for surface-enhanced Raman spectroscopy (SERS) substrate and method for preparing same | |
| CN1815197A (en) | Photon crystal optical-fiber probe sensor based on nano grain surface increasing Raman spectrum | |
| CN112499581A (en) | Preparation method of surface-enhanced Raman scattering substrate | |
| Foti et al. | A shape-engineered surface-enhanced Raman scattering optical fiber sensor working from the visible to the near-infrared | |
| CN207882154U (en) | Optical fiber surface based on surface phasmon effect enhances Raman microprobe | |
| US9204803B2 (en) | Optical device, detecting apparatus, and electronic apparatus | |
| US10989867B2 (en) | Microsphere based patterning of metal optic/plasmonic sensors including fiber based sensors | |
| Humbert et al. | Optical spectroscopy of functionalized gold nanoparticles assemblies as a function of the surface coverage | |
| Liu et al. | Real-time Raman detection by the cavity mode enhanced Raman scattering | |
| Xu et al. | Multiscale structure enabled effective plasmon coupling and molecular enriching for SERS detection | |
| CN104975279B (en) | A kind of colloidal sol and method for preparing surface enhanced Raman substrate | |
| CN113499743A (en) | Nano microsphere heptamer and preparation method and application thereof | |
| Feng et al. | Ag@ BiOCl super-hydrophobic nanostructure for enhancing SERS detection sensitivity | |
| Wei et al. | Construction of dense film inside capillary wall and SERS application research | |
| Potdar et al. | Evanescent wave sensor for potassium ion detection with special reference to agricultural application | |
| CN104237202A (en) | Silicon nano array substrate and preparation method and application thereof | |
| CN110044871A (en) | The online substance qualitative detection device and production method of surface phasmon effect | |
| Salinas et al. | Fabrication and characterization of surfaceenhanced raman scattering substrates with ordered arrays of gold nanopyramids by means of nanosphere lithography | |
| Chang et al. | Optical fiber-based surface-enhanced Raman scattering sensor using Au nanovoid arrays | |
| JP7214282B1 (en) | Near Waveguide Fiber Optic SPR Probe, Preparation Method and Sensing System | |
| CN108802005A (en) | Raman scattering enhancing substrate based on particle-waveguide coupled structure and preparation method | |
| US20080192247A1 (en) | Optical Probe for Detecting Sers-Active Molecules and Process for its Manufacture | |
| CN111272730A (en) | High-sensitivity optical fiber surface plasmon sensor and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |