CN108152359A - A kind of modulated optic ionized sensor and its operating method containing gate electrode - Google Patents
A kind of modulated optic ionized sensor and its operating method containing gate electrode Download PDFInfo
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- 230000005684 electric field Effects 0.000 claims description 12
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- 150000002500 ions Chemical class 0.000 description 46
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical compound CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
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- AZUYLZMQTIKGSC-UHFFFAOYSA-N 1-[6-[4-(5-chloro-6-methyl-1H-indazol-4-yl)-5-methyl-3-(1-methylindazol-5-yl)pyrazol-1-yl]-2-azaspiro[3.3]heptan-2-yl]prop-2-en-1-one Chemical compound ClC=1C(=C2C=NNC2=CC=1C)C=1C(=NN(C=1C)C1CC2(CN(C2)C(C=C)=O)C1)C=1C=C2C=NN(C2=CC=1)C AZUYLZMQTIKGSC-UHFFFAOYSA-N 0.000 description 2
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- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical compound FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
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- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
- G01N27/66—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber and measuring current or voltage
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Abstract
The present invention relates to a kind of modulated optic ionized sensors and its operating method containing gate electrode.According to a kind of optic ionized sensor of the application, including：The indoor electrode structure of ionization is arranged on, the electrode structure includes：Bias electrode；Ion collection electrode；And gate electrode, between the bias electrode and ion collection electrode, and gate electrode potential is adjustable.By modulation grid current potential, zero correction can be carried out in the case of without using clean air and/or the output signal strength and the linearity of optic ionized sensor can be improved.
Description
Technical field
This application involves ion detector field, more particularly to a kind of novel and follow-on containing the adjustable of gate electrode
Optic ionized sensor processed and its operating method.
Background technology
In the detection means for organic volatile (VOC), photoion (PID) detection technique due to it fast and easily
Feature and be more and more widely used.
The detection mode of business application optic ionized sensor general at present is as follows：It is passed when there is gas to enter photoionization
During the ionisation chamber of sensor, gas molecule is bombarded by the high-energy photons that vacuum UV lamp is sent out, such as the ionization energy of this gas
Less than photon energy, it is possible to be ionized as ion and electronics.It is provided in ionisation chamber by bias electrode and ion collection electrode
Electric field, under the action of the electric field, ion and electronics are detached, and the ion collection electrode to opposite low potential and opposite respectively
High potential bias electrode drifts about.One and the electric current being ionized associated by ion populations are just generated in ion collection electrode at this time,
The size of this electric current is detected, can be calculated to corresponding tested gas concentration.
Traditional optic ionized sensor uses two electrode structures.In practical applications, light source decline, ultraviolet window flaw
The interference of the factors such as dirty and site environment humiture may cause null offset and sensitivity to decay.Therefore, photoionization
Sensor has to often safeguard in use and calibration, so that it can keep its good detection performance.
The VOC concentration of usual optic ionized sensor monitoring is than relatively low, in ppm even ppb ranks, so sensor
Null offset is often very big on the influence of the measurement accuracy of low concentration VOC, so accurate calibration or adjustment zero are to protecting at the scene
Holding sensor characteristics seems extremely important.But at the scene in environment, VOC is also one of background gas in air, usually logical
The good interior of wind has the VOC of tens ppb or so, may then there is much higher VOC long-term existence in certain industry spots, this
It needs additionally to provide the cleaned air for eliminating VOC to sensor when requiring to do zero point correction.
Somebody takes the method for carrying out Zero calibration when closing ultraviolet lamp or removing ultraviolet lamp, due to circuit
The offset of middle component parameter can cause the zero of different sensors variant really, the zero correction carried out using such method
The only physical zero point of circuit.It is ultraviolet but other than the parameter differences of component in circuit cause sensor zero point inconsistent
The high-energy photons that lamp is sent out can also form certain backscatter signal in ionisation chamber, and with ultraviolet ray intensity difference without
Deng it is inconsistent that this equally also can generate sensor zero point, therefore the reading between physical zero point and true zero always has centainly
Difference.Generally when carrying out tens or hundreds of ppm higher concentrations measurements, this method is just unlikely to introduce too big error.
In addition, the output signal of optic ionized sensor often has very serious nonlinear characteristic, only very low dense
There is the range of linearity of relative narrowness in the range of degree, show serious non-linear phenomena in vast higher concentration range, this
So that can cause larger deviation when current signal is reduced into gas concentration signal, this is also that limitation PID sensor is former extensively
One of because.
Accordingly, it would be desirable to there is a kind of modified optic ionized sensor, the upper of the prior art can be effectively overcome/improved
State deficiency.
Invention content
In view of the above deficiencies of the prior art, the purpose of the present invention is to provide a kind of follow-on modulated light from
Sonization sensor can easily and effectively carry out zero adjustment, and can obtain improved signal strength and the linearity (especially
It is for the measurement range of higher concentration).
According to an aspect of the present invention, a kind of optic ionized sensor is provided, including being arranged on the indoor electrode of ionization
Structure, the electrode structure include：Bias electrode；Ion collection electrode；And gate electrode, be located at the bias electrode and from
Between sub- passive electrode, and gate electrode potential is adjustable.
Above-mentioned optic ionized sensor according to the present invention, including：Bias electrode driving circuit, for the biased electrical
Pole applies positive voltage；Ion collection electrode drives and detection circuit, for applying to the ion collection electrode than the biasing
The low voltage of electrode simultaneously detects ion signal intensity；And gate electrode driving circuit, it can set the gate electrode potential to be
Following one of which：Equal or close to ion collection electrode current potential；Between bias electrode and the current potential of ion collection electrode it
Between；Zero potential or negative potential.
Above-mentioned optic ionized sensor according to the present invention, wherein the current potential of the gate electrode is between bias electrode and ion
When between the current potential of passive electrode, improve the intensity and the linearity of the output signal of the optic ionized sensor.
Above-mentioned optic ionized sensor according to the present invention, wherein the gate electrode potential is received when being zero potential or negative potential
There is no ion ionization to generate at collector, so as to obtain the zero reading of optic ionized sensor.
Above-mentioned optic ionized sensor according to the present invention, wherein the bias electrode, ion collection electrode and gate electrode
Between it is hanging or be isolated with insulating materials.
Above-mentioned optic ionized sensor according to the present invention, wherein the bias electrode, ion collection electrode and gate electrode
Respective shape is one kind in following：Tubular, needle-shaped, Filamentous, netted, disc-shaped, the bias electrode, ion collection electrode
It is made with one kind in the following material of each freedom of gate electrode：There is the exhausted of conductive layer on metal material, conductive nonmetallic materials, surface
Edge material.
According to an aspect of the present invention, a kind of operating method of optic ionized sensor is provided, the photoionization passes
Sensor includes being arranged on the indoor bias electrode of ionization, ion collection electrode and the bias electrode and ioncollection electricity
Gate electrode between pole, the method includes：Positive potential is applied to the bias electrode；Ratio is applied to the ion collection electrode
The extremely low voltage of the biased electrical；And variable electric potential is applied to the gate electrode to modulate the electric field inside the ionisation chamber.
Aforesaid operations method according to the present invention, wherein, by the gate electrode apply between bias electrode with from
Current potential between sub- passive electrode improves the optic ionized sensor output signal strength and the linearity.
Aforesaid operations method according to the present invention, wherein, by applying zero potential or negative potential on the gate electrode
Carry out Zero calibration.
Aforesaid operations method according to the present invention, wherein, Zero calibration includes：It determines to apply zero electricity on the gate electrode
Reading when position or negative potential；Zero is calibrated based on the reading.
Description of the drawings
It is to provide further understanding of the invention including attached drawing, they are included and form the part of the application,
Attached drawing shows the embodiment of the present invention, and plays the role of the explanation principle of the invention together with this specification.In attached drawing：
Fig. 1 shows the schematic diagram of photoionization (PID) sensor according to an embodiment of the present application.
Fig. 2 shows the sectional view of PID sensor according to an embodiment of the present application.
Fig. 3 shows a kind of ionisation chamber schematic internal view of PID sensor of the prior art.
Fig. 4 shows a kind of ionisation chamber schematic internal view of PID sensor according to an embodiment of the present application.
Fig. 5 shows same PID sensor under different grid voltages to the response curve of isobutene.
Specific embodiment
In the following description, with reference to each embodiment, present invention is described.However, those skilled in the art will recognize
Know can in the case of neither one or multiple specific details or with it is other replacement and/or addition method, material or component
Implement each embodiment together.In other situations, it is not shown or well known structure, material or operation is not described in detail in order to avoid making this
The aspects of each embodiment of invention is obscure.Similarly, for purposes of explanation, specific quantity, material and configuration are elaborated, with
Comprehensive understanding to the embodiment of the present invention is just provided.However, the present invention can be implemented in the case of no specific detail.This
Outside, it should be understood that each embodiment shown in attached drawing is illustrative expression and is not drawn necessarily to scale.
Fig. 1 shows the schematic diagram of photoionization (PID) sensor according to an embodiment of the present application.Shown PID is passed
Sensor 100 includes ionisation chamber 101, vacuum UV lamp 102 and corresponding ultraviolet lamp drive circuit 103, further includes and is arranged on ionization
Special electrodes structure in room 101.As indicated, electrode structure includes ion collection electrode 104 (or referred to as passive electrode), grid
Electrode 105 and bias electrode 106, these electrodes are respectively by corresponding Ions Absorption electrode drive and detection circuit 107, gate electrode
Driving circuit 108 and bias electrode driving circuit 109 are driven.
The bias electrode 106 can thereon may be used for wire-shaped or with porose sheet metal or other conductive materials
The bias field of a direction passive electrode 104 is generated in ionisation chamber to apply higher positive potential.
The passive electrode 104 can be it is identical with bias electrode 106 can also be metal of different shapes or other
Material conductor can apply the voltage extremely low compared with biased electrical thereon, so as to its with above-mentioned bias electrode 106 together in ionisation chamber
A stable electric field is established in 101.
The gate electrode 105 is placed between bias electrode 106 and passive electrode 104, can also with bias electrode 106 or
Person's passive electrode 104 is identical or different, can apply voltage variable in a certain range thereon.Change as needed thereon
The voltage loaded can be distributed the electric field between bias electrode 106 and passive electrode 104 and electric field strength is modulated.
More specifically, the potential difference between each electrode can be controlled to control the spatial distribution of bias field and intensity, and then control
Ion drift direction and speed are to reach the size of the ionic current of adjustment passive electrode 104.
The position of the gate electrode 105 can be the middle positioned at bias electrode 106 and passive electrode 104, can also
It is biased to any one.
In the operating process of PID sensor, according to operation purpose difference, grid potential can be one be equal to or
Higher than the constant or variable electric potential of 104 current potential of passive electrode；It can be equal to or constant less than 104 current potential of passive electrode
Or variable electric potential；Or other current potentials.
The shape of the gate electrode 105 according to the structure of ionisation chamber 101 needs can be but be not limited only to netted, cylinder or
Disc-shaped structure.
The bias electrode 106, gate electrode 105 and passive electrode 104 are by conductive metal, nonmetallic materials or surface
It is made of the insulating materials of conductive layer.
Can be between each electrode 104-106 in the ionisation chamber 101 it is hanging, can also be with high insulating materials for example poly- four
Vinyl fluoride is isolated.
According to one embodiment of present invention, in working condition, bias electrode driving circuit 109 can apply positive voltage
Onto bias electrode 106, Ions Absorption electrode drive circuit 107 can apply a voltage less than bias electrode voltage to from
Son is absorbed on electrode 104, and gate electrode driving circuit 108 can apply voltage variable in a certain range to gate electrode 105.
By including electrode structure 104-106 as described above and corresponding driving circuit 107-109, ability in PID
Field technique personnel can rationally control the potential difference between above-mentioned three groups of electrodes, so as to reach at least by adjusting grid potential
Following purpose：Drift of the ion to passive electrode is blocked completely, so as to make the true zero signal of passive electrode output transducer；
Rule of thumb rationally adjustment grid potential changes the output signal size of sensor and linear, most preferably should so that sensor reaches
Use state.
Fig. 2 shows the sectional view of PID sensor 200 according to an embodiment of the present application.PID sensor 200 includes and Fig. 1
The passive electrode 204 of shown configuration consistency, gate electrode 205 and bias electrode 206 and ultraviolet lamp, device housings etc. other
Component/structure.
Except electrode structure shown in Fig. 2, additional electrode or fractionation can also be inserted into the structure type that the application mentions
Each electrode structure, makes the structure more than three electrodes, while electrode shape also can be changed, such as tubbiness, needle-shaped.More into one
Step, as described herein, each electrode potential is adjustable in certain range, and those skilled in the art can be adjusted according to this explanation
Potential difference between entire electrode group changes the characteristic of sensor, to be allowed to meet the survey of hypersensitivity or higher concentration
Amount.Unless otherwise indicated, change is either inserted into different institutions and changes the potential difference of each electrode or apply time of priority voltage
Sequence, but without the situation of substantial technological content alteration, when being regarded as the scope that the present invention can be true.
Fig. 3 shows a kind of ionisation chamber schematic internal view of PID sensor of the prior art 300.In electricity as shown in Figure 3
From in room 301, including the conventional electrodes structure being made of ion collection electrode 304 and bias electrode 306.As shown in figure 3, it carries
The air-flow of VOC molecules enters ionisation chamber, is largely ionized in the side for entering ionisation chamber close to ultraviolet photon, VOC molecules become
Positively charged VOC ions and electronegative free electron, i.e.,
VOC→VOC++e
Due to applying higher positive voltage on bias electrode 306, so as to form one in ionisation chamber 301 by bias electrode
306 are directed toward an electric field of ion collection electrodes 304, the presence of this electric field, cause the VOC ions that ionizes by ultraviolet photon with
What is ejected is electrically separated, and respectively to respective drift electrode is attracted, i.e. free electron drifts about to bias electrode 306, and
VOC ions drift about (as shown above) along direction of an electric field to passive electrode 304.
Fig. 4 shows a kind of ionisation chamber schematic internal view of PID sensor 400 according to an embodiment of the present application.In such as Fig. 4
In shown ionisation chamber 401, including the novel electrode being made of ion collection electrode 404, gate electrode 405 and bias electrode 406
Structure.
As previously mentioned, the main difference of PID sensor 400 shown in Fig. 4 and the ionization cell structure of PID sensor 300 is real
The gate electrode being placed between bias electrode and ion collection electrode is introduced, and by applying certain current potential between gate electrode
For modulating the electric field distribution even direction of an electric field inside ionisation chamber, so as to regulate and control the ion stream of ion collection electrode.More
Specifically, in the ionisation chamber 401 shown in Fig. 4 containing three-electrode structure, it can be as needed in certain range to applying
The current potential being added on gate electrode carries out at least following modulation：
Modulation system one：When gate electrode 405 applies zero potential or negative potential, the ion in ionisation chamber 401 is substantially by it
It absorbs, at passive electrode 404 other than reasons for its use scattering is influenced by ultraviolet light, ionizes and generate without ion, at this time may be used
During thinking that ionisation chamber 401 is in by pinch off.
Modulation system two：Gate electrode 405 applies and 404 equipotential of passive electrode or close current potential, at this time gate electrode
Part ion can be collected on 405, signal detection can be used as.
Modulation system three：The current potential that gate electrode 405 applies is between the current potential of bias electrode 406 and the electricity of passive electrode 404
A numerical value between position, at this time gate electrode 404 can be regarded as an acceleration electrode, be conducive to slow down the indoor ion of ionization
Pile up effect and the probability of recombination for reducing ion and electronics, so as to increase ion collection electrode 404 in identical ionizing efficiency
Ionic current.
Zero calibration
By taking PID sensor as described above (100,200,400) and appropriate operation as described above, can realize
To the Zero calibration of PID sensor.
Specifically, in practical application, when instrument needs to carry out zero point correction in normal air, may be used above-mentioned
Modulation system one carrys out the drift channel of ion in pinch off ionisation chamber to passive electrode to apply appropriate current potential to gate electrode, at this time
Even if without clean air, as long as scene can also carry out zero mark when there is (being usually ppm ranks) without higher concentration VOC
It is fixed.
It is such as applied in Portable Measurement Instrument according to the PID sensor of the application, as long as VOC is dense in background scene gas
Degree is not very high, it is possible to easily carry out zero point correction to instrument whenever and wherever possible, not need to carry dedicated clean air (zero
Point air).
It is used on the instrument being such as fixedly mounted at the scene according to the PID sensor of the application, can realize VOC detecting instruments
Zero review one's lessons by oneself orthofunction.For example, the instrument that accurate calibration is crossed is over time, ultraviolet after field application is installed to
Decline, sensor internal contamination of lamp etc. cause the drift of sensor to be can hardly be avoided, and the variation of zero is to low concentration VOC's
Measured value must influence it is relatively some larger, using the technical solution of the application, fixed instrument can at the scene concentration value compared with
It when low at any time or timing is by true zero point number of the method for pinch off ion stream come detecting instrument at that time, on the one hand can be with
When monitoring instrument null offset, on the other hand can also pass through the zero number of accurate calibration before certain algorithm and criterion and installation
Value determines when carry out the automatic amendment of zero after being compared.
Even if in the case where pure air is used to carry out Zero calibration to instrument, the PID sensor of the application can also lead to
Above-mentioned modulating mode one is crossed to effectively reduce interference of the remaining VOC molecules to calibration result, this is conducive to provide different instruments
Between consistency.
Following experimental example shows that Zero calibration can be effectively performed in the application PID sensor.
Experimental example 1a：
By vacuum UV lamp after driving shines, 80V positive voltages are imposed on bias electrode, ion collection electrode imposes
2.5V voltages, and gate electrode imposes 2.5V positive voltages, zero signal of the sensor in cleaned air is 60mV, is measured pair
The signal output of 10ppm isobutenes is 1850mV, and correspondence is distinguished as 1ppb, the linearity 0.9998.
Experimental example 1b：
By vacuum UV lamp after driving shines, 80V positive voltages are imposed on bias electrode, ion collection electrode imposes
2.5V voltages, and gate electrode imposes the negative voltage of 20V, the signal output measured to 10ppm isobutenes is 45mV.
By comparing experimental example 1a and 1b, it can be seen that not only completely switched off by applying negative voltage on gate electrode
Ion stream, and part reduces shot noise, so as to make its output signal (45mV) less than the zero in cleaned air
Signal (60mV).
Improve signal strength and the linearity
By taking PID sensor as described above (100,200,400) and appropriate operation as described above, can improve
PID sensor is in the signal strength and the linearity of high concentration measurement range.
Experimental example 2：
After vacuum UV lamp driving is shone, 80V positive voltages are imposed on bias electrode, ion collection electrode imposes 2.5V
Voltage, and gate electrode imposes 2.5V and 30V positive voltages respectively, reduce measure after sensor amplification factor to 100,1000,
The sensitivity of 3000ppm, 5000ppm, 7000ppm, 10000ppm isobutene.Fig. 5 show it is corresponding with experimental example 2, it is same
To the response curve of isobutene under sensor difference grid voltage (2.5V and 30V).From figure 5 it can be seen that corresponding grid electricity
The difference of pressure, the output signal strength and the linearity of sensor also change correspondingly.Compare ioncollection by applying on gate electrode
Voltage (2.5V) higher positive voltage (30V) of electrode, the response curve of PID sensor are strong in the signal of high concentration measurement range
Degree and the linearity obtain substantive raising.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (10)
1. a kind of optic ionized sensor, including：
The indoor electrode structure of ionization is arranged on, the electrode structure includes：
Bias electrode；
Ion collection electrode；And
Gate electrode, between the bias electrode and ion collection electrode, and gate electrode potential is adjustable.
2. optic ionized sensor as described in claim 1, including：
Bias electrode driving circuit, for applying positive voltage to the bias electrode；
Ion collection electrode drives and detection circuit, for applying the electricity more extremely low than the biased electrical to the ion collection electrode
It presses and the ion current signal being collected into is detected；And
Gate electrode driving circuit, it is following one of which that can set the gate electrode potential：It is received equal or close to ion
Collector potential；Between bias electrode and the current potential of ion collection electrode；Zero potential or negative potential.
3. optic ionized sensor as claimed in claim 2, which is characterized in that the current potential of the gate electrode is between bias electrode
When between the current potential of ion collection electrode, improve the intensity and the linearity of the output signal of the optic ionized sensor.
4. optic ionized sensor as claimed in claim 2, which is characterized in that the current potential of the gate electrode is zero potential or bears
There is no ion ionization to generate during current potential at ion collection electrode, so as to obtain the zero reading of the optic ionized sensor.
5. optic ionized sensor as described in claim 1, which is characterized in that the bias electrode, ioncollection electricity
It is hanging or be isolated with insulating materials between pole and the gate electrode.
6. optic ionized sensor as described in claim 1, which is characterized in that
The bias electrode, ion collection electrode and the respective shape of gate electrode are one kind in following：Tubular, it is needle-shaped, Filamentous,
Netted, disc-shaped,
One kind in the bias electrode, ion collection electrode and the following material of each freedom of gate electrode is made：Metal material, conduction
Nonmetallic materials, surface have the insulating materials of conductive layer.
7. a kind of operating method of optic ionized sensor, the optic ionized sensor includes being arranged on the indoor biasing of ionization
Electrode, the gate electrode between ion collection electrode and the bias electrode and the ion collection electrode, the method includes：
Positive potential is applied to the bias electrode；
Apply the voltage more extremely low than the biased electrical to the ion collection electrode；And
Variable electric potential is applied to the gate electrode to modulate the electric field inside the ionisation chamber.
8. operating method as claimed in claim 7, which is characterized in that by applying on the gate electrode between bias electrode
Current potential between ion collection electrode improves the optic ionized sensor output signal strength and the linearity.
9. operating method as claimed in claim 7, which is characterized in that by applying zero potential on the gate electrode or bearing
Current potential carries out Zero calibration.
10. operating method as claimed in claim 9, which is characterized in that Zero calibration includes：
Determine the reading when applying zero potential or negative potential on the gate electrode；
Zero is calibrated based on the reading.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115201316A (en) * | 2021-04-12 | 2022-10-18 | 纳华环境有限公司 | Photoionization device with improved linearity and stability |
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| US20040168913A1 (en) * | 2001-11-20 | 2004-09-02 | Dean William Francis Houlton | Ionisation devices |
| CN101006339A (en) * | 2004-08-06 | 2007-07-25 | 华瑞科学仪器(上海)有限公司 | Integrated optic ionized sensor |
| CN101356432A (en) * | 2006-01-09 | 2009-01-28 | 通用电气安全股份有限公司 | Ion trap mobility spectrometer |
| CN101563601A (en) * | 2006-10-08 | 2009-10-21 | 华瑞科学仪器(上海)有限公司 | Photo-ionization sensor for detecting the concentration of gas and method thereof |
| CN206671256U (en) * | 2016-12-02 | 2017-11-24 | 上海苏萨电子科技有限公司 | A kind of modulated optic ionized sensor containing gate electrode |
| CN110121632A (en) * | 2016-12-22 | 2019-08-13 | 拉皮斯坎系统股份有限公司 | System and method for the calibration of detector, verifying and following test |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115201316A (en) * | 2021-04-12 | 2022-10-18 | 纳华环境有限公司 | Photoionization device with improved linearity and stability |
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