CN108149003A - A kind of oil gas clarifier - Google Patents

A kind of oil gas clarifier Download PDF

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Publication number
CN108149003A
CN108149003A CN201711479042.8A CN201711479042A CN108149003A CN 108149003 A CN108149003 A CN 108149003A CN 201711479042 A CN201711479042 A CN 201711479042A CN 108149003 A CN108149003 A CN 108149003A
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CN
China
Prior art keywords
clarifier
oil
oil gas
deflector
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711479042.8A
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Chinese (zh)
Inventor
孙红刚
盛代华
梅桂林
刘建新
韦朝荣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Truchum Advanced Materials And Technology Co Ltd
Original Assignee
Anhui Truchum Advanced Materials And Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Anhui Truchum Advanced Materials And Technology Co Ltd filed Critical Anhui Truchum Advanced Materials And Technology Co Ltd
Priority to CN201711479042.8A priority Critical patent/CN108149003A/en
Publication of CN108149003A publication Critical patent/CN108149003A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54Furnaces for treating strips or wire
    • C21D9/663Bell-type furnaces
    • C21D9/673Details, accessories, or equipment peculiar to bell-type furnaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42Auxiliary equipment or operation thereof
    • B01D46/44Auxiliary equipment or operation thereof controlling filtration
    • B01D46/446Auxiliary equipment or operation thereof controlling filtration by pressure measuring

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Separating Particles In Gases By Inertia (AREA)

Abstract

The invention discloses a kind of oil gas clarifiers, belong to Oil-gas Separation field, including clarifier left chamber and clarifier right chamber, are provided with deflector in the middle part of oil gas clarifier inner cavity, oil gas clarifier is divided into clarifier left chamber and clarifier right chamber by deflector;Deflector is obliquely installed to clarifier left chamber direction, and deflector lower left is provided with water conservancy diversion oil discharge outlet;Silk screen is filled in clarifier left chamber, clarifier oil discharge outlet is equipped at clarifier left chamber, activated carbon is filled in clarifier right chamber, the second intake valve, second row air valve are respectively equipped on oil gas clarifier inlet tube road, exhaust outlet pipeline, the second draining valve, third draining valve are respectively equipped at the clarifier oil discharge outlet of oil gas clarifier, the water conservancy diversion oil discharge outlet of oil gas clarifier, deflector and horizontal angle are 55 ° ~ 65 °.The safe operation of vacuum pump can be ensured using the technical program, the damage frequency for reducing vacuum pump, production run cost is reduced while oil gas is avoided to be discharged into air and cause environmental pollution.

Description

A kind of oil gas clarifier
Present patent application be directed to application No. is:2015108865521 divisional application, the applying date of original application be 2015-12-07, invention and created name are:A kind of method of bell furnace vent strip Oil-gas Separation.
Technical field
The present invention relates to Oil-gas Separation technical field, more particularly, to a kind of oil gas clarifier.
Background technology
Bell furnace needs to extract furnace air out using vacuum pump during the work time at present, then passes to hydrogen nitrogen Combination Gas does not aoxidize at high temperature for copper strips in protection stove, improves copper strips quality.But in closed cover in vacuum Certain gas stream can be formed in the cover of formula stove, since vacuum pressure is relatively low in vacuum pump, so Residual oil can follow gas in copper strip roll Stream is entered by pipeline in vacuum pump, and when containing higher ROLLING OIL in pumped gas, ROLLING OIL makes very after entering vacuum pump The hydraulic performance decline of sky pump, it is serious to vacuumize slack-off and fuel injection event, causes vacuum pump failure frequency higher, influences production efficiency, The environment around exhaust outlet is polluted simultaneously.Therefore the problem of being brought in face of current bell furnace vent strip carries out oil gas point It is essential from system improvement.
Through retrieval, China Patent No.:2011202836202, apply for the day for announcing:On August 5th, 2011, invention and created name For:A kind of framing shaping machine oil and gas separating system, this application include Oil-gas Separation cap and Oil-gas Separation housing, Oil-gas Separation Lower part of the housing forms air inlet, and air inlet connects the hot waste gas mouth of heat-exchanger rig, be equipped with successively after air inlet third web plate every Piece, the second iron wire stratum reticulare and the 4th web plate partition;Oil-gas Separation housing bottom forms grease downpipe, and grease downpipe connects Oil-water separation system;Oil-gas Separation upper part of the housing shell wall is equipped with left efferent duct and right efferent duct, and left efferent duct and right efferent duct lead to Connect air cleaner.This application is condensed by using by hot waste gas so that Oil-gas Separation, but it is negative due to being also easy to produce in system Pressure, causes oil gas separation poor.
China Patent No.:2013201885111, apply for the day for announcing:On April 16th, 2013, invention and created name are:It is a kind of Oil removing and retracting device for bell furnace pumped vacuum systems, this application are related to a kind of oil removing and retracting device, specifically relate to And a kind of oil removing and retracting device for bell furnace pumped vacuum systems, including the vacuum pump and bell furnace connected by pipeline Table, further includes the oil removing being placed on pipeline and retracting device, and oil removing and retracting device include having admission line and air outlet pipe The oil eliminator ontology in road, admission line and outlet pipe are connect respectively by pipeline with prevention bell-type furnace coil base, vacuum pump;Air inlet pipe Road is connect with being placed in the playpipe of oil eliminator body interior, and the opening direction of playpipe is opposite with the outgassing direction of outlet pipe From;Playpipe is equipped with cooling collar.To bell furnace in vacuum, Oil-gas Separation is effectively carried out, avoids residual ROLLING OIL enters in vacuum pump, influences the service life of vacuum pump;Residual ROLLING OIL is just recycled simultaneously, so as to avoid causing The waste of resource improves economic benefit, but can also generate oil gas in this application intermediate pump course of work, this oil gas row Environmental pollution is easily caused into air.
Invention content
1. technical problems to be solved by the inivention
It is an object of the invention to prior art intermediate pump be overcome to be evacuated on bell furnace in use, since copper rolls up oil-containing, make Into the numerous damage of vacuum pumping frequency and exhaust outlet due to the deficiency for the problems such as a large amount of oil gas causes environmental pollution, a kind of oil gas is provided Clarifier by carrying out Oil-gas Separation in bell furnace vent strip system, ensure that the safe operation of vacuum pump so that production is suitable Freely, production run cost is reduced, while avoids oil gas and is discharged into air and cause environmental pollution.
2. technical solution
In order to achieve the above objectives, technical solution provided by the invention is:
A kind of oil gas clarifier of the present invention, the oil gas clarifier includes clarifier left chamber and clarifier right chamber, described Deflector is provided in the middle part of oil gas clarifier inner cavity, oil gas clarifier is divided into clarifier left chamber and clarifier by the deflector Right chamber;The deflector is obliquely installed to clarifier left chamber direction, and the lower left of the deflector is provided with water conservancy diversion row Hydraulic fluid port;Silk screen is filled in the clarifier left chamber, is equipped with clarifier oil discharge outlet at the clarifier left chamber, described is net Change and activated carbon is filled in device right chamber, set respectively on the pipeline of the air inlet of the oil gas clarifier, on the pipeline of exhaust outlet There are the second intake valve, second row air valve, the clarifier oil discharge outlet of the oil gas clarifier, the water conservancy diversion oil discharge outlet of oil gas clarifier Place is respectively arranged with the second draining valve, third draining valve, and the deflector and horizontal angle are 55 ° ~ 65 °.
3. advantageous effect
Using technical solution provided by the invention, compared with prior art, there is following remarkable result:
(1)A kind of oil gas clarifier using the present invention, wherein, vacuum pump exhaust outlet since pressure is relatively small and is entering After mouth detaches oil, after oil-free gas enters vacuum pump, since vacuum pump works the part mist of oil of discharge in itself, in vacuum The exhaust outlet setting oil gas clarifier of pump carries out the cleaning of part mist of oil, this process is first using silk screen filter and then by activity Carbon adsorption part mist of oil, reduces environmental pollution, reduces environmentally friendly risk.
(2)A kind of oil gas clarifier using the present invention, wherein, the clarifier oil discharge outlet that is set on oil gas clarifier and Water conservancy diversion oil discharge outlet and each oil discharge outlet is provided with draining valve, it is sharp again that recycling can be timed to the oil droplet during Oil-gas Separation With economizing on resources.
Description of the drawings
Fig. 1 is the structure diagram of bell furnace vent strip oil and gas separating system in the present invention;
Fig. 2 is the structure diagram of gs-oil separator in the present invention;
Fig. 3 is the structure diagram of the oil gas clarifier of the present invention;
Fig. 4 is the enlarged drawing at A in Fig. 2.
Label declaration in schematic diagram:
1st, bell furnace;2nd, gs-oil separator;21st, the first intake valve;22nd, separator snorkel;23rd, oil gas flow distribution plate;24th, it filters Layer;25th, the first aeroscopic plate;26th, the second aeroscopic plate;27th, first row air valve;28th, the first draining valve;29th, gas channel;3rd, vacuum Pump;4th, oil gas clarifier;41st, the second intake valve;42nd, clarifier left chamber;43rd, the second draining valve;44th, deflector;45th, third is arranged Fuel tap;46th, clarifier right chamber;47th, second row air valve;5th, vacuum valve.
Specific embodiment
To further appreciate that present disclosure, with reference to attached drawing and embodiment, the present invention is described in detail.
Embodiment 1
With reference to Fig. 3, a kind of oil gas clarifier of the present embodiment, oil gas clarifier 4 includes clarifier left chamber 42 and clarifier right chamber 46,4 inner cavity of oil gas clarifier middle part is provided with deflector 44, and deflector 44 divides oil gas clarifier 4 for 42 He of clarifier left chamber Clarifier right chamber 46;Deflector 44 is obliquely installed to 42 direction of clarifier left chamber, and deflector 44 is with horizontal angle 55 °, the lower left of deflector 44 is provided with water conservancy diversion oil discharge outlet, the clarifier oil discharge outlet of oil gas clarifier 4, oil gas clarifier 4 The second draining valve 43, third draining valve 45 are respectively arranged at water conservancy diversion oil discharge outlet, deflector 44 is left to clarifier in the present embodiment 42 direction of chamber is obliquely installed, and the lower left of deflector 44 is provided with such setting of water conservancy diversion oil discharge outlet so that air-flow is by purification Enter clarifier right chamber 46 through deflector 44 after device left chamber 42, when encountering air-flow, air velocity reduces deflector 44, due to oil Density it is larger, under gravity, can not continue to rise, so as to be gathered in deflector 44, oil droplet is under gravity It easily flows into the water conservancy diversion oil discharge outlet of lower left downwards along deflector 44, is recycled the liquid oil of aggregation by third draining valve 45 It recycles;Filled with silk screen in clarifier left chamber 42, it is equipped with clarifier oil discharge outlet at clarifier left chamber 42, in clarifier right chamber 46 Filled with activated carbon, be respectively equipped on the pipeline of the air inlet of oil gas clarifier 4, on the pipeline of exhaust outlet the second intake valve 41, Second row air valve 47.
With reference to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the present embodiment is divided using a kind of bell furnace vent strip oil gas of oil gas clarifier 4 From method, its step are as follows:
Step 1:Oil-containing copper is wrapped in bell furnace 1, the inner cover of bell furnace 1 is locked on its table;
Step 2:The first intake valve 21, first row air valve 27, the second intake valve 41 and second row air valve 47 are opened manually;Simultaneously The second draining valve 43 for being set respectively at the clarifier oil discharge outlet of oil gas clarifier 4, the water conservancy diversion oil discharge outlet of oil gas clarifier 4, Three draining valves 45 are in opening state;
Step 3:Start vacuum pump to open by it to vacuum valve 5 electric signal after 3,15 seconds, vacuum pump 3 starts to bell furnace(1) Interior oil gas is vacuumized, and is started vacuum pump in the present embodiment and is opened vacuum valve 5 after 3,15 seconds again so that vacuum pump 3 is in zero load In the case of start, avoid because load start caused by vacuum pump 3 damage;
Step 4:After starting vacuum pump 3, oil gas in bell furnace 1 successively by gs-oil separator 2, vacuum valve 5, vacuum pump 3, Oil gas clarifier 4 carries out the separation of oil and gas, after 2 inner cavity oil of gs-oil separator reaches certain liquid level, liquid level detector hair Go out alarm signal, start to recycle the oil in it by opening the first draining valve 28;
Step 5:After step 4 vacuumizes lasting 15 minutes, closed to 5 power-off signal of vacuum valve by it, vacuum pump 3 after 1 minute It turns off, completes the vent strip Oil-gas Separation of bell furnace 1, vacuum valve 5 is first powered off into closing, vacuum after 1 minute in the present embodiment Pump 3 turns off, when avoiding because first closing vacuum pump 3 so that unpumped oil gas is flowed back into bell furnace 1 in pipeline, is caused Copper volume oxidation in bell furnace 1.
Bell furnace vent strip oil and gas separating system includes bell furnace 1 and vacuum pump 3, further includes gs-oil separator 2 and oil gas Between clarifier 4, bell furnace 1 and gs-oil separator 2, gs-oil separator 2 and vacuum pump 3, vacuum pump 3 and oil gas clarifier 4 It is connected by pipeline, 3 entrance of vacuum pump is provided with vacuum valve 5, and 1 exit of bell furnace is provided with oil-gas condenser, passes through Oil gas after cooling enters back into gs-oil separator 2.
Be provided on gs-oil separator 2 separator snorkel 22, oil gas flow distribution plate 23, filter layer 24, the first aeroscopic plate 25, Second aeroscopic plate 26, separator exhaust outlet and separator oil discharge outlet, the pipe of 22 one end of separator snorkel and 1 gas outlet of bell furnace Road connects, and the other end extends to 2 inner cavity lower part of gs-oil separator, separator snorkel 22 along 2 vertical central axes of gs-oil separator For L-shaped;2 bottom interior wall of gs-oil separator is equipped with separator oil discharge outlet, and the is equipped at the separator oil discharge outlet of gs-oil separator 2 One draining valve 28,2 lower sides of gs-oil separator are equipped with liquid level detector, are set in the present embodiment in 2 bottom of gs-oil separator Liquid level detector is equipped with, it, will be oily by the first draining valve 28 of 2 bottom of gs-oil separator after liquid level gathers certain altitude It releases.
2 madial wall of gs-oil separator is equipped with five layers or five layers or more oil gas flow distribution plates 23, and oil gas flow distribution plate 23 is funnel Shape, the side of oil gas flow distribution plate 23 and the angle of vertical line are 30 °, and the vertical portion of separator snorkel 22 passes through above-mentioned oil gas Flow distribution plate 23;The diameter of 23 funnel shaped under shed of oil gas flow distribution plate is more than the diameter of separator snorkel 22 in the present embodiment, Therefore gas channel 29 is formed(Such as Fig. 4)So that into work of the oil gas through oil gas flow distribution plate 23 of 2 inner cavity lower part of gs-oil separator 2 inner cavity top of gs-oil separator can be reached after through gas channel 29.The top of separator snorkel 22 is provided with filter layer 24, filter layer 24 is silk screen, and 24 top and the bottom of filter layer are provided with pressure difference instrument, in the top of separator snorkel 22 in the present embodiment Filter layer 24 is provided with, the impurity such as the dust in oil gas are filtered, prevents from entering in vacuum pump 3 and damages the pump housing, in mistake 24 top and the bottom of filtering layer set pressure difference instrument, if silk screen can be caused after blocking gs-oil separator about 2 pressure difference become larger, at this moment need dozen Gs-oil separator 2 is opened to clean 24 silk screen of filter layer.
The first aeroscopic plate 25 and the second aeroscopic plate 26, the first aeroscopic plate 25 are provided on 2 upper inner wall of gs-oil separator It is located above filter layer 24 with the second aeroscopic plate 26, the shape of the first aeroscopic plate 25 and the second aeroscopic plate 26 is down infundibulate; The angle of first aeroscopic plate, 25 side and vertical line is 55 °, and the side of the second aeroscopic plate 26 and the angle of vertical line are 45 °, and The angle of first aeroscopic plate, 25 side and vertical line is more than the side of the second aeroscopic plate 26 and the angle of vertical line.In the present embodiment The shape of first aeroscopic plate 25 and the second aeroscopic plate 26 is down infundibulate, and the angle of 25 side of the first aeroscopic plate and vertical line More than the side of the second aeroscopic plate 26 and the angle of vertical line, the first aeroscopic plate 25 and the second aeroscopic plate 26 are in guiding gas discharge While gs-oil separator 2, the two opening angle is of different sizes and cooperates so that oil gas separation is more preferable, adds The shape of first aeroscopic plate 25 and the second aeroscopic plate 26 is down infundibulate and achievees the effect that buffer gas flow flows out, while makes oil gas It rests between the first aeroscopic plate 25 and the second aeroscopic plate 26 for a long time so that more oil droplet coalescences are in 25 He of the first aeroscopic plate Reach good oil gas separation on second aeroscopic plate 26.The top of gs-oil separator 2 is provided with separator exhaust outlet;Separation The first intake valve 21, first row air valve 27 are respectively equipped on the air inlet of device snorkel 22, the pipeline of separator exhaust outlet.
Gs-oil separator 2 carries out Oil-gas Separation by three phases in the present embodiment, 3 inlet of vacuum pump due to oil with The flow velocity of gas is larger, after entering closed 2 lower part of gs-oil separator by pipeline, due to volume change, oil-containing gases flow velocity drop Low, under the drive of outlet pressure, air-flow rises naturally, during rising, after oil gas collides oil gas flow distribution plate 23, and speed Degree further reduces, and since the density of oil is larger, under gravity, can not continue to rise, so as to gather oil gas shunting On plate 23, after the regular hour, oil droplet is formed, the bottom of gs-oil separator 2 is flowed into along the inclined-plane of oil gas flow distribution plate 23, Aggregation forms liquid oil, and 2 bottom of gs-oil separator is provided with liquid level detector, after liquid level gathers certain altitude, passes through Oil is released the Oil-gas Separation for completing the first stage, while in gs-oil separator by the first draining valve 28 of 2 bottom of gs-oil separator 2 middle and upper part is provided with filter layer 24, and the impurity such as the dust in gas are filtered, and prevents from entering in vacuum pump 3 by the pump housing Damage sets pressure difference detector in 24 top and the bottom of filter layer, if silk screen can cause pressure difference above and below in gs-oil separator 2 after blocking Become larger, at this moment need to open gs-oil separator 2 and silk screen is cleaned, part oil drop under the action of filter layer 24 with gas Body detaches, and completes the Oil-gas Separation of second stage.The first aeroscopic plate 25 and second is provided on 2 upper inner wall of gs-oil separator Aeroscopic plate 26, the first aeroscopic plate 25 and the second aeroscopic plate 26 are located at 24 top of filter layer, the first aeroscopic plate 25 and the second aeroscopic plate 26 shape is down infundibulate;And the angle of 25 side of the first aeroscopic plate and vertical line be more than the second aeroscopic plate 26 side with The angle of vertical line, air-flow complete the Oil-gas Separation of phase III under the action of the first aeroscopic plate 25 and the second aeroscopic plate 26. The present embodiment gs-oil separator 2 passes through triphasic Oil-gas Separation, and good oil gas separation effect, principle are simple, reasonable design.
Vacuum pump 3 exhaust outlet since pressure is relatively small and after entrance detaches oil, oil-free gas enters After vacuum pump 3, only vacuum pump 3 itself work discharge part mist of oil, pass through oil gas clarifier 4 use silk screen filter and activated carbon The method of purification solves.
Schematically the present invention and embodiments thereof are described above, this describes no restricted, institute in attached drawing What is shown is also one of embodiments of the present invention, and practical structure is not limited thereto.So if common skill of this field Art personnel are enlightened by it, without departing from the spirit of the invention, are not inventively designed and the technical solution Similar frame mode and embodiment, are within the scope of protection of the invention.

Claims (1)

1. a kind of oil gas clarifier, it is characterised in that:The oil gas clarifier(4)Including clarifier left chamber(42)And clarifier Right chamber(46), the oil gas clarifier(4)Deflector is provided in the middle part of inner cavity(44), the deflector(44)Oil gas is net Change device(4)It is divided into clarifier left chamber(42)With clarifier right chamber(46);The deflector(44)To clarifier left chamber(42)Institute It is obliquely installed in direction, the deflector(44)Lower left be provided with water conservancy diversion oil discharge outlet;The clarifier left chamber(42)In Filled with silk screen, the clarifier left chamber(42)Place is equipped with clarifier oil discharge outlet, the clarifier right chamber(46)Middle filling Active charcoal, the oil gas clarifier(4)Air inlet pipeline on, on the pipeline of exhaust outlet be respectively equipped with the second intake valve (41), second row air valve(47), the oil gas clarifier(4)Clarifier oil discharge outlet, oil gas clarifier(4)Water conservancy diversion oil extraction The second draining valve is respectively arranged at mouthful(43), third draining valve(45), the deflector(44)It is with horizontal angle 55°~65°。
CN201711479042.8A 2015-12-07 2015-12-07 A kind of oil gas clarifier Pending CN108149003A (en)

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Application Number Priority Date Filing Date Title
CN201711479042.8A CN108149003A (en) 2015-12-07 2015-12-07 A kind of oil gas clarifier

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Application Number Priority Date Filing Date Title
CN201711479042.8A CN108149003A (en) 2015-12-07 2015-12-07 A kind of oil gas clarifier
CN201510886552.1A CN105543466B (en) 2015-12-07 2015-12-07 A kind of method of bell furnace vent strip Oil-gas Separation

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CN201711479042.8A Pending CN108149003A (en) 2015-12-07 2015-12-07 A kind of oil gas clarifier

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110319348A (en) * 2018-03-29 2019-10-11 中国石油天然气股份有限公司 Oil gas section plug flow control device and oil gas delivery system

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CN203874627U (en) * 2014-04-29 2014-10-15 俞春华 Oil mist collecting device
CN104289010A (en) * 2014-10-31 2015-01-21 张进 Multi-baffle type oil-and-water separator

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CN203238309U (en) * 2013-04-16 2013-10-16 安徽精诚铜业股份有限公司 Oil removing and recycling device for bell-type furnace vacuum-pumping system
CN203634966U (en) * 2013-12-30 2014-06-11 陕西科技大学 Oil-gas separation device
CN203820929U (en) * 2014-03-12 2014-09-10 宁晋赛美港龙电子材料有限公司 Vacuum-pump oil-gas separation filtering structure of mono-crystal furnace
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CN203874627U (en) * 2014-04-29 2014-10-15 俞春华 Oil mist collecting device
CN104289010A (en) * 2014-10-31 2015-01-21 张进 Multi-baffle type oil-and-water separator

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CN105543466B (en) 2017-12-26

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Application publication date: 20180612