CN108044130A - A kind of metal multiaspect scan prism processing method of achievable on-line checking - Google Patents

A kind of metal multiaspect scan prism processing method of achievable on-line checking Download PDF

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CN108044130A
CN108044130A CN201711320966.3A CN201711320966A CN108044130A CN 108044130 A CN108044130 A CN 108044130A CN 201711320966 A CN201711320966 A CN 201711320966A CN 108044130 A CN108044130 A CN 108044130A
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collimation
prism
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CN108044130B (en
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黄启泰
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Suzhou Zebra Optical Technology Co ltd
Suzhou University
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Suzhou University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B5/00Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B25/00Accessories or auxiliary equipment for turning-machines
    • B23B25/06Measuring, gauging, or adjusting equipment on turning-machines for setting-on, feeding, controlling, or monitoring the cutting tools or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B9/00Automatic or semi-automatic turning-machines with a plurality of working-spindles, e.g. automatic multiple-spindle machines with spindles arranged in a drum carrier able to be moved into predetermined positions; Equipment therefor
    • B23B9/02Automatic or semi-automatic machines for turning of stock
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/04Prisms

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  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明公开了一种可实现在线检测的金属多面扫描棱镜加工方法,解决多次装夹定位误差影响扫描面角加工度精度的问题;通过自准直定位光路与标准块精确控制转轴的转角,同时以加工好的金属多面扫描棱镜第一扫描面为基准装调自准直检测光路,转动转轴,只要自准直定位光路与标准块上第n个侧面实现自准直,则自准直检测光路与第一扫描面的第n个扫描面也实现自准直;本技术方案的使用可以不依赖于高精度数控转轴,在两轴机床上即可完成金属多面扫描棱镜在线检测与加工,大幅提高加工效率、加工精度及加工一致性。

The invention discloses a metal multi-faceted scanning prism processing method capable of on-line detection, which solves the problem that multiple clamping and positioning errors affect the processing accuracy of the scanning surface angle; the rotation angle of the rotating shaft is precisely controlled by the self-collimation positioning optical path and the standard block, At the same time, adjust the self-collimation detection optical path based on the first scanning surface of the processed metal multi-faceted scanning prism, and rotate the shaft. The optical path and the nth scanning surface of the first scanning surface also realize self-collimation; the use of this technical solution can complete the online detection and processing of metal multi-faceted scanning prisms on a two-axis machine tool without relying on high-precision CNC rotating shafts, greatly Improve processing efficiency, processing accuracy and processing consistency.

Description

一种可实现在线检测的金属多面扫描棱镜加工方法A metal multi-faceted scanning prism processing method capable of on-line detection

技术领域technical field

本发明属于光学加工技术领域,具体涉及一种多面扫描棱镜的加工方法。The invention belongs to the technical field of optical processing, and in particular relates to a processing method of a multi-faceted scanning prism.

背景技术Background technique

多面扫描棱镜具有多个反射面,是扫描仪、复印机、扫码器等激光设备中的核心光学器件。使用时通常安装在电动机的旋转轴上,通过多面扫描棱镜的高速旋转,可实现大范围、超高速、高精度与高重复性的激光光束扫描,其角度精度、表面质量等因素将直接影响扫描精度和效果,因此对其各个反射面的角度加工精度要求非常高。Multi-faceted scanning prisms have multiple reflective surfaces and are the core optical devices in laser equipment such as scanners, copiers, and code scanners. When in use, it is usually installed on the rotating shaft of the motor. Through the high-speed rotation of the multi-faceted scanning prism, a large-scale, ultra-high-speed, high-precision and high-repeatability laser beam scanning can be realized. The angle accuracy, surface quality and other factors will directly affect the scanning. Accuracy and effect, so the angle processing accuracy of each reflective surface is very high.

目前国内多面扫描棱镜的加工主要依靠带有转轴的数控车床实现,一次可加工数量有限,各面之间的角度精度依靠数控转轴的精度进行保障。数控车床上加工的多面扫描棱镜时,为了保证各个扫描面之间的角度精度,需要一次装夹完成所有侧面加工。检测各个扫描面角度时,如果采用线下检测,如果某个扫描面角度超差,就需要重新装夹,对扫描棱镜再次加工,重新装夹时必然引入新的定位误差,是加工效率低下、检测效率也低;此外批量加工时产品一致性差,严重影响到组装设备的稳定性。At present, the processing of multi-faceted scanning prisms in China is mainly realized by CNC lathes with rotating shafts, the number of which can be processed at one time is limited, and the angular accuracy between each surface is guaranteed by the accuracy of CNC rotating shafts. When processing a multi-faceted scanning prism on a CNC lathe, in order to ensure the angular accuracy between each scanning face, it is necessary to complete all side processing in one clamping. When detecting the angles of each scanning surface, if the offline detection is used, if the angle of a certain scanning surface is out of tolerance, it needs to be re-clamped, and the scanning prism will be processed again. When re-clamping, a new positioning error will inevitably be introduced, which is low in processing efficiency. The detection efficiency is also low; in addition, the product consistency is poor during batch processing, which seriously affects the stability of the assembled equipment.

发明内容Contents of the invention

本发明的目的在于解决多次装夹的引入的定位误差影响角各个扫描面角度精度的问题。The purpose of the present invention is to solve the problem that the positioning error introduced by multiple clamping affects the angular accuracy of each scanning surface.

一种可实现在线检测的金属多面扫描棱镜加工方法,具体技术方案如下:A metal multi-faceted scanning prism processing method that can realize online detection, the specific technical scheme is as follows:

1)加工标准块步骤:加工一块精度优于金属多面扫描棱镜的设计参数的多面棱镜作为标准块,将所述金属多面扫描棱镜的扫描面个数记为N,标准块上的侧面个数也为N;1) processing standard block step: process a polyhedral prism whose precision is better than the design parameters of the metal multi-faceted scanning prism as a standard block, the number of scanning faces of the metal multi-faceted scanning prism is recorded as N, and the number of sides on the standard block is also for N;

2)将所述标准块安装固定在电控转台的转轴上,其中所述标准块上任意侧面的法线方向与电控转台的转轴垂直;2) installing and fixing the standard block on the rotating shaft of the electric control turntable, wherein the normal direction of any side on the standard block is perpendicular to the rotating shaft of the electric control turntable;

3)将待加工的金属多面扫描棱镜镜胚也装夹在所述电控转台的转轴上,其中金属多面扫描棱镜镜胚横截面法线方向与电控转台的转轴平行;3) The metal multi-faceted scanning prism blank to be processed is also clamped on the rotating shaft of the electric control turntable, wherein the normal direction of the cross-section of the metal multi-face scanning prism blank is parallel to the rotating shaft of the electric control turntable;

4)在机床上搭建自准直定位光路,并将电控转台安装在机床工作台上,转动所述电控转台,将所述标准块的第一个侧面对准自准直定位光路,用锁止机构固定所述电控转台的转轴;在所述金属多面扫描棱镜镜胚上车削出第一扫描面;4) Build the self-collimation positioning optical path on the machine tool, install the electric control turntable on the machine tool workbench, turn the electric control turntable, align the first side of the standard block with the self-collimation positioning optical path, and use The locking mechanism fixes the rotating shaft of the electric control turntable; turning the first scanning surface on the metal multi-faceted scanning prism blank;

5)在机床上搭建自准直检测光路,标准块的第一个侧面对准所述自准直定位光路时,以金属多面扫描棱镜的第一扫描面为基准,调整自准直检测光路使被第一扫描面反射的反射光和入射光重合;5) Build the self-collimation detection optical path on the machine tool, when the first side of the standard block is aligned with the self-collimation positioning optical path, take the first scanning surface of the metal multi-faceted scanning prism as a reference, adjust the self-collimation detection optical path so that The reflected light reflected by the first scanning surface coincides with the incident light;

6)转动所述电控转台,将标准块的第n个侧面对准所述自准直定位光路,在金属多面扫描棱镜镜胚上车削出第n个扫描面;标准块的第n个侧面对准所述自准直定位光路时,若所述自准直检测光路的入射光与被金属多面扫描棱镜第n个扫面反射的反射光不重合,将第n个扫描面的反射光和入射光角度误差反馈至机床进行误差补偿加工,并再次对第n个扫描面车削;若自准直检测光路的入射光与被第n个扫面反射的反射光重合,第一扫描面和第n扫描面的角度符合要求;其中n从2依次增加到N。带来的技术效果是:加工完成第n个扫面后,可以通过自准直检测光路直接判断该加工面与第一扫描面的角度误差是否符合要求,如果不符合要求,不需要再次装夹,直接将角度偏差作为机床的误差补偿文件再次对第n个扫描面车削加工,有效的避免了重新装夹的定位误差对角度精度的影响。6) Turn the electric control turntable, align the nth side of the standard block with the self-collimation positioning optical path, and turn the nth scanning surface on the metal multi-faceted scanning prism blank; the nth side of the standard block When aligning the self-collimation positioning optical path, if the incident light of the self-collimation detection optical path does not coincide with the reflected light reflected by the nth scanning surface of the metal multi-faceted scanning prism, the reflected light of the nth scanning surface and the The incident light angle error is fed back to the machine tool for error compensation processing, and the nth scanning surface is turned again; if the incident light of the autocollimation detection optical path coincides with the reflected light reflected by the nth scanning surface, the first scanning surface and the nth scanning surface The angle of the n scanning plane meets the requirements; where n increases from 2 to N in turn. The technical effect brought about is: after the nth scanning surface is processed, it can be directly judged through the autocollimation detection optical path whether the angle error between the processing surface and the first scanning surface meets the requirements. If it does not meet the requirements, there is no need to re-clamp , directly take the angular deviation as the error compensation file of the machine tool and turn the nth scanning surface again, effectively avoiding the influence of the re-clamping positioning error on the angular accuracy.

为了减小切削量,可先将金属多面扫描棱镜镜胚制作成角度误差小于2度的金属多面体,然后用金刚石飞刀车削技术按照上述技术方案直接车削成光学面。In order to reduce the amount of cutting, the metal multi-faceted scanning prism blank can be made into a metal polyhedron with an angle error of less than 2 degrees, and then directly turned into an optical surface by diamond flying knife turning technology according to the above technical scheme.

上述技术方案还可在一个较长的金属多面扫描棱镜镜胚上车削,待所有侧面都加工好后,通过切割工艺直接获得多个金属多面扫描棱镜。The above technical solution can also be turned on a longer metal multi-faceted scanning prism blank, and after all sides are processed, multiple metal multi-faceted scanning prisms can be directly obtained through cutting process.

上述技术方案中:所述标准块为精度优于金属多面扫描棱镜的设计参数的玻璃多面棱镜。In the above technical solution: the standard block is a glass polygonal prism whose precision is better than the design parameters of the metal polygonal scanning prism.

上述技术方案中:所述的玻璃多面棱镜可采用常规冷加工方法加工,加工标准块时严格控制各表面之间角度误差、塔差。In the above technical solution: the glass polygonal prism can be processed by conventional cold processing methods, and the angle error and tower difference between the surfaces are strictly controlled when processing the standard block.

上述技术方案中:标准块上设置通孔,该标准块上的通孔与电控转台的转轴同轴的方式装配固定。In the above technical solution: the standard block is provided with a through hole, and the through hole on the standard block is assembled and fixed coaxially with the rotating shaft of the electric control turntable.

上述技术方案中:所述的待加工的金属多面扫描棱镜镜坯上也设置通孔,并穿入电控转台的转轴。In the above technical solution: the metal multi-faceted scanning prism blank to be processed is also provided with a through hole, which penetrates into the rotating shaft of the electric control turntable.

上述技术方案中:所述的自准直定位光路为自准直平行光管。In the above technical solution: the self-collimation positioning optical path is an autocollimation collimator.

一个优选方案:所述的自准直定位光路由平行光激光器、分光镜、平面反射镜、像屏组成,其中平行光激光器射出的平行光入射至分光镜,分光镜反射的光作为参考光被垂直放置于光路中的平面反射镜反射后入射至像屏,分光镜透射的光作为检测光入射至所述标准块的任意一个侧面;转动所述电控转台,检测光被该侧面反射至像屏,在像屏上形成干涉条纹。该光路实际上为迈克尔逊干涉光路,通过干涉条纹可以更精确的控制电控转台的转轴转角。A preferred solution: the self-collimation positioning optical path is composed of a parallel light laser, a beam splitter, a plane mirror, and an image screen, wherein the parallel light emitted by the parallel light laser is incident on the beam splitter, and the light reflected by the beam splitter is taken as a reference light The plane mirror vertically placed in the optical path is reflected and incident to the image screen, and the light transmitted by the beam splitter is incident to any side of the standard block as detection light; the detection light is reflected by the side to the image when the electric control turntable is rotated. screen, forming interference fringes on the image screen. The optical path is actually a Michelson interference optical path, and the rotation angle of the electric control turntable can be controlled more precisely through interference fringes.

还可以用CCD替换像屏,将参考光与检测光的干涉条纹成像在CCD中,在整个加工过程中实时监控干涉条纹的变化。这样可以更方便的观察到加工过程中控制电控转台的转轴是否发生旋转。还可在用机床进行车削加工时,将所述干涉条纹的实时变化信息反馈回机床,进行误差实时补偿。这样的加工属于闭环加工工艺,可以实施通过干涉条纹变化转化为电控转台的转轴的姿态变化,将这一实时变化信息反馈至加工机床,可以进一步提高加工精度。It is also possible to replace the image screen with a CCD, image the interference fringes of the reference light and the detection light in the CCD, and monitor the changes of the interference fringes in real time during the entire processing process. In this way, it is more convenient to observe whether the rotating shaft controlling the electric control turntable rotates during the machining process. It is also possible to feed back the real-time change information of the interference fringes back to the machine tool for real-time error compensation when the machine tool is used for turning processing. This kind of processing belongs to the closed-loop processing technology, which can be converted into the attitude change of the rotating shaft of the electric control turntable through the change of interference fringe, and the real-time change information can be fed back to the processing machine tool, which can further improve the processing accuracy.

优选技术方案:所述的自准直检测光路由平行光激光器、与所述平行光激光器发出的平行光垂直的标尺组成,标准块的第一个侧面对准所述自准直定位光路时,以所述金属多面扫描棱镜的第一扫描面为基准,调整平光激光器使被第一扫描面反射的反射光和入射光重合,记录反射光在标尺上的读数,该读数处的位置为自准直检测光路的基准位置;步骤6)中,转动所述电控转台,将标准块的第n个侧面对准所述自准直定位光路,在金属多面扫描棱镜镜胚上车削出第n个扫描面;此时记录第n个扫描面的反射光在标尺上的第n位置,第n个扫描面的反射光在标尺上的第n位置与步骤5)中所述基准位置重合,则金属多面扫描棱镜的第一扫描面与第n扫描面的角度等于标准块的第一个侧面与第n个侧面的角度。带来的效果是可以通过反射光点在标尺上的位置便捷的判断加工的扫描面角度是否符合要求。Optimal technical solution: the self-collimation detection optical path is composed of a parallel light laser and a scale perpendicular to the parallel light emitted by the parallel light laser. When the first side of the standard block is aligned with the self-collimation positioning light path, Based on the first scanning surface of the metal multi-faceted scanning prism, adjust the planar laser so that the reflected light reflected by the first scanning surface coincides with the incident light, and record the reading of the reflected light on the scale. The position of the reading is self-calibration Directly detect the reference position of the optical path; in step 6), rotate the electric control turntable, align the nth side of the standard block with the self-collimation positioning optical path, and turn the nth side on the metal multi-faceted scanning prism mirror blank Scanning surface; now record the nth position of the reflected light of the nth scanning surface on the scale, and the nth position of the reflected light of the nth scanning surface on the scale coincides with the reference position described in step 5), then the metal The angle between the first scanning surface and the nth scanning surface of the multi-faceted scanning prism is equal to the angle between the first side and the nth side of the standard block. The resulting effect is that it is possible to conveniently judge whether the processed scanning surface angle meets the requirements through the position of the reflected light spot on the scale.

上述技术方案中,金属多面扫描棱镜的第n个扫描面的反射光在标尺上的第n位置与步骤5)中所述基准位置不重合时,测出第n位置其与基准位置之间的偏离量h,测量标尺与第n个扫描面之间的距离L,第n个扫描面的反射光与入射光之间的角度β=arcsin(h/L),金属多面扫描棱镜的第n个扫描面与第一扫描面之间的角度偏差为β/2。该方案本质上是用到了光杠杆的放大原理,将微小的角度误差放大,并将角度误差转化为标尺上的偏离量,可以在线定量的测量出角度偏差,可将此角度误差反馈给数控机床,补偿加工进一步提高扫描面的角度精度。In the above-mentioned technical scheme, when the reflected light of the nth scanning surface of the metal polygonal scanning prism does not coincide with the reference position described in step 5) on the scale, the distance between the nth position and the reference position is measured. Deviation h, the distance L between the measuring scale and the nth scanning surface, the angle between the reflected light and the incident light of the nth scanning surface β=arcsin(h/L), the nth metal polygonal scanning prism The angular deviation between the scanning plane and the first scanning plane is β/2. This scheme essentially uses the amplification principle of the optical lever to amplify the tiny angle error and convert the angle error into the deviation on the scale. The angle deviation can be quantitatively measured online, and the angle error can be fed back to the CNC machine tool. , Compensation processing further improves the angular accuracy of the scanning surface.

为了适应批量加工,更优的方案为:上述技术方案中,步骤2)中所述的电控转台的转轴通过联动机构与若干根从动转轴连接,每一根从动转轴上都可装夹至少一个金属多面扫描棱镜镜胚,当电控转台的转轴旋转时,所述的从动转轴也旋转相同角度;所述步骤3)中同时将多个待加工的金属多面扫描棱镜镜胚装夹在所述从动转轴上;所述步骤4)在机床上搭建自准直定位光路,并将电控转台安装在机床工作台上,转动所述电控转台,将所述标准块的第一个侧面对准自准直定位光路,用锁止机构固定所述电控转台的转轴;在所装夹的待加工金属多面扫描棱镜镜胚上车削出第一扫描面。这样每一根转轴上都可安装多个待加工金属多面扫描棱镜镜胚,并且可以通过联动装置连接多根从动转轴,这样就可以实现批量加工,还可以保证同一批产品精度一致,这就大大提高了所组装产品的稳定性。In order to adapt to batch processing, a more optimal solution is: in the above technical solution, the rotating shaft of the electric control turntable described in step 2) is connected to several driven rotating shafts through a linkage mechanism, and each driven rotating shaft can be clamped At least one metal multi-sided scanning prism blank, when the rotating shaft of the electric control turntable rotates, the said driven rotating shaft also rotates at the same angle; in said step 3), multiple metal multi-sided scanning prism blanks to be processed are clamped at the same time On the driven rotating shaft; the step 4) builds the self-collimation positioning optical path on the machine tool, and installs the electric control turntable on the machine tool workbench, rotates the electric control turntable, and the first part of the standard block Align the two sides with the self-collimating and positioning optical path, fix the rotating shaft of the electric control turntable with a locking mechanism; turn the first scanning surface on the clamped metal multi-faceted scanning prism blank to be processed. In this way, multiple metal multi-faceted scanning prism blanks to be processed can be installed on each rotating shaft, and multiple driven rotating shafts can be connected through a linkage device, so that batch processing can be realized, and the accuracy of the same batch of products can be guaranteed. The stability of the assembled product is greatly improved.

附图说明Description of drawings

图1金属多面扫描棱镜加工示意图;Fig. 1 schematic diagram of metal multi-faceted scanning prism processing;

图2多转轴批量加工金属多面扫描棱镜示意图;Figure 2 is a schematic diagram of multi-axis batch processing of metal multi-faceted scanning prisms;

图3一种自准直定位光路示意图;Fig. 3 is a schematic diagram of an autocollimation positioning optical path;

图4一种自准直检测光路示意图;Figure 4 is a schematic diagram of an autocollimation detection optical path;

其中:1-电控转台,2-标准块,3-金属多面扫描棱镜镜胚,4-电控转台的转轴,5-自准直定位光路,6-电控转台支架,7-锁止机构,8-联动机构,9-从动转轴,10-平行光激光器,11-分光镜,12-参考光,13-检测光,14-平面反射镜,15-像屏,16-自准直检测光路,17-标尺,18-第n个扫描面的入射光,19-第n个扫描面的反射光19,20-自准直检测光路的基准位置,21-反射光在标尺上的第n位置,22-第n个扫描面的理论位置;h-第n位置其与基准位置之间的偏离量,L-标尺与第n个扫描面之间的距离,β-第n个扫描面的反射光与入射光之间的角度。Among them: 1-electric control turntable, 2-standard block, 3-metal multi-faceted scanning prism blank, 4-rotary shaft of electric control turntable, 5-self-collimation positioning optical path, 6-electric control turntable bracket, 7-locking mechanism , 8-linkage mechanism, 9-driven shaft, 10-parallel laser, 11-beam splitter, 12-reference light, 13-detection light, 14-plane mirror, 15-image screen, 16-autocollimation detection Optical path, 17-scale, 18-incident light of nth scanning surface, 19-reflected light of nth scanning surface, 19, 20-reference position of autocollimation detection optical path, 21-reflected light on scale nth Position, 22-the theoretical position of the nth scanning surface; h-the deviation between the nth position and the reference position, L-the distance between the scale and the nth scanning surface, β-the nth scanning surface The angle between the reflected light and the incident light.

具体实施方式Detailed ways

为了更清楚地说明发明,下面结合附图及实施例作进一步描述In order to illustrate the invention more clearly, the following will be further described in conjunction with the accompanying drawings and embodiments

实施例一:Embodiment one:

一种可实现在线检测的金属多面扫描棱镜加工方法,附图1所示,具体技术方案如下:A metal multi-faceted scanning prism processing method that can realize on-line detection, as shown in accompanying drawing 1, the specific technical scheme is as follows:

1)加工标准块步骤:加工一块精度优于金属多面扫描棱镜的设计参数的多面棱镜作为标准块2,将所述金属多面扫描棱镜的扫描面个数记为N,标准块上的侧面个数也为N;1) processing standard block step: process a polyhedral prism whose precision is better than the design parameters of the metal multi-faceted scanning prism as the standard block 2, the number of scanning faces of the metal multi-faceted scanning prism is recorded as N, the number of sides on the standard block also N;

2)将标准块安装固定在电控转台1的转轴4上,其中所述标准块上任意侧面的法线方向与电控转台的转轴垂直;2) Install and fix the standard block on the rotating shaft 4 of the electric control turntable 1, wherein the normal direction of any side on the standard block is perpendicular to the rotating shaft of the electric control turntable;

3)将待加工的金属多面扫描棱镜镜胚3也装夹在所述电控转台的转轴上,其中金属多面扫描棱镜镜胚横截面法线方向与电控转台的转轴平行;3) The metal multi-faceted scanning prism blank 3 to be processed is also clamped on the rotating shaft of the electric control turntable, wherein the normal direction of the cross-section of the metal multi-face scanning prism blank is parallel to the rotating shaft of the electric control turntable;

4)在机床上搭建自准直定位光路5,并将电控转台安装在机床工作台上,转动所述电控转台,将所述标准块的第一个侧面对准自准直定位光路,用锁止机构固定所述电控转台的转轴;在所述金属多面扫描棱镜镜胚上车削出第一扫描面;4) Build the self-collimating positioning optical path 5 on the machine tool, and install the electric control turntable on the machine tool workbench, rotate the electric control turntable, align the first side of the standard block with the self-collimating positioning optical path, Using a locking mechanism to fix the rotating shaft of the electric control turntable; turning the first scanning surface on the metal multi-faceted scanning prism blank;

5)在机床上搭建自准直检测光路,标准块的第一个侧面对准所述自准直定位光路时,以金属多面扫描棱镜的第一扫描面为基准,调整自准直检测光路使被第一扫描面反射的反射光和入射光重合;5) Build the self-collimation detection optical path on the machine tool, when the first side of the standard block is aligned with the self-collimation positioning optical path, take the first scanning surface of the metal multi-faceted scanning prism as a reference, adjust the self-collimation detection optical path so that The reflected light reflected by the first scanning surface coincides with the incident light;

6)转动所述电控转台,将标准块的第n个侧面对准所述自准直定位光路,在金属多面扫描棱镜镜胚上车削出第n个扫描面;标准块的第n个侧面对准所述自准直定位光路时,若所述自准直检测光路的入射光与被金属多面扫描棱镜第n个扫面反射的反射光不重合,将第n个扫描面的反射光和入射光角度误差反馈至机床进行误差补偿加工,并再次对第n个扫描面车削;若自准直检测光路的入射光与被第n个扫面反射的反射光重合,第一扫描面和第n扫描面的角度符合要求;其中n从2依次增加到N。6) Turn the electric control turntable, align the nth side of the standard block with the self-collimation positioning optical path, and turn the nth scanning surface on the metal multi-faceted scanning prism blank; the nth side of the standard block When aligning the self-collimation positioning optical path, if the incident light of the self-collimation detection optical path does not coincide with the reflected light reflected by the nth scanning surface of the metal multi-faceted scanning prism, the reflected light of the nth scanning surface and the The incident light angle error is fed back to the machine tool for error compensation processing, and the nth scanning surface is turned again; if the incident light of the autocollimation detection optical path coincides with the reflected light reflected by the nth scanning surface, the first scanning surface and the nth scanning surface The angle of the n scanning plane meets the requirements; where n increases from 2 to N in turn.

实施例二:Embodiment two:

附图2所示的一种可实现在线检测的金属多面扫描棱镜加工方法,具体技术方案如下:A kind of metal multi-faceted scanning prism processing method that can realize on-line detection shown in accompanying drawing 2, concrete technical scheme is as follows:

1)加工标准块步骤:加工一块精度优于金属多面扫描棱镜的设计参数的多面棱镜作为标准块2;1) Process standard block step: process a polygonal prism whose precision is better than the design parameters of the metal polygonal scanning prism as standard block 2;

2)将标准块安装固定在电控转台1的转轴4上,其中标准块的横截面法线方向与电控转台的转轴平行;电控转台1的转轴2通过联动机构8与若干根从动转轴9连接,每一根从动转轴上都可装夹至少一个金属多面扫描棱镜镜胚3,当电控转台的转轴旋转时,所述的从动转轴也旋转相同角度;2) Install and fix the standard block on the rotating shaft 4 of the electric control turntable 1, wherein the normal direction of the cross section of the standard block is parallel to the rotating shaft of the electric control turntable; the rotating shaft 2 of the electric control turntable 1 communicates with several driven The rotating shaft 9 is connected, and at least one metal multi-faceted scanning prism mirror blank 3 can be clamped on each driven rotating shaft. When the rotating shaft of the electric control turntable rotates, the driven rotating shaft also rotates at the same angle;

3)将多个待加工的金属多面扫描棱镜镜胚装夹在所述从动转轴上;其中金属多面扫描棱镜镜胚横截面法线方向与电控转台的转轴平行;3) Clamping a plurality of metal multi-faceted scanning prism blanks to be processed on the driven shaft; wherein the normal direction of the cross-section of the metal multi-faceted scanning prism blanks is parallel to the rotating shaft of the electric control turntable;

4)在电控转台支架6上搭建自准直定位光路5,将电控转台安装在机床工作台上,转动所述电控转台,将所述标准块的任意一个侧面对准自准直定位光路,用锁止机构7固定所述电控转台的转轴以及所有从动转轴;在所述电控转台的转轴与从动转轴上固定的金属多面扫描棱镜镜胚上车削出扫第一扫描面。4) Build the self-collimation positioning optical path 5 on the electric control turntable bracket 6, install the electric control turntable on the machine tool table, rotate the electric control turntable, and align any side of the standard block with the self-collimation positioning In the optical path, the rotating shaft of the electric control turntable and all driven rotating shafts are fixed by the locking mechanism 7; the first scanning surface is turned on the metal multi-faceted scanning prism mirror blank fixed on the rotating shaft and driven rotating shaft of the electric control turntable .

5)在机床上搭建自准直检测光路5) Build an autocollimation detection optical path on the machine tool

以所述第一扫描面为基准,调整自准直检测光路使被第一扫描面反射的反射光和入射光重合;Taking the first scanning surface as a reference, adjusting the self-collimation detection optical path so that the reflected light reflected by the first scanning surface coincides with the incident light;

6)依次转动所述电控转台,将标准块的第n个侧面对准所述自准直定位光路,在金属多面扫描棱镜镜胚上车削出第n个扫描面;所述自准直检测光路的入射光被第n个扫面反射的反射光与入射光不重合时,将第n个扫描面的反射光和入射光角度误差反馈至机床进行误差补偿,并再次对第n个扫描面车削;自准直检测光路的入射光被第n个扫面反射的光与入射光重合时,第一扫描面和第n扫描面的角度符合要求;其中2≤n≤N。6) Turn the electric control turntable in turn, align the nth side of the standard block with the self-collimation positioning optical path, and turn the nth scanning surface on the metal multi-faceted scanning prism blank; the self-collimation detection When the incident light of the optical path is reflected by the nth scanning surface and the reflected light does not coincide with the incident light, the angle error between the reflected light and the incident light of the nth scanning surface is fed back to the machine tool for error compensation, and the nth scanning surface is again Turning; when the incident light of the self-collimation detection optical path is coincident with the incident light reflected by the nth scanning surface, the angle between the first scanning surface and the nth scanning surface meets the requirements; where 2≤n≤N.

实施例三:Embodiment three:

实施例一技术方案基础上,所述的自准直定位光路5如图3所示,由平行光激光器10、分光镜11、平面反射镜14、像屏15组成,其中平行光激光器射出的平行光入射至分光镜,分光镜反射的光作为参考光12被垂直放置于光路中的平面反射镜反射后入射至像屏,分光镜透射的光作为检测光13入射至所述标准块的任意一个侧面;转动所述电控转台,检测光被该侧面反射至像屏15,在像屏上形成干涉条纹。该光路实际上为迈克尔逊干涉光路,通过干涉条纹可以更精确的控制电控转台的转轴转角。On the basis of the technical solution of Embodiment 1, the described self-collimating positioning optical path 5 is composed of a parallel light laser 10, a beam splitter 11, a plane reflector 14, and an image screen 15 as shown in Figure 3, wherein the parallel light emitted by the parallel light laser The light is incident on the beam splitter, and the light reflected by the beam splitter is reflected by the plane reflector vertically placed in the optical path as the reference light 12 and then incident on the image screen, and the light transmitted by the beam splitter is incident on any one of the standard blocks as the detection light 13 Side: when the electric control turntable is rotated, the detection light is reflected to the image screen 15 by the side, and interference fringes are formed on the image screen. The optical path is actually a Michelson interference optical path, and the rotation angle of the electric control turntable can be controlled more precisely through interference fringes.

实施例四:Embodiment four:

实施例一技术方案基础上,如图4所示,所述的自准直检测光路16由平行光激光器、与所述平行光激光器发出的平行光垂直的标尺17组成,标准块的第一个侧面对准所述自准直定位光路时,以所述金属多面扫描棱镜的第一扫描面为基准,调整平光激光器使被第一扫描面反射的反射光和入射光重合,记录反射光在标尺上的读数,该读数处的位置为自准直检测光路的基准位置20;On the basis of the technical solution of Embodiment 1, as shown in Figure 4, the self-collimation detection optical path 16 is composed of a parallel light laser and a scale 17 perpendicular to the parallel light emitted by the parallel light laser. The first standard block When the side is aligned with the self-collimation positioning optical path, with the first scanning surface of the metal polygonal scanning prism as a reference, adjust the planar laser so that the reflected light reflected by the first scanning surface coincides with the incident light, and record the reflected light on the scale The reading on the reading, the position at the reading is the reference position 20 of the autocollimation detection optical path;

步骤6)中,转动所述电控转台,将标准块的第n个侧面对准所述自准直定位光路,在金属多面扫描棱镜镜胚上车削出第n个扫描面;此时记录第n个扫描面的反射光在标尺上的第n位置21,第n个扫描面的反射光在标尺上的第n位置与步骤5)中所述基准位置重合,则金属多面扫描棱镜的第一扫描面与第n扫描面的角度等于标准块的第一个侧面与第n个侧面的角度。In step 6), turn the electric control turntable, align the nth side of the standard block with the self-collimation positioning optical path, and turn the nth scanning surface on the metal multi-faceted scanning prism blank; record the nth side at this time The reflected light of n scanning surfaces is on the nth position 21 on the scale, and the nth position on the scale of the reflected light of the n scanning surfaces coincides with the reference position described in step 5), then the first metal polygonal scanning prism The angle between the scanning surface and the nth scanning surface is equal to the angle between the first side and the nth side of the standard block.

若加工得到的第n个扫描面与第n个扫描面的理论位置22不重合时,金属多面扫描棱镜的第n个扫描面的反射光19在标尺上的第n位置与步骤5)中所述基准位置不重合,测出第n位置其与基准位置之间的偏离量h,测量标尺与第n个扫描面之间的距离L,第n个扫描面的反射光19与入射光18之间的角度β=arcsin(h/L),金属多面扫描棱镜的第n个扫描面与第一扫描面之间的角度偏差为β/2。If the nth scanning surface obtained by processing does not coincide with the theoretical position 22 of the nth scanning surface, the reflected light 19 of the nth scanning surface of the metal polygonal scanning prism is on the nth position on the scale and step 5) in The reference position does not coincide, measure the deviation h between the nth position and the reference position, measure the distance L between the scale and the nth scanning surface, and measure the distance L between the reflected light 19 and the incident light 18 of the nth scanning surface. The angle between β=arcsin(h/L), the angle deviation between the nth scanning surface and the first scanning surface of the metal polygonal scanning prism is β/2.

上述技术的方案的原理为,通过自准直定位光路与标准块精确控制转轴的转角,由于待加工金属多面扫描棱镜镜胚与标准块装夹在同一根转轴上,同时以加工好的金属多面扫描棱镜第一扫描面为基准装调自准直检测光路,转动转轴,只要自准直定位光路与标准块上第n个侧面实现自准直,则自准直检测光路与第一扫描面的第n个扫描面也应该实现自准直,此时可以说明金属多面扫描棱镜上精确的复制了标准块各个侧面的角度精度。本技术方案的使用可以不依赖于高精度数控转轴,在两轴机床上即可完成金属多面扫描棱镜加工,解决了现有技术中多次装夹的引入的定位误差影响角各个扫描面角度精度的问题,大幅提高加工效率、加工精度及加工一致性。The principle of the above technical solution is to precisely control the rotation angle of the rotating shaft through the self-collimation positioning optical path and the standard block. Since the metal multi-faceted scanning prism blank and the standard block are clamped on the same rotating shaft, at the same time, the processed metal multi-faceted The first scanning surface of the scanning prism is used as a reference to adjust the self-collimation detection optical path. When the rotating shaft is rotated, as long as the self-collimation positioning optical path and the nth side of the standard block realize self-collimation, the distance between the self-collimation detection optical path and the first scanning surface The n-th scanning surface should also achieve self-collimation. At this time, it can be explained that the angular accuracy of each side of the standard block is accurately copied on the metal multi-faceted scanning prism. The use of this technical solution does not depend on the high-precision CNC rotating shaft, and the metal multi-faceted scanning prism can be processed on a two-axis machine tool, which solves the problem of positioning errors introduced by multiple clamping in the prior art that affect the angular accuracy of each scanning surface. problems, greatly improving processing efficiency, processing accuracy and processing consistency.

该技术方案不但适用于多面扫描棱镜,还可适用于多面异形棱镜,例如棱镜的侧面为球面或者非球面,为了精确控制该多面异形棱镜各个面的光轴方向,也可以先加工各个面为平面的光轴角度与多面异形棱镜光轴角度相同的标准块,将标准块的光轴角度通过本技术方案复制到多面异形棱镜上。This technical solution is not only applicable to multi-faceted scanning prisms, but also applicable to multi-faceted special-shaped prisms. For example, the sides of the prisms are spherical or aspherical. The optical axis angle of the standard block is the same as that of the multi-faceted special-shaped prism, and the optical axis angle of the standard block is copied to the multi-faceted special-shaped prism through the technical solution.

本技术方案未详细说明部分属于本领域技术人员公知技术。Parts not described in detail in this technical solution belong to the well-known technology of those skilled in the art.

Claims (10)

1. a kind of metal multiaspect scan prism processing method of achievable on-line checking, comprises the following steps:
1) processing criterion block step:One piece of precision of processing is better than the multifaceted prism conduct of the design parameter of metal multiaspect scan prism The scanning plane number of the metal multiaspect scan prism is denoted as N by calibrated bolck, and the side number on calibrated bolck is also N;
2) calibrated bolck is fixed in the shaft of automatically controlled turntable, wherein on the calibrated bolck arbitrary side normal side To vertical with the shaft of automatically controlled turntable;
3) by metal multiaspect scan prism mirror embryo to be processed also clamping in the shaft of the automatically controlled turntable, wherein metal multiaspect Scan prism mirror embryo cross section normal direction is parallel with the shaft of automatically controlled turntable;
4) auto-collimation positioning light path is built on lathe, and automatically controlled turntable is mounted on platen, is rotated described automatically controlled By first side alignment auto-collimation positioning light path of the calibrated bolck, the automatically controlled turntable is fixed with lockable mechanism for turntable Shaft;It gets on the bus in the metal multiaspect scan prism mirror embryo and cuts out the first scanning plane;
5) auto-collimation light path is built on lathe, when first side of calibrated bolck is directed at the auto-collimation positioning light path, On the basis of the first scanning plane of metal multiaspect scan prism, adjustment auto-collimation light path makes by the anti-of the first scanning plane reflection It penetrates light and incident light overlaps;
6) the automatically controlled turntable is rotated, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, is swept in metal multiaspect It retouches prism mirror embryo and gets on the bus and cut out n-th of scanning plane;When n-th of side of calibrated bolck is directed at the auto-collimation positioning light path, if institute It is misaligned to state incident light and the reflected light reflected by n-th of the surface sweeping of metal multiaspect scan prism of auto-collimation light path, by n-th The reflected light and incident light angle error of a scanning plane feed back to lathe and carry out error compensation processing, and n-th is scanned again Facing;If the incident light of auto-collimation light path is overlapped with the reflected light reflected by n-th of surface sweeping, the first scanning plane and n-th The angle of scanning plane meets the requirements;Wherein n is successively increased from 2 to N.
2. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 1, it is characterised in that: The calibrated bolck is glass multifaceted prism of the precision better than the design parameter of metal multiaspect scan prism.
3. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 2, it is characterised in that: The glass multifaceted prism is processed using conventional Cold-forming process.
4. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 1, it is characterised in that: Through hole is set on calibrated bolck, and the mode coaxial with the shaft of automatically controlled turntable of the through hole on the calibrated bolck assembles fixation.
5. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 4, it is characterised in that: Through hole is also provided on the metal multiaspect scan prism mirror base to be processed, and penetrates the shaft of automatically controlled turntable.
6. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of Claims 1 to 5, special Sign is:The auto-collimation positioning light path is auto-collimation collimator.
7. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of Claims 1 to 5, special Sign is:The parallel light laser of described auto-collimation positioning optical routing, beam expanding lens, plane mirror, are formed as screen spectroscope, The directional light that wherein parallel light laser projects is incident to spectroscope after expanding, and the light of dichroic mirror is used as with reference to light quilt It is incident to after being disposed vertically the reflection of the plane mirror in light path as screen, the light of spectroscope transmission is incident to institute as detection light State any one side of calibrated bolck;The automatically controlled turntable is rotated, detection light, to as shielding, is formed by the offside reflection on as screen Interference fringe.
8. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of claim 1-5, special Sign is:
Auto-collimation light path described in step 5) is by parallel light laser, the directional light sent with the parallel light laser Vertical scale composition, when first side of calibrated bolck is directed at the auto-collimation positioning light path, is scanned with the metal multiaspect On the basis of first scanning plane of prism, adjustment zero diopter laser makes to be overlapped by the reflected light of the first scanning plane reflection and incident light, Record reading of the reflected light on scale, the position at the reading is the reference position of auto-collimation light path;
In step 6), the automatically controlled turntable is rotated, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, in gold Category multiaspect scan prism mirror embryo, which is got on the bus, cuts out n-th of scanning plane;Of the reflected light of n-th of scanning plane on scale is recorded at this time N positions, the n-th position of the reflected light of n-th of scanning plane on scale are overlapped with reference position described in step 5), then metal is more First scanning plane of Surface scan prism and the angle of the n-th scanning plane are equal to the angle of first side and n-th of side of calibrated bolck Degree.
9. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 8, it is characterised in that: N-th position of the reflected light of n-th of scanning plane of metal multiaspect scan prism on scale and reference position described in step 5) When misaligned, its bias h between reference position of the n-th position is measured, the distance between surveyors' staff and n-th scanning plane L, angle beta=arcsin (h/L) between the reflected light and incident light of n-th scanning plane, n-th of metal multiaspect scan prism Angular deviation between scanning plane and the first scanning plane is β/2.
10. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of Claims 1 to 5, It is characterized in that:
The shaft of automatically controlled turntable described in the step 2) is connected by linkage mechanism with several driven spindles, each from On turn axis all can at least one metal multiaspect scan prism mirror embryo of clamping, when automatically controlled turntable shaft rotation when, it is described from Turn axis also rotates equal angular;
Simultaneously by multiple metal multiaspect scan prism mirror embryo clampings to be processed on the driven spindle in the step 3);
The step 4) builds auto-collimation positioning light path on lathe, and automatically controlled turntable is mounted on platen, rotates By first side alignment auto-collimation positioning light path of the calibrated bolck, the electricity is fixed with lockable mechanism for the automatically controlled turntable Control the shaft of turntable;It gets on the bus in the metal multiaspect scan prism mirror embryo to be processed of institute's clamping and cuts out the first scanning plane.
CN201711320966.3A 2017-12-12 2017-12-12 A method for processing metal multi-faceted scanning prisms that can realize on-line detection Expired - Fee Related CN108044130B (en)

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CN113985420A (en) * 2021-12-28 2022-01-28 四川吉埃智能科技有限公司 Method for compensating scanning light path error of laser radar inclined by 45 degrees
CN114971508A (en) * 2021-11-17 2022-08-30 图达通智能科技(苏州)有限公司 Prism manufacturing method, system, computer device and computer readable storage medium

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CN114971508A (en) * 2021-11-17 2022-08-30 图达通智能科技(苏州)有限公司 Prism manufacturing method, system, computer device and computer readable storage medium
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