CN108008334A - A kind of faint electric charge calibration method - Google Patents

A kind of faint electric charge calibration method Download PDF

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Publication number
CN108008334A
CN108008334A CN201711469431.2A CN201711469431A CN108008334A CN 108008334 A CN108008334 A CN 108008334A CN 201711469431 A CN201711469431 A CN 201711469431A CN 108008334 A CN108008334 A CN 108008334A
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China
Prior art keywords
electric charge
calibration
collection
actual
output voltage
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CN201711469431.2A
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Chinese (zh)
Inventor
吴金杰
康佳佳
王培玮
刘莹
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中国计量科学研究院
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Priority to CN201711469431.2A priority Critical patent/CN108008334A/en
Publication of CN108008334A publication Critical patent/CN108008334A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the preceding groups
    • G01R35/005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Abstract

The present embodiments relate to a kind of faint electric charge calibration method, method includes:A, digital sourcemeter, standard capacitor, resistor and electrometer are electrically connected successively, and standard capacitor and resistor is positioned in drying box;B, output voltage signal is exported by digital sourcemeter;C, output voltage signal carries out blocking stream process by standard capacitor and resistor;D, the electric charge in the electric signal after electrometer collection blocking stream process, obtains the collection quantity of electric charge;E, the actual quantity of electric charge is calculated according to the magnitude of voltage of the capacitance of standard capacitor and output voltage signal;F, the output voltage of digital sourcemeter is changed, repeat the above steps B to step E, obtains corresponding to multigroup collection quantity of electric charge of different output voltages and the actual quantity of electric charge;G, calibration factor is calculated according to multigroup collection quantity of electric charge and the actual quantity of electric charge.The present invention calibrates the electric charge shelves of low current instrument, eliminates electric leakage, instrument makes moist etc. the influence of factor.

Description

A kind of faint electric charge calibration method

Technical field

The present invention relates to measurement collimation technique field, more particularly to a kind of faint electric charge calibration method.

Background technology

With the continuous improvement of science and technology, high sensitivity, the accurate weak current measuring instrument of high resolution are extensive Applied to space flight measurement and control, semiconductor integrate, the various fields such as nuclear radiation observing and controlling, but its signal amplitude is extremely low, and the external world is easily to it Interference is formed, so the low current instrument for calibrating this magnitude has very big difficulty, meanwhile, measurement to instrument electric charge shelves also one It is directly a technical barrier, therefore, both at home and abroad to reaching nA (10-9A)、pA(10-12) or even fA (10 A-15A) the weak current of magnitude The measurement calibration requirements of electric charge are further urgent.At present, many associated mechanisms units in China have paid many effort for this, but due to The instruments such as common novel electrostatic meter are highly prone to many-sided extraneous factor such as electric leakage, null offset, humidity and bias current Influence, calibrated it is difficult to which electric charge shelves are carried out with directly measurement.

In addition, domestic also non-someone at present carried out the electric charge shelves of measuring instrument calibration experiments, it is external most of at present Generally in the winter of low humidity, and during the summer of high humility, calibration factor is not reproducible for the calibration of electric charge shelves, and changes model Enclose for 20% or so, the reason for it is maximum is exactly that the make moist electric leakage of initiation of the devices such as capacitance causes the uncertain of experimental result to be spent Height, seriously limits the use of calibration system.Therefore, it is necessary to a kind of measurement calibration method that can overcome the above problem.

The content of the invention

In order to solve the problems in the prior art, the purpose of the present invention is to, there is provided one kind can exclude electric leakage, instrument makes moist The faint electric charge calibration method that aspect factor influences.

To achieve the above object, the present invention provides a kind of faint electric charge calibration method, the calibration method to include:

Step A, digital sourcemeter, standard capacitor, resistor and electrometer are electrically connected successively, and by the standard electric Container and the resistor are positioned in drying box;

Step B, output voltage signal is exported by the digital sourcemeter, the magnitude of voltage of the output voltage signal is V;

Step C, described output voltage signal carries out blocking stream process by the standard capacitor and the resistor;

Step D, the electric charge in the electric signal after the electrometer collection blocking stream process, obtains the collection quantity of electric charge Q1

Step E, it is calculated according to the magnitude of voltage V of the capacitance C of the standard capacitor and the output voltage signal Actual quantity of electric charge Q;

Step F, the output voltage of the digital sourcemeter is changed, repeat the above steps B to step E, obtains corresponding different defeated Go out multigroup collection quantity of electric charge of voltage and the actual quantity of electric charge;

Step G, calibration factor is calculated according to multigroup collection quantity of electric charge and the actual quantity of electric charge.

Preferably, it is described to be calculated according to the capacitance C of the standard capacitor and the magnitude of voltage V of the output voltage signal Obtaining actual quantity of electric charge Q is specially:Q=C × V.

Preferably, it is described digital sourcemeter, standard capacitor, resistor and electrometer are electrically connected successively before, institute Calibration method is stated to further include:

The voltage gear of the digital sourcemeter is calibrated.

Preferably, before the step B, the calibration method further includes:

Processing is dried in the digital sourcemeter.

Preferably, before the step B, the calibration method further includes:

The output voltage of the digital sourcemeter is set as 0V;

The reading of the electrometer is obtained, obtains the error charge value Q of digital sourcemeter2

It is further preferred that the step D is specifically included:

The electric charge in electric signal after the electrometer collection filtering process, measures output charge amount Q3

According to the error charge value Q2With the output charge amount Q3The collection quantity of electric charge Q is calculated1;It is described to adopt Collect quantity of electric charge Q1For:Q1=Q3-Q2

Preferably, the step G is specifically included:

Multigroup collection quantity of electric charge and the actual quantity of electric charge are handled with least square method, obtain the collection electric charge The linear relationship of amount and the actual quantity of electric charge;

According to the linear relationship of the collection quantity of electric charge and the actual quantity of electric charge, the calibration factor is obtained.

Preferably, before the step C, the method further includes:

Processing is filtered to the output voltage signal.

Preferably, the high-voltage digital source table that the digital sourcemeter is detected using the contact of keithley 2410-C types band.

Preferably, the model 6517B of the electrometer.

Faint electric charge calibration method provided in an embodiment of the present invention, using indirect measurement calibration method, to low current instrument The electric charge shelves of device are calibrated, and simplify the electronic component in circuit, and the instruments such as standard capacitor and resistor are placed in dry In dry case, electric leakage is eliminated, instrument makes moist etc. the influence of factor.

Brief description of the drawings

Fig. 1 is the flow diagram of faint electric charge calibration method provided in an embodiment of the present invention;

Fig. 2 is the structural frames of the faint electric charge calibration system provided in an embodiment of the present invention using faint electric charge calibration method Figure;

Fig. 3 is the linear of the collection quantity of electric charge and the actual quantity of electric charge of faint electric charge calibration method provided in an embodiment of the present invention Matched curve figure.

Embodiment

Below by drawings and examples, technical scheme is described in further detail.

The present embodiments relate to the faint electric charge calibration method of offer, using indirect measurement calibration method, to small electricity The electric charge shelves of stream instrument are calibrated, and simplify the electronic component in circuit, and the instruments such as standard capacitor and resistor are housed In in drying box, eliminate electric leakage, instrument makes moist etc. the influence of factor.

Fig. 1 is the flow diagram of faint electric charge calibration method provided in an embodiment of the present invention.With reference to shown in Fig. 1:

Digital sourcemeter, standard capacitor, resistor and electrometer, be electrically connected by step 101 successively, and by standard capacitance Device and resistor are positioned in drying box.

Specifically, first the voltage gear of digital sourcemeter is calibrated, afterwards by the digital sourcemeter and standard capacitance after calibration Device, resistor, electrometer are connected with each other successively, and standard capacitor therein and resistor are placed in drying box, are done Dry processing.

During one specific, digital sourcemeter contacts the high-voltage digital of detection using keithley 2410-C types band Source table, the model 6517B of electrometer, capacitor selection standard capacitor.It is each in connection to ensure the accuracy of experimental data Before a device, first the voltage gear of digital sourcemeter is calibrated, then again by the digital sourcemeter after calibration successively with standard electric Container, resistor, electrometer are electrically connected, meanwhile, the moisture-sensitive electric leakage protected from environmental of the device such as capacitance is, it is necessary to carry out it Drying process, therefore standard capacitor, resistor are placed into drying box, it is dried in processing by drying box, simply It is convenient, it is highly practical.

Step 102, by digital sourcemeter export output voltage signal.

Specifically, processing is dried in digital sourcemeter before use, digital sourcemeter is then turned on, electricity is exported by digital sourcemeter Signal is pressed, the voltage signal of this output is denoted as output voltage signal.

During specific at one, to exclude electric leakage, instrument make moist etc. the influence of factor, except needing to standard Capacitor, resistor are dried outside processing, it is also necessary to digital sourcemeter is dried processing, can be by digital sourcemeter together It is positioned in drying box, is placed back into again after in use, digital sourcemeter to be taken out to use from drying box again, having used, Independent drying process can also be carried out to digital sourcemeter.After digital source table drying process, digital sourcemeter is opened, then basis It is required that setting a magnitude of voltage, and the output voltage signal of the magnitude of voltage is exported by digital sourcemeter.

Step 103, output voltage signal carry out blocking stream process by standard capacitor and resistor.

Specifically, before output voltage signal carries out blocking stream process by standard capacitor and resistor, to output Voltage signal is filtered processing, and the output voltage signal after filtered processing passes sequentially through standard capacitor and resistance Device, standard capacitor and resistor composition First-order Rc Circuit, blocking stream process is carried out to voltage signal.

During one specific, standard capacitor is used for obstructing direct current, resistance by exchange in electronic circuit Voltage protection component when device is overloaded as input on the one hand, is on the other hand combined composition RC circuits with standard capacitor, right Voltage signal carries out stopping direct current, adjusts burning voltage.The output voltage signal of digital sourcemeter output is filtered by wave filter Processing, filters out the electric signal of doping, then by standard capacitor and resistor carry out it is logical exchange blocking stream process, formed surely Fixed voltage signal.

The electric charge in electric signal after step 104, electrometer collection blocking stream process, obtains the collection quantity of electric charge.

Specifically, before step 102, the output voltage of digital sourcemeter is set as 0V, the reading of electrometer is obtained, obtains To the error charge value Q of digital sourcemeter2

After filtered blocking processing, stable voltage signal gathers the electric charge in electric signal by electrometer, electrometer, from And measure simultaneously display output quantity of electric charge Q3.Then according to error charge value Q2With output charge amount Q3The collection quantity of electric charge is calculated Q1, collection quantity of electric charge Q1For:Q1=Q3-Q2

During one specific, since when connecting circuit, digital sourcemeter in itself has necessarily the magnitude of voltage of offer Error, therefore, processing gather charge data when, should remove it.When opening electrometer, the output voltage setting of electrometer For 0V, the electric charge shelves of electrometer have certain reading, are denoted as the error charge value Q of digital sourcemeter2.Then non-zero electricity is set Pressure value, is exported by digital sourcemeter, and by the electric charge in the electric signal after electrometer collection at this time filtered blocking processing, is gone forward side by side Row measurement display, is denoted as output charge amount Q3, by output charge amount Q3Subtract error charge value Q2So as to obtain revised collection Quantity of electric charge Q1

Step 105, according to the capacitance of standard capacitor and the magnitude of voltage of output voltage signal be calculated actual electric charge Amount.

Specifically, actual electric charge is calculated according to the magnitude of voltage V of the capacitance C of standard capacitor and output voltage signal Measuring Q is specially:

Q=C × V (1)

During one specific, pass through magnitude of voltage and the used standard capacitor of digital sourcemeter reality output The actual quantity of electric charge of reality output is calculated in capacitance.

Step 106, change digital sourcemeter output voltage, obtain correspond to different output voltages multigroup collection quantity of electric charge and The actual quantity of electric charge.

Specifically, the magnitude of voltage that setting is different, and exported by digital sourcemeter, repeat step 102 to step 105, passes through Electrometer obtains multiple collection quantities of electric charge of different output voltages, and by the magnitude of voltage of digital sourcemeter reality output with being used The capacitance of standard capacitor multiple actual quantities of electric charge of different output voltages are calculated, and recorded, so as to obtain Multigroup collection quantity of electric charge and the actual quantity of electric charge.

During one specific, to ensure the reliability of experimental result with accuracy, it is necessary to measure multigroup numerical value.Therefore By varying the output voltage of digital sourcemeter, electrometer measures different output charge amounts, and subtracts error by output charge amount Electric charge is worth to multiple collection quantities of electric charge, meanwhile, it is calculated by the magnitude of voltage of output and the capacitance of standard capacitor more A actual quantity of electric charge, and record the corresponding collection quantity of electric charge of different output voltages and the actual quantity of electric charge.

Step 107, according to it is multigroup collection the quantity of electric charge and the actual quantity of electric charge calibration factor is calculated.

Specifically, multigroup collection quantity of electric charge and the actual quantity of electric charge are handled with least square method, collection electric charge is obtained The linear relationship of amount and the actual quantity of electric charge;According to the linear relationship of the collection quantity of electric charge and the actual quantity of electric charge, calibration factor is obtained.

During one specific, it is actual electric charge that multigroup collection quantity of electric charge and the actual quantity of electric charge are plotted in abscissa Amount, ordinate for collection the quantity of electric charge coordinate system in, be depicted as abscissa be the actual quantity of electric charge, ordinate be collection the quantity of electric charge Matched curve, as shown in figure 3, obtaining the linear relationship of the collection quantity of electric charge and the actual quantity of electric charge, linear gradient by matched curve That is calibration factor.

Faint electric charge calibration method provided in an embodiment of the present invention can be applied to faint electric charge calibration system, as shown in Figure 2. With reference to Fig. 2, to being introduced using the faint electric charge calibration system of faint electric charge calibration method.

Digital sourcemeter 1 is mainly that faint electric charge calibration system provides the stable known and voltage by calibrating.Filtering The filter circuit that device 2 is made of capacitance, inductance and resistance, can to the frequency point of specific frequency in voltage signal or the frequency point with Outer frequency is effectively filtered out, so as to obtain the voltage after one specific frequency of voltage signal or elimination of a specific frequency Signal.Standard capacitor 3 mainly improves system voltage from the angle of compensating reactance, to reduce electric energy loss, improves the steady of system It is qualitative, completely cut off direct current.Voltage protection component when resistor 4 is overloaded as input, adjusts burning voltage.Electrometer 5 gathers electricity Electric charge in road, alignment unit (not shown) determines calibration factor using experimental data, and carries out electric charge shelves to electrometer Calibration.Processing is dried to the pertinent instruments in system in drying box (not shown), avoids instrument due to electric leakage of making moist And influence measurement calibration result.

Wherein, digital sourcemeter 1 is electrically connected successively with wave filter 2, standard capacitor 3, resistor 4, electrometer 5, filtering Device 2, standard capacitor 3, resistor 4 are positioned in drying box, and processing is dried, and alignment unit is defeated according to digital sourcemeter 1 The capacitance for going out voltage signal and standard capacitor 3 determines the actual quantity of electric charge, is determined according to the actual quantity of electric charge and output charge amount Calibration factor, further according to the electric charge shelves of calibration factor calibration electrometer 5.

Above is be described to the flow of faint electric charge calibration method provided in this embodiment, with reference to Fig. 1 and Fig. 3, is described in detail the operation principle of faint electric charge calibration method.

The voltage gear of digital sourcemeter is calibrated, then by the digital sourcemeter after calibration and wave filter, standard capacitance Device, resistor, electrometer are electrically connected successively, in the environment of high humility, it is necessary to by wave filter, standard capacitor and resistor It is placed into drying box, reduces instrument as far as possible and the external interference such as make moist.When carrying out experimental data measurement, digital source is opened Table, the output valve of digital sourcemeter voltage is 0V, and the electric charge shelves of electrometer show reading, and reading at this time is denoted as error charge value simultaneously Recorded.Then multiple magnitudes of voltage are provided successively with digital sourcemeter, multiple output charge amounts are exported by electrometer, utilize output The quantity of electric charge subtracts error electric charge and is worth to the collection quantity of electric charge, and the electricity exported according to the capacitance and digital sourcemeter of standard capacitor The actual quantity of electric charge is calculated in pressure value.

In the present embodiment, the high-voltage digital source table that digital sourcemeter is detected using the contact of keithley 2410-C types band, according to The voltage of 1~15V of secondary offer, standard capacitor select the standard capacitance that capacitance is 1000pF, and calibration model 6517B's is quiet The electric charge shelves of electricity meter.

According to above-mentioned faint electric charge calibration method, experimental data measurement is carried out, experiment accordingly is obtained and surveys data, it is as follows Shown in table 1.

Table 1 tests measured data

Since the device count connected in circuit is more, the probability of electric leakage is just bigger, to avoid leaking electricity as far as possible, ensures experiment number According to accuracy, therefore, the wave filter in experimental circuit is removed, the electric charge shelves of electrometer are carried out again according to the above method Measurement calibration, and experimental data during by obtained data with there is wave filter is contrasted, the two result is basically identical, can be with It was found that the presence or absence of wave filter, the influence to experimental result can be ignored substantially, illustrate the stable output signal of laboratory apparatus Reliably, therefore to reduce the probability of happening of electric leakage, experimental data during using without using wave filter.

When the output voltage setting of the high-voltage digital source table of keithley 2410-C types band contact detection is 0V, 6517B The reading of type electrometer electric charge shelves is 0.300nc, i.e., error charge value is 0.300nc, when processing gathers charge data, by it Remove, and by the data handled be depicted as with the function curve of the actual quantity of electric charge, as shown in Figure 3.

Wherein, the abscissa in Fig. 3 represents known measurement electric charge, i.e., the actual quantity of electric charge, and ordinate represents what is collected Electric charge, that is, gather the quantity of electric charge, the related coefficient of curve is 1.From matched curve as can be seen that the actual quantity of electric charge and the collection quantity of electric charge Into good linear relationship, linear gradient, that is, calibration factor is 0.99785.The repetitive operation under low-humidity environment is tested by more than One time, the two data is basically identical, therefore the calibration of electrometer electric charge shelves is from the influence of external environment humidity.

Further to prove the reliability of faint electric charge calibration method provided in an embodiment of the present invention, below to the experiment knot The uncertainty of fruit is evaluated and analyzed.

The A class relative standard uncertainties of experimental result can be obtained by bessel method, wherein, A class relative standards are not true To caused by the fluctuation of data statistics when fixed degree is due to multiple measurement.The standard uncertainty calculation formula of single measurement is:

I.e. A classes relative standard uncertainty is

Caused by type B standard uncertainty is the measure of precision of the resolving power as measuring instrument in itself, it can be demonstrate,proved by calibrating Book and principle formula obtain, its calculation formula is

Wherein, n is the various measurement factors in formula.Because each component of A and B class uncertainties is independent, therefore The relative standard uncertainty of synthesis is

In the present embodiment, only analyzed by taking small amount journey 1V as an example.2410-C type high-voltage digitals source table provides 1V electricity Pressure, and repeat 10 measurements respectively, repeated measurement data is as shown in table 2 below.

2 repeated measurement data of table

It can show that standard deviation is 6 × 10 by the calculating to experimental data-6, it is not true that A class relative standards are obtained indirectly Fixed degree is 6 × 10-6(k=1).

The uncertainty of voltage gear on the table calibration certificate of 2410-C type high-voltage digitals source, as shown in table 3

3 2410-C output voltage uncertainty calibration certificates of table

Uncertainty on 1000pF standard capacitance calibration certificates, as shown in table 4.

4 standard capacitance uncertainty calibration certificate of table

Understand that testing the B class uncertainties of measurement is according to formula (1) and (4):

It can be obtained by formula (5), the synthesis relative standard uncertainty for testing measurement is 3.06 × 10-5(k=1).For it The analysis on Uncertainty of its electric charge shelves measurement result is same as above.

Pass through the uncertain of the research calibrated under low two kinds of environment of high humility to faint ionization electric charge and the experimental system Degree evaluation and analysis, are taken using instruments such as the standard capacitances of 2410-C type high-voltage digitals source table, 6517B types electrometer and 1000pF The electric charge calibration system built is scientific and reasonable, and relative standard uncertainty is relatively low, and thus provable this method can service well The work such as calibration, calibrating in various small current measurement instrument electric charge shelves, solve the problem of charge measurement calibration etc., and It and calibration system is placed in drying box, annual can measure, measurement result will not be influenced because of humidity, greatly facilitate actual answer With.

Faint electric charge calibration method provided in an embodiment of the present invention, using indirect measurement calibration method, to low current instrument The electric charge shelves of device are calibrated, and simplify the electronic component in circuit, and the instruments such as standard capacitor and resistor are placed in dry In dry case, electric leakage is eliminated, instrument makes moist etc. the influence of factor, in low two kinds of environment of high humility, the calibration method phase It is relatively low for calibration method uncertainty of the prior art, it can be widely applied for various small current measurement instrument electric charge shelves The work such as calibration, calibrating, solve the problem of charge measurement calibration etc., and will not be surveyed because the humidity of environment influences experiment Amount and its measurement result, it is highly practical.

Above-described embodiment, has carried out the purpose of the present invention, technical solution and beneficial effect further Describe in detail, it should be understood that the foregoing is merely the embodiment of the present invention, be not intended to limit the present invention Protection domain, within the spirit and principles of the invention, any modification, equivalent substitution, improvement and etc. done, should all include Within protection scope of the present invention.

Claims (10)

1. a kind of faint electric charge calibration method, it is characterised in that the calibration method includes:
Step A, digital sourcemeter, standard capacitor, resistor and electrometer are electrically connected successively, and by the standard capacitor It is positioned over the resistor in drying box;
Step B, output voltage signal is exported by the digital sourcemeter, the magnitude of voltage of the output voltage signal is V;
Step C, described output voltage signal carries out blocking stream process by the standard capacitor and the resistor;
Step D, the electric charge in the electric signal after the electrometer collection blocking stream process, obtains collection quantity of electric charge Q1
Step E, reality is calculated according to the magnitude of voltage V of the capacitance C of the standard capacitor and the output voltage signal Quantity of electric charge Q;
Step F, the output voltage of the digital sourcemeter is changed, repeat the above steps B to step E, obtains corresponding different output electricity The multigroup collection quantity of electric charge and the actual quantity of electric charge of pressure;
Step G, calibration factor is calculated according to multigroup collection quantity of electric charge and the actual quantity of electric charge.
2. faint electric charge calibration method according to claim 1, it is characterised in that described according to the standard capacitor Actual quantity of electric charge Q is calculated in the magnitude of voltage V of capacitance C and the output voltage signal:Q=C × V.
3. faint electric charge calibration method according to claim 1, it is characterised in that described by digital sourcemeter, standard electric Before container, resistor and electrometer are electrically connected successively, the calibration method further includes:
The voltage gear of the digital sourcemeter is calibrated.
4. faint electric charge calibration method according to claim 1, it is characterised in that before the step B, the calibration Method further includes:
Processing is dried in the digital sourcemeter.
5. faint electric charge calibration method according to claim 1, it is characterised in that before the step B, the calibration Method further includes:
The output voltage of the digital sourcemeter is set as 0V;
The reading of the electrometer is obtained, obtains the error charge value Q of digital sourcemeter2
6. faint electric charge calibration method according to claim 5, it is characterised in that the step D is specifically included:
The electric charge in electric signal after the electrometer collection filtering process, measures output charge amount Q3
According to the error charge value Q2With the output charge amount Q3The collection quantity of electric charge Q is calculated1;The collection electricity Lotus amount Q1For:Q1=Q3-Q2
7. faint electric charge calibration method according to claim 1, it is characterised in that the step G is specifically included:
By it is described it is multigroup collection the quantity of electric charge and the actual quantity of electric charge handled with least square method, obtain it is described collection the quantity of electric charge with The linear relationship of the actual quantity of electric charge;
According to the linear relationship of the collection quantity of electric charge and the actual quantity of electric charge, the calibration factor is obtained.
8. faint electric charge calibration method according to claim 1, it is characterised in that before the step C, the method Further include:
Processing is filtered to the output voltage signal.
9. faint electric charge calibration method according to claim 1, it is characterised in that the digital sourcemeter uses keithley The high-voltage digital source table of 2410-C types band contact detection.
10. faint electric charge calibration method according to claim 1, it is characterised in that the model of the electrometer 6517B。
CN201711469431.2A 2017-12-29 2017-12-29 A kind of faint electric charge calibration method CN108008334A (en)

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Citations (3)

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Publication number Priority date Publication date Assignee Title
CN101551420A (en) * 2009-05-08 2009-10-07 北京航空航天大学 A weak capacitive detection circuit of MEMS device
CN101702012A (en) * 2009-11-24 2010-05-05 中国西电电气股份有限公司 Apparent charge calibrator for local discharge capacity measurement
CN103178708A (en) * 2013-02-06 2013-06-26 北京东方计量测试研究所 Static charge source and method for calibrating same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101551420A (en) * 2009-05-08 2009-10-07 北京航空航天大学 A weak capacitive detection circuit of MEMS device
CN101702012A (en) * 2009-11-24 2010-05-05 中国西电电气股份有限公司 Apparent charge calibrator for local discharge capacity measurement
CN103178708A (en) * 2013-02-06 2013-06-26 北京东方计量测试研究所 Static charge source and method for calibrating same

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Title
康佳佳等: "微弱电离电荷校准系统构建", 《核电子学与探测技术》 *

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