CN107923736B - 三维测量装置 - Google Patents
三维测量装置 Download PDFInfo
- Publication number
- CN107923736B CN107923736B CN201680046181.9A CN201680046181A CN107923736B CN 107923736 B CN107923736 B CN 107923736B CN 201680046181 A CN201680046181 A CN 201680046181A CN 107923736 B CN107923736 B CN 107923736B
- Authority
- CN
- China
- Prior art keywords
- light
- image data
- light intensity
- grating
- intensity distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 claims abstract description 105
- 238000005259 measurement Methods 0.000 claims abstract description 52
- 238000012545 processing Methods 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 230000010363 phase shift Effects 0.000 claims abstract description 17
- 238000009826 distribution Methods 0.000 claims description 97
- 230000008569 process Effects 0.000 claims description 87
- 238000003384 imaging method Methods 0.000 claims description 76
- 229910000679 solder Inorganic materials 0.000 claims description 25
- 238000012935 Averaging Methods 0.000 claims description 20
- 239000006071 cream Substances 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000007689 inspection Methods 0.000 abstract description 29
- 238000005286 illumination Methods 0.000 abstract description 14
- 238000004088 simulation Methods 0.000 description 32
- 230000003287 optical effect Effects 0.000 description 7
- 238000013500 data storage Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
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- 230000009471 action Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
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- 238000000844 transformation Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-231661 | 2015-11-27 | ||
JP2015231661A JP6062523B1 (ja) | 2015-11-27 | 2015-11-27 | 三次元計測装置 |
PCT/JP2016/070238 WO2017090268A1 (ja) | 2015-11-27 | 2016-07-08 | 三次元計測装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107923736A CN107923736A (zh) | 2018-04-17 |
CN107923736B true CN107923736B (zh) | 2020-01-24 |
Family
ID=57800032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201680046181.9A Active CN107923736B (zh) | 2015-11-27 | 2016-07-08 | 三维测量装置 |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP6062523B1 (es) |
CN (1) | CN107923736B (es) |
DE (1) | DE112016005425T5 (es) |
MX (1) | MX366402B (es) |
TW (1) | TWI610061B (es) |
WO (1) | WO2017090268A1 (es) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7371443B2 (ja) * | 2019-10-28 | 2023-10-31 | 株式会社デンソーウェーブ | 三次元計測装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007113958A (ja) * | 2005-10-18 | 2007-05-10 | Yamatake Corp | 3次元計測装置、3次元計測方法、及び3次元計測プログラム |
JP2013167464A (ja) * | 2012-02-14 | 2013-08-29 | Ckd Corp | 三次元計測装置 |
JP2015087244A (ja) * | 2013-10-30 | 2015-05-07 | キヤノン株式会社 | 画像処理装置、画像処理方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4701948B2 (ja) * | 2005-09-21 | 2011-06-15 | オムロン株式会社 | パタン光照射装置、3次元形状計測装置、及びパタン光照射方法 |
CN100561258C (zh) * | 2008-02-01 | 2009-11-18 | 黑龙江科技学院 | 一种三维测量系统中相移光栅 |
DE202010018585U1 (de) * | 2009-05-27 | 2017-11-28 | Koh Young Technology Inc. | Vorrichtung zur Messung einer dreidimensionalen Form |
JP2013124938A (ja) * | 2011-12-15 | 2013-06-24 | Ckd Corp | 三次元計測装置 |
-
2015
- 2015-11-27 JP JP2015231661A patent/JP6062523B1/ja active Active
-
2016
- 2016-05-31 TW TW105116968A patent/TWI610061B/zh active
- 2016-07-08 DE DE112016005425.4T patent/DE112016005425T5/de active Pending
- 2016-07-08 MX MX2018001490A patent/MX366402B/es active IP Right Grant
- 2016-07-08 WO PCT/JP2016/070238 patent/WO2017090268A1/ja active Application Filing
- 2016-07-08 CN CN201680046181.9A patent/CN107923736B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007113958A (ja) * | 2005-10-18 | 2007-05-10 | Yamatake Corp | 3次元計測装置、3次元計測方法、及び3次元計測プログラム |
JP2013167464A (ja) * | 2012-02-14 | 2013-08-29 | Ckd Corp | 三次元計測装置 |
JP2015087244A (ja) * | 2013-10-30 | 2015-05-07 | キヤノン株式会社 | 画像処理装置、画像処理方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2017096866A (ja) | 2017-06-01 |
WO2017090268A1 (ja) | 2017-06-01 |
MX2018001490A (es) | 2018-08-01 |
MX366402B (es) | 2019-07-08 |
CN107923736A (zh) | 2018-04-17 |
DE112016005425T5 (de) | 2018-08-16 |
TW201719112A (zh) | 2017-06-01 |
TWI610061B (zh) | 2018-01-01 |
JP6062523B1 (ja) | 2017-01-18 |
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