CN107919260A - The ultrafast electron microscope of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN - Google Patents
The ultrafast electron microscope of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN Download PDFInfo
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- CN107919260A CN107919260A CN201711168748.2A CN201711168748A CN107919260A CN 107919260 A CN107919260 A CN 107919260A CN 201711168748 A CN201711168748 A CN 201711168748A CN 107919260 A CN107919260 A CN 107919260A
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- electron gun
- thermionic cathode
- super
- klystron
- microwave
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/29—Reflection microscopes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
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- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
A kind of ultrafast electron microscope of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN, including high voltage pulse modulator, klystron, THERMIONIC CATHODE MICROWAVE ELECTRON GUN, energy selector, focusing image-forming system, pumped laser system and electronic detection system.The present invention possesses the time resolution and single-shot imaging capability of microsecond.
Description
Technical field
The present invention relates to electron microscope, the particularly a kind of ultrafast electronic display of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN
Micro mirror.
Background technology
The electron source of electron microscope is usually high direct voltage electronics rifle, and the emission mechanism of electronics can be heat emission and field
Transmitting is caused, the Electronic Speculum of general below 200kV is referred to as low energy Electronic Speculum, energy Electronic Speculum, more than 500-1000kV during 200-500 kV are referred to as
As high energy Electronic Speculum, more than 1000kV is frequently referred to ultrahigh voltage electron microscope.
The construction of traditional Electronic Speculum generally comprises electron source, electronics is accelerated to high energy by direct-current high-voltage system, magnetic lenses is imaged
System, observation ward.Ultrahigh voltage electron microscope price is high, and scale and construction difficulty greatly (are needed many high direct voltage block coupled in series
Get up, and need to ensure that sparking and punch-through will not occur for electric field), only Japanese Hitachi and Japan Electronics Corporation at present
It can build, price is generally more than 15,000,000 dollars.As Osaka, Japan university 3000kV ultrahigh voltage electron microscopes, this Electronic Speculum are high by 13
Rice, weighs 130 tons.
Caltech in 2005 and U.S.'s Lao Lunsi livermore national laboratories propose the concept of ultrafast Electronic Speculum, itself and biography
The main distinction of system Electronic Speculum is to introduce two sets of laser systems, wherein a set of be used to be radiated on cathode by photoemission generation electricity
Son, another set of to be radiated on sample, using pumping-Detection Techniques, which can provide high time resolution.Caltech exists
2005 patented, and FEI Co. of the U.S. starts the such product of production and sales after the patent in 2015 is expired.
The content of the invention
It is an object of the invention to provide a kind of ultrafast electron microscope of the super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN, tool
The time resolution and single-shot imaging capability of standby microsecond.
The technical solution of the present invention is as follows：
A kind of ultrafast electron microscope of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN, its feature are to include high voltage pulse
Modulator, klystron, THERMIONIC CATHODE MICROWAVE ELECTRON GUN, energy selector, focusing image-forming system, pumped laser system and electron detection
System, the high voltage pulse modulator are connected by high-tension cable with the klystron, and the klystron passes through waveguide
It is connected with the THERMIONIC CATHODE MICROWAVE ELECTRON GUN, the THERMIONIC CATHODE MICROWAVE ELECTRON GUN is sequentially connected described by vacuum pipe
Energy selector is connected with the focusing image-forming system, the focusing image-forming system include set gradually beam-shrinked mirror, lead
Enter speculum, object lens, projection lens's solenoid magnet, sample to be tested is located in the object lens；Through the pumped laser system
The laser of output is irradiated on the sample to be tested by importing speculum, the electronic detection system, for gathering
Imaging of the electron beam stated to the sample.
The THERMIONIC CATHODE MICROWAVE ELECTRON GUN is the 1.5cell microwave cavities of a quality factor about 10000, passes through control
Phase shift between resonator processed, it is ensured that produce the electron beam that a magnitude lower than conventional 1.5cell microwave electron guns can dissipate.
Deflection magnet is equipped with the energy selector, slit is equipped with the middle part of the deflection magnet.
The pulse that the high voltage pulse modulator is used to the alternating current of 380V being converted into about 5 microsecond of 120kV pulsewidths is high
Pressure, and be connected by high-tension cable with klystron, drive klystron.
The klystron is used for the peak power that the signal of microwave source is amplified to 5MW, micro- with hot cathode by waveguide
Ripple electron gun connects, and drives THERMIONIC CATHODE MICROWAVE ELECTRON GUN.
Compared with prior art, beneficial effects of the present invention are as follows：
1) by accurately controlling the phase shift between resonator, a magnitude lower than conventional 1.5cell microwave electron guns is produced
The electron beam that can be dissipated；The microwave power of 5MW will form the accelerating field of about 50 MV/m in electron gun, and electronics goes out in electron gun
Mouth energy about 3MeV, electron gun are connected by vacuum pipe with energy selector；Final electron beam into picture by electron detection system
System collects (such as phosphorescent screen adds EMCCD).In addition, pumped laser system is relatively independent unit, by beam-shrinked mirror and object lens it
Between importing speculum imported on sample, sample is located in object lens.
2) energy selector used mainly includes a deflection magnet, and ten thousand can be dispersed in by slit selection among magnet
Electronics within/mono- is used to be imaged, and energy selector is connected by vacuum pipe with focusing image-forming system.
3) microwave electron gun is used, electronics can be accelerated into 3000kV in 15cm length, existing Electronic Speculum needs several meters.
4) power source of high energy is accelerated to as electronics using high voltage pulse modulator and klystron, existing Electronic Speculum is using straight
Flow high pressure.
5) time-resolved mode：The grand pulse temporal width of electron beam of the present invention is in musec order, it is only necessary to a set of irradiating sample
Laser, high time resolution ability can be obtained and be operated in ultrafast Electronic Speculum pattern；Existing ultrafast Electronic Speculum needs two sets of laser difference
Irradiating sample and cathode could obtain high time resolution ability.
6) cost (reducing at least 10 times) of ultrahigh voltage electron microscope is significantly reduced, and it is (multiple to be both operated in static schema
Integration obtains a secondary figure), it can also be operated in ultrafast pattern (after laser pump (ing) sample, electronics is detected).
Brief description of the drawings
Fig. 1 is the schematic diagram of the super-pressure ultrafast electron microscope of the invention based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN.
Fig. 2 is that the energy for the electron beam that the present invention exports dissipates.
In figure, 1- high voltage pulses modulator, 2- klystrons, 3- THERMIONIC CATHODE MICROWAVE ELECTRON GUNs, 4- energy selectors, 5- are focused on
Imaging system, 6- pumped laser systems, 7- electronic detection systems.
Embodiment
Below in conjunction with drawings and examples, the present invention is described in more detail.It should be noted that in following embodiments
The combination of the technical characteristic or technical characteristic of description is not construed as isolated, they can be mutually combined so as to reaching
To superior technique effect.
Please referring initially to Fig. 1, Fig. 1 is showing for the super-pressure ultrafast electron microscope of the invention based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN
It is intended to.As shown in the figure, a kind of ultrafast electron microscope of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN, including high voltage pulse modulation
Device 1, klystron 2, THERMIONIC CATHODE MICROWAVE ELECTRON GUN 3, energy selector 4, focusing image-forming system 5, pumped laser system 6 and electronics
Detection system 7, the high voltage pulse modulator 1 are connected by high-tension cable with the klystron 2, the klystron 2
Be connected by waveguide with the THERMIONIC CATHODE MICROWAVE ELECTRON GUN 3, the THERMIONIC CATHODE MICROWAVE ELECTRON GUN 3 by vacuum pipe successively
The connection energy selector 4 and the focusing image-forming system 5 connect, and the focusing image-forming system 5 includes setting successively
Beam-shrinked mirror, importing speculum, object lens, the projection lens's solenoid magnet put, sample to be tested are located in the object lens；Through described
The laser that pumped laser system 6 exports is irradiated on the sample to be tested by importing speculum, the electron detection system
System, for gathering imaging of the electron beam to the sample.
The present invention uses THERMIONIC CATHODE MICROWAVE ELECTRON GUN 3, using the sinusoidal microwave electric field changed over time by electronics about 15
Centimetre length in accelerate to 3000kV, power source includes high voltage pulse modulator and klystron.In traditional Electronic Speculum, electronics is
Always transmitting and no matter electronics when launching, it is seen that electric field be all identical；In the present invention, since electric field is being done
Sinusoidal vibration, therefore the energy that the electronics launched at different moments finally obtains is different, we utilize and are based on deflection magnet
Energy selector 4 select the electronics that can be dispersed within about a ten thousandth to be imaged to improve spatial resolution.Introduce at the same time
A set of laser system 6, with reference to pump probe technology, the present invention possesses the time resolution and single-shot imaging capability of microsecond.
By the way that the phase shift of resonator is adjusted to optimal, dissipated so that the energy of output electron beam is greatly reduced, referring to Fig. 2, wherein
For the output electron beam longitudinal phase space of conventional hot-cathode microwave electron gun, (electron beam can dissipate larger lower section line segment, can not meet
The requirement that Electronic Speculum imaging can dissipate electron beam), top line segment is to utilize the electron beam phase space of the electron gun acquisition of the present invention, electricity
Beamlet, which can dissipate, reduces 1 magnitude.
Claims (5)
1. the ultrafast electron microscope of a kind of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN, it is characterised in that including high voltage pulse tune
Device (1) processed, klystron (2), THERMIONIC CATHODE MICROWAVE ELECTRON GUN (3), energy selector (4), focusing image-forming system (5), pumping laser
System (6) and electronic detection system (7), the high voltage pulse modulator (1) pass through high-tension cable and the klystron (2)
Connection, the klystron (2) are connected by waveguide with the THERMIONIC CATHODE MICROWAVE ELECTRON GUN (3), the hot cathode microwave
Electron gun (3) is sequentially connected the energy selector (4) by vacuum pipe and the focusing image-forming system (5) connects,
The focusing image-forming system (5) includes beam-shrinked mirror, importing speculum, object lens, intermediate mirror and the projection lens's helical set gradually
Pipe magnet, sample to be tested are located in the object lens；Reflected through the laser that the pumped laser system (6) exports by importing
Mirror is irradiated on the sample to be tested, the electronic detection system, for gathering the electron beam to the sample
Imaging.
2. the ultrafast electron microscope of the super-pressure according to claim 1 based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN, its feature exist
In the THERMIONIC CATHODE MICROWAVE ELECTRON GUN (3) is the 1.5cell microwave cavities of a quality factor about 10000, passes through control
Phase shift between resonator, it is ensured that produce the electron beam that a magnitude lower than conventional 1.5cell microwave electron guns can dissipate.
3. the ultrafast electron microscope of the super-pressure according to claim 1 based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN, its feature exist
In the energy selector (4) is interior to be equipped with deflection magnet, and slit is equipped with the middle part of the deflection magnet.
4. according to any ultrafast electron microscopes of the super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN of claim 1-3, its
It is characterized in that, the high voltage pulse modulator (1) is used for the pulse that the alternating current of 380V is converted into about 5 microsecond of 120kV pulsewidths
High pressure, and be connected by high-tension cable with klystron, drive klystron.
5. according to any ultrafast electron microscopes of the super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN of claim 1-3, its
It is characterized in that, the klystron (2) is used for the peak power that the signal of microwave source is amplified to 5MW, passes through waveguide and Re Yin
Pole microwave electron gun connection, drives THERMIONIC CATHODE MICROWAVE ELECTRON GUN.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711168748.2A CN107919260B (en) | 2017-11-21 | 2017-11-21 | The ultrafast electron microscope of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711168748.2A CN107919260B (en) | 2017-11-21 | 2017-11-21 | The ultrafast electron microscope of super-pressure based on THERMIONIC CATHODE MICROWAVE ELECTRON GUN |
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| CN107919260A true CN107919260A (en) | 2018-04-17 |
| CN107919260B CN107919260B (en) | 2019-07-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114252653A (en) * | 2021-01-06 | 2022-03-29 | 中国科学院物理研究所 | Ultrafast imaging device and method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160005566A1 (en) * | 2014-06-20 | 2016-01-07 | California Institute Of Technology | Method and system for electron microscope with multiple cathodes |
| JP2016138801A (en) * | 2015-01-27 | 2016-08-04 | 国立大学法人東京工業大学 | Time-resolved photoemission electron microscope device |
| CN106645236A (en) * | 2016-10-20 | 2017-05-10 | 中国科学院物理研究所 | Ultra-fast transmission electron microscope system and use method thereof |
| CN107275177A (en) * | 2017-06-12 | 2017-10-20 | 北京理工大学 | Detachable electric field arrangement for electronic streak electron microscope |
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2017
- 2017-11-21 CN CN201711168748.2A patent/CN107919260B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160005566A1 (en) * | 2014-06-20 | 2016-01-07 | California Institute Of Technology | Method and system for electron microscope with multiple cathodes |
| JP2016138801A (en) * | 2015-01-27 | 2016-08-04 | 国立大学法人東京工業大学 | Time-resolved photoemission electron microscope device |
| CN106645236A (en) * | 2016-10-20 | 2017-05-10 | 中国科学院物理研究所 | Ultra-fast transmission electron microscope system and use method thereof |
| CN107275177A (en) * | 2017-06-12 | 2017-10-20 | 北京理工大学 | Detachable electric field arrangement for electronic streak electron microscope |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114252653A (en) * | 2021-01-06 | 2022-03-29 | 中国科学院物理研究所 | Ultrafast imaging device and method thereof |
| CN114252653B (en) * | 2021-01-06 | 2023-12-12 | 中国科学院物理研究所 | Ultrafast imaging device and method thereof |
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| CN107919260B (en) | 2019-07-05 |
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Granted publication date: 20190705 Termination date: 20211121 |