CN107917955A - 新型光辅助石英晶体微天平及其检测方法 - Google Patents
新型光辅助石英晶体微天平及其检测方法 Download PDFInfo
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- CN107917955A CN107917955A CN201711285232.6A CN201711285232A CN107917955A CN 107917955 A CN107917955 A CN 107917955A CN 201711285232 A CN201711285232 A CN 201711285232A CN 107917955 A CN107917955 A CN 107917955A
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- qcm
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- quartz crystal
- light
- light source
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- 238000003380 quartz crystal microbalance Methods 0.000 title claims abstract description 133
- 238000001514 detection method Methods 0.000 title claims abstract description 60
- 239000013078 crystal Substances 0.000 claims abstract description 35
- 239000010453 quartz Substances 0.000 claims abstract description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 230000008859 change Effects 0.000 claims abstract description 21
- 238000000961 QCM-D Methods 0.000 claims description 77
- 238000005286 illumination Methods 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 8
- 241000446313 Lamella Species 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 239000004575 stone Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 16
- 230000000630 rising effect Effects 0.000 abstract description 3
- 239000008055 phosphate buffer solution Substances 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000007853 buffer solution Substances 0.000 description 9
- 239000000872 buffer Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 230000004224 protection Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008570 general process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 238000003759 clinical diagnosis Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
- 239000000439 tumor marker Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/222—Constructional or flow details for analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
Landscapes
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711285232.6A CN107917955B (zh) | 2017-12-07 | 2017-12-07 | 新型光辅助石英晶体微天平及其检测方法 |
PCT/CN2017/115776 WO2019109368A1 (zh) | 2017-12-07 | 2017-12-13 | 新型光辅助石英晶体微天平及其检测方法 |
US16/763,231 US11105774B2 (en) | 2017-12-07 | 2017-12-13 | Light-assisted quartz crystal microbalance and measurement method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711285232.6A CN107917955B (zh) | 2017-12-07 | 2017-12-07 | 新型光辅助石英晶体微天平及其检测方法 |
Publications (2)
Publication Number | Publication Date |
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CN107917955A true CN107917955A (zh) | 2018-04-17 |
CN107917955B CN107917955B (zh) | 2019-12-03 |
Family
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CN201711285232.6A Active CN107917955B (zh) | 2017-12-07 | 2017-12-07 | 新型光辅助石英晶体微天平及其检测方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11105774B2 (zh) |
CN (1) | CN107917955B (zh) |
WO (1) | WO2019109368A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019109368A1 (zh) * | 2017-12-07 | 2019-06-13 | 江苏大学 | 新型光辅助石英晶体微天平及其检测方法 |
CN110426451A (zh) * | 2019-07-15 | 2019-11-08 | 深圳市华星光电技术有限公司 | 蚀刻速率量测装置及侧向蚀刻速率的量测方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114184671B (zh) * | 2021-12-09 | 2024-02-06 | 中国石油大学(北京) | 用于确定表面活性剂在岩石表面的吸附层数的方法 |
Citations (7)
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DE10024366C1 (de) * | 2000-05-17 | 2002-01-24 | Max Planck Gesellschaft | Verfahren und Vorrichtung zur Schichtcharakterisierung |
CN101163957A (zh) * | 2004-09-15 | 2008-04-16 | 新加坡科技研究局 | 表面等离子体共振和石英晶体微天平传感器 |
US20120262718A1 (en) * | 2011-04-12 | 2012-10-18 | Seiko Epson Corporation | Detection device |
CN103196769A (zh) * | 2013-03-19 | 2013-07-10 | 上海博物馆 | 一种基于石英晶体微天平的博物馆微环境监测装置 |
CN204694582U (zh) * | 2015-07-01 | 2015-10-07 | 通化师范学院 | 石英晶体微天平传感器 |
CN106092802A (zh) * | 2016-05-10 | 2016-11-09 | 浙江大学 | 一种光激电拾的el-qcm-d阵列化流体检测系统 |
CN107290240A (zh) * | 2017-07-27 | 2017-10-24 | 江苏集萃有机光电技术研究所有限公司 | 石英晶体微天平及检测方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL130889A (en) * | 1998-11-02 | 2003-11-23 | Meidensha Electric Mfg Co Ltd | Qcm sensor |
WO2005001421A2 (en) * | 2003-06-05 | 2005-01-06 | Oakland University | Improved piezoimmunosensor |
US7930923B2 (en) * | 2009-04-01 | 2011-04-26 | The University Of North Florida Board Of Trustees | Quartz crystal microbalance with nanocrystalline oxide semiconductor thin films and method of detecting vapors and odors including alcoholic beverages, explosive materials and volatilized chemical compounds |
WO2017066721A1 (en) * | 2015-10-14 | 2017-04-20 | Quansor Corporation | Continuous flow fluid contaminant sensing system and method |
US20170260629A1 (en) * | 2016-03-08 | 2017-09-14 | Ultratech, Inc. | Quartz crystal microbalance assembly for ALD systems |
CN107917955B (zh) | 2017-12-07 | 2019-12-03 | 江苏大学 | 新型光辅助石英晶体微天平及其检测方法 |
-
2017
- 2017-12-07 CN CN201711285232.6A patent/CN107917955B/zh active Active
- 2017-12-13 US US16/763,231 patent/US11105774B2/en active Active
- 2017-12-13 WO PCT/CN2017/115776 patent/WO2019109368A1/zh active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10024366C1 (de) * | 2000-05-17 | 2002-01-24 | Max Planck Gesellschaft | Verfahren und Vorrichtung zur Schichtcharakterisierung |
CN101163957A (zh) * | 2004-09-15 | 2008-04-16 | 新加坡科技研究局 | 表面等离子体共振和石英晶体微天平传感器 |
US20120262718A1 (en) * | 2011-04-12 | 2012-10-18 | Seiko Epson Corporation | Detection device |
CN103196769A (zh) * | 2013-03-19 | 2013-07-10 | 上海博物馆 | 一种基于石英晶体微天平的博物馆微环境监测装置 |
CN204694582U (zh) * | 2015-07-01 | 2015-10-07 | 通化师范学院 | 石英晶体微天平传感器 |
CN106092802A (zh) * | 2016-05-10 | 2016-11-09 | 浙江大学 | 一种光激电拾的el-qcm-d阵列化流体检测系统 |
CN107290240A (zh) * | 2017-07-27 | 2017-10-24 | 江苏集萃有机光电技术研究所有限公司 | 石英晶体微天平及检测方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019109368A1 (zh) * | 2017-12-07 | 2019-06-13 | 江苏大学 | 新型光辅助石英晶体微天平及其检测方法 |
US11105774B2 (en) | 2017-12-07 | 2021-08-31 | Jiangsu University | Light-assisted quartz crystal microbalance and measurement method thereof |
CN110426451A (zh) * | 2019-07-15 | 2019-11-08 | 深圳市华星光电技术有限公司 | 蚀刻速率量测装置及侧向蚀刻速率的量测方法 |
CN110426451B (zh) * | 2019-07-15 | 2021-12-24 | Tcl华星光电技术有限公司 | 蚀刻速率量测装置及侧向蚀刻速率的量测方法 |
Also Published As
Publication number | Publication date |
---|---|
US20210072188A1 (en) | 2021-03-11 |
US11105774B2 (en) | 2021-08-31 |
CN107917955B (zh) | 2019-12-03 |
WO2019109368A1 (zh) | 2019-06-13 |
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Wang Jie Inventor after: Liu Lei Inventor before: Wang Jie Inventor before: Liu Lei Inventor before: Dong Mingdong |
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Effective date of registration: 20240723 Address after: Room 309-16, Building 1, No. 8 Jinfeng Road, High tech Zone, Suzhou City, Jiangsu Province 215163 Patentee after: Yuxin Biotechnology (Suzhou) Co.,Ltd. Country or region after: China Address before: Zhenjiang City, Jiangsu Province, 212013 Jingkou District Road No. 301 Patentee before: JIANGSU University Country or region before: China |