CN107894315A - A kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals - Google Patents

Abstract

The invention discloses a four-axis excitation device capable of applying impact loads to MEMS microstructures, comprising a sleeve, stacked piezoelectric ceramics, pressure sensors, upper and lower coupling blocks and MEMS microstructures; The supporting plate and the electric screw drive mechanism connected to the lower connecting block; the upper and lower connecting blocks are respectively provided with mutually matching spherical protrusions and spherical grooves; stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support The upper connection block is evenly connected with ball plungers, and the outer ends of the ball plungers push into the rectangular grooves on the inner wall of the sleeve. The device can flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics easy. It is smoother and smoother, greatly reduces the shear force between the layers of the stacked piezoelectric ceramics, can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

Description

A four-axis excitation device capable of applying impact loads to MEMS microstructures

technical field

The invention belongs to the technical field of micromechanical electronic systems, in particular to a four-axis excitation device capable of loading impact loads on MEMS microstructures.

Background technique

Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content.

In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to make the microstructure vibrate, that is, to excite the microstructure. Due to the small size, light weight and high natural frequency of MEMS microstructures, the excitation methods and excitation devices in traditional mechanical mode testing cannot be applied to the vibration excitation of MEMS microstructures. In the past thirty years, researchers at home and abroad have conducted a lot of explorations on the vibration excitation methods of MEMS microstructures, and have developed some excitation methods and corresponding excitation devices that can be used for MEMS microstructures. Among them, the base excitation device using stacked piezoelectric ceramics as the excitation source has the advantages of large excitation bandwidth, simple device, easy operation, and strong applicability, so it has been widely used in the field of MEMS microstructure dynamic characteristic testing. In the article "A base excitation test facility fordynamic testing of microsystems", David et al. introduced a base excitation device based on piezoelectric ceramics. In this device, stacked piezoelectric ceramics are directly bonded on a fixed base. The stacked piezoelectric ceramics is a multi-layer bonding structure, so the stacked piezoelectric ceramics can withstand a large pressure, but it cannot bear the tensile force. The tensile force will cause the damage of the stacked piezoelectric ceramics. When the stacked piezoelectric ceramics are in When in use, applying a certain pre-tightening force is beneficial to prolong the service life of stacked piezoelectric ceramics, but this device does not consider the above problems; Wang et al. in the article "Dynamic characteristic testing forMEMS micro-devices with base excitation" This paper introduces a base excitation device based on piezoelectric ceramics. In this device, the problem of applying a certain pre-tightening force to the stacked piezoelectric ceramics is considered. Electric ceramics, and the size of the pre-tightening force can be changed by turning the adjusting screw, but this device does not take into account that when the above-mentioned mechanism is used to apply the pre-tightening force to the stacked piezoelectric ceramics, due to the two working surfaces of the stacked piezoelectric ceramics The parallelism error will generate a shear force between the layers of the stacked piezoelectric ceramics, which will cause mechanical damage to the stacked piezoelectric ceramics. In addition, the device cannot measure the applied preload. If the size is not adjusted properly, it will also cause mechanical damage to the stacked piezoelectric ceramics. The Chinese invention patent with the publication number CN101476970A discloses a base excitation device based on piezoelectric ceramics. In this device, a cross spring plate is used to apply a preload to the stacked piezoelectric ceramics, and the bottom of the stacked piezoelectric ceramics is installed On a movable base structure to reduce the shear force on the piezoelectric ceramics, in addition, a pressure sensor is also provided in the device to detect the pre-tightening force applied to the piezoelectric ceramics and stack piezoelectric ceramics output force at work. But this device still has following shortcoming:

1. The movable base structure of the device is composed of an upper connection block, a steel ball and a lower connection block. The steel ball, the upper connection block and the lower connection block are in line contact. When it is necessary to compensate the top surface of the stacked piezoelectric ceramics and the When the movable base structure is adjusted by itself due to the parallelism error of the two working surfaces on the bottom surface, the steel ball cannot rotate smoothly, and may even be stuck;

2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure is self-adjusted, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

4. In the device, one side of the cross spring is used to compress the stacked piezoelectric ceramics, and the other side of the cross spring is bonded to the micro device for testing. When the piezoelectric ceramics are working, the deformation of the cross spring is relatively large. Cause the colloid between the micro-device and the cross spring to crack, causing the micro-device to fall off;

5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, resulting in a complicated adjustment process and insufficient flexibility.

Contents of the invention

The technical problem to be solved by the present invention is to provide a four-axis excitation device that can apply impact loads to MEMS microstructures. The obtained pre-tightening force measurement value is more accurate, which can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics smoother and smoother, and greatly reduces the shear between the layers of the stacked piezoelectric ceramics The force can avoid the falling off of the micro-device used in the test, and it is convenient to test the dynamic characteristic parameters of the MEMS microstructure.

In order to solve the above problems, the present invention adopts the following technical solutions:

A four-axis excitation device capable of applying impact loads to MEMS microstructures, including a sleeve, in which a stack of piezoelectric ceramics, a pressure sensor, an upper connection block and a lower connection block are arranged, and on the sleeve is a Elastic support and MEMS microstructure characterized by:

An annular top plate is arranged on the sleeve, and the MEMS microstructure is installed on the annular top plate through an elastic support; the elastic support includes a base plate and four support arms uniformly distributed around the circumference, and each support arm is connected to each other in sequence. The vertically connected first connecting arm, second connecting arm, third connecting arm and fourth connecting arm form an L-shaped gap with the outer edge of the substrate to reduce the deformation of the substrate;

A support plate is provided at the lower part of the sleeve, and an electric screw transmission mechanism is installed in the center of the support plate along the vertical direction. The screw nut of the electric screw transmission mechanism is connected with the lower connection block to drive the lower connection block to move up and down;

On the opposite surfaces of the upper coupling block and the lower coupling block, there are respectively provided spherical protrusions and spherical grooves which cooperate with each other, the spherical protrusions are inserted into the spherical grooves and the radius of curvature of the spherical protrusions is smaller than that of the spherical grooves , so that a point contact is formed between the upper coupling block and the lower coupling block; the pressure sensor is embedded in the center hole on the top surface of the upper coupling block, and the stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support;

Ball plungers are evenly distributed on the outer edge of the upper connection block, and the steel balls at the outer ends of the ball plunger are pushed into the rectangular grooves uniformly distributed on the inner wall of the sleeve along the circumferential direction, which are used to assist the upper connection block to compensate for stacking Adjustment of the parallelism error of the two working surfaces of piezoelectric ceramics;

Guide shafts are evenly distributed in the sleeve along the circumferential direction, and the guide shafts pass through the uniform guide holes arranged on the flange plate at the lower end of the lower connection block through clearance fit to ensure the levelness of the lower connection block when moving up and down.

As a further preference, adjusting rods are evenly distributed around the outer edge of the upper coupling block, and the adjusting rods are respectively passed through long holes uniformly distributed on the sleeve wall along the circumferential direction; for realizing the reset of the upper coupling block after the test.

As a further preference, the substrate is square, and the four support arms are respectively connected to one end around the substrate through the first connecting arm; to further reduce the deformation of the substrate and prevent the MEMS microstructure from falling off due to colloidal cracking.

As a further preference, the outer ends of the four support arms of the elastic support are respectively supported and fixed on the annular top plate through pillars.

As a further preference, the outer edge of the upper coupling block is a regular octagon, and a connecting screw hole is respectively provided in the middle of each surface of the outer edge.

As a further preference, there are four ball plungers, one end of which is respectively threaded into the connecting screw holes on the outer edge of the upper coupling block.

As a further preference, there are four adjusting rods and they are spaced apart from the ball plunger.

As a further preference, a mounting sleeve is fastened on the upper end of the stacked piezoelectric ceramics, and the elastic support is pressed on the mounting sleeve to avoid the stacked piezoelectric ceramics caused by the roughness of the top working surface of the stacked piezoelectric ceramics. Poor contact between ceramic and elastic supports.

As a further preference, the centerline of the long hole and the centerline of the rectangular groove are parallel to the axis of the sleeve, and the central angle between the centerline of each long hole and the centerline of the adjacent rectangular groove is 45 degree.

As a further preference, there are four guide shafts, and the central angle formed by the center line of the long hole and the axis of the adjacent guide shaft and the axis of the sleeve is 22.5 degrees.

The beneficial effects of the present invention are:

1. Since the opposite surfaces of the upper coupling block and the lower coupling block are respectively provided with mutually matching spherical protrusions and spherical grooves, the spherical protrusions are inserted into the spherical grooves and the radius of curvature of the spherical protrusions is smaller than that of the spherical grooves Therefore, a point contact is formed between the upper connecting block and the lower connecting block. When it is necessary to compensate the parallelism error of the two working surfaces of the stacked piezoelectric ceramics to adjust the movable base composed of the upper connecting block and the lower connecting block , the upper connecting block will rotate with the contact point between the spherical protrusion and the spherical groove as the center of rotation, the adjustment process is smooth and smooth, and there will be no problem of being stuck, which greatly reduces the gap between the layers of stacked piezoelectric ceramics. of shear force.

2. Since the ball plunger is evenly distributed on the outer edge of the upper connection block, the steel balls at the outer end of the ball plunger are pushed into the rectangular grooves uniformly distributed on the inner wall of the sleeve along the circumferential direction. When it is necessary to compensate for the stacking pressure When the parallelism error of the two working surfaces of the electroceramic is used to adjust the movable base, the upper connecting block can swing in different directions through the cooperation of the spring in the ball plunger and the steel ball, and the adjustable space is larger.

3. Since the pressure sensor is embedded in the center hole on the top surface of the upper connecting block, the stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support, so when the pre-tightening force is applied to the stacked piezoelectric ceramics , which avoids the interference of the movable base structure on the pressure sensor, and can obtain more accurate pre-tightening force data; when the stacked piezoelectric ceramics work, the measured value of the excitation force obtained is also more accurate.

4. Since the elastic support includes a base plate and four support arms uniformly distributed on the circumference, each support arm is composed of a first connecting arm, a second connecting arm, a third connecting arm and a fourth connecting arm which are vertically connected to each other in sequence , when the stacked piezoelectric ceramics work, the vibration deformation of the elastic support mainly comes from the four support arms, while the deformation of the substrate is very small, so the colloid will not crack and the micro devices will not fall off.

5. Since the electric screw drive mechanism is installed in the vertical direction in the center of the support plate, the nut of the electric screw drive mechanism is connected to the lower connecting block. When it is necessary to apply different sizes of preload to the stacked piezoelectric ceramics, It can be realized by driving the movable base to move through the electric screw transmission mechanism, and the adjustment process is simple and flexible.

Description of drawings

Fig. 1 is a schematic diagram of the three-dimensional structure of the present invention.

Figure 2 is a top view of the present invention.

Fig. 3 is a cross-sectional view along line A-A of Fig. 2 .

Fig. 4 is a B-B sectional view of Fig. 2 .

Fig. 5 is a C-C sectional view of Fig. 2 .

Fig. 6 is a top view of the present invention with the annular top plate removed.

Fig. 7 is a schematic diagram of the structure of the elastic support.

In the figure: 1. sleeve, 101. rectangular groove, 102. long hole, 2. annular top plate, 3. bottom plate, 4. MEMS microstructure, 5. microstructure mounting plate, 6. elastic support, 601. support Arm, 6011. First connecting arm, 6012. Second connecting arm, 6013. Third connecting arm, 6014. Fourth connecting arm, 602. Base plate, 7. Prop, 8. Mounting sleeve, 9. Ball plunger, 10. Stacked piezoelectric ceramics, 11. Pressure sensor, 12. Adjusting rod, 13. Upper connection block, 1301. Spherical protrusion, 14. Guide shaft, 15. Lower connection block, 1501. Spherical groove, 16. Wire Female, 17. support plate, 18. linear stepper motor, 19. leading screw, 20. axle sleeve.

Detailed ways

As shown in Figures 1 to 7, the present invention relates to a four-axis excitation device capable of applying impact loads to MEMS microstructures, including a hollow sleeve 1, and stacked piezoelectric ceramics 10 are arranged in the sleeve 1. , a pressure sensor 11 and a movable base composed of an upper coupling block 13 and a lower coupling block 15 , and an elastic support 6 and a MEMS microstructure 4 are arranged on the sleeve 1 .

An annular top plate 2 and a bottom plate 3 are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by bolts, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . The elastic support includes a square base plate 602 and four support arms 601 uniformly distributed around the circumference, each support arm 601 is composed of a first connecting arm 6011, a second connecting arm 6012, and a third connecting arm 6013 which are vertically connected in sequence. Composed of the fourth connecting arm 6014, the four supporting arms 601 are respectively connected to one end of the peripheral end surface of the substrate 602 through the first connecting arm 6011, and an L-shaped gap is formed between the second connecting arm 6012 and the third connecting arm 6013 and the outer edge of the substrate 602 ; It is used to reduce the deformation of the substrate and prevent the MEMS microstructure 4 from falling off due to cracking of the colloid. The four support arms 601 of the elastic support 6 are supported and fixed on the annular top plate 2 through the hollow pillars 7 respectively, and the MEMS microstructure 4 is bonded to the center of the upper surface of the substrate 602 of the elastic support 6 through the microstructure mounting plate 5 place.

A support plate 17 is fixed by screws at the bottom step of the sleeve 1, and an electric screw drive mechanism is installed in the center of the support plate 17 along the vertical direction. The screw 19 of the output shaft of the stepping motor 18 and the screw nut 16 constitute, wherein the linear stepping motor 18 is installed on the bottom surface of the support plate 17, the upper end of the screw screw 19 is inserted in the center hole of the bottom surface of the lower connecting block 15, and the upper end of the screw nut 16 is connected to the bottom surface of the lower connecting block 15. The bottom surface of the coupling block 15 is connected by screws evenly distributed on the circumference, and is used to drive the lower coupling block 15 to move up and down.

On the opposite surface of the upper coupling block 13 and the lower coupling block 15 are respectively provided with a spherical protrusion 1301 and a spherical groove 1501 that cooperate with each other, and the spherical protrusion 1301 is inserted into the spherical groove 1501 and the radius of curvature of the spherical protrusion is less than The radius of curvature of the spherical groove makes point contact between the upper coupling block and the lower coupling block; and an adjustment gap is formed between the bottom surface of the upper coupling block 13 and the top surface of the lower coupling block 15, and the adjustment gap is preferably 2 to 5mm .

The pressure sensor 11 is embedded and bonded in the center hole on the top surface of the upper connecting block 13, the stacked piezoelectric ceramic 10 is cylindrical and the lower end is bonded on the pressure sensor 11, and the upper and lower ends of the stacked piezoelectric ceramic 10 are clamped between the pressure sensor 11 and the base plate 602 of the elastic support 6 . A mounting sleeve 8 is fastened and bonded to the upper end of the stacked piezoelectric ceramics 10, and the substrate 602 is pressed on the mounting sleeve 8 for making the stacked piezoelectric ceramics 10 and the bottom surface of the elastic support member realize good contact, avoiding the The problem of poor contact between the stacked piezoelectric ceramics 10 and the elastic support member 6 is caused by the roughness of the top working surface of the stacked piezoelectric ceramics 10 .

The outer edge of the upper coupling block 13 is a regular octagon, and a connecting screw hole is respectively arranged in the middle of each surface of the outer edge along the radial direction. The outer edge of the upper coupling block 13 is uniformly connected with ball plungers 9 along the circumferential direction, and the number of the ball plungers 9 is four, and one end is connected to the four connecting screw holes in the outer edge of the upper coupling block in a radial direction through threads respectively. , the steel balls at the outer end of the ball plunger 9 are pushed into four rectangular grooves 101 uniformly distributed on the inner wall of the sleeve 1 along the circumferential direction, which are used to assist the movable base to compensate the parallelism of the two working surfaces of the stacked piezoelectric ceramics 10 error adjustment.

The outer edge of the upper coupling block 13 is uniformly connected with adjusting rods 12 along the circumferential direction. The head plungers are arranged at intervals. The outer ends of the adjustment rods 12 pass through four long holes 102 uniformly distributed on the wall of the sleeve 1 along the circumferential direction, so as to realize the reset of the upper coupling block 13 after the test. The centerlines of the elongated holes 102 and the centerlines of the rectangular grooves 101 are parallel to the axis of the sleeve 1, and the central angle between the centerline of each elongated hole 102 and the centerline of the adjacent rectangular groove 101 is is 45 degrees.

Four guide shafts 19 are evenly distributed along the circumferential direction in the sleeve 1 , and both ends of the guide shafts 19 are respectively connected between the annular top plate 2 and the support plate 17 by screws. The guide shaft 19 passes through the guide holes evenly distributed on the flange plate at the lower end of the lower coupling block 15 through clearance fit, so as to ensure the levelness of the lower coupling block 15 when moving up and down. Axle sleeves 20 are fitted respectively in the guide holes at the lower end of the lower coupling block 15 . The central angle formed by the central line of the long hole 102 and the axis of the adjacent guide shaft 19 and the axis of the sleeve 1 is 22.5 degrees.

When working, first start the linear stepper motor 18 to push upwards through the transmission of the lead screw 19 and the screw nut 16. The movable base composed of the upper coupling block 13 and the lower coupling block 15 exerts a pre-tightening force on the stacked piezoelectric ceramics 10, and at the same time The pre-tightening force data measured by the pressure sensor 11 is monitored, and when the pre-tightening force reaches a set value, the linear stepper motor 18 is controlled to stop working. Then, an external power supply is used to apply a pulse signal between the two electrodes of the stacked piezoelectric ceramics 10, and the inverse piezoelectric effect of the stacked piezoelectric ceramics 10 is used to excite the MEMS microstructure 4. The vibration device detects the vibration response of the MEMS microstructure 4, and the pressure sensor 11 is used to detect the output force of the stacked piezoelectric ceramics 10. Finally, after the excitation of the MEMS microstructure 4 is completed, the linear stepping motor 18 is controlled to drive the lower connecting block 15 to move downward, and then the four adjusting rods 12 are manually adjusted to drive the upper connecting block 13 to move downward, so that the stacked piezoelectric The mounting sleeve 8 on the top of the ceramic 10 is separated from the elastic support member 6 to prevent the stacked piezoelectric ceramic 10 from being under stress all the time.

Although the embodiment of the present invention has been disclosed as above, it is not limited to the use listed in the specification and implementation, it can be applied to various fields suitable for the present invention, and it can be easily understood by those skilled in the art Therefore, the invention is not limited to the specific details and examples shown and described herein without departing from the general concept defined by the claims and their equivalents.

Claims (10)

1. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals, including sleeve, are provided with folded in sleeve Heap piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block, elastic supporting member for supporting optical member and the micro- knots of MEMS are provided with sleeve Structure, it is characterized in that：

Annular roof plate is provided with sleeve, the MEMS micro-structurals are arranged on annular roof plate by elastic supporting member for supporting optical member；It is described Elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm by being mutually connected vertically successively First linking arm, the second linking arm, the 3rd linking arm and the 4th linking arm composition simultaneously form a L-type gap with substrate outer edge, For reducing the deflection of substrate；

Bottom is provided with supporting plate in sleeve, and electric threaded shaft transmission mechanism is vertically provided with supporting plate center, electronic The screw of lead-screw drive mechanism is connected with lower connection block, for driving lower connection block to move up and down；

The spherical surface hill and spherical groove of mutual cooperation, the ball are respectively equipped with upper coupling block and the opposite face of lower connection block The raised insertion spherical groove in face is interior and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, makes coupling block with Point contact is formed between coupling block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics It is clamped between pressure sensor and elastic supporting member for supporting optical member；

Bulb plunger is uniformly connected with upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end pushes into circumferentially side respectively To being distributed in the rectangular recess of sleeve lining, for aiding in upper connection block compensation to stack the working surface depth of parallelism of piezoelectric ceramics two The regulation of error；

The axis of guide is along the circumferential direction laid with sleeve, the axis of guide is fitted through by gap is arranged on lower connection block lower end Ring flange on uniform pilot hole, levelness during for ensureing that lower connection block moves up and down.

2. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 1, it is special Sign is：Adjusting rod is uniformly connected with upper coupling block outer marginal circumference, adjusting rod is respectively by being along the circumferential direction distributed in sleeve wall Elongated hole pass through；The reset of upper coupling block after being tested for realization.

3. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 1, it is special Sign is：The substrate is square, and four support arms are connected to one end of substrate surrounding by the first linking arm respectively；To enter one Step reduces the deflection of substrate, avoids MEMS micro-structurals from being fallen off because colloid ftractures.

4. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 3, it is special Sign is：Four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on above annular roof plate by pillar respectively.

5. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 2, it is special Sign is：The upper coupling block outer rim is octagon, and is respectively equipped with a connecting screw hole in each Middle face of outer rim.

6. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 5, it is special Sign is：The bulb plunger is four and one end is threadedly attached in the connecting screw hole of coupling block outer rim respectively.

7. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 6, it is special Sign is：The adjusting rod be four and with bulb plunger arranged for interval.

8. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 1, it is special Sign is：Installation set is provided with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoiding due to folded Heap piezoelectric ceramics top work surface it is rough caused by stack asking for piezoelectric ceramics and elastic supporting member for supporting optical member loose contact Topic.

9. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 7, it is special Sign is：The diameter parallel of the center line of the elongated hole and the center line of rectangular recess with sleeve, and the center line of each elongated hole It it is 45 degree with the central angle folded by the center line of adjacent rectangular recess.

10. a kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structurals according to claim 9, it is special Sign is：The axis of guide is four, the circle folded by the center line of the elongated hole and the axis of adjacent axis of guide axis and sleeve Heart angle is 22.5 degree.