CN107886993A - A kind of method of testing and test circuit of memory cell load voltage - Google Patents

A kind of method of testing and test circuit of memory cell load voltage Download PDF

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Publication number
CN107886993A
CN107886993A CN201711022722.7A CN201711022722A CN107886993A CN 107886993 A CN107886993 A CN 107886993A CN 201711022722 A CN201711022722 A CN 201711022722A CN 107886993 A CN107886993 A CN 107886993A
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CN
China
Prior art keywords
memory cell
voltage
test
bit
cell load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711022722.7A
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Chinese (zh)
Inventor
蔡道林
卢瑶瑶
陈�峰
陈一峰
闫帅
吴磊
刘源广
李阳
宋志棠
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Microsystem and Information Technology of CAS
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Publication date
Application filed by Shanghai Institute of Microsystem and Information Technology of CAS filed Critical Shanghai Institute of Microsystem and Information Technology of CAS
Priority to CN201711022722.7A priority Critical patent/CN107886993A/en
Publication of CN107886993A publication Critical patent/CN107886993A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/50Marginal testing, e.g. race, voltage or current testing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/50Marginal testing, e.g. race, voltage or current testing
    • G11C2029/5004Voltage

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  • For Increasing The Reliability Of Semiconductor Memories (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Static Random-Access Memory (AREA)

Abstract

The present invention provides a kind of method of testing and test circuit of memory cell load voltage, including for entering the memory array of row information storage;The buffering isolated location being parallel on the bit line of memory array, bit-line voltage when obtaining memory cell operation in memory array from the output end of buffering isolated location, and the bit-line voltage that will be read is isolated with test lead, reduce influence of the electric capacity of test lead introducing to the bit-line voltage to be read, and then improve the accuracy of test result.The present invention tests voltage during memory cell operation using the voltage follower circuit structure in parallel with bit line, voltage follower output voltage approximation input voltage amplitude, and be in high-impedance state to front stage circuits, it is in low resistive state to late-class circuit, thus play " isolation " effect;During the phase-changing memory unit being selected by bit line input operation, voltage follower can test out the voltage by memory cell, improve testing progress and test obtains the voltage drop of memory cell.

Description

A kind of method of testing and test circuit of memory cell load voltage
Technical field
The present invention relates to microelectronic, method of testing and test electricity more particularly to a kind of memory cell load voltage Road.
Background technology
Phase change memory technology be based on Ovshinsky late 1960s (Phys.Rev.Lett., 21,1450 1453,1968) beginning of the seventies, (Appl.Phys.Lett., 18,254 phase-change thin films 257,1971) proposed can apply to phase What the conception of change storage medium was set up, be a kind of cheap, stable performance memory device.Phase transition storage can be done In silicon wafer substrate, its critical material is recordable phase-change thin film, heating electrode material, heat-insulating material and extraction electrode material Study hotspot also just around its device technology deploy:The physical mechanism research of device, includes how to reduce device material etc..Phase transformation The general principle of memory is to be acted on using electric impulse signal on device cell, make phase-change material amorphous state and polycrystalline state it Between reversible transition occurs, low-resistance during high resistant and polycrystalline state during by differentiating amorphous state, it is possible to achieve write-in, the erasing of information And read operation.
Phase transition storage is because with high speed reading, high erasable number, non-volatile, component size is small, low in energy consumption, anti- The advantages that strong motion and radioresistance, thought most possibly to substitute current flash memories to form by International Semiconductor Industry Association For future memory main product and at first as the device of commercial product.
Reading and writing, the wiping operation of phase transition storage are exactly to apply different in width and the voltage or electricity of height on device cell Signal pulse stream:Operation (RESET) is wiped, when adding a short and strong pulse signal to make the phase-change material temperature liter in device cell It is high to after more than fusion temperature, then by quick cooling so as to realizing phase-change material polycrystalline state to amorphous conversion, i.e. one state To the conversion of " 0 " state;Write operation (SET), it is raised to phase-change material temperature when applying long and moderate strength a pulse signal Under fusion temperature, on crystallization temperature after, and keep a period of time promote nucleus growth, so as to realize amorphous state to polycrystalline state Conversion, i.e. " 0 " state to one state conversion;Read operation, it is very weak when adding a state to phase-change material not have an impact Pulse signal after, its state is read by the resistance value of measurement device unit.
In order to accurately test phase transition storage operating parameter and its performance, the voltage drop of phase-changing memory unit and electric current are Important test parameter, as shown in figure 1, in the prior art, testing electricity of the phase-change memory cell in operation in phase transition storage 1 The method that stream and voltage typically use the test voltage of oscillograph 2, but this method of testing can be by the electric capacity in the oscillograph 2 It is incorporated on the bit line of phase-change memory cell, the operation to phase-change memory cell impacts, and even results in operation failure, and This method can not measure to the voltage drop of chip internal phase-change memory cell.There is also same for other kinds of memory The problem of.
A kind of therefore, it is necessary to voltage ginseng when establishing accurate and convenient method of testing to test memory cell operation Number.
The content of the invention
In view of the above the shortcomings that prior art, it is an object of the invention to provide a kind of memory cell load voltage Method of testing and test circuit, for solving to test in the prior art present in voltage parameter when phase-change memory cell operates The problems such as accuracy is poor, stability is low.
In order to achieve the above objects and other related objects, the present invention provides a kind of test side of memory cell load voltage Method, the method for testing of the memory cell load voltage comprise at least:
Operation is written and read to the memory cell in memory array, will be carrying out where the memory cell of read-write operation Bit-line voltage test after buffering is isolated is read, and isolates the electric capacity for reducing test lead introducing to the memory cell by buffering Bit-line voltage influence, and then improve test result accuracy.
Preferably, the amplitude of signal after buffering isolation and the ratio of the amplitude of the bit-line voltage of the memory cell are 1.
It is highly preferred that buffering isolation is realized by way of voltage follow.
In order to achieve the above objects and other related objects, the present invention provides a kind of test electricity of memory cell load voltage Road, the test circuit of the memory cell load voltage comprise at least:
Memory array, it is used for the storage into row information;
Isolated location is buffered, is parallel on the bit line of the memory array, from the output end of the buffering isolated location Obtain bit-line voltage when memory cell in the memory array operates, and the bit-line voltage that will be read and test lead every From, influence of the reduction test lead to the bit-line voltage to be read, and then improve the accuracy of test result.
Preferably, the memory array includes the phase-change memory cell that n rows m row are arranged in the form of an array, wherein, n, m Respectively it is more than zero natural number.
Preferably, the memory array includes the variable-resistance memory unit that n rows m row are arranged in the form of an array, wherein, n, m Respectively it is more than zero natural number.
Preferably, the input impedance of the buffering isolated location is not more than 10 Europe not less than 1 kilo-ohm, output impedance.
It is highly preferred that the buffering isolated location is voltage follower, the normal phase input end of the voltage follower and institute The bit line connection of memory array is stated, the output end of the inverting input of the voltage follower and the voltage follower connects Connect.
Preferably, the voltage follower is realized using operational amplifier.
It is highly preferred that the operational amplifier is realized using transistor or integrated chip.
As described above, the method for testing and test circuit of the memory cell load voltage of the present invention, have below beneficial to effect Fruit:
Bit-line voltage and survey of the method for testing and test circuit of the memory cell load voltage of the present invention in memory cell Examination increases voltage follower between end, high input-impedance stage of the voltage follower as whole circuit, can mitigate to signal source Influence, while the bit-line voltage of memory cell when being written and read operation can be tested out.
Brief description of the drawings
Fig. 1 is shown as the principle schematic of memory cell load voltage method of testing of the prior art.
Fig. 2 is shown as the structural representation of the test circuit of the memory cell load voltage of the present invention.
Component label instructions
1 phase transition storage
2 oscillographs
3 memory arrays
4 buffering isolated locations
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from Various modifications or alterations are carried out under the spirit of the present invention.
Refer to Fig. 2.It should be noted that the diagram provided in the present embodiment only illustrates the present invention's in a schematic way Basic conception, the component relevant with the present invention is only shown in schema then rather than according to component count during actual implement, shape And size is drawn, kenel, quantity and the ratio of each component can be a kind of random change during its actual implementation, and its assembly layout Kenel may also be increasingly complex.
As shown in Fig. 2 the present invention provides a kind of test circuit of memory cell load voltage, the memory cell load electricity The test circuit of pressure comprises at least:
Memory array 3 and buffering isolated location 4.
As shown in Fig. 2 the memory array 3 is used for the storage into row information.
Specifically, the memory array 3 includes the phase-change memory cell that n rows m row are arranged in the form of an array, wherein, n, m Respectively it is more than zero natural number, in actual applications, a phase transition storage list is comprised at least in the memory array 3 Member.As shown in Fig. 2 row control signal is word-line signal WL, row transmission signal is bit line signal BL, and the same time only has a word Line and a bit line conducting, the phase-changing memory unit include phase change resistor and gate tube, wherein, the one of the phase change resistor End connection bit line BL, the other end connect the drain terminal of the gate tube, and the grid end of the gate tube connects wordline WL, source ground connection. In practical application, the memory array 3 can be resistance-variable storing device array, be not limited with the present embodiment.
As shown in Fig. 2 the buffering isolated location 4 is parallel on the bit line of the memory array 3, from the buffer compartment Bit-line voltage when being operated from memory cell in the output end acquisition memory array 3 of unit 1, and the bit line that will be read Voltage is isolated with test lead, reduces influence of the test lead to the bit-line voltage to be read, and then improve the accuracy of test result.
Specifically, in the present embodiment, a buffering isolated location 4 is all connected with each bit line, bit line is only shown in Fig. 2 The buffering isolated location 4 is connected on BL0, the buffering isolated location 4 connected on other bit lines is not shown.The buffering isolation Unit 4 is in high-impedance state to front stage circuits, is in low resistive state to late-class circuit, thus " isolation " work is played to front stage circuit With in the present embodiment, the input impedance of the buffering isolated location 4 is not more than 10 Europe not less than 1 kilo-ohm, output impedance, can Needed to do specific setting according to actual parameter, be not limited with the present embodiment.
More specifically, in the present embodiment, the buffering isolated location 4 is voltage follower, the voltage follower Normal phase input end is connected with the bit line of the memory array 3, the inverting input of the voltage follower and the voltage with Connected with the output end of device, form backfeed loop.The voltage follower can use feedback factor for 1 homophase input amplifier Realize, the amplifier welds to be formed using transistor, can also use integrated chip.In the present embodiment, using integrated computation Amplifier forms voltage follower to realize the function of voltage follow.Due to the high gain characteristics of operational amplifier in itself, with collection The voltage follower formed into amplifier has high input impedance, hardly draws electric current from signal source, while have extremely low Output impedance, hardly internally cause voltage drop during to load output current, Ui=Uo, wherein, Ui is the memory The voltage of memory cell is selected in array 3, Uo is the voltage that test lead is read.Oscillograph 3 is loaded into the buffer compartment Voltage when output end from unit 4 can be obtained by phase-change memory cell operation, and does not influence to operate.
As shown in Fig. 2 the present invention also provides a kind of method of testing of memory cell load voltage, in the present embodiment, institute State test circuit of the method for testing of memory cell load voltage based on the memory cell load voltage to realize, comprise at least:
Operation is written and read to the memory cell in the memory array 3, the storage list of read-write operation will be carrying out The test after buffering isolation of bit-line voltage where first is read, and the electric capacity that reduction test lead introducing is isolated by buffering is deposited to described The influence of the bit-line voltage of storage unit, and then improve the accuracy of test result.
Specifically, the amplitude of signal after buffering isolation and the ratio of the amplitude of the bit-line voltage of the memory cell are 1, That is Ui=Uo, wherein, Ui is the voltage that memory cell is selected in the memory array 3, and Uo is the electricity that test lead is read Pressure.In the present embodiment, buffering isolation is realized by the way of voltage follow, voltage follower can significantly reduce input electricity The size of appearance, guarantee is provided for the input waveform of high-quality;Meanwhile voltage follower output voltage approximation input voltage amplitude, And be in high-impedance state to front stage circuits, it is in low resistive state to late-class circuit, thus play " isolation " effect.
Bit-line voltage and survey of the method for testing and test circuit of the memory cell load voltage of the present invention in memory cell Examination increases voltage follower between end, high input-impedance stage of the voltage follower as whole circuit, can mitigate to signal source Influence, while the bit-line voltage of memory cell when being written and read operation can be tested out, and it is single to obtain chip internal storage The voltage drop of member.
In summary, present invention offer a kind of method of testing and test circuit of memory cell load voltage, including for Enter the memory array of row information storage;The buffering isolated location being parallel on the bit line of the memory array, delay from described Rush bit-line voltage when memory cell operates in the output end acquisition memory array of isolated location, and the position that will be read Line voltage is isolated with test lead, reduces influence of the electric capacity of test lead introducing to the bit-line voltage to be read, and then improve test As a result accuracy.The method of testing and test circuit of the memory cell load voltage of the present invention use voltage follower and bit line Circuit structure in parallel tests voltage during memory cell operation, voltage follower output voltage approximation input voltage amplitude, And be in high-impedance state to front stage circuits, it is in low resistive state to late-class circuit, thus play " isolation " effect;Inputted and grasped by bit line When making selected phase-changing memory unit, voltage follower can test out the voltage by memory cell, raising test into Spend and test to obtain the voltage drop of memory cell.So the present invention effectively overcomes various shortcoming of the prior art and has height Spend industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as Into all equivalent modifications or change, should by the present invention claim be covered.

Claims (10)

  1. A kind of 1. method of testing of memory cell load voltage, it is characterised in that the test side of the memory cell load voltage Method comprises at least:
    Operation is written and read to the memory cell in memory array, bit line where the memory cell of read-write operation being carrying out Voltage test after buffering is isolated is read, and isolates the position for reducing the electric capacity of test lead introducing to the memory cell by buffering The influence of line voltage, and then improve the accuracy of test result.
  2. 2. the method for testing of memory cell load voltage according to claim 1, it is characterised in that:Letter after buffering isolation Number the ratio of amplitude of bit-line voltage of amplitude and the memory cell be 1.
  3. 3. the method for testing of memory cell load voltage according to claim 1 or 2, it is characterised in that:By voltage with With mode realize buffering isolation.
  4. A kind of 4. test circuit of memory cell load voltage, it is characterised in that the test electricity of the memory cell load voltage Road comprises at least:
    Memory array, it is used for the storage into row information;
    Isolated location is buffered, is parallel on the bit line of the memory array, is obtained from the output end of the buffering isolated location Bit-line voltage when memory cell operates in the memory array, and the bit-line voltage that will be read is isolated with test lead, is subtracted Influence of the small test lead to the bit-line voltage to be read, and then improve the accuracy of test result.
  5. 5. the test circuit of memory cell load voltage according to claim 4, it is characterised in that:The memory array The phase-change memory cell arranged in the form of an array including n rows m row, wherein, n, m are respectively the natural number more than zero.
  6. 6. the test circuit of memory cell load voltage according to claim 4, it is characterised in that:The memory array The variable-resistance memory unit arranged in the form of an array including n rows m row, wherein, n, m are respectively the natural number more than zero.
  7. 7. the test circuit of memory cell load voltage according to claim 4, it is characterised in that:The buffering isolation is single The input impedance of member is not more than 10 Europe not less than 1 kilo-ohm, output impedance.
  8. 8. the test circuit of the memory cell load voltage according to claim 4 or 7, it is characterised in that:The buffer compartment It is voltage follower from unit, the normal phase input end of the voltage follower is connected with the bit line of the memory array, described The inverting input of voltage follower is connected with the output end of the voltage follower.
  9. 9. the test circuit of memory cell load voltage according to claim 4, it is characterised in that:The voltage follower Realized using operational amplifier.
  10. 10. the test circuit of memory cell load voltage according to claim 9, it is characterised in that:The operation amplifier Device is realized using transistor or integrated chip.
CN201711022722.7A 2017-10-27 2017-10-27 A kind of method of testing and test circuit of memory cell load voltage Pending CN107886993A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5973571A (en) * 1997-02-27 1999-10-26 Nec Corporation Semiconductor integrated circuit having a phase locked loop
US20060170433A1 (en) * 2005-02-01 2006-08-03 Samsung Electronics Co., Ltd. Semiconductor test circuit
CN102004197A (en) * 2009-09-02 2011-04-06 三星电子株式会社 Method for measuring a resistance of resist memory device and the resistance measuring system
CN102426848A (en) * 2011-11-30 2012-04-25 中国科学院微电子研究所 Method and system for reading information of storage array unit
CN102426852A (en) * 2011-11-30 2012-04-25 中国科学院微电子研究所 Method and system for reading information of storage array unit
CN102831935A (en) * 2012-05-18 2012-12-19 华中科技大学 Pulse I-V (intravenous) characteristic testing method and device of phase change memory unit

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5973571A (en) * 1997-02-27 1999-10-26 Nec Corporation Semiconductor integrated circuit having a phase locked loop
US20060170433A1 (en) * 2005-02-01 2006-08-03 Samsung Electronics Co., Ltd. Semiconductor test circuit
CN102004197A (en) * 2009-09-02 2011-04-06 三星电子株式会社 Method for measuring a resistance of resist memory device and the resistance measuring system
CN102426848A (en) * 2011-11-30 2012-04-25 中国科学院微电子研究所 Method and system for reading information of storage array unit
CN102426852A (en) * 2011-11-30 2012-04-25 中国科学院微电子研究所 Method and system for reading information of storage array unit
CN102831935A (en) * 2012-05-18 2012-12-19 华中科技大学 Pulse I-V (intravenous) characteristic testing method and device of phase change memory unit

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Application publication date: 20180406