CN107703437B - A kind of high frequency body modal resonance device test method based on half frequency Electrostatic Excitation - Google Patents
A kind of high frequency body modal resonance device test method based on half frequency Electrostatic Excitation Download PDFInfo
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- CN107703437B CN107703437B CN201710827926.1A CN201710827926A CN107703437B CN 107703437 B CN107703437 B CN 107703437B CN 201710827926 A CN201710827926 A CN 201710827926A CN 107703437 B CN107703437 B CN 107703437B
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- 230000005284 excitation Effects 0.000 title claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
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- 229910001885 silicon dioxide Inorganic materials 0.000 claims description 3
- 238000004458 analytical methods Methods 0.000 claims description 2
- 238000006243 chemical reactions Methods 0.000 claims description 2
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 [Si-] HJELPJZFDFLHEY-UHFFFAOYSA-N 0.000 claims 4
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
Abstract
A kind of high frequency body modal resonance device test method based on half frequency Electrostatic Excitation, including open-loop test method and closed loop test method, the calibration that open-loop test method is suitable for laboratory environment medium-high frequency body modal resonance device are tested；Closed loop test method is suitable for the practical application of industry spot medium-high frequency body modal resonance device；The present invention utilizes the principle of half frequency wave Electrostatic Excitation resonator, feedthrough electric current is reduced to two divided-frequency, it and is still original frequency by the dynamic current that resonator vibration generates, the two is isolated in different frequency ranges, it can be by feedthrough electric current bring noise remove by external circuit, the signal-to-noise ratio of resonator test is substantially increased, and then improves the performance parameter of silicon microoscillator.
Description
Technical field
The present invention relates to resonator the field of test technology, in particular to a kind of high frequency body mode based on half frequency Electrostatic Excitation
Resonator test method.
Background technique
Currently, there are many researchers carries out corresponding research, including oscillation electricity for the test of silicon microoscillator
The Optimal improvements on road, temperature-compensating mechanism are probed into.Chinese patent (CN 102439844) is in traditional silicon micro oscillation circuit
Introduce correction portion, can be generated according to former oscillator signal as defined in frequency signal, and feed back to the micro- vibration of silicon as output signal
Device is swung, in this way, improves the stability of silicon microoscillator.Chinese patent (102377408 A of CN) is directed to the survey of oscillator
Examination circuit is improved, and improves the practicability of silicon microoscillator using pressure drag measurement method.Due to the temperature of silicon materials
Effect, influence of the frequency of oscillation of silicon microoscillator vulnerable to ambient temperature, causes temperature drift larger.In view of this, Chinese patent
(104811186 A of CN) devises a kind of temperature-compensating mechanism, ensure that the stabilization of silicon microoscillator ambient temperature, mentions
It rises its temperature resistance and floats ability；Chinese patent (CN 102594260) constitutes compensation circuit using parasitic capacitance and temperature sensor, together
Sample avoids the reduction of temperature drift bring frequency stability.
So far, there has been no the test optimization work that open source literature is dedicated to high frequency body mode silicon micro-resonator.Silicon is micro-
Resonator generally passes through the metal electrode layer connection external circuit of sputtering, due to the electric conductivity of silicon materials itself, metal electrode layer
Between there is parasitic capacitances, the accumulation signal of resonator is directly transferred to pick-up end by parasitic capacitance, so as to form feedback
Electric current is worn, the signal-to-noise ratio of pick-up signal is affected.When testing high frequency body mode silicon micro-resonator, since its exciting is tired
Difficulty needs biggish exciting electric current, its eigenfrequency is often higher in addition, and the negative effect of feedthrough electric current bring is particularly evident,
Considerably increase the difficulty of test of high frequency body mode silicon micro-resonator.When using traditional technique in measuring, feedthrough electric current and resonance
It is homogenous frequency signal that device, which vibrates bring dynamic current, cannot well separate the two by external circuit, lead to useful signal
It is often submerged in feedthrough signal and Noise Background, test result cannot reach requirement.
Summary of the invention
The high frequency body modal resonance device test method based on half frequency Electrostatic Excitation that the present invention provides a kind of, it is quiet by half frequency
The method of electric shock vibration, so that feedthrough electric current and dynamic current, which separate in different frequency range, then by external circuit, filters out feedthrough electric current
Bring influences, and realizes the signal-to-noise ratio of high frequency body mode silicon microoscillator and the promotion of frequency stability.
In order to achieve the above object, the technical scheme adopted by the invention is that:
A kind of high frequency body modal resonance device test method based on half frequency Electrostatic Excitation, including open-loop test method and closed loop
Test method, the calibration that open-loop test method is suitable for laboratory environment medium-high frequency body modal resonance device are tested；Closed loop test side
Method is suitable for the practical application of industry spot medium-high frequency body modal resonance device；
The open-loop test method, comprising the following steps: the port A of vector grid analyzer 10-1 exports alternating sinusoidal
Electric current ω, by comparator 10-2, sinusoidal current becomes the same frequency square wave of high level 3.3V, low level 0.3V, then through frequency conversion
Circuit 10-3 modulates the signals onto as half-frequency signal ω/2, and the micro- harmonic oscillator 1 of silicon of resonator is passed through together with DC offset voltage
Exciting end, when the frequency of alternating sinusoidal current ω and the natural frequency ω of the micro- harmonic oscillator 1 of silicon0When identical, the micro- harmonic oscillator 1 of silicon and half
Frequency accumulation signal generates resonance, and vibration frequency is its natural frequency ω0；The vibration of the micro- harmonic oscillator 1 of silicon produces frequency and is also
ω0Dynamic current, detect the dynamic current at the pick-up end of the micro- harmonic oscillator 1 of silicon, through amplifier 10-4 amplification, high-pass filtering
After device 10-5 removes feedthrough electric current, the port B of input vector network analysis instrument 10-1 is tested and analyzed；
The closed loop test method, comprising the following steps: in oscillating circuit work, amplifier 11-1 is by feedthrough electric current
ω0/ 2 and dynamic current ω0It simultaneously amplifies, the cutoff frequency of high-pass filter 11-2 is slightly less than ω0, feedthrough electricity has been filtered out with this
Flow ω0/2；Phase shifter 11-3 adjusts the phase of feedback current, provides self-oscillatory necessary condition, comparator 11-4 will be fed back
Electric current becomes square wave, is input to frequency changer circuit 11-5 and is divided, then big by amplitude adjusting circuit 11-6 adjusting feedback current
It is small, the micro- harmonic oscillator 1 of silicon of the feedback current exciting resonator of final half frequency, after entire circuit forms stable self-oscillation,
The frequency of oscillator is read by frequency counter 11-7.
A kind of high frequency body modal resonance device test method based on half frequency Electrostatic Excitation, can not only be directed to high frequency
Body modal resonance device is tested, and can also be tested for low-frequency resonator, high frequency body modal resonance device includes disc type
Silicon micro-resonator and square plate formula silicon micro-resonator, low-frequency resonator include beam type silicon micro-resonator or tuning-fork type silica micro-resonator.
The invention has the benefit that
The present invention utilizes the principle of half frequency wave Electrostatic Excitation resonator, and feedthrough electric current is reduced to two divided-frequency, and by resonator
The dynamic current that vibration generates still is original frequency, and the two is isolated in different frequency ranges, can be by feedthrough by external circuit
Electric current bring noise remove, substantially increases the signal-to-noise ratio of resonator test, and then improves the performance ginseng of silicon microoscillator
Number.
Detailed description of the invention
Fig. 1 is the schematic diagram of open-loop test circuit of the present invention.
Fig. 2 is the schematic diagram of closed loop test circuit of the present invention.
Fig. 3 is the schematic diagram of disc type silicon micro-resonator.
Fig. 4 is influence schematic diagram of the feedthrough electric current for test result.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
Referring to Fig.1, a kind of open-loop test method based on half frequency Electrostatic Excitation, comprising the following steps: vector net
The port A of case analysis instrument 10-1 exports alternating sinusoidal current ω, by comparator 10-2, sinusoidal current become high level 3.3V,
Then the same frequency square wave of low level 0.3V modulates the signals onto as half-frequency signal ω/2 through frequency changer circuit 10-3, with direct current biasing
Voltage is passed through the micro- 1 exciting end of harmonic oscillator of silicon of disc type silicon micro-resonator together, when frequency and the silicon of alternating sinusoidal current ω are micro-
The natural frequency ω of harmonic oscillator 10When identical, the micro- harmonic oscillator 1 of silicon and half frequency accumulation signal generate resonance, and vibration frequency is solid for it
There is frequencies omega0；It is also ω that the vibration of the micro- harmonic oscillator 1 of silicon, which produces frequency,0Dynamic current, the micro- harmonic oscillator 1 of silicon pick-up end examine
The dynamic current is measured, after amplifier 10-4 amplification, high-pass filter 10-5 removal feedthrough electric current, input vector network analysis
The port B of instrument 10-1 is tested and analyzed.
Referring to fig. 2, a kind of closed loop test method based on half frequency Electrostatic Excitation, comprising the following steps: vibrating
When circuit works, amplifier 11-1 is by feedthrough electric current ω0/ 2 and dynamic current ω0It simultaneously amplifies, the cut-off of high-pass filter 11-2
Frequency is slightly less than ω0, feedthrough electric current ω has been filtered out with this0/2；Phase shifter 11-3 adjusts the phase of feedback current, provides from exciting
Feedback current is become square wave by the necessary condition swung, comparator 11-4, is input to frequency changer circuit 11-5 and is divided, then passes through width
Value adjusts circuit 11-6 and adjusts feedback current size, and the silicon of the feedback current exciting disc type silicon micro-resonator of final half frequency is micro- humorous
Oscillator 1, after entire circuit forms stable self-oscillation, the frequency of oscillator is read by frequency counter 11-7.
Referring to Fig. 3, the disc type silicon micro-resonator includes the micro- harmonic oscillator 1 of silicon, and micro- 1 shape of harmonic oscillator of silicon is disk
Shape is respectively disposed with the first support end 2, the second support end 3, third support end 4 and the 4th support end 5 every 90 ° in its surrounding,
First support end 2, the second support end 3, third support end 4 and the 4th support end 5 are respectively by the first support end anchor point 2-1, second
Support end anchor point 3-1, third support end anchor point 4-1, the 4th support end anchor point 5-1 and uniform sputter are in the first metal on anchor point
Electrode layer 2-2, the second metal electrode layer 3-2, third metal electrode layer 4-2, the 4th metal electrode layer 5-2 are constituted, each support end
Anchor point is connect with the micro- harmonic oscillator 1 of silicon by slender beam, has signal transmission end, respectively in the intermediate arrangement of every two support end
One signal transmission end 6, second signal transmission end 7, third signal transmission end 8 and fourth signal transmission end 9, the first signal transmission end
6, second signal transmission end 7, third signal transmission end 8 and fourth signal transmission end 9 are respectively by the first transmission end anchor point 6-1,
Two transmission end anchor point 7-1, third transmission end anchor point 8-1, the 4th transmission end anchor point 9-1 and uniform sputter are on transmission end anchor point
Fifth metal electrode layer 6-2, the 6th metal electrode layer 7-2, the 7th metal electrode layer 8-2, the 8th metal electrode layer 9-2 are constituted,
Transmission end anchor point by slender beam respectively with first capacitor pole plate 6-3, the second capacitor plate 7-3, third capacitor plate 8-3, the
There is a fixed gap and form capacitor in four capacitor plate 9-3 connections, capacitor plate and the micro- harmonic oscillator 1 of silicon, as exciting resonator with
Detect the means of vibration signal.
The micro- harmonic oscillator 1 of the silicon, capacitor plate are all hanging and being capable of free vibration；The support end anchor point and transmission
End anchor point is all fixed in monocrystal silicon substrate, plays the role of the entire device of support.
The frequency of oscillation of the micro- harmonic oscillator 1 of the silicon is determined by its parameter of structure design, by changing the micro- harmonic oscillator 1 of silicon
Design parameter, assigns the specific intrinsic frequency of the micro- harmonic oscillator 1 of silicon, which can be measured by open-loop test circuit；When
When the micro- harmonic oscillator 1 of silicon is placed in closed loop test circuit, under special parameter, the micro- harmonic oscillator 1 of silicon constitutes high property with closed loop circuit
Energy silicon microoscillator, the self-oscillation in the intrinsic frequency of the micro- harmonic oscillator 1 of silicon export stable frequency signal.
Referring to Fig. 4, Fig. 4 be body mode silicon micro-resonator open-loop test amplitude figure (on) and phase diagram (under), three lines
Show respectively feedthrough electric current it is descending when the resonator works state that measures.As can be seen that when feedthrough electric current is larger, it is humorous
Vibration peak is less obvious, is partially submerged in the noise of feedthrough electric current, and quality factor are lower；It is humorous when feedthrough electric current is smaller
Vibration peak appears completely, has very high quality factor.In closed loop test, the higher resonance peak of quality factor will bring higher
Frequency stability, and then other performance indicators of oscillator will also greatly promote.
The operation principle of the present invention is that:
In an ideal case, whether body mode silicon micro-resonator or the micro- resonance of beam type silicon micro-resonator, tuning-fork type silica
Device can be equivalent to a rlc circuit, under dynamic excitation or specified conditions, can form self-oscillation.In practical feelings
In condition, due to the presence of parasitic capacitance, there should be a C in the RLC model of resonatorfIn parallel therewith, which may be expressed as:
Wherein ω is frequency of oscillation, ω0For the intrinsic frequency of resonator, CmFor dynamic capacity, CfFor parasitic capacitance, Q is humorous
The quality factor of vibration device.By above-mentioned model it is found that at pick-up end, resonator itself vibration bring dynamic electric can be not only obtained
Stream can also obtain accumulation signal and pass through the feedthrough electric current that parasitic capacitance is formed.
In traditional test method, since the intrinsic frequency of accumulation signal and resonator is homogenous frequency signal, so dynamic
Electric current and feedthrough electric current are also homogenous frequency signal.In this way, cannot well be separated the two after pick-up end acquires signal, cause
Detection signal-to-noise ratio is lower, and dynamic current is often submerged in the noise of feedthrough electric current, so that resonator cisco unity malfunction.
One of solution of the above problem is exactly by dynamic current and feedthrough current isolation in different frequency ranges.By pushing away
Calculate, half frequency wave can also exciting resonator, according to half frequency wave signal as exciting source, feedthrough electric current will be ω0/ 2, and dynamic
Electric current is still ω0, thus can be very good to separate the two.
The relationship of exciting electric current and exciting force can indicate are as follows:
In formula, C is the size of capacity plate antenna, and x is the vibration displacement of resonator, VdcFor the direct current biasing electricity of excitation resonator
Pressure, | Vac| for the peak value of exchange accumulation signal.By the ω in formula0Replace with ω0/ 2, pass through transformation, it can be seen that half frequency wave swashs
Direct current exciting force, half frequency exciting force and a frequency multiplication exciting force are contained in vibration power F:
So frequency ω0It is ω that/2 half frequency wave, which can produce frequency,0Exciting force, so that exciting resonator, makes it
Vibration is in natural frequency ω0On, generation frequency is ω0Dynamic current.At this point, by parasitic capacitance generate noise frequency still
For ω0/ 2, and useful signal is ω0, can be removed by external circuits such as notch filter, bandpass filters.
Claims (2)
1. a kind of high frequency body modal resonance device test method based on half frequency Electrostatic Excitation, it is characterised in that: including open-loop test
Method and closed loop test method, the calibration that open-loop test method is suitable for laboratory environment medium-high frequency body modal resonance device are tested；
Closed loop test method is suitable for the practical application of industry spot medium-high frequency body modal resonance device；
The open-loop test method, comprising the following steps: the port the A output alternating sinusoidal electricity of vector grid analyzer (10-1)
ω is flowed, by comparator (10-2), sinusoidal current becomes the same frequency square wave of high level 3.3V, low level 0.3V, then through frequency conversion
Circuit (10-3) modulates the signals onto as half-frequency signal ω/2, and the micro- harmonic oscillator of silicon of resonator is passed through together with DC offset voltage
(1) exciting end, when the frequency of alternating sinusoidal current ω and the natural frequency ω of the micro- harmonic oscillator of silicon (1)0When identical, the micro- harmonic oscillator of silicon
(1) resonance is generated with half frequency accumulation signal, and vibration frequency is its natural frequency ω0；The vibration of the micro- harmonic oscillator of silicon (1) produces
Frequency is also ω0Dynamic current, the dynamic current is detected at the pick-up end of the micro- harmonic oscillator of silicon (1), through amplifier (10-4)
After amplification, high-pass filter (10-5) removal feedthrough electric current, the port B of input vector network analysis instrument (10-1) carries out detection point
Analysis；
The closed loop test method, comprising the following steps: in oscillating circuit work, amplifier (11-1) is by feedthrough electric current
ω0/ 2 and dynamic current ω0It simultaneously amplifies, the cutoff frequency of high-pass filter (11-2) is slightly less than ω0, feedthrough has been filtered out with this
Electric current ω0/2；Phase shifter (11-3) adjusts the phase of feedback current, provides self-oscillatory necessary condition, comparator (11-4)
Feedback current is become into square wave, frequency changer circuit (11-5) is input to and is divided, then circuit (11-6) is adjusted by amplitude and is adjusted
Feedback current size, the micro- harmonic oscillator of silicon (1) of the feedback current exciting resonator of final half frequency, entire circuit forms stable
After self-oscillation, the frequency of oscillator is read by frequency counter (11-7).
2. a kind of high frequency body modal resonance device test method based on half frequency Electrostatic Excitation according to claim 1, special
Sign is: can be tested, can also be tested for low-frequency resonator, high frequency body mould for high frequency body modal resonance device
State resonator includes disc type silicon micro-resonator and square plate formula silicon micro-resonator, low-frequency resonator include beam type silicon micro-resonator or
Tuning-fork type silica micro-resonator.
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| US4917498A (en) * | 1987-06-15 | 1990-04-17 | Geary Joseph M | Arrangement for testing grazing hyperboloids and similar reflective solid bodies for shape deviations |
| CN1934455A (en) * | 2004-03-26 | 2007-03-21 | 爱德万测试株式会社 | Test device and test method |
| CN101713811A (en) * | 2009-10-29 | 2010-05-26 | 天津必利优科技发展有限公司 | System for automatically testing parameters of quartz crystal oscillator |
| CN203688739U (en) * | 2013-12-17 | 2014-07-02 | 中国科学院微电子研究所 | Test system for ring oscillator |
| CN104488194A (en) * | 2012-07-26 | 2015-04-01 | 高通股份有限公司 | System and method of determining an oscillator gain |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4917498A (en) * | 1987-06-15 | 1990-04-17 | Geary Joseph M | Arrangement for testing grazing hyperboloids and similar reflective solid bodies for shape deviations |
| CN1934455A (en) * | 2004-03-26 | 2007-03-21 | 爱德万测试株式会社 | Test device and test method |
| CN101713811A (en) * | 2009-10-29 | 2010-05-26 | 天津必利优科技发展有限公司 | System for automatically testing parameters of quartz crystal oscillator |
| CN104488194A (en) * | 2012-07-26 | 2015-04-01 | 高通股份有限公司 | System and method of determining an oscillator gain |
| CN203688739U (en) * | 2013-12-17 | 2014-07-02 | 中国科学院微电子研究所 | Test system for ring oscillator |
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