CN107632637A - A kind of temperature control system of small size vacuum cavity - Google Patents
A kind of temperature control system of small size vacuum cavity Download PDFInfo
- Publication number
- CN107632637A CN107632637A CN201710949336.6A CN201710949336A CN107632637A CN 107632637 A CN107632637 A CN 107632637A CN 201710949336 A CN201710949336 A CN 201710949336A CN 107632637 A CN107632637 A CN 107632637A
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- vacuum tank
- pipeline
- temperature
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- cavity
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Abstract
A kind of temperature control system of small size vacuum cavity, it includes a vacuum tank, the heating system and refrigeration system being cascaded with pipeline are configured with outside the vacuum tank, flow control valve is respectively arranged with the pipeline of series connection, described pipeline connection is arranged at the heat exchanger in vacuum tank, and drawn in the other end of the heat exchanger with pipeline, through circulating pump connection and the heater and refrigerating plant connected, at least one temperature sensor with temperature controller outside wire connection vacuum tank is provided with the vacuum tank, and the temperature controller is at least connected with circulating pump and each flow control valve;It has that structure composition is reasonable, safe and reliable, small volume, the features such as can realizing temperature quick accurate transformation.
Description
Technical field
The present invention relates to a kind of temperature control system of small size vacuum cavity, belong to temperature adjusting technical field.
Background technology
The temperature control system of current vacuum cavity mainly includes vacuum heater, such as electron tubes type furnace apparatus, this
Equipment typically uses the natural type of cooling in cooling, without special cooling system, it is difficult to quickly realize temperature reduction, in addition
This equipment volume is larger, and electric energy consumption is generally larger, not energy-conserving and environment-protective, and is worked under the conditions of higher alternating voltage,
Security performance is not high;Also have the heating that a kind of Resistant heating carried out in vacuum chamber realizes temperature in addition, equally there is also
Only heat up and can not fast cooling the shortcomings that.Although for some more accurate vacuum cavities, special configuration has vacuum system
Cooling system, it uses liquid nitrogen refrigerating generally below -60 DEG C, and vacuum cavity is realized using external refrigeration equipment more than -60 DEG C
Interior temperature reduces, and energy consumption is very big.
The content of the invention
It is an object of the invention to overcome the shortcomings of the prior art, and it is reasonable to provide a kind of structure composition, uses peace
Entirely reliably, small volume, the temperature control system of the small size vacuum cavity of the quick accurate transformation of temperature can be realized.
The purpose of the present invention is completed by following technical solution, a kind of temperature control system of small size vacuum cavity, it
Including a vacuum tank, the heating system and refrigeration system being cascaded with pipeline are configured with outside the vacuum tank, is being gone here and there
It is respectively arranged with flow control valve on the pipeline of connection, described pipeline connection is arranged at the heat exchanger in vacuum tank, and
The other end of the heat exchanger is drawn with pipeline, described through circulating pump connection and the heater and refrigerating plant connected
At least one temperature sensor with temperature controller outside wire connection vacuum tank, and the temperature control are provided with vacuum tank
Device processed is at least connected with circulating pump and each flow control valve.
As preferred:Described heating system includes the heating cavity built with PTC fever tablets, is set on the heating cavity
There is the inlet and outlet of connecting line;Described refrigeration system includes the interior refrigeration cavity for being provided with multistage TEC cooling pieces, the system
The inlet and outlet of connecting line is provided with cold cavity;The matchmaker's fluid circulated is filled with described pipeline;Described
PTC fever tablets connect power supply, the connection of described solid-state relay by respective solid-state relay respectively with multistage TEC cooling pieces
Temperature controller.
As preferred:Described heater and refrigerating plant with pipeline be it is front and rear be sequentially connected in series, and in the connection of centre
It is connected with one on pipeline to be in charge of, this is in charge of the pipe by a flow control valve to connect and access vacuum tank inside heat exchanger
Road connects.
The present invention has structure composition reasonable, safe and reliable, small volume, can realize quick accurate transformation of temperature etc.
Feature.
Brief description of the drawings
Fig. 1 is the structure composition schematic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be described in detail:Shown in Fig. 1, a kind of small size vacuum chamber of the present invention
The temperature control system of body, it includes a vacuum tank 1, the heating system being cascaded with pipeline 2 is configured with outside the vacuum tank 1
System 3 and refrigeration system 4, are respectively arranged with flow control valve 5 on the pipeline 2 of series connection, and the connection of described pipeline 2 is arranged at vacuum
Heat exchanger 6 in container 1, and drawn in the other end pipeline 2 of the heat exchanger 6, connect through circulating pump 7 and connected with described
Heating system 3 and refrigeration system 4, at least one is provided with the vacuum tank 1 and connects 1 outer temperature of vacuum tank with wire 8
The temperature sensor 10 of controller 9, and the temperature controller 9 is at least connected with circulating pump 7 and each flow control valve 5.
Shown in figure, described heating system 3 includes the heating cavity 12 built with PTC fever tablets 11, the heating cavity
The inlet and outlet of connecting line 2 is provided with 12;Described refrigeration system 4 is provided with multistage TEC cooling pieces 13 in including
Freeze cavity 14, and the inlet and outlet of connecting line 2 is provided with the refrigeration cavity 14;Circulation is filled with described pipeline 2
Matchmaker's fluid of flowing, such as molten existing conventional matchmaker's fluid of oil;Described PTC fever tablets 11 and multistage TEC cooling pieces 13 are distinguished
Power supply, described solid-state relay 15 connection temperature controller 9 are connected by respective solid-state relay 15.
Heating system 3 and refrigeration system 4 of the present invention with pipeline 2 be it is front and rear be sequentially connected in series, and centre connection
One is connected with pipeline 2 and is in charge of 16, this is in charge of 16 and handed over by a flow control valve 5 to connect and heat in access vacuum tank 1
The pipeline 2 of parallel operation 6 connects.
In embodiments of the invention, temperature control, performance safety can be realized using 12V DC Low Voltage Technique;Pass through
Control semiconductor element realizes the complete regulation and control of temperature, temperature control console small volume.In the temperature control console of vacuum tank(System)Bag
Containing heating part and refrigerating part, it is possible to achieve temperature is quickly accurately changed.
Claims (3)
1. a kind of temperature control system of small size vacuum cavity, it includes a vacuum tank, it is characterised in that matches somebody with somebody outside the vacuum tank
The heating system and refrigeration system being cascaded with pipeline are equipped with, flow control valve is respectively arranged with the pipeline of series connection,
Described pipeline connection is arranged at the heat exchanger in vacuum tank, and is drawn in the other end of the heat exchanger with pipeline, warp
Circulating pump connects and the heater and refrigerating plant connected, and is provided with least one in the vacuum tank and is connected with wire
The temperature sensor of the outer temperature controller of vacuum tank, and the temperature controller at least with circulating pump and each flow control valve
Connection.
2. the temperature regulation system of vacuum tank at lower voltages according to claim 1, it is characterised in that described adds
Hot systems include the heating cavity built with PTC fever tablets, and the inlet and outlet of connecting line is provided with the heating cavity;Institute
The refrigeration system stated includes the interior refrigeration cavity for being provided with multistage TEC cooling pieces, and connecting line is provided with the refrigeration cavity
Inlet and outlet;The matchmaker's fluid circulated is filled with described pipeline;Described PTC fever tablets and multistage TEC cooling pieces
Power supply, described solid-state relay connection temperature controller are connected by respective solid-state relay respectively.
3. the temperature regulation system of vacuum tank at lower voltages according to claim 1 or 2, it is characterised in that described
Heater and refrigerating plant with pipeline be it is front and rear be sequentially connected in series, and be connected with one on the connecting line of centre and be in charge of, should
It is in charge of and is connected by a flow control valve to connect with accessing the pipeline of vacuum tank inside heat exchanger.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710949336.6A CN107632637A (en) | 2017-10-12 | 2017-10-12 | A kind of temperature control system of small size vacuum cavity |
Applications Claiming Priority (1)
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CN201710949336.6A CN107632637A (en) | 2017-10-12 | 2017-10-12 | A kind of temperature control system of small size vacuum cavity |
Publications (1)
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CN107632637A true CN107632637A (en) | 2018-01-26 |
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Family Applications (1)
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CN201710949336.6A Withdrawn CN107632637A (en) | 2017-10-12 | 2017-10-12 | A kind of temperature control system of small size vacuum cavity |
Country Status (1)
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113064045A (en) * | 2021-04-06 | 2021-07-02 | 青岛科技大学 | Cold-hot compensation semiconductor coupling structure and vacuum temperature control test platform and method thereof |
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CN87215933U (en) * | 1987-11-30 | 1988-08-10 | 上海制冷设备厂 | Energy-saving refrigeration cycle device for cold cupboard |
CN2119616U (en) * | 1992-03-02 | 1992-10-21 | 陈林建 | Common refrigerating circulation arrangement with low energy loss |
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CN203024484U (en) * | 2012-11-16 | 2013-06-26 | 郑州长城科工贸有限公司 | Heating cycle system for sealed refrigeration |
CN103176370A (en) * | 2013-03-13 | 2013-06-26 | 华中科技大学 | Immersion liquid temperature control system for immersion lithography |
CN103210575A (en) * | 2010-10-26 | 2013-07-17 | 地热能源公司 | Method and apparatus for generating electricity by thermally cycling an electrically polarizable material using heat from condensers |
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CN104571183A (en) * | 2014-12-02 | 2015-04-29 | 兰州华宇航天技术应用有限责任公司 | Backheating gas mixed circulating refrigeration, heating and temperature adjustment system |
CN105865102A (en) * | 2016-04-15 | 2016-08-17 | 合肥华凌股份有限公司 | Refrigerating system and refrigerator with same |
CN105865103A (en) * | 2016-04-25 | 2016-08-17 | 合肥晶弘电器有限公司 | Auxiliary defrosting method, refrigerator defrosting method, refrigerating system and refrigerator |
CN105955070A (en) * | 2016-06-30 | 2016-09-21 | 北京瑞禾四方科技有限公司 | Temperature field simulation device and system |
CN106814769A (en) * | 2017-03-27 | 2017-06-09 | 成都深冷科技有限公司 | A kind of high/low temperature cyclic control system and high/low temperature fast control method |
CN107238230A (en) * | 2017-07-04 | 2017-10-10 | 青岛大学 | A kind of dual temperature area semiconductor thermostatic and temperature device |
CN207488844U (en) * | 2017-10-12 | 2018-06-12 | 浙江东成生物科技股份有限公司 | The temperature control system of small size vacuum cavity |
-
2017
- 2017-10-12 CN CN201710949336.6A patent/CN107632637A/en not_active Withdrawn
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Publication number | Priority date | Publication date | Assignee | Title |
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CN87215933U (en) * | 1987-11-30 | 1988-08-10 | 上海制冷设备厂 | Energy-saving refrigeration cycle device for cold cupboard |
CN2119616U (en) * | 1992-03-02 | 1992-10-21 | 陈林建 | Common refrigerating circulation arrangement with low energy loss |
CN1334496A (en) * | 2001-08-14 | 2002-02-06 | 广东生益科技股份有限公司 | Temp control system of drive roller for glue applicator of plate to be foiled |
CN2731363Y (en) * | 2004-10-25 | 2005-10-05 | 科利奥·雅尼克 | Underground heating and refrigerating temperature adjusting system |
CN101059292A (en) * | 2007-05-22 | 2007-10-24 | 上海本家空调系统有限公司 | Water source heat pump system |
CN101074807A (en) * | 2007-05-22 | 2007-11-21 | 上海本家空调系统有限公司 | Hydrothermal pump system |
CN201408825Y (en) * | 2009-05-07 | 2010-02-17 | 联合汽车电子有限公司 | Automotive battery heat managing system |
CN103210575A (en) * | 2010-10-26 | 2013-07-17 | 地热能源公司 | Method and apparatus for generating electricity by thermally cycling an electrically polarizable material using heat from condensers |
CN102616761A (en) * | 2012-04-10 | 2012-08-01 | 瓮福(集团)有限责任公司 | Automatic temperature control system for crystallized phosphoric acid production |
CN102768548A (en) * | 2012-07-25 | 2012-11-07 | 北京卫星环境工程研究所 | Heat sink temperature control system and method for thermal vacuum test |
CN103808102A (en) * | 2012-11-14 | 2014-05-21 | 陈辉俊 | Heat-driven defrosting device using natural circulation and defrosting method using same |
CN203024484U (en) * | 2012-11-16 | 2013-06-26 | 郑州长城科工贸有限公司 | Heating cycle system for sealed refrigeration |
CN203170309U (en) * | 2013-02-27 | 2013-09-04 | 上海亚杜润滑材料有限公司 | Heating and cooling system of reaction kettle |
CN103176370A (en) * | 2013-03-13 | 2013-06-26 | 华中科技大学 | Immersion liquid temperature control system for immersion lithography |
CN203349637U (en) * | 2013-05-21 | 2013-12-18 | 上海东富龙制药设备制造有限公司 | Circulating system for pharmaceutical vacuum drying oven by adopting steam heating and chilled water cooling |
CN203550753U (en) * | 2013-10-29 | 2014-04-16 | 山东新华医疗器械股份有限公司 | Temperature control system with double heat exchangers |
CN104571183A (en) * | 2014-12-02 | 2015-04-29 | 兰州华宇航天技术应用有限责任公司 | Backheating gas mixed circulating refrigeration, heating and temperature adjustment system |
CN105865102A (en) * | 2016-04-15 | 2016-08-17 | 合肥华凌股份有限公司 | Refrigerating system and refrigerator with same |
CN105865103A (en) * | 2016-04-25 | 2016-08-17 | 合肥晶弘电器有限公司 | Auxiliary defrosting method, refrigerator defrosting method, refrigerating system and refrigerator |
CN105955070A (en) * | 2016-06-30 | 2016-09-21 | 北京瑞禾四方科技有限公司 | Temperature field simulation device and system |
CN106814769A (en) * | 2017-03-27 | 2017-06-09 | 成都深冷科技有限公司 | A kind of high/low temperature cyclic control system and high/low temperature fast control method |
CN107238230A (en) * | 2017-07-04 | 2017-10-10 | 青岛大学 | A kind of dual temperature area semiconductor thermostatic and temperature device |
CN207488844U (en) * | 2017-10-12 | 2018-06-12 | 浙江东成生物科技股份有限公司 | The temperature control system of small size vacuum cavity |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113064045A (en) * | 2021-04-06 | 2021-07-02 | 青岛科技大学 | Cold-hot compensation semiconductor coupling structure and vacuum temperature control test platform and method thereof |
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Application publication date: 20180126 |