CN107561785B - Optical alignment device and alignment method thereof - Google Patents
Optical alignment device and alignment method thereof Download PDFInfo
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Abstract
The invention provides an optical alignment device and an alignment method thereof, which are mainly applied to the field of optical alignment of liquid crystal display screens. The device includes: the device comprises a base, a moving guide rail, a guide rail support frame, a reflector, at least one substrate station, at least one transmission device, a polarized light generating device and the like. The transmission device is used for completing the transmission work of the substrate to be aligned, and incident light generated by the polarized light generating device is reflected to the reflector through the spectroscope group and the detection device so as to optically align the substrate to be aligned. The invention also provides an alignment method of the device, which can realize continuous alignment operation through the alternate conversion of the transmission device. The alignment device is more stable and the alignment quality is improved by fixing the base plate station and moving the reflector; meanwhile, the working space and the quality of the whole device are reduced; with the matching of the alignment method, the alignment operation efficiency is improved.
Description
Technical Field
The invention relates to the field of optical alignment of liquid crystal displays, in particular to an optical alignment device and an alignment method thereof.
Background
Liquid crystal displays have been widely used in daily life. The liquid crystal alignment control technology is one of the basic technologies for manufacturing high-quality liquid crystal panels, and the quality of the alignment effect directly affects the final picture quality of the liquid crystal display. The current alignment technology is mainly divided into two types of traditional rubbing alignment and photo-alignment, and the photo-alignment relative rubbing alignment has the characteristics of good alignment effect, high yield and the like, and gradually replaces the traditional rubbing alignment.
Generally the optical alignment technique is performed on a photo-alignment device. The inventors have found that in the prior art, there are the following technical disadvantages: the large jitter in the alignment scanning process is caused by the factors of long moving guide rail, large workpiece bearing platform, large substrate mass and the like; the moving guide rail is irradiated by alignment light to influence alignment quality; the double stations need four substrate spaces, and the occupied space is large.
Therefore, it is necessary to develop an optical alignment apparatus that occupies a small space and has high alignment quality.
Disclosure of Invention
The invention aims to provide an optical alignment device and an alignment method thereof, which are used for solving the problems of unstable alignment quality and low alignment efficiency of the conventional optical alignment device.
To solve the above technical problem, an aspect of the present invention provides an optical alignment apparatus, including: the device comprises a base, a moving guide rail, a guide rail support frame, a reflector, at least one substrate station, at least one transmission device and a polarized light generating device.
The substrate comprises a first end and a second end opposite to the first end, the first end of the substrate is provided with a guide rail supporting frame, and the second end of the substrate is provided with a polarized light generating device for generating incident light; the moving guide rail is arranged on the guide rail support frame, and a reflecting mirror capable of moving along the moving guide rail is arranged on the moving guide rail; the at least one substrate station is positioned below the reflector and fixed on the base; the at least one transmission device is positioned at one side of the substrate station; during optical alignment operation, the transmission device transmits the substrate to be aligned to the substrate station, the reflector reflects the incident light generated by the polarized light generating device to the substrate station, and the optical alignment operation is performed on the substrate to be aligned on the substrate station.
Optionally, the optical alignment apparatus further includes a detection apparatus for detecting an optical characteristic of the incident light; the detection device is positioned below the polarized light generation device.
Optionally, the optical alignment apparatus further includes a light splitting mirror group, the light splitting mirror group and the reflective mirror are located at the same height, the light splitting mirror group is located between the polarized light generating apparatus and the detection apparatus, a part of the incident light is reflected to the reflective mirror through the light splitting mirror group, and the rest of the incident light reaches the detection apparatus through the light splitting mirror group.
The reflecting surface of the reflecting mirror is parallel to the reflecting surface of the light splitting mirror group.
Optionally, the detecting device includes an analyzer, a light intensity detector or an optical detector, or a combination of the three or any two of them.
Optionally, the number of the substrate stations is two or three; the number of the transmission devices is one or two.
Optionally, the optical alignment apparatus further includes a temperature control device, where the temperature control device is located on the polarized light generating device and is configured to control the temperature of the polarized light generating device.
Optionally, the polarized light generating device is a laser or a mercury lamp.
And the reflection width of the reflector is greater than or equal to the width of the substrate to be aligned along the alignment direction.
Optionally, the optical alignment apparatus further includes a light beam adjusting device, and the light beam adjusting device is disposed between the reflective mirror and the beam splitting mirror group, and is configured to adjust characteristics of light beams.
The alignment device is positioned above the substrate station and used for detecting whether the position of the substrate to be aligned is accurate or not.
Optionally, on the premise of not affecting the movement of the reflective mirror and the operation of the transmission module, the polarized light generating device, the beam splitter group, the detecting device and the light beam adjusting device are installed as close as possible to the edge of the guide rail support frame.
In order to better achieve the object of the present invention, another aspect of the present invention provides an alignment method of an optical alignment apparatus, comprising the steps of:
s1: conveying a substrate to be aligned to the substrate station through a conveying device, and adjusting the posture of the substrate to be aligned;
s2: carrying out optical alignment on a substrate to be aligned by utilizing a reflector;
s3: and conveying the substrate which is subjected to optical alignment from the substrate station by the conveying device.
Alternatively, in the aligning method of the optical aligning apparatus, when the number of the substrate stations is at least two, in S2,
after the optical alignment of the substrate to be aligned at one substrate station is completed,
and moving the reflector to the position above the substrate to be aligned on the substrate station which is not subjected to optical alignment, and respectively carrying out optical alignment on the substrate to be aligned which is not subjected to optical alignment.
According to the optical alignment device and the alignment method thereof provided by the invention, the working space is reduced by fixing the substrate stations and moving the reflectors to perform optical alignment on the substrate to be aligned of each substrate station, and the problem of poor alignment quality caused by the shaking of the substrate stations is solved. Furthermore, according to the optical alignment device, the alignment method of the optical alignment device is provided, and a multi-station step-by-step alternate operation mode is adopted, so that the working efficiency is improved.
Drawings
FIG. 1 is a front view of an optical alignment apparatus according to a first embodiment of the present invention;
FIG. 2 is a top view of an optical alignment apparatus according to a first embodiment of the present invention;
FIG. 3 is a left side view of an optical alignment apparatus according to a first embodiment of the present invention;
FIG. 4 is a front view of an optical alignment apparatus without a detection device according to an embodiment of the present invention;
FIGS. 5A and 5B are schematic diagrams of a transmission device according to an embodiment of the invention;
FIG. 5C is a schematic view of a second substrate station with a turntable according to one embodiment of the present invention;
FIG. 6 is a front view of an optical alignment apparatus according to a third embodiment of the present invention;
FIGS. 7A, 7B and 7C are top views of an optical alignment apparatus according to a third embodiment of the present invention;
fig. 8 is a flowchart of an alignment method of an optical alignment apparatus according to a fourth embodiment of the present invention.
In the figure: 1-a polarized light generating device; 2-a spectroscope group; 3-a detection device; 4-a guide rail support frame; 5-a motion guide rail; 6-a reflector; 7A, 7B, 7C-substrate station; 8A, 8B-transmission means; 9A, 9B-alignment module; 10-a substrate; 11A-incident light; 11B-detecting polarization light; 11C-reflected light; 11D-alignment light.
Detailed Description
The following describes an optical alignment apparatus and an alignment method thereof in detail with reference to the accompanying drawings and specific examples. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Example one
Fig. 1 to 3 are a front view, a top view and a left side view of an optical alignment apparatus according to a first embodiment of the present invention.
Referring to fig. 1 to 3, the optical alignment apparatus includes: a polarized light generating device 1 for generating incident light 11A, a spectroscope group 2 for separating the incident light 11A into a polarization detecting light 11B and a reflected light 11C, a detection device 3 for measuring the optical characteristics of the polarization detection light 11B, a guide rail support frame 4 for bearing a moving guide rail 5, a moving guide 5 for moving the reflecting mirror 6 in the alignment direction or the reverse direction, a beam adjusting unit 12 for adjusting the reflected light 11C, a reflector 6 for reflecting the reflected light 11C to the substrate to be aligned, a substrate station 7A for carrying the substrate to be aligned, a substrate station 7B, a transfer device 8A, 8B for transferring the substrate to the substrate station 7A, the substrate station 7B and adjusting the substrate posture, an alignment module 9A and an alignment module 9B for detecting the substrate attitude, a base 10 for carrying the entire apparatus, and a beam adjusting unit 12.
The inventors have studied and found that the intensity and polarization uniformity of alignment light 11D incident on the substrate surface have a large influence on the alignment quality according to the conventional optical alignment technique. The quality of the incident light 11A generated by the polarized light generating device 1 is poor, and the incident light is introduced into the lower layer by layer, so that the polarized light generating device 1 needs to have good stability in the maintenance period.
For this reason, it is preferable that the polarized light generating device 1 is mounted on a stable frame as far as possible from the vibration source to reduce the influence of the vibration on the polarized light generating device.
When the polarized light generating device is a mercury lamp, it is preferable that a temperature control device is added to the polarized light generating device 1 to control the temperature of the polarized light generating device 1, so as to prevent unstable incident light 11A from being generated by the polarized light generating device 1 due to an excessively high temperature.
Further, on a spatial scale, the width of the reflecting surface of the reflector 6 is greater than or equal to the width of the substrate to be aligned, the width of the reflected light 11C generated by the light speed adjusting unit 12 is greater than or equal to the width of the reflecting surface of the reflector, the width of the spectroscope group is greater than or equal to the width of the light speed adjusting unit, and the width of the incident light 11A generated by the polarized light generating device is greater than or equal to the width of the spectroscope group. Therefore, the alignment direction of the substrate to be aligned can be completely covered by the incident light 11A generated by the polarized light generating device 1 after being reflected (that is, the alignment width of the alignment light can completely cover the alignment width of the substrate to be aligned), and the alignment operation can be completed by the alignment light 11D at one time.
In order to control the intensity of the alignment light 11D, the spectroscope group 2 and the detection device 3 are provided in the present embodiment. Incident light 11A generated by the polarized light generating device 1 is split by the beam splitter group 2, a part of the incident light refracts detection light 11B, and the other part of the incident light reflects reflected light 11C. Wherein the detecting light 11B is irradiated onto the detecting means 3 for detecting the energy of the irradiation. In order to completely divide the incident light 11A into the detecting light 11B and the reflected light 11C by the beam splitter 2, the beam splitter 2 must be able to receive the whole incident light 11A. The splitting ratio of the splitting mirror group 2 can be changed according to the incident light 11A generated by the polarized light generating device 1, and the lowest energy received by the detecting device 3 is ensured.
The detecting device 3 includes, but is not limited to, a polarization detector for detecting the detecting light 11B, and may further include a light intensity detector, and/or other optical detectors. The detection device 3 can be selected according to specific conditions so as to meet the requirements of different substrates.
Further, if there is no optical characteristic detection requirement, the detection device 3 and the spectroscope group 2 may be eliminated, and then a mirror may be used to replace the spectroscope group, specifically referring to fig. 4.
The light beam adjusting unit 12 is provided in the present embodiment to enhance the illumination intensity. Thereby making the reflected light 11C better meet the alignment requirements.
Preferably, the polarized light generating device 1, the spectroscope group 2 and the detection device 3 are as close to the edge of the motion guide rail 6 as possible on the premise of not affecting each other. This shortens the optical path, reduces energy loss, and reduces the requirements of the beam adjusting unit 12.
In this embodiment, the support surface of the guide rail support frame 4 is as large as possible, and it is basically sufficient that the transmission of the upper and lower plates of the transmission device 8 and the reflected light 11 are not blocked, so that the movement guide rail can be more stable, and the vibrations of the movement guide rail 5 and the reflective mirror 6 can be reduced.
The reflecting surfaces of the reflecting mirror 6 and the spectroscope group 2 arranged in this embodiment should be parallel to ensure that alignment light can vertically enter the substrate station 7A and the substrate station 7B, thereby achieving the effect of improving the quality of optical alignment.
In this embodiment, a transfer device 8A and a transfer device 8B are provided for transferring the substrate to the substrate station or transferring the aligned substrate. Referring to fig. 5A and 5B, the transferring device may be two independent upper and lower plate manipulators, or one upper and lower plate manipulators may be disposed on a moving guide rail capable of moving along the direction of alignment or in the opposite direction, and the moving guide rail may move to drive the manipulator to switch between the transferring device 8A and the transferring device 8B.
In this embodiment, an alignment module 9A and an alignment module 9B are provided to detect whether the posture of the substrate on the substrate station is accurate. The alignment modules can be two independent modules, or one alignment module can be placed on a moving guide rail which can move along the direction of alignment or in the opposite direction, and the movement of the moving guide rail can drive the alignment module to switch between the alignment module 7A and the alignment module 7B.
Example two
Fig. 5C shows another structure of the second transfer device and the substrate station according to the first embodiment of the present invention, which is different from the first embodiment in that a structure of a turntable 13A and a turntable 13B are added to the substrate station 7A and the substrate station 7B, respectively.
Specifically, the substrate is transported to the substrate station 7A by the transport device 8A, and the posture of the substrate to be aligned is adjusted by the rotating table 13A under the detection of the alignment module until the substrate to be aligned is completely aligned.
Preferably, the posture adjustment can be completed by the transmission device 8A and the rotating platform 13A together, wherein the transmission device 8A performs preliminary adjustment, and the rotating platform 13A performs precise adjustment; the transport device 8B and the rotary table 13B also work accordingly.
The added rotating platform 13A and rotating platform 13B in this embodiment can effectively increase the speed of adjusting the posture of the substrate to be aligned, reduce the requirements on the conveying device 8A and the conveying device 8B, and increase the service life.
EXAMPLE III
Fig. 6 and 7A are a front view and a top view of an optical alignment apparatus according to a third embodiment of the present invention.
FIGS. 7B and 7C are top views of the optical alignment device of the third embodiment of the present invention transformed from FIG. 7A.
The difference from the first embodiment is that: the number of the alignment modules is reduced from two to 1; the number of the substrate stations is increased from two to three, the substrate stations are respectively a substrate station 7A, a substrate station 7B and a substrate station 7C, the 3 stations can be switched in a single direction through a conveying mechanism, and the conveying mechanism can be in a belt conveying mode, a chain conveying mode, a sliding table conveying mode and the like. The conveying devices 8A and 8B are correspondingly distributed in front of the substrate station 7A and the substrate station 7C. The substrate station 7A is an upper plate station, the substrate station 7B is an alignment station, and the substrate station 7C is a lower plate station. Wherein the stations are switched to roll from the substrate station 7A to the substrate station 7C in sequence by the transfer mechanism.
Specifically, the substrate to be aligned is switched to the transmission device 8A, the transmission device 8A transmits the substrate to be aligned to the substrate station 7A, and the posture of the substrate to be aligned is adjusted to meet the alignment requirement of the alignment module; further, the aligned substrate to be aligned is conveyed to the substrate station 7B by the conveying mechanism; further, performing alignment operation on the substrate to be aligned at the substrate station 7B; further, the substrate after the alignment operation is completed is conveyed to a substrate station 7C by a conveying mechanism; further, the transfer device 8B transfers the aligned substrate from the substrate station 7C.
In the embodiment, a flow process of the alignment substrate to be aligned is adopted, and the positions of the upper substrate and the lower substrate avoid the alignment station 7B, so that the interference of the transmission device, the alignment module and the posture adjustment operation on the alignment substrate 7B is avoided, and the stability of the alignment substrate 7B is further improved.
Further, since the alignment work is performed only on the alignment substrate 7B, the length of the moving rail 5 is reduced by half, so that the stability of the moving rail is further improved, and the quality of the alignment work is improved.
As in the embodiment, the conveying device in this embodiment may be two independent upper and lower plate manipulators, or may be an upper and lower plate manipulator disposed on a moving guide rail capable of moving along the direction of alignment or in the opposite direction, and the movement of the moving guide rail may drive the manipulator to switch between the conveying device 8A and the conveying device 8B.
Similarly, the substrate loading station in this embodiment may further include a rotating table to assist in adjusting the position of the substrate to be aligned.
Further, on this basis, the positional relationship of the three substrate stations may be changed into the form as shown in fig. 7B and 7C. Specifically, the polarized light generating device is arranged on one side of the alignment station. This form achieves the object of shortening the optical path, and thus reduces the requirements for the beam adjusting unit 12.
Example four
Referring to fig. 1, 2 and 8, the present embodiment provides an alignment method of an optical alignment mechanism.
In this embodiment, two substrate stations are provided, including a first substrate station and a second substrate station.
Specifically, the incident light 11A generated by the polarized light generating device 1 is divided into a polarization detecting light 11B propagating continuously along the incident direction through the spectroscope assembly 2 and a reflected light 11C perpendicular to the incident direction, wherein the polarization detecting light 11B is perpendicularly incident on the detection device 3 capable of detecting optical characteristics such as polarization state, etc., the reflected light 11C is propagated to the reflecting mirror 6 through the light beam adjusting unit 12, and is reflected again through the reflecting mirror 6 to form an alignment light 11D for alignment of the substrate, the reflecting mirror 6 is disposed on the moving guide 5 and can move along the moving guide 5 in the alignment direction or in the reverse direction, when the moving guide 5 of the reflecting mirror 6 aligns the first substrate station 7A, the transmission device 8B uploads the substrate to the substrate station 7B, and simultaneously, the alignment module 9B performs attitude detection on the substrate station 7B and performs adjustment through the transmission device 8B, after the alignment of the substrate station 7A is completed, the substrate station 7B is aligned by moving the reflector 6, and simultaneously, the transmission device 8A carries out the unloading and the loading of a new substrate on the aligned substrate on the substrate station 7A, and the process is repeated until the batch process is finished.
The optical alignment method provided by the embodiment makes full use of the working time of each mechanism, and improves the efficiency of alignment operation.
EXAMPLE five
Referring to fig. 6 to 7C, another alignment method of an optical alignment apparatus is provided in this embodiment. According to the third embodiment, the optical alignment method of the present embodiment is also changed accordingly.
Specifically, the conveying device 8A conveys the substrate to be aligned to the substrate station 7A, the posture of the substrate to be aligned is adjusted under the inspection of the alignment device, after the posture adjustment is completed, the conveying mechanism conveys the substrate to be aligned to the alignment station and completes the alignment operation, after the alignment is completed, the conveying mechanism conveys the substrate to be aligned to the lower plate station, and the conveying device 8B conveys the substrate to be aligned from the lower plate station, so that the alignment operation of one substrate is completed.
Further, a rotating table mechanism can be added to the plate feeding station, so that the posture adjustment mode is completed by the rotating table.
The embodiment adds a substrate station to separately complete the upper plate operation, the alignment operation and the lower plate operation. The flow type operation mode makes the operation simpler, the requirement on the transmission device in the device is reduced, and the alignment module is simplified, so the service life of the whole device is prolonged; meanwhile, the alignment operation is only completed on the substrate station 7B, so that the length of the moving guide rail is reduced, the stability of the alignment operation is improved, and the alignment quality is improved.
In summary, the optical alignment apparatus and the alignment method thereof of the present invention can improve the quality of optical alignment and improve the efficiency of alignment operation; to a certain extent, the occupied space of the alignment device is also reduced.
The emphasis of each embodiment in the present specification is on the difference from the other embodiments, and the same and similar parts among the various embodiments may be referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (14)
1. An optical alignment apparatus, comprising: the device comprises a base, a moving guide rail, a guide rail support frame, a reflector, at least one substrate station, at least one transmission device and a polarized light generating device;
the base is provided with the guide rail support frame, the at least one substrate station and a polarized light generating device for generating incident light; the moving guide rail is arranged on the guide rail support frame, and a reflecting mirror capable of moving along the moving guide rail is arranged on the moving guide rail; the at least one transmission device is positioned at one side of the substrate station; during optical alignment operation, the transmission device transmits the substrate to be aligned to the substrate station, the reflector reflects the incident light generated by the polarized light generating device to the substrate station, and the optical alignment operation is performed on the substrate to be aligned on the substrate station.
2. The optical alignment device of claim 1, further comprising a detection device for detecting an optical characteristic of the incident light; the detection device is positioned below the polarized light generation device.
3. The optical alignment apparatus according to claim 2, further comprising a beam splitter group, wherein the beam splitter group and the reflective mirror are located at the same height, the beam splitter group is located between the polarized light generating device and the detecting device, a portion of the incident light is reflected to the reflective mirror through the beam splitter group, and the remaining portion of the incident light reaches the detecting device through the beam splitter group.
4. The optical alignment device of claim 3, wherein the reflective surface of the mirror and the reflective surface of the beam splitter group are parallel to each other.
5. Optical alignment device according to claim 2, wherein the detection means comprise a polarization detector, a light intensity detector or an optical detector.
6. The optical alignment apparatus of claim 1, wherein the number of substrate stations is two or three.
7. Optical alignment device according to claim 1, wherein the number of transport devices is one or two.
8. The optical alignment device according to claim 1, further comprising a temperature control device on the polarized light generating device for controlling the temperature of the polarized light generating device.
9. Optical alignment apparatus according to claim 1, wherein the polarized light generating means is a laser or a mercury lamp.
10. The optical alignment device according to claim 1, wherein the reflective width of the mirror is greater than or equal to the width of the substrate to be aligned in the alignment direction.
11. The optical alignment apparatus of claim 3, further comprising a beam conditioning device disposed between the mirror and the beam splitting mirror group for adjusting beam characteristics.
12. The optical alignment apparatus according to claim 1, further comprising an alignment device located above the substrate station for detecting whether the position of the substrate to be aligned is accurate.
13. An alignment method based on the optical alignment apparatus of claim 1, comprising the steps of:
s1: conveying a substrate to be aligned to the substrate station through a conveying device, and adjusting the posture of the substrate to be aligned;
s2: carrying out optical alignment on a substrate to be aligned by utilizing a reflector;
s3: and conveying the substrate which is subjected to optical alignment from the substrate station by the conveying device.
14. The alignment method of optical alignment apparatus according to claim 13, wherein when the number of substrate stations is at least two, in S2,
after the optical alignment of the substrate to be aligned at one substrate station is completed,
and moving the reflector to the position above the substrate to be aligned on the substrate station which is not subjected to optical alignment, and respectively carrying out optical alignment on the substrate to be aligned which is not subjected to optical alignment.
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| CN108761926A (en) * | 2018-05-09 | 2018-11-06 | 深圳市华星光电技术有限公司 | Orientation microcosmic detection equipment and orientation detection method |
| US10720354B2 (en) * | 2018-08-28 | 2020-07-21 | Axcelis Technologies, Inc. | System and method for aligning light-transmitting birefringent workpieces |
| CN111781773B (en) * | 2019-04-04 | 2022-07-01 | 上海微电子装备（集团）股份有限公司 | Photo-alignment apparatus and photo-alignment method |
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| JP3678120B2 (en) * | 2000-06-06 | 2005-08-03 | ウシオ電機株式会社 | Polarized light irradiation device |
| KR101113109B1 (en) * | 2010-02-12 | 2012-02-15 | (주)엘립소테크놀러지 | Apparatus for measuring of aligning state of alignment layer and method for measuring tht same |
| JP5915888B2 (en) * | 2012-02-02 | 2016-05-11 | 株式会社リコー | Alignment film processing equipment |
| JP5607104B2 (en) * | 2012-04-25 | 2014-10-15 | 岩崎電気株式会社 | Polarized UV irradiation device |
| JP5862616B2 (en) * | 2013-07-17 | 2016-02-16 | ウシオ電機株式会社 | Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment |
| CN203759391U (en) * | 2014-04-17 | 2014-08-06 | 成都京东方光电科技有限公司 | Optical alignment device |
| CN204406005U (en) * | 2015-02-28 | 2015-06-17 | 成都京东方光电科技有限公司 | Light orientation apparatus |
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