CN107546035A - High-precision Vacuum printing capacitor and its application - Google Patents

High-precision Vacuum printing capacitor and its application Download PDF

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Publication number
CN107546035A
CN107546035A CN201710816255.9A CN201710816255A CN107546035A CN 107546035 A CN107546035 A CN 107546035A CN 201710816255 A CN201710816255 A CN 201710816255A CN 107546035 A CN107546035 A CN 107546035A
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CN
China
Prior art keywords
capacitor
print
vacuum printing
precision vacuum
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710816255.9A
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Chinese (zh)
Inventor
刘更涛
顾好粮
王学宝
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BEIJING SANXIONG SCIENCE AND TECHNOLOGY Co
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BEIJING SANXIONG SCIENCE AND TECHNOLOGY Co
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Priority to CN201710816255.9A priority Critical patent/CN107546035A/en
Publication of CN107546035A publication Critical patent/CN107546035A/en
Pending legal-status Critical Current

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Abstract

A kind of high-precision Vacuum printing capacitor and its application, high-precision Vacuum printing capacitor by capacity substrate (4), print capacitor (3), shell (2), vacuumize interface (1) and capacitive electrode plates lead (6) forms;Capacity substrate (4) is less than 0.5 × 10 using loss tangent‑3Insulating materials;Print capacitor (3) is using printed circuit board technology, in the paired capacitor plate that the upper and lower surface relative position of capacity substrate (4) is set;Have on shell (2) and vacuumize interface (1), shell (2) surrounds print capacitor (3), and vacuum cavity (5) is formed around print capacitor (3);Print capacitor (3) is connected by battery lead plate lead (6) with external circuit.The capacitor can be used in high-frequency circuit, and it has higher pressure-resistant, more high q-factor, high accuracy, the characteristic for being particularly more high stability.

Description

High-precision Vacuum printing capacitor and its application
Technical field
The present invention relates to a kind of plane-parallel capacitor, and in particular to a kind of vacuum applied to High-precision high-frequency oscillating circuit Plane-parallel capacitor.
Background technology
Capacitor, as the high-accuracy resonance circuit of level Four bar mass spectrum, it is necessary to use high q-factor, high pressure, high stability electric capacity Device.For the mass spectrometric frequency-selecting resonance circuit of level Four bar, high q-factor can ensure its narrow-band characteristic, so as to obtain pure radio frequency just String ripple.Proved from the mass spectrographic theory and practice of level Four bar, the sine wave of high quality directly affects the selectivity of fragment ion, frequency-selecting The amplitude of resonance circuit determines mass measurement scope, so the maximum of its operating voltage volts up to ten thousand.And stability is even more straight Connect the degree of accuracy for having influence on quality readings and resolution ratio.Due to above reason, existing various forms of capacitors can not all meet The mass spectrometric demand of level Four bar.Selection is typically only capable to using special cermacis as substrate, the capacitor of glass glaze shell encapsulation can To meet the requirement of high withstand voltage and high q-factor.Because the technology difficulty of these high withstand voltage high q-factor special cermacis dielectric capacitances is big, Still it is difficult to meet the mass spectrometric requirement of level Four bar in terms of stability.To find out its cause, mainly pottery material adsorption capacity is strong, institute To be influenceed greatly by ambient temperature and humidity, and environmental factor before and after the unmanageable encapsulation of encapsulation technology, so as to have influence on its stability.
The content of the invention
To solve capacitor material in the prior art and environment (mainly humiture and dust) to its dielectric constant and damage The influence of angle tangent stability is consumed, the present invention provides a kind of high-precision Vacuum printing capacitor, selected in wide frequency ranges condition Under still there is the material of fine dielectric constant stability to be medium, it is auxiliary using printed circuit technique in substrate overlying print capacitor Surrounded with vacuum cavity, realize high withstand voltage, high frequency, high q-factor, high accuracy and the high stability of capacitor.
To achieve the above object, the present invention includes following technical scheme:
A kind of high-precision Vacuum printing capacitor, by capacity substrate 4, print capacitor 3, shell 2 and capacitive electrode plates lead 6 Composition;Wherein,
The capacity substrate 4 is less than 0.5 × 10 using loss tangent-3Insulating materials;
The print capacitor 3 be using printed circuit board technology, the upper and lower surface relative position of capacity substrate 4 set into To capacitor plate;
Have on shell 2 and vacuumize interface 1, shell 2 surrounds print capacitor 3, and vacuum chamber is formed around print capacitor 3 Body 5;
Print capacitor 3 is connected by battery lead plate lead 6 with external circuit.
High-precision Vacuum printing capacitor as described above, it is preferable that the material of the capacity substrate 4 is polytetrafluoroethyl-ne Alkene, polystyrene, mica or ceramics.
High-precision Vacuum printing capacitor as described above, it is preferable that the thickness of the capacity substrate 4 is 0.25~5mm.
High-precision Vacuum printing capacitor as described above, it is preferable that the print capacitor 3 is one or more, is printed The material of electric capacity is copper, silver, Kufil or graphite.
High-precision Vacuum printing capacitor as described above, it is preferable that the print capacitor 3 is equal apart from the distance of shell 2 Not less than 1mm.
High-precision Vacuum printing capacitor as described above, it is preferable that the area of the print capacitor 3 is S=C4 π kd/ ε, C be capacitance with faradmeter, π is pi, and k is electrostatic force constant, and d is distance between polar plate, and ε is relative dielectric constant;Print The thickness of brush capacitor plate 3 is 0.018 or 0.035mm.
High-precision Vacuum printing capacitor as described above, it is preferable that the housing 2 uses high-strength insulating material.
High-precision Vacuum printing capacitor as described above, it is preferable that gluing is used between the housing and capacity substrate 4 Agent or rubber ring sealing.
High-precision Vacuum printing capacitor as described above, it is preferable that the vacuum cavity 5 is vacuum state, is vacuumized Interface 1 is sealed.
On the other hand, the present invention provides high-precision Vacuum printing capacitor as described above answering in high-frequency circuit With.
The beneficial effect of the high-precision Vacuum printing capacitor of the present invention is:Capacitor substrate is using polytetrafluoroethylene (PTFE) etc. The insulating materials of low loss tangent, utilize high stability (its dielectric constant of its material in itself:Working frequency is in 50-1MHz In the range of do not measure its change, for temperature change in instrument use environment excursion, conventional meanses do not measure its change), it is low Loss angle tangent (in below 30MHz, is maintained at 10-4Magnitude is horizontal), it is easy to obtain high q-factor (105Magnitude is horizontal), line expansion Coefficient is small by (7.1 × 10-5/ DEG C), structure temperature stability is good.Using printed-board technology, capacitor plate accurate can be controlled Size and shape, the print capacitor of high precision under very economical process conditions, can be obtained.But directly use, its is long-term Stability, influenceed by environmental factor, do not reach mass spectrometric requirement still.Then, the present invention natively has using mass spectrograph Vacuum source environment, print capacitor is encapsulated in closed shell, vacuum is evacuated to by mass spectrometric vacuum system, makes printing electric Hold and obtain stable dry control environment, it is easy to just reach stability requirement.In addition, the capacitor of the present invention is directly made Into vacuum lumen, high precision capacitor can be used as to be used alone.Its performance reaches following design requirement:
(1) high accuracy:Condenser capacity can accurately control the 0.1% of several pico farads.
(2) high q-factor:The Q values of capacitor are up to 105More than.
(3) high stability:Electric capacity comprehensive stability test in six months under the conditions of high frequency (1MHz) is excellent.
(4) high withstand voltage:Every millimeter of ptfe substrate is resistant to 60 kilovolts of high pressures.
Brief description of the drawings
Fig. 1 is a kind of longitudinal profile structure schematic of optimal technical scheme high accuracy Vacuum printing capacitor of the present invention.
Fig. 2 is a kind of horizontal cross-section structure diagram of optimal technical scheme high accuracy Vacuum printing capacitor of the present invention.
Fig. 3 is mass resolution month statistic curve.
Fig. 4 is mass spectrum mass number month curve.
Embodiment
For the high-precision Vacuum printing capacitor of the present invention is expanded on further, make more to say in detail with reference to embodiment It is bright.
Embodiment 1
As depicted in figs. 1 and 2, high-precision Vacuum printing capacitor is by substrate 4, copperplate printing electric capacity, shell 2 and electric capacity electricity Pole plate lead 6 forms.Substrate selection model F4BM220 Copper Clad Laminates Based On Polytetrafluoroethylene, gauge thickness 2mm, its dielectric constant When 2.2, loss angle tangent 10GHz≤7 × 10-5, according to these parameters, the polar plate area for calculating printing 3Pf electric capacity is 308.44mm2, finally it is defined as the disk for being shaped as radius 9.91mm of capacitor plate.Done using polyether-ether-ketone (PEEK) material Housing.
Using printed circuit board technology, a pair of prints are made in upper and lower two surfaces relative position of ptfe substrate 4 Brush capacitor plate 3, is the disk of 9.91 radiuses, and capacitor plate thickness is 0.035mm.Have on shell 2 and vacuumize interface 1, Shell 2 surrounded print capacitor, is sealed between housing and ptfe substrate with rubber seal ring, in copperplate printing electric capacity 3 weeks Enclose to form vacuum cavity 5.Distance 1mm of two pairs of print capacitor pole plates 3 apart from shell 2.Two panels print capacitor pole plate 3 passes through respectively Lead 6 is connected with external equipment.
Embodiment 2
By the vacuum interface 1 of the high-precision Vacuum printing capacitor described in embodiment 1 be connected to level Four bar it is mass spectrometric before Between level pump and molecular pump, the vacuum of vacuum cavity 5 is maintained at below 100Pa, open the mass spectrometric correcting fluid of level Four bar (F43) level Four bar mass spectrometer system, the fragment peak of observation matter nucleocytoplasmic ratio 502, are tuned, and records fragment peak Abundances, quality readings And resolution ratio.Under 1MHz radio frequency conditions, tested through six months, mass number long-time stability, mass resolution long-time stability Data are shown in Table 1-4.
The peak bob (strength stability) of table 1
The demeanour stability of table 2
The monthly tabular value of resolution ratio stability of table 3
The monthly Data-Statistics of resolution ratio
The mass number stability month table of table 4
January 2 months March April May June Extreme difference
69 69.01 69.01 69.02 69.02 69.02 69.02 0.01
219 219.01 219.02 219.03 219.02 219.03 219.02 0.02
502 502.03 502.05 502.07 502.05 502.06 502.05 0.04
Embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, about the common of technical field Technical staff, without departing from the spirit and scope of the present invention, it can also make a variety of changes and modification, thus it is all Equivalent technical scheme falls within scope of the invention, and scope of patent protection of the invention should be defined by the claims.

Claims (10)

1. a kind of high-precision Vacuum printing capacitor, it is characterised in that it is by capacity substrate (4), print capacitor (3), shell (2) formed with capacitive electrode plates lead (6);Wherein,
The capacity substrate (4) is less than 0.5 × 10 using loss tangent-3Insulating materials;
The print capacitor (3) be using printed circuit board technology, the upper and lower surface relative position of capacity substrate (4) set into To capacitor plate;
Have on shell (2) and vacuumize interface (1), shell (2) surrounds print capacitor (3), is formed around print capacitor (3) Vacuum cavity (5);
Print capacitor (3) is connected by battery lead plate lead (6) with external circuit.
2. high-precision Vacuum printing capacitor as claimed in claim 1, it is characterised in that the material of the capacity substrate (4) For polytetrafluoroethylene (PTFE), polystyrene, mica or ceramics.
3. high-precision Vacuum printing capacitor as claimed in claim 2, it is characterised in that the thickness of the capacity substrate (4) For 0.25~5mm.
4. high-precision Vacuum printing capacitor as claimed in claim 1, it is characterised in that the print capacitor (3) is one Or it is multiple, the material of print capacitor is copper, silver, Kufil or graphite.
5. high-precision Vacuum printing capacitor as claimed in claim 1, it is characterised in that print capacitor (3) distance is outer The distance of shell (2) is not less than 1mm.
6. high-precision Vacuum printing capacitor as claimed in claim 1, it is characterised in that the area of the print capacitor (3) For S=C4 π kd/ ε, C be capacitance with faradmeter, π is pi, and k is electrostatic force constant, and d is distance between polar plate, and ε is relative Dielectric constant;The thickness of print capacitor pole plate (3) is 0.018 or 0.035mm.
7. high-precision Vacuum printing capacitor as claimed in claim 1, it is characterised in that the housing (2) uses high intensity Insulating materials.
8. high-precision Vacuum printing capacitor as claimed in claim 1, it is characterised in that the housing and capacity substrate (4) Between sealed using adhesive or rubber ring.
9. the high-precision Vacuum printing capacitor as any one of claim 1-8, it is characterised in that the vacuum cavity (5) it is vacuum state, vacuumizes interface (1) and sealed.
10. application of the high-precision Vacuum printing capacitor in high-frequency circuit as claimed in any one of claims 1-9 wherein.
CN201710816255.9A 2017-09-11 2017-09-11 High-precision Vacuum printing capacitor and its application Pending CN107546035A (en)

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Application Number Priority Date Filing Date Title
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110316457A (en) * 2019-04-11 2019-10-11 武汉大学 Printed electronic packing device and design method based on magnetic resonance wireless power technology
CN110329631A (en) * 2019-04-11 2019-10-15 武汉大学 The luminous packing device of printing based on magnetic resonance wireless power technology and design method
CN110329660A (en) * 2019-04-11 2019-10-15 武汉大学 Printed sensor packing device and design method based on magnetic resonance wireless power technology
CN110335736A (en) * 2019-04-11 2019-10-15 武汉大学 Printing fever temperature control packing device and design method based on magnetic resonance wireless power technology

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1408121A (en) * 1999-08-18 2003-04-02 麦克斯威尔电子元件集团股份有限公司 Multi-electrode double layer capacitor having hermetic electrolyte seal
CN1549287A (en) * 2003-05-08 2004-11-24 北京集星世纪科技有限公司 Active carbon fibre cloth/sprayed aluminium composite polar plate double-electric layer capacitor and producing method thereof
CN1788325A (en) * 2004-03-09 2006-06-14 三洋电机株式会社 Electric double-layer capacitor
US20060124059A1 (en) * 2003-03-18 2006-06-15 Harqkyun Kim Inductively coupled plasma generation system with a parallel antenna array having evenly distributed power input and ground nodes and improved field distribution
CN101150010A (en) * 2007-08-22 2008-03-26 厦门大学 Multifunctional element possessing large electric capacitance and pressure-sensitive character and its preparation method
CN101989493A (en) * 2009-08-07 2011-03-23 纵坚平 Ceramic capacitor physical battery with electric energy latching function
CN201918259U (en) * 2010-05-25 2011-08-03 揭兴文 Vacuum capacitor
CN105531777A (en) * 2013-05-30 2016-04-27 康姆艾德公司 Vacuum variable capacitor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1408121A (en) * 1999-08-18 2003-04-02 麦克斯威尔电子元件集团股份有限公司 Multi-electrode double layer capacitor having hermetic electrolyte seal
US20060124059A1 (en) * 2003-03-18 2006-06-15 Harqkyun Kim Inductively coupled plasma generation system with a parallel antenna array having evenly distributed power input and ground nodes and improved field distribution
CN1549287A (en) * 2003-05-08 2004-11-24 北京集星世纪科技有限公司 Active carbon fibre cloth/sprayed aluminium composite polar plate double-electric layer capacitor and producing method thereof
CN1788325A (en) * 2004-03-09 2006-06-14 三洋电机株式会社 Electric double-layer capacitor
CN101150010A (en) * 2007-08-22 2008-03-26 厦门大学 Multifunctional element possessing large electric capacitance and pressure-sensitive character and its preparation method
CN101989493A (en) * 2009-08-07 2011-03-23 纵坚平 Ceramic capacitor physical battery with electric energy latching function
CN201918259U (en) * 2010-05-25 2011-08-03 揭兴文 Vacuum capacitor
CN105531777A (en) * 2013-05-30 2016-04-27 康姆艾德公司 Vacuum variable capacitor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110316457A (en) * 2019-04-11 2019-10-11 武汉大学 Printed electronic packing device and design method based on magnetic resonance wireless power technology
CN110329631A (en) * 2019-04-11 2019-10-15 武汉大学 The luminous packing device of printing based on magnetic resonance wireless power technology and design method
CN110329660A (en) * 2019-04-11 2019-10-15 武汉大学 Printed sensor packing device and design method based on magnetic resonance wireless power technology
CN110335736A (en) * 2019-04-11 2019-10-15 武汉大学 Printing fever temperature control packing device and design method based on magnetic resonance wireless power technology

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Application publication date: 20180105