CN107473133A - The slow pulling apparatus of silicon chip flower basket - Google Patents
The slow pulling apparatus of silicon chip flower basket Download PDFInfo
- Publication number
- CN107473133A CN107473133A CN201710867908.6A CN201710867908A CN107473133A CN 107473133 A CN107473133 A CN 107473133A CN 201710867908 A CN201710867908 A CN 201710867908A CN 107473133 A CN107473133 A CN 107473133A
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- flower basket
- travel
- ing rest
- chip flower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 52
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 48
- 239000010703 silicon Substances 0.000 title claims abstract description 48
- 230000001174 ascending effect Effects 0.000 claims 1
- 238000001035 drying Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/22—Lifting frames, e.g. for lifting vehicles; Platform lifts with tiltable platforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
This application discloses a kind of slow pulling apparatus of silicon chip flower basket, including a lifting apparatus, the lifting apparatus includes horizontal lifting support, the horizontal lifting support vertically moves, the horizontal lifting cradle top surface is supported by a travel(l)ing rest, the travel(l)ing rest upper surface supports the silicon chip flower basket, motion bar is installed between the travel(l)ing rest and the horizontal lifting support, the motion bar is symmetricly set in the travel(l)ing rest both sides, the position that keeps left or keep right is fixed in the middle part of the travel(l)ing rest side in described motion bar one end, the other end is rotationally connected with the horizontal lifting support, the silicon chip flower basket is axially perpendicular to the two motion bar line directions.The advantage of the invention is that avoiding adjacent two panels Wafer bonding together, ensure that silicon chip surface moisture is less if so slow lifting of lifting apparatus, into drying tank after can quickly realize drying.
Description
Technical field
The application is related to a kind of slow pulling apparatus of silicon chip flower basket.
Background technology
In Wafer Cleaning moving process, the frock gaily decorated basket is in a horizontality all the time, and silicon chip lifts to slow in the gaily decorated basket
In groove, because no ultrasonic wave makees effect of vibration, in slow lifting lifting, adjacent two silicon chips are in left and right stochastic regime, have
Point keeps left, and keeps right a little, although there is plastic septum to separate, it is contemplated that the small reason of spacing, once in a while two sector-meetings stick together, after causing
Face can not effectively dry, and influence Si wafer quality and production efficiency.
The content of the invention
It is an object of the invention to provide a kind of slow pulling apparatus of silicon chip flower basket, with overcome the deficiencies in the prior art.
To achieve the above object, the present invention provides following technical scheme.
The embodiment of the present application discloses a kind of slow pulling apparatus of silicon chip flower basket, including a lifting apparatus, the lifting apparatus
Including horizontal lifting support, the horizontal lifting support vertically moves, and the horizontal lifting cradle top surface is supported by one
Travel(l)ing rest, the travel(l)ing rest upper surface support the silicon chip flower basket, the travel(l)ing rest and the horizontal lifting support it
Between be installed with motion bar, the motion bar is symmetricly set in the travel(l)ing rest both sides, and described motion bar one end is fixed on
Keep left or keep right in the middle part of the travel(l)ing rest side position, and the other end is rotationally connected with the horizontal lifting support, the silicon
The piece gaily decorated basket is axially perpendicular to the two motion bar line directions, and the side bottom of silicon chip flower basket two protrudes outward respectively is provided with
One male part, the travel(l)ing rest both sides offer the breach for coordinating first male part respectively.
Preferably, in the above-mentioned slow pulling apparatus of silicon chip flower basket, silicon chip flower basket both sides top protrudes outward respectively
It is provided with the second male part.
Preferably, in the above-mentioned slow pulling apparatus of silicon chip flower basket, 3 groups of the travel(l)ing rest upper surface support is mutually arranged
Silicon chip flower basket.
Preferably, in the above-mentioned slow pulling apparatus of silicon chip flower basket, the lifting apparatus also includes a vertical arm, the level
The vertical arm is fixed in lifting apparatus one end, and the vertical arm upper end is fixedly installed in a sliding block, and the sliding block moves up and down installation
In a upright guide rail.
Preferably, in the above-mentioned slow pulling apparatus of silicon chip flower basket, the horizontal lifting frame bottom support is provided with one
Inclined shore arm.
Preferably, in the above-mentioned slow pulling apparatus of silicon chip flower basket, in addition to a tank, the tank is away from the activity
The side bottom of bar is provided with the first block, and the tank is provided with the second block close to the side surface upper part of the motion bar.
Compared with prior art, the advantage of the invention is that the travel(l)ing rest supporting silicon chip gaily decorated basket, but travel(l)ing rest bottom
There is provided motion bar, and motion bar is not in centre, so travel(l)ing rest is certain to be partial to side, in Action of Gravity Field
Under so that all silicon chips are partial to side, so avoid adjacent two panels Wafer bonding together, such lifting apparatus
Slow lifting, using the surface tension effects of water, the hydrone of silicon chip surface is constantly drawn from top to bottom, ensure that silicon chip surface water
It is point less, into drying tank after can quickly realize drying；
When Wafer Cleaning cleans, due to the supporting role of the first block so that travel(l)ing rest is in horizontality, that is, spends
Basket is in horizontality, ensure that cleaning performance；
When the gaily decorated basket is promoted to top, it is necessary to when gaily decorated basket whole Transporting is gone out, due to the suppressing action of the second block, protect
The level of the gaily decorated basket has been held, has facilitated the operation of other devices.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments described in application, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 show the right view of the slow pulling apparatus of silicon chip flower basket in the specific embodiment of the invention；
Fig. 2 show the front view of the slow pulling apparatus of silicon chip flower basket in the specific embodiment of the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, detailed retouch is carried out to the technical scheme in the embodiment of the present invention
State, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on the present invention
In embodiment, the every other implementation that those of ordinary skill in the art are obtained on the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
With reference to shown in Fig. 1-2, the slow pulling apparatus of silicon chip flower basket, including a lifting apparatus 100, lifting apparatus 100 include water
Flat lifting support 110, horizontal lifting support 110 vertically move, and the horizontal top surface of lifting support 110 is supported by an activity branch
Frame 120, the upper surface supporting silicon chip gaily decorated basket 200 of travel(l)ing rest 120, fixed peace between travel(l)ing rest 120 and horizontal lifting support 110
Equipped with motion bar 130, motion bar 130 is symmetricly set in the both sides of travel(l)ing rest 120, and travel(l)ing rest is fixed in the one end of motion bar 130
Keep left or keep right in the middle part of 120 sides position, and the other end is rotationally connected with horizontal lifting support 110, and silicon chip flower basket 200 axially hangs down
Directly in the line direction of two motion bar 130,200 liang of side bottoms of silicon chip flower basket protrude outward respectively is provided with the first male part 210, living
The dynamic both sides of support 120 offer the breach 121 for coordinating the first male part 210 respectively.
The travel(l)ing rest supporting silicon chip gaily decorated basket, but travel(l)ing rest bottom is provided with motion bar, and also motion bar is not in
Between, so travel(l)ing rest is certain to be partial to side, under gravity so that all silicon chips are partial to side, so
Avoid adjacent two panels Wafer bonding together, so slow lifting of lifting apparatus, utilize the surface tension effects of water, silicon
The hydrone on piece surface is constantly drawn from top to bottom, ensure that silicon chip surface moisture is less, into drying tank after can quickly realize
Drying.
First male part of silicon chip flower basket both sides can coordinate with the breach on travel(l)ing rest, prevent from skidding.
Further, the both sides top of silicon chip flower basket 200 protrudes outward respectively is provided with the second male part 220.
Fashionable dress is coordinated to be loaded onto another operation link with other mechanisms.
Further, the upper surface of travel(l)ing rest 120 supports 3 groups of mutually arranged silicon chip flower baskets 200.
Further, lifting apparatus 100 also includes a vertical arm 140, and vertical arm 140 is fixed in horizontal one end of lifting apparatus 100,
The upper end of vertical arm 140 is fixedly installed in a sliding block 150, and sliding block 150, which moves up and down, is installed on a upright guide rail 160.
Further, the horizontal bottom of lifting support 110 support is provided with an inclined shore arm 111.
Make structure overall more firm.
Further, in addition to a tank 300, side bottom of the tank 300 away from motion bar 130 are provided with the first block
310, tank 300 is provided with the second block 320 close to the side surface upper part of motion bar 130.
When Wafer Cleaning cleans, due to the supporting role of the first block so that travel(l)ing rest is in horizontality, that is, spends
Basket is in horizontality, ensure that cleaning performance；
When in raised due to the presence of motion bar so that travel(l)ing rest is certain to be partial to side, under gravity, makes
Obtain all silicon chips and be partial to side, so avoid adjacent two panels Wafer bonding together, such lifting apparatus is slow
Lifting, using the surface tension effects of water, the hydrone of silicon chip surface is constantly drawn from top to bottom, ensure that silicon chip surface moisture compared with
It is few；
When the gaily decorated basket is promoted to top, it is necessary to when gaily decorated basket whole Transporting is gone out, due to the suppressing action of the second block, protect
The level of the gaily decorated basket has been held, has facilitated the operation of other devices.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply and deposited between these entities or operation
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability includes, so that process, method, article or equipment including a series of elements not only will including those
Element, but also the other element including being not expressly set out, or it is this process, method, article or equipment also to include
Intrinsic key element.In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that
Other identical element also be present in process, method, article or equipment including the key element.
Described above is only the embodiment of the application, it is noted that for the ordinary skill people of the art
For member, on the premise of the application principle is not departed from, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as the protection domain of the application.
Claims (6)
1. a kind of slow pulling apparatus of silicon chip flower basket, it is characterised in that including a lifting apparatus, the lifting apparatus includes horizontal lift
Ascending branch frame, the horizontal lifting support vertically move, and the horizontal lifting cradle top surface is supported by a travel(l)ing rest, institute
State travel(l)ing rest upper surface and support the silicon chip flower basket, be installed between the travel(l)ing rest and the horizontal lifting support
Motion bar, the motion bar are symmetricly set in the travel(l)ing rest both sides, and the travel(l)ing rest is fixed in described motion bar one end
Keep left or keep right in the middle part of side position, and the other end is rotationally connected with the horizontal lifting support, and the silicon chip flower basket axially hangs down
Directly in the two motion bar line directions, the side bottom of silicon chip flower basket two protrudes outward respectively is provided with the first male part, institute
State travel(l)ing rest both sides and offer the breach for coordinating first male part respectively.
2. the slow pulling apparatus of silicon chip flower basket according to claim 1, it is characterised in that silicon chip flower basket both sides upper part
Do not protrude outward and be provided with the second male part.
3. the slow pulling apparatus of silicon chip flower basket according to claim 1, it is characterised in that the travel(l)ing rest upper surface support
3 groups of mutually arranged silicon chip flower baskets.
4. the slow pulling apparatus of silicon chip flower basket according to claim 1, it is characterised in that it is perpendicular that the lifting apparatus also includes one
The vertical arm is fixed in arm, described horizontal lifting apparatus one end, and the vertical arm upper end is fixedly installed in a sliding block, on the sliding block
Lower movement is installed on a upright guide rail.
5. the slow pulling apparatus of silicon chip flower basket according to claim 1, it is characterised in that the horizontal lifting frame bottom branch
Support is provided with an inclined shore arm.
6. the slow pulling apparatus of silicon chip flower basket according to claim 1, it is characterised in that also including a tank, the tank
Side bottom away from the motion bar is provided with the first block, and the tank is provided with close to the side surface upper part of the motion bar
Second block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710867908.6A CN107473133B (en) | 2017-09-22 | 2017-09-22 | Silicon wafer basket slow lifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710867908.6A CN107473133B (en) | 2017-09-22 | 2017-09-22 | Silicon wafer basket slow lifting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107473133A true CN107473133A (en) | 2017-12-15 |
| CN107473133B CN107473133B (en) | 2023-11-24 |
Family
ID=60585793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710867908.6A Active CN107473133B (en) | 2017-09-22 | 2017-09-22 | Silicon wafer basket slow lifting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107473133B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110211904A (en) * | 2019-06-28 | 2019-09-06 | 阜宁协鑫光伏科技有限公司 | Slow pulling apparatus and silicon wafer cleaner |
| WO2023280270A1 (en) * | 2021-07-07 | 2023-01-12 | 禄丰隆基硅材料有限公司 | Lifting device and silicon wafer cleaning system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204946870U (en) * | 2015-09-09 | 2016-01-06 | 张家港市超声电气有限公司 | Silicon chip flower basket clamping-type upending device |
| CN204946877U (en) * | 2015-09-09 | 2016-01-06 | 张家港市超声电气有限公司 | Silicon chip flower basket inclination flip device |
| CN106848001A (en) * | 2017-03-24 | 2017-06-13 | 张家港市德昶自动化科技有限公司 | A kind of full-automatic inserting piece device |
| CN106876526A (en) * | 2017-03-24 | 2017-06-20 | 张家港市德昶自动化科技有限公司 | A kind of automatic inserting piece device for adapting to the different size gaily decorated basket |
| CN206282872U (en) * | 2016-12-09 | 2017-06-27 | 常州亿晶光电科技有限公司 | Silicon chip inserting piece device |
| CN207158706U (en) * | 2017-09-22 | 2018-03-30 | 张家港市超声电气有限公司 | The slow pulling apparatus of silicon chip flower basket |
-
2017
- 2017-09-22 CN CN201710867908.6A patent/CN107473133B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204946870U (en) * | 2015-09-09 | 2016-01-06 | 张家港市超声电气有限公司 | Silicon chip flower basket clamping-type upending device |
| CN204946877U (en) * | 2015-09-09 | 2016-01-06 | 张家港市超声电气有限公司 | Silicon chip flower basket inclination flip device |
| CN206282872U (en) * | 2016-12-09 | 2017-06-27 | 常州亿晶光电科技有限公司 | Silicon chip inserting piece device |
| CN106848001A (en) * | 2017-03-24 | 2017-06-13 | 张家港市德昶自动化科技有限公司 | A kind of full-automatic inserting piece device |
| CN106876526A (en) * | 2017-03-24 | 2017-06-20 | 张家港市德昶自动化科技有限公司 | A kind of automatic inserting piece device for adapting to the different size gaily decorated basket |
| CN207158706U (en) * | 2017-09-22 | 2018-03-30 | 张家港市超声电气有限公司 | The slow pulling apparatus of silicon chip flower basket |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110211904A (en) * | 2019-06-28 | 2019-09-06 | 阜宁协鑫光伏科技有限公司 | Slow pulling apparatus and silicon wafer cleaner |
| WO2023280270A1 (en) * | 2021-07-07 | 2023-01-12 | 禄丰隆基硅材料有限公司 | Lifting device and silicon wafer cleaning system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107473133B (en) | 2023-11-24 |
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