CN107402195B - The measuring device and method of half ball optical cell transmittance and its uniformity - Google Patents
The measuring device and method of half ball optical cell transmittance and its uniformity Download PDFInfo
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- CN107402195B CN107402195B CN201710558206.XA CN201710558206A CN107402195B CN 107402195 B CN107402195 B CN 107402195B CN 201710558206 A CN201710558206 A CN 201710558206A CN 107402195 B CN107402195 B CN 107402195B
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
A kind of device and method of measurement half ball optical cell transmittance and its uniformity, including super continuous spectrums laser, monochromator, optical attenuator, beam splitter, with reference to the parts such as optical detector, diaphragm, multidimensional machinery adjustment frame, half ball optical element to be measured, controllor for step-by-step motor, test optical detector, data collector and computer.The present invention solves conventional method and is difficult to accurately measure the technical problem of half ball optical cell transmittance and its uniformity；And measurement point sampling is uniformly, can really reflect the uniformity of hemisphere optical element transmissivity；Furthermore measuring system high degree of automation is able to achieve key measurement.
Description
Technical field
The present invention relates to the fields of measurement of optical element transmissivity, especially a kind of half ball optical element is unified interior
Penetrate the measuring device and method of rate and its uniformity.
Background technique
The transmissivity of optical element is its very important optical parameter, at present the side of common measurement optical element transmissivity
Method is [1-3] completed using spectrophotometer, and for flat optical element, spectrophotometer can easily complete it thoroughly
The measurement of rate is penetrated, but for half ball optical element (outer surface is hemisphere, and inside is emptied, and is also hemispherical), spectrophotometric
Meter is primarily present following problem when measuring its transmissivity:
(1) deviation of light can occur when passing through half ball optical element due to incident light, spectrophotometer
Detector can not be collected into transmitted light completely, thus will cause the measuring error of transmissivity.
(2) the unified interior transmissivity uniformity of half ball optical element is its important technical indicator, but point
Light photometer can only often measure the transmissivity at one position of optical element, thus can not double of spherical optical elements transmissivity
Uniformity characterized.
Bibliography:
[1] Ni one, yellow plum is precious, Yuan Bo, Zhao Haiying, the development of Dou Xiaoming ultraviolet-uisible spectrophotometer and status [J]
Modern Scientific Instruments, 2004, (03): 3-7+11.
[2] http://www.perkinelmer.com.cn/Catalog/Category/ID/UVVis%
20Spectrophotometers.
[3]http://www.agilent.com/zh-cn/products/uv-vis-uv-vis-nir.
Summary of the invention
In order to exist when solving the problems, such as spectrophotometer measurement half ball optical cell transmittance and its uniformity, this hair
Bright patent proposes the device and method of accurate, convenient, the rapid survey half ball optical cell transmittance of one kind and its uniformity.
Technical solution of the invention is as follows:
A kind of measuring device of half ball optical cell transmittance and uniformity, including super continuous spectrums laser, monochromator,
Optical attenuator, beam splitter, with reference to optical detector, diaphragm, multidimensional machinery adjustment frame, controllor for step-by-step motor, test optical detection
Device, data collector and computer；
Along the beam exit direction of the super continuous spectrums laser be sequentially placed the monochromator, optical attenuator and
Incident beam is divided into the reflected beams and transmitted light beam by beam splitter, the beam splitter, and the reflected beams are as reference beam, in the ginseng
Examining direction of beam propagation is the reference optical detector, and the transmitted light beam is passed as test beams in the test beams
Broadcasting direction successively is diaphragm and half ball optical element to be measured, and it is mechanical which is fixed on the multidimensional
On adjustment frame, the controllor for step-by-step motor is connected with the multidimensional machinery adjustment frame and computer respectively, the survey
Light beam is tried to be received after half ball optical element to be measured by the test optical detector, the output end of the test optical detector with
The first input end of the data collector is connected, the output end with reference to optical detector and the data collector
Second input terminal is connected, and the output end of the data collector is connected with the input terminal of the computer.
The multidimensional machinery adjustment frame include optical precision displacement platform, optical precision turntable, optical precision displacement platform,
Optical precision displacement platform, optical precision lifting platform, optical precision turntable and three-jaw holding frame；
The optical precision turntable is fixed on the optical precision displacement platform, the optical precision displacement platform
It is fixed on the optical precision turntable, the optical precision displacement platform is fixed on the optical precision turntable
On, the optical precision lifting platform is fixed on the optical precision displacement platform, and the optical precision turntable is fixed
On the optical precision lifting platform, the three-jaw holding frame is fixed on the optical precision turntable.
Transmissivity is carried out using double of spherical optical elements of measuring device of half ball optical cell transmittance and uniformity
And its measurement method of uniformity, comprising the following steps:
1. not placing half ball optical element to be measured, the one-wavelength laser light beam of wavelength needed for measuring monochromator output leads to
The light intensity signal of data collector collecting test light beam and reference beam is crossed, and calculates test beams light intensity and reference beam light intensity
Ratio, be denoted as k1；
2. making the laser beam of monochromator output 632.8nm, optical precision translation stage is dismantled on optical precision turntable,
Then optics strut is installed at the center of optical precision turntable, by adjusting optical precision displacement platform, passes through incident ray
In the rotary shaft of optical precision turntable；
3. installing optical precision translation stage on optical precision turntable, make incident light by adjusting optical precision lifting platform
Line passes through the center position of three-jaw holding frame, and half ball optical element to be measured is then installed on three-jaw holding frame；
4. being located at the centre of sphere of half ball optical element to be measured in the rotary shaft of optical precision turntable by feedback regulation；
5. being in incident ray at the first lap of half ball optical element to be measured by rotary optical precision rotation platform.
6. with the light intensity signal of data collector collecting test light beam and reference beam, and calculating test beams light intensity and ginseng
The ratio for examining light beam light intensity, is denoted asThen transmissivity T of the half ball optical element to be measured at the measurement position is according to following public affairs
Formula is calculated:
7. being interrupted rotary optical precision rotation platform according to certain step-length in 360 °, and successively at each scan position
It repeats step 6., and then completes the scanning survey of first lap on half ball optical element to be measured；
8. making incident ray be in half ball optical element to be measured according to certain angle rotary optical precision rotation platform
7. second circle, repeats step, the scanning survey of the second circle on half ball optical element to be measured can be completed；
9. repeating step 8., the scanning until completing n circle in total on half ball optical element to be measured.
10. drawing the distribution map of the unified internal transmission factor of half ball optical element to be measured, and count according to the data measured
The numerical result of half ball optical cell transmittance uniformity to be measured.
First lap on half ball optical element to be measured, second the n-th circle of circle ... be successively uniformly distributed in from hemisphere boundary to
At the position at center.
Compared with prior art, beneficial effects of the present invention are as follows:
(1) it solves conventional method to be difficult to accurately measure the technology hardly possible of half ball optical cell transmittance and its uniformity
Topic；
(2) measurement point sampling uniformly, can really reflect the uniformity of hemisphere optical element transmissivity；
(3) measuring system high degree of automation is able to achieve key measurement.
Detailed description of the invention
Fig. 1 is the structure chart of half ball optical cell transmittance and its uniformity measurement apparatus of the present invention；
Fig. 2 is the structure chart of multidimensional machinery adjustment frame；
Fig. 3 is the schematic illustration of feedback regulation；
The distribution map of hot spot position on hemisphere face when Fig. 4 is first lap scanning；
The distribution map of hot spot position on hemisphere face when Fig. 5 is the scanning of the second circle；
Fig. 6 is the distribution map of all scan positions on hemisphere face.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings, but guarantor of the invention should not be limited with this
Protect range.
The mechanical construction drawing of multidimensional machinery adjustment frame is as shown in Fig. 2, mainly include optical precision displacement platform 13, optical precision
Turntable 14, optical precision displacement platform 15, optical precision displacement platform 16, optical precision lifting platform 17, optical precision turntable 18
With three-jaw holding frame 19, optical precision displacement platform 13 is used to adjust the position of 14 rotary shaft of optical precision turntable, optical precision
Turntable 14 is used to rotate the orientation of half ball optical element to be measured, optical precision displacement platform 15 for adjust in the horizontal direction to
The orientation of half ball optical element is surveyed, optical precision displacement platform 16 is used to adjust half ball optical to be measured in another horizontal direction
The orientation of element, optical precision lifting platform 17 are used to adjust the orientation of half ball optical element to be measured, three claw clips in vertical direction
Frame 19 is held for clamping half ball optical element to be measured, optical precision turntable 18 is for rotating half ball optical element to be measured
Orientation.
Working principle:
In the measuring device of half ball optical cell transmittance and its uniformity as shown in Figure 1, secondary color light source is issued
Polychromatic light be successively transmitted through monochromator, attenuator, beam splitter, then form a branch of reference light and a branch of test light, refer to
The light intensity of light beam is referenced optical detector acquisition, and test beams are visited by being tested light after diaphragm, half ball optical element to be measured
It surveys collected by device.
In measurement process, then the one-wavelength laser light beam of wavelength needed for first measuring monochromator output does not place sample
Product make collected by the directly tested optical detector of test beams, then with data collector while collecting test light beam and reference light
The light intensity signal of beam, and the ratio of test beams light intensity and reference beam light intensity at this time is calculated, it is denoted as k1.Then make monochromator defeated
The laser beam of 632.8nm out is installed on half ball optical element to be measured on three-jaw holding frame, makes hemisphere by feedback regulation
The centre of sphere of shape optical element is located in the rotary shaft of optical precision turntable 14 that (principle of feedback regulation is as shown in figure 3, work as hemisphere
The centre of sphere of shape optical element is not when in the rotary shaft of optical precision turntable 14, if rotary optical precision rotation platform
14, then the direction of propagation of half ball optical component inner surface reflected light can then deviate the direction of propagation of incident beam, pass through adjusting
Optical precision displacement platform 15, the diaphragm in binding test light beam, so that in the mistake for constantly continuing rotary optical precision rotation platform 14
The direction of propagation of Cheng Zhong, half ball optical component inner surface reflected light are conllinear with the direction of propagation of incident beam always, Ji Keshi
The centre of sphere of existing half ball optical element is located at the purpose in 14 rotary shaft of optical precision turntable), it is then same with data collector
When collecting test light beam and reference beam light intensity signal, and calculate the ratio of test beams light intensity and reference beam light intensity at this time
Value, is denoted asThen transmissivity T of the half ball optical element to be measured at the measurement position can be calculated according to formula (1):
It is using optical precision turntable 18 shown in Fig. 4, measurement hot spot first lap on half ball optical element to be measured is swept
The position view retouched is to measure hot spot to be measured using optical precision turntable 14 and optical precision turntable 18 shown in Fig. 5
The position view of first lap and the second circle scanning, is to utilize optical precision turntable 14 shown in Fig. 6 on half ball optical element 8
With optical precision turntable 18, the position view of hot spot all n circle scannings on half ball optical element to be measured is measured, every
One scan position is counted using data collector while the light intensity signal of collecting test light beam and reference beam according to formula (1)
Transmissivity of the half ball optical element to be measured at the measurement position is calculated, it is unified interior that half ball optical element to be measured can be completed
The measurement of transmissivity and its uniformity.
The average value of the unified internal transmission factor of half ball optical element to be measured is calculated according to formula (2)
WhereinFor the average value of the unified internal transmission factor of half ball optical element to be measured, TiAt single measurement position
Transmissivity, N are total sampling number.
The PV value of the unified internal transmission factor of half ball optical element to be measured is calculated according to formula (3):
PV=Tmax-Tmin (3)
Wherein PV is the peak-to-valley value of the unified internal transmission factor of half ball optical element to be measured, TmaxFor half ball optical to be measured
The maximum value of the unified internal transmission factor of element, TminFor the minimum value of the unified internal transmission factor of half ball optical element to be measured.
The opposite peak-to-valley value ξ of the unified internal transmission factor of half ball optical element to be measured is calculated according to formula (4):
WhereinFor the opposite peak-to-valley value of the unified internal transmission factor of half ball optical element to be measured, PV is hemispherical light to be measured
The peak-to-valley value of the unified internal transmission factor of element is learned,For the average value of the unified internal transmission factor of half ball optical element to be measured.
The standard deviation sigma of the unified internal transmission factor of half ball optical element to be measured is calculated according to formula (5):
Wherein σ is the standard deviation of the unified internal transmission factor of half ball optical element to be measured,For half ball optical member to be measured
The average value of the unified internal transmission factor of part, Ti,jFor the transmissivity at single locus, N is total sampling number.
The standard rate χ of the unified internal transmission factor of half ball optical element to be measured is calculated according to formula (6):
Wherein χ is the standard rate of the unified internal transmission factor of half ball optical element to be measured, and σ is half ball optical member to be measured
The standard deviation of the unified internal transmission factor of part,For the average value of the unified internal transmission factor of half ball optical element to be measured.
Measuring device based on half ball optical cell transmittance and its uniformity as shown in Figure 1 and as shown in Figure 2
The measurement method of multidimensional machinery adjustment frame, a kind of half ball optical cell transmittance and its uniformity, mainly comprises the steps that
1. the one-wavelength laser light beam of wavelength needed for measuring the output of monochromator 2, then not placing sample keeps test beams straight
It connects collected by tested optical detector 10, then with data collector 11, the light intensity of collecting test light beam and reference beam is believed simultaneously
Number, and the ratio of test beams light intensity and reference beam light intensity at this time is calculated, it is denoted as k1。
2. monochromator 2 is made to export the laser beam of 632.8nm first, optical precision is dismantled on optical precision turntable 14
Then translation stage 15 is installed optics strut at the center of optical precision turntable 14, by adjusting optical precision displacement platform 13, is made
Incident ray is by the rotary shaft of optical precision turntable 14.
3. installing optical precision translation stage 15 on optical precision turntable 14, made by adjusting optical precision lifting platform 17
Incident ray passes through the center position of three-jaw holding frame 19, and half ball optical member to be measured is then installed on three-jaw holding frame 19
Part 8.
4. making the centre of sphere of half ball optical element 8 to be measured be located at the rotary shaft of optical precision turntable 14 by feedback regulation
On.
5. making incident ray be in the first lap of half ball optical element 8 to be measured by rotary optical precision rotation platform 14
Place.
6. with data collector 11 while the light intensity signal of collecting test light beam and reference beam, and calculating test light at this time
The ratio of Shu Guangqiang and reference beam light intensity, are denoted asThen transmissivity of the half ball optical element 8 to be measured at the measurement position
T can be calculated according to following formula:
7. being interrupted rotary optical precision rotation platform 18 according to certain step-length in 360 °, and successively in each scan position
6. place repeats step, and then complete the scanning survey of first lap on half ball optical element 8 to be measured.
8. making incident ray be in half ball optical element to be measured according to certain angle rotary optical precision rotation platform 14
(8) 7. the second circle, repeats step, the scanning survey of the second circle on half ball optical element 8 to be measured can be completed.
9. repeating step 8., the scanning until completing n circle in total on half ball optical element 8 to be measured.
10. drawing the distribution map of the unified internal transmission factor of half ball optical element 8 to be measured, and calculate according to the data measured
The numerical statistic result of 8 transmissivity uniformity of half ball optical element to be measured.
Embodiment 1:
Fig. 2 and Fig. 3 is the thought based on the invention patent, and the half ball optical cell transmittance and its uniformity of building are surveyed
The structure chart of amount system, super continuous spectrums laser use FemtoPower FP1060-20 super continuum light fibre laser, monochromator
The grating monochromator produced using Photon etc company, attenuator use the adjustable optical attenuator of Thorlabs company,
The pellicular beamsplitters that beam splitter is installed using the CM1-BP145B2 cage cube of Thorlabs company, diaphragm use
Thorlabs company ID20 extension bar installs iris diaphgram, is all made of Ophir company PD- with reference to optical detector and test optical detector
300 serial light power meters, multidimensional machinery adjustment frame are completed the process by nonstandard customization, and controllor for step-by-step motor uses Shanghai friendship ties light
3 axis controllers of fibre laser tool Co., Ltd, data collector use the Laser star series binary channels number of Ophir company
According to collector.
When scanning survey, the scanning element of the 1st circle is 30, as shown in figure 3, the scanning element of the 2nd circle is 27, such as
Shown in Fig. 4, the scanning element of the 3rd circle is 24, and the scanning element of the 4th circle is 21, and the scanning element of the 5th circle is 18, and the 6th circle is swept
Described point is 15, and the scanning element of the 7th circle is 12, and the scanning element of the 8th circle is 9, and the scanning element of the 9th circle is 6, the 10th circle
Scanning element is 1, scans 10 circles altogether, and total scan position is as shown in fig. 6, this take point mode that can realize to take a little on hemisphere face
Uniformly, so as to the characterization of the realization hemisphere face transmissivity uniformity of optimization.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (3)
1. the measuring device of a kind of half ball optical cell transmittance and uniformity, which is characterized in that including super continuous spectrums laser
Device (1), monochromator (2), optical attenuator (3), beam splitter (4), with reference to optical detector (5), diaphragm (6), multidimensional machinery adjustment
Frame (7), controllor for step-by-step motor (9), test optical detector (10), data collector (11) and computer (12)；
The monochromator (2), optical attenuator are sequentially placed along the beam exit direction of the super continuous spectrums laser (1)
(3) and incident beam is divided into the reflected beams and transmitted light beam by beam splitter (4), the beam splitter (4), and the reflected beams are as reference
Light beam is the reference optical detector (5) in the reference beam direction of propagation, the transmitted light beam as test beams,
It is successively diaphragm (6) and half ball optical element to be measured (8), the half ball optical element to be measured in the test beams direction of propagation
(8) be fixed on the multidimensional machinery adjustment frame (7), the controllor for step-by-step motor (9) respectively with the multidimensional machine
Tool adjustment frame (7) is connected with computer (12), and the test beams are after half ball optical element (8) to be measured by the survey
It tries optical detector (10) to receive, the first input of the output end of the test optical detector (10) and the data collector (11)
End is connected, and the output end of the reference optical detector (5) is connected with the second input terminal of the data collector (11), described
The output end of data collector (11) be connected with the input terminal of the computer (12)；
The multidimensional machinery adjustment frame (7) includes optical precision displacement platform (13), optical precision turntable (14), optical precision
Displacement platform (15), optical precision displacement platform (16), optical precision lifting platform (17), optical precision turntable (18) and three-jaw clamping
Frame (19)；
The optical precision turntable (14) is fixed on the optical precision displacement platform (13), the optical precision position
Moving stage (15) is fixed on the optical precision turntable (14), and the optical precision displacement platform (16) is fixed on described
On optical precision displacement platform (15), the optical precision lifting platform (17) is fixed on the optical precision displacement platform (16)
On, the optical precision turntable (18) is fixed on the optical precision lifting platform (17), the three-jaw holding frame
(19) it is fixed on the optical precision turntable (18).
2. using the measuring device of half ball optical cell transmittance and uniformity described in claim 1 to half ball optical member
Part carries out the measurement method of transmissivity and its uniformity, which comprises the following steps:
1. half ball optical element (8) to be measured is not placed, the one-wavelength laser light beam of wavelength needed for measuring monochromator (2) output,
By the light intensity signal of data collector (11) collecting test light beam and reference beam, and calculate test beams light intensity and reference light
The ratio of Shu Guangqiang, is denoted as k1；
2. making the laser beam of monochromator (2) output 632.8nm, optical precision displacement is dismantled on optical precision turntable (14)
Platform (15) then installs optics strut at the center of optical precision turntable (14), by adjusting optical precision displacement platform (13),
Make incident ray by the rotary shaft of optical precision turntable (14)；
3. optical precision displacement platform (15) are installed on optical precision turntable (14), by adjusting optical precision lifting platform (17)
So that incident ray is passed through the center position of three-jaw holding frame (19), hemispherical to be measured then is installed on three-jaw holding frame (19)
Optical element (8)；
4. making the centre of sphere of half ball optical element (8) to be measured be located at the rotary shaft of optical precision turntable (14) by feedback regulation
On；
5. passing through the first lap that rotary optical precision rotation platform (14) makes incident ray be in half ball optical element (8) to be measured
Place；
6. with the light intensity signal of data collector (11) collecting test light beam and reference beam, and calculating test beams light intensity and ginseng
The ratio for examining light beam light intensity, is denoted asThen transmissivity T of the half ball optical element (8) to be measured at the measurement position is according to such as
Lower formula is calculated:
7. being interrupted rotary optical precision rotation platform (18) according to certain step-length in 360 °, and successively at each scan position
It repeats step 6., and then completes the scanning survey of first lap on half ball optical element (8) to be measured；
8. making incident ray be in half ball optical element to be measured according to certain angle rotary optical precision rotation platform (14)
(8) 7. the second circle, repeats step, the scanning survey of the second circle on half ball optical element (8) to be measured can be completed；
9. repeating step 8., the scanning until completing n circle in total on half ball optical element (8) to be measured；
10. draw the distribution map of the unified internal transmission factor of half ball optical element (8) to be measured according to the data that measure, and count to
Survey the numerical result of half ball optical element (8) transmissivity uniformity.
3. double of spherical optical elements as claimed in claim 2 carry out the measurement method of transmissivity and its uniformity, feature exists
In first lap, second the n-th circle of circle ... on half ball optical element (8) to be measured are successively uniformly distributed in from hemisphere boundary in
At the position of the heart.
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| CN109444089B (en) * | 2018-12-19 | 2021-05-11 | 航天新气象科技有限公司 | Transmittance calculating device for total radiation sensor ball cover |
| CN109991179B (en) * | 2019-01-25 | 2020-10-16 | 中国科学院上海光学精密机械研究所 | Use environment simulation device and measurement method for optical thin film spectral measurement |
| CN111442908B (en) * | 2020-04-23 | 2022-04-12 | 中国建筑材料科学研究总院有限公司 | Device and method for detecting visible light transmittance and uniformity of optical fiber image transmission element |
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| CN204203100U (en) * | 2014-12-04 | 2015-03-11 | 中国工程物理研究院激光聚变研究中心 | Based on the large-sized optical elements transmissivity measurement device of spectrophotometric method |
| CN106441817A (en) * | 2016-11-04 | 2017-02-22 | 电子科技大学 | Comprehensive measurement device for measuring reflectivity/transmittance of optical components |
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