CN107144217A - 用于光学元件加工质量在线检测的光纤干涉共焦系统 - Google Patents
用于光学元件加工质量在线检测的光纤干涉共焦系统 Download PDFInfo
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- CN107144217A CN107144217A CN201710278345.7A CN201710278345A CN107144217A CN 107144217 A CN107144217 A CN 107144217A CN 201710278345 A CN201710278345 A CN 201710278345A CN 107144217 A CN107144217 A CN 107144217A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 74
- 239000000835 fiber Substances 0.000 title claims abstract description 9
- 239000013307 optical fiber Substances 0.000 claims abstract description 104
- 239000000523 sample Substances 0.000 claims abstract description 25
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 239000000919 ceramic Substances 0.000 claims abstract description 14
- 230000001360 synchronised effect Effects 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims description 34
- 238000012545 processing Methods 0.000 claims description 17
- 238000004587 chromatography analysis Methods 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000013519 translation Methods 0.000 claims description 5
- 238000011156 evaluation Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000012876 topography Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 11
- 230000003746 surface roughness Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
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- 238000005305 interferometry Methods 0.000 description 2
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- 239000011796 hollow space material Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02042—Confocal imaging
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
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CN201710278345.7A CN107144217B (zh) | 2017-04-25 | 2017-04-25 | 用于光学元件加工质量在线检测的光纤干涉共焦系统 |
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CN201710278345.7A CN107144217B (zh) | 2017-04-25 | 2017-04-25 | 用于光学元件加工质量在线检测的光纤干涉共焦系统 |
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CN107144217A true CN107144217A (zh) | 2017-09-08 |
CN107144217B CN107144217B (zh) | 2019-05-24 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107860776A (zh) * | 2017-11-22 | 2018-03-30 | 佛山科学技术学院 | 一种镜片缺陷检测装置及方法 |
CN108562241A (zh) * | 2018-03-08 | 2018-09-21 | 复旦大学 | 基于光纤束的数字全息柔性测量的装置与方法 |
CN110596818A (zh) * | 2019-10-17 | 2019-12-20 | 中天宽带技术有限公司 | 一种薄膜滤波片型波分复用器贴片工装及工艺 |
CN113607750A (zh) * | 2021-08-05 | 2021-11-05 | 浙江大学 | 一种用于光学元件亚表面缺陷检测的装置及方法 |
CN114160967A (zh) * | 2021-12-29 | 2022-03-11 | 南京萃智激光应用技术研究院有限公司 | 一种随动式激光加工装置及其控制方法 |
CN114353671A (zh) * | 2022-01-14 | 2022-04-15 | 西安交通大学 | 一种实现位移和角度同步测量的双波长衍射干涉系统及方法 |
CN114754705A (zh) * | 2022-04-11 | 2022-07-15 | 华侨大学 | 垂直扫描白光干涉谱辅助穆勒矩阵椭偏测量系统及方法 |
CN115815792A (zh) * | 2023-02-17 | 2023-03-21 | 山东省科学院激光研究所 | 一种可视化的激光加工系统及方法 |
CN117006971A (zh) * | 2023-09-25 | 2023-11-07 | 板石智能科技(深圳)有限公司 | 一种三维形貌测量系统 |
US11835472B2 (en) | 2021-08-05 | 2023-12-05 | Zhejiang University | Device and method for detecting subsurface defect of optical component |
Citations (4)
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CN1293361A (zh) * | 2000-11-30 | 2001-05-02 | 中国科学院上海光学精密机械研究所 | 实时测量厚度与折射率的半导体激光干涉测量装置 |
CN101109618A (zh) * | 2007-08-23 | 2008-01-23 | 北京交通大学 | 利用合成波干涉全场纳米表面三维在线测量方法和系统 |
US20110134436A1 (en) * | 2009-04-29 | 2011-06-09 | Adrian Podoleanu | Method for depth resolved wavefront sensing, depth resolved wavefront sensors and method and apparatus for optical imaging |
JP5975522B2 (ja) * | 2012-12-07 | 2016-08-23 | 日本電信電話株式会社 | 動的焦点移動型光干渉断層顕微鏡 |
-
2017
- 2017-04-25 CN CN201710278345.7A patent/CN107144217B/zh active Active
Patent Citations (4)
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CN1293361A (zh) * | 2000-11-30 | 2001-05-02 | 中国科学院上海光学精密机械研究所 | 实时测量厚度与折射率的半导体激光干涉测量装置 |
CN101109618A (zh) * | 2007-08-23 | 2008-01-23 | 北京交通大学 | 利用合成波干涉全场纳米表面三维在线测量方法和系统 |
US20110134436A1 (en) * | 2009-04-29 | 2011-06-09 | Adrian Podoleanu | Method for depth resolved wavefront sensing, depth resolved wavefront sensors and method and apparatus for optical imaging |
JP5975522B2 (ja) * | 2012-12-07 | 2016-08-23 | 日本電信電話株式会社 | 動的焦点移動型光干渉断層顕微鏡 |
Non-Patent Citations (2)
Title |
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师中华等: "光学镜面间距测量技术研究进展", 《激光与光电子学进展》 * |
王津楠等: "基于白光LED的光谱共焦位移传感器", 《中国测试》 * |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107860776A (zh) * | 2017-11-22 | 2018-03-30 | 佛山科学技术学院 | 一种镜片缺陷检测装置及方法 |
CN108562241A (zh) * | 2018-03-08 | 2018-09-21 | 复旦大学 | 基于光纤束的数字全息柔性测量的装置与方法 |
CN110596818A (zh) * | 2019-10-17 | 2019-12-20 | 中天宽带技术有限公司 | 一种薄膜滤波片型波分复用器贴片工装及工艺 |
CN113607750B (zh) * | 2021-08-05 | 2022-06-14 | 浙江大学 | 一种用于光学元件亚表面缺陷检测的装置及方法 |
CN113607750A (zh) * | 2021-08-05 | 2021-11-05 | 浙江大学 | 一种用于光学元件亚表面缺陷检测的装置及方法 |
US11835472B2 (en) | 2021-08-05 | 2023-12-05 | Zhejiang University | Device and method for detecting subsurface defect of optical component |
CN114160967A (zh) * | 2021-12-29 | 2022-03-11 | 南京萃智激光应用技术研究院有限公司 | 一种随动式激光加工装置及其控制方法 |
CN114353671A (zh) * | 2022-01-14 | 2022-04-15 | 西安交通大学 | 一种实现位移和角度同步测量的双波长衍射干涉系统及方法 |
CN114353671B (zh) * | 2022-01-14 | 2022-11-01 | 西安交通大学 | 实现位移和角度同步测量的双波长衍射干涉系统及方法 |
CN114754705A (zh) * | 2022-04-11 | 2022-07-15 | 华侨大学 | 垂直扫描白光干涉谱辅助穆勒矩阵椭偏测量系统及方法 |
CN114754705B (zh) * | 2022-04-11 | 2023-05-05 | 华侨大学 | 垂直扫描白光干涉谱辅助穆勒矩阵椭偏测量系统及方法 |
CN115815792A (zh) * | 2023-02-17 | 2023-03-21 | 山东省科学院激光研究所 | 一种可视化的激光加工系统及方法 |
CN117006971A (zh) * | 2023-09-25 | 2023-11-07 | 板石智能科技(深圳)有限公司 | 一种三维形貌测量系统 |
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Address after: Room 102, Building 22, No. 60 Weixin Road, Industrial Park, Suzhou City, Jiangsu Province, 215000 Patentee after: Suzhou Field Technology Group Co.,Ltd. Address before: 215000 floor 2, building 1, zone B, Weiting industrial Plaza, No. 9, zhanye Road, Suzhou Industrial Park, Jiangsu Province Patentee before: Suzhou field Precision Manufacturing Co.,Ltd. |
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