CN107004621A - Nozzle lip cleaning device and its slit application device - Google Patents

Nozzle lip cleaning device and its slit application device Download PDF

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Publication number
CN107004621A
CN107004621A CN201580066153.9A CN201580066153A CN107004621A CN 107004621 A CN107004621 A CN 107004621A CN 201580066153 A CN201580066153 A CN 201580066153A CN 107004621 A CN107004621 A CN 107004621A
Authority
CN
China
Prior art keywords
blade
cleaning device
nozzle lip
nozzle
head
Prior art date
Application number
CN201580066153.9A
Other languages
Chinese (zh)
Inventor
朴镐胤
金善勇
李忠翰
具滋贤
Original Assignee
显示器生产服务株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR10-2014-0172646 priority Critical
Priority to KR1020140172646A priority patent/KR101578368B1/en
Application filed by 显示器生产服务株式会社 filed Critical 显示器生产服务株式会社
Priority to PCT/KR2015/013149 priority patent/WO2016089132A1/en
Publication of CN107004621A publication Critical patent/CN107004621A/en

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools, brushes, or analogous members
    • B08B1/001Cleaning by methods involving the use of tools, brushes, or analogous members characterised by the type of cleaning tool
    • B08B1/005Scrapers
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like

Abstract

The present invention provides nozzle lip cleaning device and the slit application device using the nozzle lip cleaning device, wherein the nozzle lip cleaning device includes:Cleaning device main body;Blade support unit, with the first blade support member for being incorporated into the cleaning device main body;Blade unit, with the first blade, first blade rear end is incorporated into first blade support member, and front end is contacted with the surface of the nozzle lip, and the decoction on nozzle lip surface is attached to after injection decoction to wipe off;Angle regulating unit, with first angle regulating member, the first angle regulating member configuration moves first blade support member in the cleaning device main body, while the relative position between the front end and the nozzle lip surface of regulation first blade;Supporting pin unit, with the first support pin member, the first support pin member configuration is between first blade support member and first blade, and the pivot of the width as first blade, and then the front end of first blade is abreast contacted with the nozzle lip surface when first blade support member is moved.

Description

Nozzle lip cleaning device and its slit application device

Technical field

The present invention relates to nozzle lip cleaning device and using the slit application device of the nozzle lip cleaning device, In more detail, the nozzle lip cleaning device and the slit application device using the nozzle lip cleaning device being related to, The surface of the nozzle lip will be accurately and quickly arranged on for the blade of washer jet lip, while can also improve pair The cleaning force of nozzle lip.

Background technology

Flat panel displaying element is included various liquid medicine paintings in the application process of real estate with substrate manufacturing process, and is made Smearing equipment for the application process mainly smears dress using the slit type with narrow slit type nozzle (Slit nozzle) Put.

The slit application device is lateral from the one of the substrate while spraying decoction by the narrow slit type nozzle Opposite side moment moves, and then by the liquid medicine painting in the real estate.

Decoction should equably be applied to the real estate by the slit application device, be that this must be in the substrate Put what removing was adhered in the nozzle lip (nozzle lip) of the narrow slit type nozzle at a fixed time after smearing decoction in face Decoction.

In order to remove the decoction for being attached to the nozzle lip, nozzle lip is configured with the slit application device clear Cleaning device, has multiple blades in the nozzle lip cleaning device, is attached to for wiping off described in the nozzle lip Decoction.

Now, the front end of the blade should abreast be contacted with the surface of the nozzle lip, and deposit in the prior art To make the surface that the front end of the blade is abreast contacted with the nozzle lip need to put into the substantial amounts of time in setting The problem of with making great efforts.

Also, in the case of wiping the decoction while nozzle lip cleaning device high-speed mobile off, by a certain The decoction that blade is separated from the nozzle lip is when blade movement, has influence on other blades, therefore it is unqualified to there is cleaning The problem of.

The content of the invention

(problem to be solved)

The invention solves the problems that technical task be to provide following nozzle lip cleaning device and its slit smears dress Put:Contacted while the front end of blade is quickly and accurately constituted parallel with the surface of nozzle lip, and then dress can be improved The rate of capacity utilization put.

Another technical problem to be solved by the present invention is that the following nozzle lip cleaning device of offer and its slit are applied Smear device:The cleaning force of nozzle lip cleaning device is improved, and then the production time can be reduced.

The invention solves the problems that other another technical problems be to provide following nozzle lip cleaning device and its slit Formula application device:The decoction separated from nozzle lip surface is influenceed other blades by a certain blade, and then can prevent Cleaning is unqualified.

(means for solving problem)

The present invention in order to solve problem as described above there is provided a kind of nozzle lip cleaning device, including:Cleaning device master Body;Blade support unit, with the first blade support member for being incorporated into the cleaning device main body;Blade unit, with One blade, first blade rear end is incorporated into first blade support member, and front end is contacted with the nozzle lip Surface, the decoction on nozzle lip surface is attached to after injection decoction to wipe off;Angle regulating unit, with first angle regulation Part, the first angle regulating member configuration moves first blade support member in the cleaning device main body It is dynamic, while the relative position between the front end and the nozzle lip surface of regulation first blade;Supporting pin unit, has First support pin member, the first support pin member configuration first blade support member and first blade it Between, and the pivot of the width as first blade, and then when first blade support member is moved The front end of first blade is set abreast to be contacted with the nozzle lip surface.

First blade includes:It is incorporated into the blade fastening portion of first blade support member;It is tight from the blade Gu portion extends the blade head to be formed.The first support pin member may include:It is incorporated into first blade support member Sell fastening part;The pin supporting part of the subregion on the blade head is supported while extending to be formed from the pin fastening part.

Described nozzle lip cleaning device also includes combining unit, and the combining unit has the first bonded block, institute Stating the first bonded block is used for first blade with the described first support pin member in combination with the first blade branch Support part part, the width of the pin supporting part has the value of the width less than the blade head.

Restraint location Variable Area can be formed with the pin fastening part, the restraint location Variable Area, which is used to change, to be tied Together in the binding site of the first support pin member of first blade support member.

The width of the pin supporting part is less than the width of the pin fastening part, and the pin supporting part can be from the pin fastening part The central area of width extends to be formed.

The length of the first support pin member is less than the length of first blade, and described first supports the strong of pin member Degree can have the value of the intensity more than first blade.

It is tight in order to prevent from by the blade head being moved to the blade from the decoction that the nozzle lip surface is separated Gu portion, the blade head has the width more than the blade fastening portion, while can be to the bottom of the blade fastening portion Direction forms stepped.

At least a portion in the lower area on the blade head can have chamfer shape, with other for preventing and abutting Blade is interfered.

The blade head may include:The head rear portion extended from the blade fastening portion;From head rear portion Extension forms and is formed slopely surface, and then the thinner blade front part of the nose thickness more to the blade head.

In addition, as another embodiment of first blade, first blade may include:Blade fastening portion, knot Together in first blade support member;Blade head, extends to be formed from the blade fastening portion.The blade head Ke Bao Include:Head rear portion, from blade fastening portion extension;Head front part, extends to be formed from head rear portion;Head is convex Rise, the surface on the blade head is protruded into from the borderline region in head rear portion and the head front part.

First angle regulating member configuration pressurizes described first at the rear of first blade support member Move first blade support member while behind blade support member, and with the described first support pin member It can be configured up and down respectively on the basis of width center.

The cleaning device main body includes:Matrix, first side block and second side block, wherein the first side block And the configuration of second side block can be formed with the insertion first angle regulation in the matrix both sides in the first side block The through hole of part and the two row above of insertion.

According to another embodiment of the invention, the present invention provides a kind of slit application device, including:Workbench, is placed There is the substrate of decoction to be applied;Nozzle unit, with nozzle and tip retainer, the nozzle is applied for face on the substrate Decoction is smeared, the tip retainer fixes the upper area of the nozzle;Nozzle mobile unit, for moving the nozzle list Member;Above-mentioned nozzle lip cleaning device;Cleaning device mobile unit, makes the nozzle lip cleaning device along the nozzle Length direction movement;Cleaning device cleaning unit, for cleaning the nozzle lip cleaning device;Charging basket unit, at least one The bottom of the nozzle lip cleaning device and the cleaning device cleaning unit is partly arranged at, and is housed by the spray The decoction of mouth lip cleaning device separation and the cleaning fluid discharged from the cleaning device cleaning unit.

(The effect of invention)

It is as follows according to the effect of the nozzle lip cleaning device of the present invention and its slit application device:

First, the surface of nozzle lip is abreast contacted with for the front end that makes blade, is provided with as blade width direction The support pin member of pivot, and then with the blade can be accurately and quickly arranged on to the nozzle lip surface Advantage.Therefore, the setting time for the blade for being arranged on nozzle lip cleaning device can be reduced, and then the production capacity of device can be improved Utilization rate.

Second, the head of blade has the width more than blade fastening portion, while to the bottom side of the blade fastening portion It is stepped to being formed, therefore institute is moved to by the blade head with the decoction that can prevent from separating from nozzle lip surface State the advantage of blade fastening portion.

Especially, the decoction has high viscosity, even and in the situation of the blade that runs at high speed, pass through first The decoction of blade separation does not fall out other blades of adjacent configuration yet, therefore, it is possible to prevent the cleaning to the nozzle lip It is unqualified, therefore have the advantages that the production time can be reduced.

3rd, it is thinner to form nose thickness more to blade head in order to tilt finished surface, shrilly formed and spray The blade front end of the surface contact of lip mouthful, and then have the advantages that the cleaning force to the nozzle lip surface can be improved.

4th, pressurization blade support member below while with up and down two row more than configure make the blade support member Mobile angular adjustment part, and then have the advantages that being capable of setting angle that is more accurate and easily adjusting the blade.

Brief description of the drawings

Fig. 1 is the stereogram for the embodiment for showing the slit application device of the present invention.

Fig. 2 is to show to be arranged on the nozzle and the stereogram of nozzle lip cleaning device of Fig. 1 slit application device.

Fig. 3 is to show to set the front elevation of the state of nozzle lip cleaning device on Fig. 2 nozzle lip surface.

Fig. 4 is the stereogram for the major part for expanding the nozzle lip cleaning device for showing Fig. 2.

Fig. 5 is provided in the plan of the first blade of Fig. 4 nozzle lip cleaning device.

Fig. 6 is that the cleaning device main body for showing the nozzle lip cleaning device setting in Fig. 4 combines the first blade, the first knife The drawing of the state of piece support member and the first support pin member.

Fig. 7 is the bonding state of the first blade support member, the first support pin member and the first blade that show Fig. 6 Plan.

Embodiment

Explanation implements the preferred embodiments of the present invention of the above-mentioned problem to be solved referring to the drawings.In explanation originally During embodiment, identical title and same-sign are used for identical structure, and in additional theory accordingly omitted below It is bright.

Referring to figs. 1 to Fig. 7, illustrate the nozzle lip cleaning device according to the present invention and the slit using the cleaning device One embodiment of formula application device.

As shown in Figure 1 and Figure 2, the slit application device includes:Workbench 1, nozzle unit 100, nozzle movement Unit 2, nozzle lip cleaning device 200, cleaning device mobile unit 4, cleaning device cleaning unit 5, charging basket unit 3 and big Gas chamber 6.

Specifically, the substrate of decoction to be applied is placed with the workbench 1, the nozzle unit 100 is displaced into institute State above substrate, while by the liquid medicine painting in the substrate.

The nozzle unit 100 includes:For by liquid medicine painting in the nozzle 110 of the thereon;The fixed spray The tip retainer 120 of the upper area of mouth 110.

The nozzle 110 includes:It is incorporated into the nozzle body 111 of the tip retainer 120;To the nozzle body 111 lower area protrudes and sprays the nozzle lip 113 of decoction.

The nozzle mobile unit 2 is arranged on the both sides of the tip retainer 120 and moves the tip retainer 120 It is dynamic, and then move the nozzle 110.

The nozzle lip cleaning device 200 is used to remove the decoction for being attached to the nozzle lip 113, the nozzle lip The blade of mouth cleaning device wipes the decoction off to be contacted with the state of the surface of nozzle lip 113.For the nozzle It is described in detail in the structure of lip cleaning device 200, the content that will be described below.

The cleaning device mobile unit 4 makes length side of the nozzle lip cleaning device 200 along the nozzle 110 To movement.That is, in the state of the described remains stationary of nozzle 110, the cleaning device mobile unit 4 cleans the nozzle lip Device 200 is moved, and then the nozzle lip cleaning device 200 removes the decoction for being attached to the nozzle lip 113.

5 pairs of the cleaning device cleaning unit is used during the decoction for being attached to the nozzle lip 113 is removed The nozzle lip cleaning device 200 crossed is cleaned.

Also, at least a portion configuration of the charging basket unit 3 is in the nozzle lip cleaning device 200 and described clear The bottom of cleaning device cleaning unit 5.The decoction separated by the nozzle lip cleaning device 200 is housed in the charging basket unit 3 With the cleaning fluid discharged from the cleaning device cleaning unit 5.

The atmospheric chamber 6 is that the place of the nozzle 110 is housed before using the nozzle 110, without using institute When stating nozzle 110, in order to prevent the medical liquid spraying dry mouth of the nozzle, cleaning fluid is charged with the atmospheric chamber 6.

Reference picture 2 is to Fig. 7, an embodiment of the nozzle lip cleaning device as described below according to the present invention.

The nozzle lip cleaning device 200 includes:Cleaning device main body 210;Configuration is in the cleaning device main body 210 Rear area shower unit 220;It is incorporated into the blade support unit of the medial surface of the cleaning device main body 210;With reference to In the blade unit of the blade support unit;For the angle for the setting angle for adjusting the blade for being arranged on the blade unit Adjustment unit;For making the front end of the blade supporting pin unit parallel with the surface of nozzle lip;For by the support Pin unit is incorporated into the combining unit (not shown) of the blade support unit with the blade unit.

The cleaning device main body 210 is moved by the cleaning device mobile unit 4, and in the cleaning device master Body 210 installs the blade unit, blade support unit, the angle regulating unit, the supporting pin unit and the pouring Bathe unit 220.

Specifically, the cleaning device main body 210 includes:Matrix 215, configuration are in the two sides of the matrix 215 First side block 211 and second side block 213.On the basis of Fig. 3, the first side block 211 is configured in the matrix 215 Left side, the second side block 213 configured on the right side of the matrix 215.

The matrix 215, the first side block 211 and the second side block 213 form one, and described The medial surface of the medial surface of one side block 211 and the second side block 213 for above the matrix 215 with upper direction It is formed slopely.

The blade support unit includes:Configure the first blade support member in the medial surface of first side block 211 230;Configure the second blade support member 23 in the medial surface of the second side block 213;Configuration is on the matrix 215 The 3rd blade support member 26.

First blade support member 230 supports the first blade 250 of the blade unit, second blade support Part 23 supports the second blade 25 of the blade unit, and the 3rd blade support member 26 supports the of the blade unit Three blades 28.

The structure of first blade support member 230 and second blade support member 23 is practically identical, therefore First blade support member 230 is only limited to be carried out as follows explanation.

First blade support member 230 includes:It is incorporated into the first supporting part of the medial surface of first side block 211 231;Extend the second support for being formed and being combined with the lower area of first blade 250 from first supporting part 231 Portion 233.

The first fastener hole for being formed with the other secure component (not shown) of insertion in first supporting part 231 (does not show Go out), wherein the secure component is used to first blade support member 230 being incorporated into the inner side of first side block 211 Face.

Second supporting part 233 is formed slopely for first supporting part 231 to upper direction, and described Two supporting parts 233 are formed with the second fastener hole 233a for the first bonded block (not shown) with reference to the combining unit.

First bonded block supports pin member 240 by the first of first blade 250 and the supporting pin unit In combination with first blade support member 230.

Specifically, the fastening slots 251a of the first blade described in the first bonded block insertion and the described first support It is anchored on the second fastener hole 233a while the restraint location Variable Area 245 of pin member, and then by first blade Rear with described first support pin member 240 rear area be incorporated into second supporting part 233.

On the other hand, the blade unit includes:It is incorporated into the first blade 250 of first blade support member 230; It is incorporated into the second blade 25 of second blade support member 23;It is incorporated into the 3rd knife of the 3rd blade support member 26 Piece 28.

The front end of first blade 250 is contacted with the first side 113a of the nozzle lip, second blade 25 Front end be contacted with the second side 113b of the nozzle lip, the front end of the 3rd blade 28 is contacted with to form the nozzle The nozzle tip (not shown) of lip chemicals liquid discharge mouthful.

First blade 250 is mutually configured with second blade 25 with oblique angle, the 3rd blade more than 28 Portion direction is arranged obliquely.

First blade 250 wipes the decoction for the first side 113a for adhering to the nozzle lip, second blade off 25 wipe the decoction for the second side 113b for being attached to the nozzle lip off, and the 3rd blade 28, which is wiped off, is attached to the nozzle The decoction at tip.

The structure of first blade 250 and second blade 25 is practically identical, therefore is limited to first blade 250 illustrate.

The rear end of first blade 250 is incorporated into first blade support 230, and front end is then contacted with the spray The first side 113a of lip mouthful, to wipe the surface of the nozzle lip after discharge decoction off, that is, wipes off and is attached to nozzle lip The first side 113a of mouth decoction.

Specifically, reference picture 5, first blade 250 includes:It is incorporated into first blade support member 230 Blade fastening portion 251;Extend the blade head 253 formed from the blade fastening portion 251.

It is formed with the blade fastening portion 251 for the fastening slots with reference to first blade support member 230 251a。

The blade head 253 includes:The head rear portion 253a extended from the blade fastening portion 251;From the head Portion rear portion 253a extends the head front part 253b to be formed.

Especially, with reference to Fig. 5 (b) of I-I profile as Fig. 5 (a), the head front part 253b surfaces, which are formed, inclines Tiltedly, the nose thickness and then more to the blade head 253 is thinner.

In the present embodiment, the head front part 253b is processed by chamfer machining, but the present invention is not limited In this, but it can be processed by various methods.

The head front part 253b is used as the part for being contacted with the surface of nozzle lip 113, the head front part 253b end (that is, the front end on described blade head) is sharper, then more efficient can remove and be attached to the nozzle lip First side 113a decoction, therefore, it is possible to improve the cleaning force to the nozzle lip.

In addition, the lower area 253d of the head front part has chamfer shape, to prevent and other adjacent blades The interference of (that is, the head front part of the head front part of the second blade 25 and the 3rd blade 28).

The lower end part on usual blade head is in the position less than the lower surface of nozzle lip 113, if the bit The bottom in portion 253 is not chamfer shape, then the bit subordinate end with adjacent another blade is interfered.

As shown in figure 5, the chamfer shape of the head front part 253b can have the shape of straight line, but it is of the invention This is not limited to, but can also have rounded shapes.

Certainly, the present invention is not limited to this, but also the head front part progress chamfering to the 3rd blade 28 adds Work, tiltable forms the head front part of the 3rd blade 28, and then the nose thickness more to the 3rd blade 28 is thinner.

Typically, if the decoction of the surface separating high-viscosity from nozzle lip, because the deadweight of the decoction is under blade Portion drops in direction, if the translational speed of the blade is too fast, and the decoction does not drop to the bottom direction of the blade, but The top for other blades that configuration is abutted with the blade to dropping to while movement along the length direction of the blade, together When cause cleaning it is unqualified.

In order to prevent above mentioned problem, configure the width on the blade head 253 of the present invention and be more than existing bit The width in portion, and then it is able to ensure that the bottom direction of the decoction to first blade 250 that are separated from the nozzle lip 113 is fallen The space fallen.

Moreover, the blade head 253 has the width more than the blade fastening portion 251, while to the knife The bottom direction of piece fastening part 251 forms stepped, and then more efficient prevents the decoction from being moved from the blade head 253 To the blade fastening portion 251.

Specifically, the width on the blade head 253 is more than the width of the blade fastening portion 251, the bit The lower area in portion 253 forms stepped region while further extension than the lower area of the blade fastening portion 251 to bottom Domain 253c, even and if then the decoction viscosity it is big, separate decoction because conducting oneself with dignity described in from the surface of the nozzle lip 113 The table on blade head 253, which faces toward, drops to the bottom of first blade 250 after the movement of direction, or along the knife Do not move, but drop to described to the lower area of the blade fastening portion 251 after the lower area movement of sheet head 253 The bottom on blade head 253.

Finally, the width of the blade fastening portion 251 is kept and existing blade fastening portion identical width, while described The width on blade head 253 is bigger than existing blade head, and then will can be fastened with the blade fastening portion 251 attached group The size of part keeps constant, therefore can be by equipment miniaturization, while not making the decoction of separation be moved by the blade head 253 To the blade fastening portion 251.Therefore, other blades (that is, the second blade 25 and the 3rd blade 28) will not be polluted, and then can Prevent that the cleaning to nozzle lip is unqualified, and then the production time can be reduced.

Certainly, the present invention is not limited to the above embodiments, but the blade head 253 may also comprise:From the knife The head rear portion of piece fastening part extension;Extend the head front part to be formed from head rear portion;From the head rear The borderline region of portion and the head front part protrudes into the raised (not shown) in head on the surface on the blade head.

The decoction separated by the head front part from the nozzle lip surface when blade is moved with the head Do not moved while projection collision to head rear portion, but drop to the bottom of the blade.

On the other hand, the angle regulating unit includes:It is arranged on the cleaning device main body 210 and makes described first The first angle regulating member 270 that blade support member 230 is moved;It is arranged on the cleaning device main body 210 and makes described The second angle regulating member (not shown) of second blade support member 23 movement.

The structure of the first angle regulating member 270 and the second angle regulating member is practically identical, therefore limit Illustrated in the first angle regulating member 270.

The first angle regulating member 270 is configured at the rear of first blade support member 230, and institute of pressurizeing Described the is adjusted while stating behind the first blade support member 230, and then move first blade support member 230 Relative position between the front end and the surface of the nozzle lip 113 of one blade 250.

Pressurizeed described in the insertion of first angle regulating member 270 while first side block 211 the first blade branch Support part part 230.

Specifically, the first angle regulating member 270 includes:With the width side of the described first support pin member 240 Pressurizeed on the basis of to center first blade support member 230 upper area upper angle regulating member 272;Pressurization institute State the lower angular regulating member 271 of the lower area of the first blade support member 230.

Here, being formed with the through hole of the two row above in the first side block 211, the through hole includes inserting on described Portion's angular adjustment part 272 and by the first through hole 211a of insertion, insert the lower angular regulating member 271 and by insertion The second through hole 211b.

The angular adjustment part adjusts the setting angle of blade in order to pressurize blade support member and configures two up and down More than row, and then it can more correctly and easily adjust the setting angle of the blade.

On the other hand, the supporting pin unit includes:Configure first on first blade support member 230 Support pin member 240;With second support pin member 24 of the configuration on second blade support member 23.

The first support pin member 240 configure first blade support member 230 and first blade 250 it Between, and the width pivot as first blade 250, and then moved in first blade support member 230 When dynamic, the front end of first blade 250 is set abreast to be contacted with the surface of the nozzle lip 113.

The structure of the first support pin member 240 and the described second support pin member 24 is practically identical, therefore is limited to The first support pin member 240 is illustrated.

The first support pin member 240 includes:It is incorporated into the pin fastening part 241 of first blade support member 230; The pin supporting part 243 of the subregion on the blade head 253 is supported while extending and formed from the fastening part 241.

Restraint location Variable Area 245 is formed with the pin fastening part 241, first knife is incorporated into for changing The binding site of the first support pin member 240 of piece support member 230.

In the present embodiment, the restraint location Variable Area 245 is configured to a long hole shape, but the present invention is not This is defined in, but can also be configured multiple hole shapes of fixed range at interval, and may also be configured to the slit of regular length Shape.

The width of the pin supporting part 243 is less than the width of the pin fastening part 241, and the pin supporting part 243 can be from institute The central area for stating pin fastening part width extends to be formed.Also, selling the width of supporting part 243 has less than the bit The value of the width in portion 253.

Certainly, the present invention is not limited to this, but the pin supporting part 243 has same widths with pin fastening part 241, And can also have the value of the width less than the blade head 253.

The width of the pin supporting part 243 has the value of the width less than the blade head 253, and then the pin is supported Portion 243 is the pivot of the width on the blade head.

Specifically, reference picture 7, are closely contacted with the surface equivalent to the blade head in the a-quadrant shown in Fig. 7 The surface of nozzle lip is on the contrary, the situation on surface of the remaining area away from the nozzle lip 113 on the blade head 253 Under, i.e., in the case that the front end of described first blade 250 is not contacted with the surface of nozzle lip 13 abreast, user is makes The front end for stating the first blade 250 is parallel with the surface of the nozzle lip 113, and the lower angular regulating member is promoted first 271, while subregion (that is, the lower region for second supporting part 233 that pressurizes of pressurization first blade support member 230 Domain).

In addition, user's regulation is incorporated into the secure component of the first fastener hole (not shown) of first supporting part 231, Can move 230 pairs of the first blade support member first side block 211 simultaneously.

In this way, the lower area of second supporting part 233 pressurizes simultaneously behind the lower area of the pin fastening part 241 Behind the lower area of the blade fastening portion 251.

Also, the lower area on the blade head 253 that the lower area of the blade fastening portion 251 is formed with extension By the power in the direction being pulled upwardly from Fig. 7 bottom surface.

Now, the width as the blade head 253 while the pin supporting part 243 supports blade head 253 Spend direction pivot, the upper area on the blade head 253 centered on the pin supporting part 243 by Fig. 7 bottom surface Rotated while the power in inner side direction.

Finally, the pin supporting part 243 acts on as follows:While pressurization behind the blade head 253, make the knife Sheet head 253 is crushed on the surface of the nozzle lip 113 with elastic restoring force, while as the blade head 253 The pivot of width, it helps the front end of first blade 250 and the easy structure in surface of the nozzle lip 113 Into parallel.

That is, described pin supporting part 243 is played for the width of first blade 250 and acted on lever identical, Help the front end of first blade 250 parallel with the surface of the nozzle lip 113 simultaneously.

Here, the length of the first support pin member 240 is less than the length of first blade 250, and described the The intensity of one support pin member 240 can have the value of the intensity more than first blade 250.

The intensity of the first support pin member 240 has the value of the intensity more than first blade 250, and then described The state that the flexible restoring force of first blade 250 and holding are stably pressed, while the nozzle lip can be arranged on Surface.

For example, the first support pin member 240 is made by stainless steel, first blade 250 can be by resin-made Form.

Certainly, the present invention is not limited to the above embodiments, but the support pin member is equally applicable to be provided with admittedly The nozzle lip cleaning device of the blade of fixed width degree.

Moreover, the support pin member is equally applicable to the angular adjustment part in the blade support member Center is configured to the situation of a row below.That is, described support pin member effect is as follows:In the front end of the blade not abreast It is configured in the state of the nozzle lip surface, if the angular adjustment part pressurizes behind the center of the blade support member The pivot in face, then width of the pin supporting part as the blade of the support pin member, while helping to make The front end of the blade is parallel with nozzle lip surface composition.

As described above, the present invention is not limited to above-mentioned specific preferred embodiment, and the technical field of the invention Technical staff with usual knowledge can implement various deformation under the main points of the invention protected without departing from right, And the deformation belongs to the scope of the present invention.

Commercial exploitation possibility

The present invention can accurately and quickly be provided for removing the decoction for being attached to nozzle lip after discharge decoction Blade, while can also improve the cleaning force of nozzle lip, therefore can be used in slit application device, therefore be used in slit Formula application device, and the slit application device be used in FPD substrate manufacturing process by various liquid medicine paintings in The application process of real estate.

Claims (13)

1. a kind of nozzle lip cleaning device, it is characterised in that including:
Cleaning device main body;
Blade support unit, with the first blade support member for being incorporated into the cleaning device main body;
Blade unit, with the first blade, first blade rear end is incorporated into first blade support member, and preceding termination Touch in the surface of the nozzle lip, the decoction on nozzle lip surface is attached to after injection decoction to wipe off;
Angle regulating unit, with first angle regulating member, the first angle regulating member configuration is in the cleaning device Main body, and the front end of first blade and the nozzle lip are adjusted while moving first blade support member Relative position between surface;
Supporting pin unit, with the first support pin member, the first support pin member configuration is in first blade support Between part and first blade, and the pivot of the width as first blade, and then described first Blade support member makes the front end of first blade abreast be contacted with the nozzle lip surface when moving.
2. nozzle lip cleaning device according to claim 1, it is characterised in that
First blade includes:Blade fastening portion, is incorporated into first blade support member;
Blade head, extends to be formed from the blade fastening portion;
The first support pin member includes:Fastening part is sold, first blade support member is incorporated into;Supporting part is sold, from institute State the subregion that the blade head is supported while pin fastening part extends to be formed.
3. nozzle lip cleaning device according to claim 2, it is characterised in that also include:
Combining unit, with the first bonded block, first bonded block is used for first blade and described first Pin member is supportted in combination with first blade support member,
The width of the pin supporting part has the value of the width less than the blade head.
4. nozzle lip cleaning device according to claim 2, it is characterised in that
Restraint location Variable Area is formed with the pin fastening part, the restraint location Variable Area is incorporated into institute for change State the binding site of the first support pin member of the first blade support member.
5. nozzle lip cleaning device according to claim 2, it is characterised in that
The width of the pin supporting part is less than the width of the pin fastening part, and the pin supporting part is from pin fastening part width side To central area extend and to be formed.
6. nozzle lip cleaning device according to claim 2, it is characterised in that
The length of the first support pin member is less than the length of first blade, the intensity tool of the first support pin member There is the value of the intensity more than first blade.
7. nozzle lip cleaning device according to claim 2, it is characterised in that
In order to prevent being moved to the blade fastening portion by the blade head from the decoction that the nozzle lip surface is separated, The blade head has the width more than the blade fastening portion, while forming rank to the bottom direction of the blade fastening portion Scalariform.
8. nozzle lip cleaning device according to claim 7, it is characterised in that
At least a portion in the lower area on the blade head has chamfer shape, to prevent from sending out with other adjacent blades Raw interference.
9. nozzle lip cleaning device according to claim 2, it is characterised in that
The blade head includes:Head rear portion, from blade fastening portion extension;Blade front part, behind the head Square portion extends to be formed, and forms inclined surface, and then the nose thickness more to the blade head is thinner.
10. nozzle lip cleaning device according to claim 2, it is characterised in that
The blade head includes:Head rear portion, from blade fastening portion extension;Head front part, behind the head Square portion extends to be formed;Head is raised, and the knife is protruded into from the borderline region of head rear portion and the head front part The surface of sheet head.
11. nozzle lip cleaning device according to claim 1, it is characterised in that
The first angle regulating member configuration is at the rear of first blade support member, and first blade that pressurizes Move first blade support member while behind support member, and with the width of the described first support pin member Configured up and down respectively on the basis of the center of direction.
12. nozzle lip cleaning device according to claim 11, it is characterised in that
The cleaning device main body includes:Matrix, first side block and second side block, wherein the first side block and Second side block is configured in the matrix both sides,
It is formed with the first side block and inserts the first angle regulating member and the through hole of the two row above of insertion.
13. a kind of slit application device, it is characterised in that including:
Workbench, is placed with the substrate of decoction to be applied;
Nozzle unit, with nozzle and tip retainer, the nozzle is used for face on the substrate and smears decoction, the nozzle Fixator fixes the upper area of the nozzle;
Nozzle mobile unit, for moving the nozzle unit;
The nozzle lip cleaning device of any one in claim 1 to 12;
Cleaning device mobile unit, moves length direction of the nozzle lip cleaning device along the nozzle;
Cleaning device cleaning unit, for cleaning the nozzle lip cleaning device;
Charging basket unit, at least a portion configuration is under the nozzle lip cleaning device and the cleaning device cleaning unit Portion, and house the decoction separated by the nozzle lip cleaning device and the cleaning discharged from the cleaning device cleaning unit Liquid.
CN201580066153.9A 2014-12-04 2015-12-03 Nozzle lip cleaning device and its slit application device CN107004621A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR10-2014-0172646 2014-12-04
KR1020140172646A KR101578368B1 (en) 2014-12-04 2014-12-04 Apparatus for cleaning nozzle lip and Slit coater using the same
PCT/KR2015/013149 WO2016089132A1 (en) 2014-12-04 2015-12-03 Nozzle lip cleaner and slit coater using same

Publications (1)

Publication Number Publication Date
CN107004621A true CN107004621A (en) 2017-08-01

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Application Number Title Priority Date Filing Date
CN201580066153.9A CN107004621A (en) 2014-12-04 2015-12-03 Nozzle lip cleaning device and its slit application device

Country Status (3)

Country Link
KR (1) KR101578368B1 (en)
CN (1) CN107004621A (en)
WO (1) WO2016089132A1 (en)

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CN101362123A (en) * 2007-08-10 2009-02-11 K.C.科技股份有限公司 Nozzle cleaning device and cleaning method
CN101614960A (en) * 2008-06-27 2009-12-30 显示器生产服务株式会社 Slit coating device with nozzle lip cleaning device
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JP2011167607A (en) * 2010-02-17 2011-09-01 Tokyo Electron Ltd Apparatus for cleaning slit nozzle and coating apparatus

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JP3835549B2 (en) * 2003-03-07 2006-10-18 株式会社ミヤコシ Latent image carrier cleaning device
JP4578381B2 (en) * 2005-10-19 2010-11-10 東京エレクトロン株式会社 Coating method and coating apparatus
EP1990693A4 (en) 2006-03-02 2010-03-17 Toshiba Kk Cleaning apparatus, cleaning method, pattern forming apparatus and pattern forming method
KR101328730B1 (en) * 2012-03-28 2013-11-11 주식회사 디엠에스 Slit Coater

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Publication number Priority date Publication date Assignee Title
CN1757441A (en) * 2004-10-04 2006-04-12 大日本网目版制造株式会社 Substrate processing device and method
CN101314153A (en) * 2007-05-28 2008-12-03 大日本网目版制造株式会社 Nozzle cleaning apparatus
CN101362123A (en) * 2007-08-10 2009-02-11 K.C.科技股份有限公司 Nozzle cleaning device and cleaning method
CN101614960A (en) * 2008-06-27 2009-12-30 显示器生产服务株式会社 Slit coating device with nozzle lip cleaning device
CN102161027A (en) * 2010-02-17 2011-08-24 东京毅力科创株式会社 Cleaning device and coating device for slit nozzle
JP2011167607A (en) * 2010-02-17 2011-09-01 Tokyo Electron Ltd Apparatus for cleaning slit nozzle and coating apparatus

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WO2016089132A1 (en) 2016-06-09
KR101578368B1 (en) 2015-12-18

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