CN106969826A - The calibrating installation and calibration method of a kind of vibrating sensor - Google Patents

The calibrating installation and calibration method of a kind of vibrating sensor Download PDF

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Publication number
CN106969826A
CN106969826A CN201710228709.0A CN201710228709A CN106969826A CN 106969826 A CN106969826 A CN 106969826A CN 201710228709 A CN201710228709 A CN 201710228709A CN 106969826 A CN106969826 A CN 106969826A
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CN
China
Prior art keywords
calibration
isolation table
vibration isolation
vibrating sensor
sensor
Prior art date
Application number
CN201710228709.0A
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Chinese (zh)
Inventor
陈海峰
白文义
乔江晖
王伟
邝奇
耿直
刘英元
姚羽佳
刘晓
潘思宇
Original Assignee
西安航天动力试验技术研究所
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Priority to CN201710228709.0A priority Critical patent/CN106969826A/en
Publication of CN106969826A publication Critical patent/CN106969826A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H17/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups

Abstract

The invention belongs to measurement and calibration fixture fields, it is related to the calibrating installation and calibration method of a kind of vibrating sensor, it is intended to improve the calibration accuracy to vibrating sensor.Wherein calibrating installation includes standard vibration sensor, exciting source, data acquisition module, data processing module, calibration cavity, heater box, vibration isolation table, the vacuum acquiring system for being connected with heater box and connecting positioned at the external temperature control device of calibration chamber, with calibration chamber body phase;Calibration cavity is fixed in vibration isolation table is collectively forming airtight cavity with vibration isolation table;Exciting source and heater box are arranged in airtight cavity, and exciting source is arranged on vibration isolation table upper surface, and heater box is fixedly mounted on exciting source by thermal insulating connectors;Standard vibration sensor is fixedly installed in heater box.The change that the present invention is capable of environmental test is calibrated to vibrating sensor, effectively increases the calibration accuracy of vibrating sensor.

Description

The calibrating installation and calibration method of a kind of vibrating sensor

Technical field

The invention belongs to measurement and calibration fixture fields, it is related to the calibrating installation and calibration method of a kind of vibrating sensor.

Background technology

The today developed rapidly in machinery manufacturing industry, high speed, efficient, high accuracy and maximization have become Administration & Mechanical Development Key, because mechanical oscillation can have a strong impact on machine performance and life-span, so examination and assessment mechanical oscillation effect turn into design With an important index for assessing mechanical device equipment performance.

The kinetic parameter of plant equipment and structure can be obtained using vibration-testing, science is provided to solve vibration problem Foundation.Vibration-testing is that the vibratory output of machinery is converted into electric signal parameter by sensor, the then electric signal to being converted into Measure and analyze, finally provide the conclusion of vibration performance index.In vibration-testing link, during sensor is measurement process Visual plant, its measurement performance will directly influence the accuracy for the numerical value measured, so before sensor measurement, needing Sensor is calibrated, and the accuracy calibrated will directly influence the performance of sensor, so how by the standard of calibration Exactness is improved, and reduces influence of the external environment (especially environment temperature and vacuum) to calibration accuracy, and this, which is one, is worth solution Certainly the problem of.

The calibration of existing country and international standard to vibrating sensor, is all built upon 160Hz normal temperature (25 DEG C) condition Lower foundation, corresponding calibrating installation is also to set up on this condition, right currently without the change for being capable of environmental test The device that vibrating sensor is calibrated, and vibrating sensor is all the condition in environment temperature acute variation under many circumstances Under measure, this can bring about larger measurement error.

The content of the invention

In order to improve the calibration accuracy to vibrating sensor, vibrated the invention provides relative method under the conditions of a kind of thermal vacuum Calibrating installation and calibration method, the change for being capable of environmental test are calibrated to vibrating sensor.

The present invention technical solution be:

A kind of calibrating installation of vibrating sensor, including standard vibration sensor, exciting source, data acquisition module and data Processing module;

It is characterized in that:

Also include calibration cavity, heater box, vibration isolation table, be connected with heater box and be located at the external temperature control device of calibration chamber, With the vacuum acquiring system of calibration chamber body phase even;

The calibration cavity is fixed in the vibration isolation table, and airtight cavity is collectively forming with vibration isolation table;

The exciting source and heater box are arranged in the airtight cavity, wherein, exciting source is arranged on vibration isolation table upper table Face, heater box is fixedly mounted on the exciting source by thermal insulating connectors;

The standard vibration sensor is fixedly installed in the heater box;

The data acquisition module is used to gather standard vibration sensor and the output signal by school vibrating sensor;

The data processing module is used to be compared by standard vibration sensor and by the output signal of school vibrating sensor Relatively correct, obtain sensitivity and the frequency characteristic of corrected sensor.

Based on above-mentioned basic technical scheme, the present invention also makes following optimization and/or restriction:

To reduce influence of the extraneous vibration to exciting source service behaviour, the present invention is in vibration isolation table and for disposing vibration isolation table Five pieces of cushion blockings are provided between ground, wherein four pieces of cushion blockings are arranged at four drift angles of vibration isolation table, for ground vibration damping simultaneously Balancing gravity makes basic steady;Remaining one piece of cushion blocking is circular damping block, is arranged on vibration isolation table bottom centre, for keep every Shake the stabilization and vibration damping of platform.

To prevent from being arranged with insulating sleeve, the mark outside influence of the thermal environment to exciting source service behaviour, above-mentioned exciting source Quasi- vibrating sensor is fixed on insulating sleeve by thermal insulating connectors.

Specifically, above-mentioned temperature control device includes heat sink, electric heating unit, refrigeration unit and temperature conditioning unit;It is described heat sink to adopt It is made of copper or stainless steel, heat sink surface painting space flight is special pitch-dark, and absorptivity and hemispherical reflectance are above 0.9, heat sink temperature Scope is at 0 DEG C~100 DEG C;The refrigeration unit is external refrigeration machine, heat sink is cooled down to described by outer circulation;It is described Temperature conditioning unit includes high-precision platinum resistor.

Further, for convenience of dismounting, above-mentioned calibration cavity bottom is first flange dish structure, the vibration isolation table upper surface With the second flange dish structure matched with the first flange dish structure;The calibration cavity and vibration isolation table pass through the first method Blue dish structure is fixedly connected with second flange dish structure;It is provided between the first flange dish structure and second flange dish structure Rubber seal.

Further, it is provided with watch window at the top of above-mentioned calibration cavity;Signal is additionally provided with the calibration cavity to connect Mouthful, using the sealing of vacuum mud at signaling interface.

Further, it is increase portability, above-mentioned calibrating installation also includes moving cart;It is provided with moving cart described Ground for disposing vibration isolation table.

Vibrating sensor is calibrated invention also provides a kind of calibrating installation using above-mentioned vibrating sensor Method, it is characterized in that, comprises the following steps:

1) corrected sensor is fixed in heater box, and the corrected sensor and standard transducer is back-to-back puts Put;

2) calibration cavity is fixedly connected and vacuumized with vibration isolation table, the vacuum in calibration chamber body is reached that calibration is required The vacuum wanted;

3) heater box and temperature control device are opened, makes the temperature value that environment temperature is risen to required for calibration in heater box;

4) real-time, synchronization is to by the x excited by impact of school vibrating sensor and standard vibration sensor application formed objects;

5) gather in real time by school vibrating sensor and standard transducer by the rear signal y1 exported respectively excited by impact And y2;

6) signal y1 is compared with signal y2, obtains sensitivity and the frequency characteristic of corrected sensor.

The advantage of the invention is that:

1st, the present invention controls the vacuum in calibration chamber body by vacuum acquiring system, and heater box is controlled by temperature control system Interior environment temperature, corrected sensor and standard transducer is arranged in controllable vacuum environment and heating environment, Neng Goumo The change for intending external environment is calibrated to corrected sensor, improves the calibration accuracy of vibrating sensor.

2nd, the present invention using five pieces of cushion blockings make vibration isolation table keep it is stable and and to its vibration damping, reduction is shaken in a calibration process The dynamic influence for calibration result.

3rd, the present invention is arranged insulating sleeve outside exciting source, can effectively prevent thermal environment to the shadow of exciting source service behaviour Ring, it is ensured that the service life of exciting source, while further increasing calibration accuracy.

4th, the present invention makes calibrating installation more portable using moving cart.

Brief description of the drawings

Fig. 1 is the structure composition schematic diagram of the present invention;

Fig. 2 is the form and distribution schematic diagram of the cushion blocking of the present invention;

Fig. 3 is the principle schematic of vacuum acquiring system;

1- heater boxes;2- thermal insulating connectors;3- moving carts;4- cushion blockings.

Embodiment

Below in conjunction with accompanying drawing, the invention will be further described.

As shown in figure 1, the calibrating installation of vibrating sensor provided by the present invention mainly includes calibration cavity, by absolute Method calibrates (i.e. laboratory investment) good standard vibration sensor, for being added by school vibrating sensor and standard vibration sensor Carry exciting source, rigid vibration isolation table, the heater box 1 for simulating thermal environment and the temperature control device of pattern field acceleration magnitude, be used for Simulate the vacuum acquiring system of vacuum environment, for gathering standard vibration sensor and the output signal number by school vibrating sensor According to acquisition module and for obtaining the sensitivity of corrected sensor and the data processing module of frequency characteristic.Calibrate cavity Overall using the columnar structured of one end closing, bottom is made up of a circular flange disk, is fixed with vibration isolation table top one big Small another circular flange disk corresponding with the circular flange disk, the two ring flanges are bolted and add rubber therebetween Glue sealing ring is so that calibration cavity to be fixedly connected with vibration isolation table and form annular seal space.Signaling interface (example is provided with calibration cavity Such as cable and the jack interface of sensor) it is used to be controlled heater box and exciting source and signal output, these signaling interfaces Place is sealed using vacuum mud.When in use, corrected sensor and standard transducer are placed back to back and are fixed on heating In case, heater box is fixedly mounted on exciting source by thermal insulating connectors, then temperature control device and heater box are connected;Then Calibration cavity is buckled in outside heater and exciting source, and is fastened on by flange in vibration isolation table;Finally by vacuum acquirement System connects with calibration cavity.

The material selection 1Cr18Ni9 of cavity is calibrated, when calibration cavity is solely subjected to external pressure, can be calculated by stable condition, its wall Thickness can be calculated according to equation below and obtained:

Wherein S0To calibrate the calculated wall thickness of cavity, DBFor footpath in calibration chamber body, P is external pressure design pressure, vacuum tank choosing 0.1MPa is selected, L is calibration cavity computational length, EtModulus of elasticity when for material temperature being temperature t, when taking 20 DEG C of stainless steel Modulus of elasticity.The etching extent of mismachining tolerance and sheet material in view of sheet material, the actual wall thickness of calibration cavity need to add a surplus C

C=C1+C2+C3 (2)

C is additional value of wall thickness;(estimated to take 1.5mm);C1 is the maximum negative common difference additional amount of steel plate, is generally taken 0.5mm;C2 is corrosion allowance, and single-sided corrosion (including atmospheric corrosion) takes C2=1mm, and two-sided corrosion typically takes 2mm;C3 is end socket Stretching Reducing thickness during punching press, in general C3 take the 10% of calculated thickness, and no more than 4mm.For cylinder not Stamped element, takes C3=0;Calibrate the actual wall thickness S=S of cavity0+C。

Rigid vibration isolation table should have higher rigid, good flatness;To enable exciting source to facilitate firm be fixed on In vibration isolation table, when avoiding the extraneous vibration from working exciting source using basic vibration protection between the basis of vibration isolation table and calibrating installation Influence.Because vibration isolation table directly bears load, its deformation under static load should meet the actual use needs of engineering.In addition, every Structural response of the platform under dynamic loading that shake is also one of the performance parameter for needing to consider, representation parameter is exactly that table top will have and to the greatest extent may be used The high structural modal frequency of energy.

Basic vibration protection is in the present embodiment:Five pieces of rubber dampers 4 are set below vibration isolation table, wherein four pieces of vibration dampings Padding is used for ground vibration damping and balancing gravity for square cushion blocking and being individually positioned at four drift angles of vibration isolation table and makes basic steady, remains One piece of cushion blocking of remaininging is circular cushion blocking and is placed on the bottom centre position of vibration isolation table for keeping the stabilization of vibration isolation table and subtracting Shake, as shown in Figure 2.Such design is to can be convenient for changing when rubber damper is due to ageing failure after long-term use Rubber damper.

The effect of thermal insulating connectors is that the heat for preventing heater box conducts to exciting source and influences its normal work.In order to Further prevent influence of the thermal environment to exciting source service behaviour, the outer insulating sleeve of surface cover system one of exciting source, for protecting exciting Source.

Temperature control device is used for the temperature for measuring and controlling heater box, and temperature control device includes heat sink, temperature detecting unit, heating Unit, refrigeration unit, temperature conditioning unit and temperature display unit.Heat sink use copper or stainless steel are made, and it is special that heat sink surface applies space flight With pitch-dark, absorptivity and hemispherical reflectance are above 0.9,0 DEG C to 100 DEG C of heat sink temperature scope;Heating unit uses electrical heating Pattern;The external refrigeration machine of refrigeration unit, using special silicone oil (or fluorocarbon oil) as working medium, is made by outer circulation to heat sink It is cold;Temperature conditioning unit carries out temperature control using high-precision platinum resistor.

The schematic diagram of vacuum acquiring system as shown in figure 3, including vavuum pump, standard vacuum gauge and vacuum pressure controller, Its intermediate pump connects with calibration chamber body phase, for being vacuumized to calibration cavity;Standard vacuum gauge is used to measure in calibration chamber body Vacuum, vacuum pressure controller is according to the pumpdown time of measured vacuum degree control vavuum pump.The pumpdown time of vavuum pump It is made up of two of low vacuum lower pumping time and high vacuum lower pumping time.Low vacuum lower pumping Time Calculation, be actually It is divided into 5 pressure segments equivalent to the pumpdown time for air being pressed onto 1Pa, each pressure segment of correspondence is according to formula (3) Calculate the pumpdown time of each pressure section respectively with the K values given by table 1, be then added the pumpdown time of five pressure sections Produce total pumpdown time that target pressure value is pressed onto from air.

Wherein tiFor time, KiFor correction factor, V is the volume for calibrating cavity, SpIt is the nominal displacement of vavuum pump, PuFor Limiting pressure in calibration chamber body, PiTo start pressure during pumping in calibration chamber body, Pi+1To calibrate cavity after the t times Interior pressure.

The adjusted coefficient K of table 1i

It is of course also possible to pumpdown time is divided into more or less pressure segments, it is distinguished the segment being point and got over Close, the requirement to segment control algolithm precision is higher, and the pumpdown time of cost is longer;The segment divided is fewer, to segment Control algolithm precision is low, and the pumpdown time of cost is shorter.

Data acquisition module includes parallel arrangement of two submodules, and one of submodule, which is used to gather to be vibrated by school, to be passed The output of sensor, another submodule is used for the output for gathering standard vibration sensor.Each submodule includes series winding The input of charge amplifier and logging modle, wherein charge amplifier is connected with the output of vibrating sensor, charge amplifier Output end is connected with the input of logging modle, and the output end of logging modle is connected with the input of data processing module.

Data processing module is used to be compared amendment to standard vibration sensor and by the output valve of school vibrating sensor, Obtain sensitivity and the frequency characteristic of corrected sensor.

Data acquisition module and data processing module can use existing unit.

The present invention operation principle be:

Frequency meter inputs the signal source of certain frequency to signal generator, and signal generator exports sinusoidal current signal through work( Exciting source is input to after rate amplifier amplification, exciting source is produced the sinusoidal vibration in horizontal or vertical direction, due to being vibrated by school Sensor and standard vibration sensor are connected with exciting source, so also doing the sinusoidal vibration in horizontal or vertical direction therewith.Cause This, the quantity of electric charge that changes by sinusoidal rule can be all being produced by the output end of school vibrating sensor and standard vibration sensor, should The quantity of electric charge is recorded after amplifying respectively respectively through corresponding charge amplifier in data acquisition module by corresponding logging modle Parameter.Data processing unit will be corresponding by the output valve and standard vibration sensor of the corresponding logging modle of school vibrating sensor The output valve of logging modle is compared after amendment, sensitivity and frequency characteristic with regard to that can obtain corrected sensor.

It is to the specific method of Vibrating Sensor Calibration using the calibrating installation of above-mentioned vibrating sensor:

1st, corrected sensor is fixed in heater box, and the corrected sensor and standard transducer is back-to-back puts Put;

2nd, calibration cavity is fixedly connected and vacuumized with vibration isolation table, the vacuum in calibration chamber body is reached that calibration is required The vacuum wanted;

3rd, heater box and temperature control device are opened, makes the temperature value that environment temperature is risen to required for calibration in heater box;

4th, real-time, synchronization is to by the x excited by impact of school vibrating sensor and standard vibration sensor application formed objects;One As when calibrating x generally take the integral multiple of gravity acceleration value.

5th, data acquisition module collection in real time is distinguished by school vibrating sensor and standard transducer by after excited by impact The signal y1 and y2 (true value) of output;

6th, signal y1 and signal y2 are compared by data processing module, and corrected sensor is entered according to y1 and y2 difference Row amendment, obtains sensitivity and the frequency characteristic of corrected sensor.

Claims (8)

1. a kind of calibrating installation of vibrating sensor, including at standard vibration sensor, exciting source, data acquisition module and data Manage module;
It is characterized in that:
Also include calibration cavity, heater box, vibration isolation table, be connected with heater box and be located at the external temperature control device of calibration chamber and school The connected vacuum acquiring system of quasi- cavity;
The calibration cavity is fixed in the vibration isolation table, and airtight cavity is collectively forming with vibration isolation table;
The exciting source and heater box are arranged in the airtight cavity, wherein, exciting source is arranged on vibration isolation table upper surface, plus Hot tank is fixedly mounted on the exciting source by thermal insulating connectors;
The standard vibration sensor is fixedly installed in the heater box;
The data acquisition module is used to gather standard vibration sensor and the output signal by school vibrating sensor;
The data processing module is used to repair standard vibration sensor and being compared by the output signal of school vibrating sensor Just, sensitivity and the frequency characteristic of corrected sensor are obtained.
2. the calibrating installation of vibrating sensor according to claim 1, it is characterised in that:The vibration isolation table and for disposing Five pieces of cushion blockings are provided between the ground of vibration isolation table, wherein four pieces of cushion blockings are arranged at four drift angles of vibration isolation table, for ground Simultaneously balancing gravity makes basis steady to base vibration damping;Remaining one piece of cushion blocking is circular damping block, is arranged on vibration isolation table bottom centre, is used In the stabilization and vibration damping that keep vibration isolation table.
3. the calibrating installation of vibrating sensor according to claim 1, it is characterised in that:Be arranged with outside the exciting source every Hot jacket cylinder, the standard vibration sensor is fixed on insulating sleeve by thermal insulating connectors.
4. the calibrating installation of vibrating sensor according to claim 1, it is characterised in that:The temperature control device includes heat Heavy, electric heating unit, refrigeration unit and temperature conditioning unit;The heat sink use copper or stainless steel are made, and it is special that heat sink surface applies space flight With pitch-dark, absorptivity and hemispherical reflectance are above 0.9, and heat sink temperature scope is at 0 DEG C~100 DEG C;The refrigeration unit is outer The refrigeration machine put, heat sink is cooled down by outer circulation to described;The temperature conditioning unit includes high-precision platinum resistor.
5. the calibrating installation of vibrating sensor according to claim 1, it is characterised in that:The calibration cavity bottom is the One flange plate structure, the vibration isolation table upper surface has the second flange dish structure matched with the first flange dish structure; The calibration cavity is fixedly connected with vibration isolation table by first flange dish structure with second flange dish structure;The first flange disk Rubber seal is provided between structure and second flange dish structure.
6. the calibrating installation of vibrating sensor according to claim 1, it is characterised in that:Set at the top of the calibration cavity There is watch window;It is additionally provided with signaling interface, signaling interface and is sealed using vacuum mud on the calibration cavity.
7. the calibrating installation of vibrating sensor according to claim 2, it is characterised in that:Also include moving cart;It is mobile The ground for being used to dispose vibration isolation table is provided with dolly.
8. the side calibrated using the calibrating installation of any described vibrating sensor of claim 1 to 7 to vibrating sensor Method, it is characterised in that comprise the following steps:
1) corrected sensor is fixed in heater box, and corrected sensor and the standard transducer are placed back to back;
2) will calibration cavity be fixedly connected and vacuumize with vibration isolation table, make the vacuum in calibration chamber body reach calibration required for Vacuum;
3) heater box and temperature control device are opened, makes the temperature value that environment temperature is risen to required for calibration in heater box;
4) real-time, synchronization is to by the x excited by impact of school vibrating sensor and standard vibration sensor application formed objects;
5) gather in real time by school vibrating sensor and standard transducer by rear the signal y1 and y2 exported respectively excited by impact;
6) signal y1 is compared with signal y2, obtains sensitivity and the frequency characteristic of corrected sensor.
CN201710228709.0A 2017-04-10 2017-04-10 The calibrating installation and calibration method of a kind of vibrating sensor CN106969826A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107830927A (en) * 2017-12-10 2018-03-23 内蒙航天动力机械测试所 A kind of vibrating sensor is examined and calibrating installation and application method
CN108007559A (en) * 2017-11-10 2018-05-08 西安航天动力试验技术研究所 Vibrating sensor laser calibrating equipment and method under the conditions of a kind of thermal vacuum
CN108180987A (en) * 2018-02-05 2018-06-19 浙江大学 The calibrating installation of vibrating sensor
CN108180988A (en) * 2018-02-05 2018-06-19 浙江大学 Positive step acceleration exciting bank
CN108195462A (en) * 2018-02-05 2018-06-22 浙江大学 A kind of calibrating installation of vibrating sensor
CN108344883A (en) * 2018-02-05 2018-07-31 浙江大学 A kind of positive step acceleration exciting bank
CN108709624A (en) * 2018-05-07 2018-10-26 南昌航空大学 A kind of high-precision intrinsic frequency measurement method and device

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CN104344885A (en) * 2014-11-05 2015-02-11 北京航天计量测试技术研究所 Magnitude-phase absolute calibration device of high-temperature vibration sensor
CN105067109A (en) * 2015-07-29 2015-11-18 歌尔声学股份有限公司 Method for measuring vibration sensor frequency response characteristic
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Publication number Priority date Publication date Assignee Title
CN108007559A (en) * 2017-11-10 2018-05-08 西安航天动力试验技术研究所 Vibrating sensor laser calibrating equipment and method under the conditions of a kind of thermal vacuum
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CN108180988A (en) * 2018-02-05 2018-06-19 浙江大学 Positive step acceleration exciting bank
CN108195462A (en) * 2018-02-05 2018-06-22 浙江大学 A kind of calibrating installation of vibrating sensor
CN108344883A (en) * 2018-02-05 2018-07-31 浙江大学 A kind of positive step acceleration exciting bank
CN108709624A (en) * 2018-05-07 2018-10-26 南昌航空大学 A kind of high-precision intrinsic frequency measurement method and device
CN108709624B (en) * 2018-05-07 2020-05-15 南昌航空大学 High-precision natural frequency measuring method and device

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Application publication date: 20170721