CN106949841B - The measuring device of automatic detecting cassette support sag of chain - Google Patents
The measuring device of automatic detecting cassette support sag of chain Download PDFInfo
- Publication number
- CN106949841B CN106949841B CN201710277166.1A CN201710277166A CN106949841B CN 106949841 B CN106949841 B CN 106949841B CN 201710277166 A CN201710277166 A CN 201710277166A CN 106949841 B CN106949841 B CN 106949841B
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- Prior art keywords
- column
- sag
- cassette
- chain
- slide bar
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
Abstract
A kind of measuring device of automatic detecting cassette support sag of chain, including the first column and the second column being oppositely arranged, first column and the second column at least one be equipped with the slide bar that can be slided along longitudinal direction, and distance measuring sensor and several detection sensors on slide bar, distance measuring sensor and detection sensor are connect with a signal processing and display device signal, signal processing and display device judge whether the signal of detection sensor sending is supported by cassette according to the signal of detection sensor passes and block, distance measuring sensor measures the locating height of cassette support when the signal that detection sensor issues is blocked, signal processing and display device calculate the sag of chain that cassette supports according to the height measured.When carrying out inspection to the sag of chain that cassette supports using measuring device of the invention, measuring device need to only be moved to without taking out cassette at cassette, it is easy to operate.
Description
Technical field
It is automatic the present invention relates to being used in technical field of flat panel display more particularly to a kind of flat-panel monitor manufacturing process
The measuring device of point inspection cassette support sag of chain.
Background technique
In the manufacturing process of flat-panel monitor, it usually needs the glass substrate of display is put together in cassette,
Corresponding work is placed it in by taking out glass substrate in cassette using mechanical arm (Robot Fork) when needing to assemble
It is assembled position.
In the cassette for placing glass substrate, since the length of cassette support is longer, and need to bear in use
Most of weight of glass substrate, therefore, after a large amount of conveying and picking and placing work, the support of cassette can be due to deformation
It is sagging, if can not find in time, when the sag of chain of cassette support is excessive, it will lead to glass substrate in cassette
Position it is too low, using mechanical arm pick and place glass substrate when, easily because the raising height of mechanical arm be greater than glass substrate
Actual height and cause striker, the glass substrate and mechanical arm being damaged in cassette.
To solve the above problems, needing regularly to put the height of inspection cassette support.The point procuratorial organ that industry mainly uses at present
Formula is: cassette being taken out, is placed on cassette maintenance platform, carries out an inspection to cassette sag of chain using special fixture.Such point
The special fixture used in procuratorial organ's formula includes column and multiple grooves being parallel to each other for being opened on column, will in inspection
Special fixture is placed on cassette maintenance platform and moves closer to cassette, if the glass substrate placed in cassette is inserted into corresponding to
Groove in, then the sag of chain for showing cassette within the range of permission, otherwise then thinks that the sag of chain of cassette is excessive.Such point
Although procuratorial organ's formula can put the undesirable cassette of detection, due to needing cassette taking out laying bracket when inspection, by card
Casket and special fixture are placed on cassette maintenance platform and adjust levelness, and operating point inspection, relative complex, time-consuming, and due to
The requirement of dustless production operation specification must clean cassette after the completion of point inspection, and which increases a complexity for inspection operation
The time of property and cost.
Summary of the invention
In view of this, it is necessary to provide a kind of measuring devices of automatic detecting cassette support sag of chain.
The measuring device of automatic detecting cassette provided by the invention support sag of chain, including the first column for being oppositely arranged and
Second column, first column and second column at least one be equipped with the slide bar slided along longitudinal direction, Yi Jishe
In distance measuring sensor and several detection sensors on the slide bar, the detection sensor is used to sense in several detections
The sag of chain of perception cassette support when the light that device issues is blocked, the distance measuring sensor are used to sense in several detections
The sag of chain that measurement cassette supports when the light of device is blocked by cassette support, the distance measuring sensor and the detection sensor with
One signal processing and the connection of display device signal, the signal processing and display device are used for according to the detection sensor passes
Light judge whether the light that the detection sensor issues is blocked by the free end that cassette supports, the distance measuring sensor is used
It is measured when the light issued in the detection sensor is blocked by cassette support free end locating for cassette support free end
Height, the signal processing and display device, which are used to be calculated according to height locating for the cassette support free end measured, blocks
The sag of chain of casket support, the measuring device further include driving device and the driving connecting with driving device signal dress
Controller is set, the driving device drives the slide bar above and below corresponding column under the control of the drive set controller
Movement.
Further, the slide bar and several detection sensors are set on first column, and several inspections
Know sensor while there is the transmitting and receive capabilities of light, second column, which is equipped with, can reflect several detection biographies
The reflecting surface for the light that sensor issues.
Further, the reflecting surface is formed directly on second column or is formed in the reflection of second column
On plate.
Further, the slide bar and several detection sensors are respectively arranged on first column and described second and stand
On column, several detection sensors include several first detections for being set on first column and having light emission function
Sensor and on second column and with light receiver function several second detection sensors.
Further, several detection sensors are equally spaced along the short transverse of corresponding column, adjacent detection sensing
The distance between device is equal to the distance between adjacent cassette support root.
Further, the slide bar is equipped with rack gear, and the measuring device further includes gear cooperating with the rack,
The gear and the driving device are mechanically connected.
Further, it is equipped with the slide bar on first column and second column, the slide bar is equipped with tooth
Item, the rack gear pass through the output axis connection of gear and a driving device, and the driving device, which is set to, connects first column
On lateral strut between second column.
Further, the jack rod sleeve is set to corresponding column periphery, opens on one of the slide bar and corresponding column
Equipped with sliding rail, the slide bar and corresponding column it is wherein another on be formed with the raised line matched with the sliding rail.
The sag of chain that cassette supports is carried out in the measuring device using automatic detecting cassette support sag of chain of the invention
When point inspection, only measuring device need to be moved at cassette and can be carried out, without cassette is taken out laying bracket again, and without in point
Cassette is cleaned after the completion of inspection, to simplify the time of the process of inspection operation and cost；Also, due to of the invention
The specific value that measuring device can measure cassette support sag of chain is blocked therefore, it is possible to analyze the data measured
The sag of chain of casket support exceeds early warning, convenient replacement in time or maintenance cassette, and can correspondingly reduce the probability of striker.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And it can be implemented in accordance with the contents of the specification, and in order to allow above and other objects, features and advantages of the invention can
It is clearer and more comprehensible, it is special below to lift preferred embodiment, and cooperate attached drawing, detailed description are as follows.
Detailed description of the invention
The measuring device of the automatic detecting cassette support sag of chain of first embodiment of the invention shown in Fig. 1 and the structure of cassette
Schematic diagram；
It is defeated that Fig. 2 show the data measured using the measuring device of automatic detecting cassette support sag of chain of the invention
Schematic diagram out.
Fig. 3, which is shown, carries out the schematic diagram that sag of chain exceeds early warning using the sagging amount measurement data of some cassette support.
The measuring device of the automatic detecting cassette support sag of chain of second embodiment of the invention shown in Fig. 4 and the structure of cassette
Schematic diagram；
Wherein, 10- cassette, 11- top frame, 12- bottom frame, 13- lateral brace, 14- back prop, the collateral support of 15-, 16- rear support,
20,30- measuring device, 21, the first column of 31-, 211,311,321- slide bar, 212,312- sliding rail, 213,313,323- rack gear,
214,314,324- gear, 215,315,325- detection sensor, 216,316- distance measuring sensor, 217,227- movable pulley, 22,
The second column of 32-, 221- reflecting plate, 23,33- lateral strut, 24,34- driving device, 25- signal processing and display device, 26-
Drive set controller.
Specific embodiment
It is of the invention to reach the technical means and efficacy that predetermined goal of the invention is taken further to illustrate, below in conjunction with
Attached drawing and preferred embodiment, the present invention is described in detail as follows.
As shown in Figure 1, the present invention need point inspection a cassette 10 include top frame 11, bottom frame 12, lateral brace 13, back prop 14,
Collateral support 15 and rear support 16.
Wherein, top frame 11 and bottom frame 12 are rectangle frame, and pass through several 13 Hes of lateral brace between top frame 11 and bottom frame 12
Several back props 14 connect.The inside of each lateral brace 13 is respectively and fixedly provided with the collateral support that several short transverses along lateral brace 13 arrange
15, the inside of each back prop 14 is respectively and fixedly provided with the rear support 16 of several short transverse (i.e. longitudinal) arrangements along back prop 14.Respectively
Collateral support 15 extends along the length direction (i.e. left and right directions in Fig. 1) of cassette 10, and each rear support 16 is along the width side of cassette 10
Extend to (i.e. front-rear direction in Fig. 1).The mounting height of rear support 16 should be consistent with the mounting height of corresponding collateral support 15,
Rear support 16 and respective side is set to support 15 upper surface that several load planes for being used for bearing glass panel are collectively formed with this.
In addition, length of the length of rear support 16 much larger than collateral support 15, in the present embodiment, the length of collateral support 15 is about 30 lis
Rice, the length of rear support 16 is about 1.2 meters, along with rear support 16 is usually made of aluminium alloy, and makes the rear branch of cassette 10
Support 16 easily deform with it is sagging.
First embodiment
Please continue to refer to Fig. 1, the measuring device 20 of the automatic detecting cassette support sag of chain of first embodiment of the invention is wrapped
It includes the first column 21 and the second column 22 that two are oppositely arranged and are parallel to each other and to be connected to the first column 21 and second vertical
Lateral strut 23 between the top of column 22.Wherein, the first column 21 is equipped with one and can slide along the short transverse of the first column 21
Slide bar 211, in the present embodiment, the cross section of slide bar 211 is substantially in the concave of bottom end opening, i.e. slide bar 211 includes
Three side walls, three side walls surround the structure that a cross section is substantially in " ㄇ " font, and are used in three side walls
It connects and protrudes out to form a raised line (not shown) to the inside of " ㄇ " character form structure on the side wall of other two side walls, which is embedded
In one along the sliding rail 212 that the short transverse of the first column 21 extends, in this way, making slide bar 211 can be in raised line and sliding rail 212
Guide the short transverse sliding of the first column of lower edge 21.It should be understood that in other embodiments of the invention, raised line and sliding rail
212 position can be interchanged, i.e., raised line is set on the first column 21, and sliding rail 212 is set on slide bar 211.In addition, in this hair
In bright other embodiments, other installations and fit system can also be used between slide bar 211 and the first column 21, such as will
The cross section of slide bar 211 is made " mouth " font, and slide bar 211 is set in the periphery etc. of the first column 21, as long as 211 He of slide bar
The installation of first column 21 and fit system can be such that slide bar 211 slides along the short transverse of the first column 21.
Further, in order to which driving slider 211 is slided along the first column 21, the bottom of slide bar 211 is equipped with a rack gear 213,
Measuring device of the invention further includes a gear 214 matched with rack gear 213, and gear 214 and a driving device 24 are mechanical even
It connects, in the present embodiment, gear 214 is connected with the output shaft of a driving motor, makes slide bar 211 can be under the driving of driving motor
Short transverse along the first column 21 is slided upward or downward.
Further, in slide bar 211 towards equidistant arrangement has several detections to pass from top to bottom on the surface of the second column 22
Sensor 215, in the present embodiment, slide bar 211 are equipped with 20 detection sensors 215, these detection sensors 215 are with receipts
The sensor of isolychn or semiotic function, and in the position of these detection sensors 215 and cassette 10 respective side support 15 and after
The position of support 16 is corresponding, and the light/signal for issuing these detection sensors 215 is by respective side support 15 with after
At the upper surface straightline propagation to the second column 22 of measuring device of support 16, sensor is sensed after the reflection of the second column 22
215 sense.
In order to allow the second column 22 to reflect the light or signal of the sending of detection sensor 215,22 direction of the second column
The surface of first column 21 is equipped with a reflecting plate 221 with reflecting surface, or directly by the second column 22 towards the first column
21 surface is set as can be with reflection light or the reflecting surface of signal.
Further, the lower part of slide bar 211 is additionally provided with the downward distance measuring sensor 216 of a transmitting terminal, the distance measuring sensor
216 for measuring the distance between itself and a datum level, so that the position of detection sensor 215 on slide bar 211 is calculated, and then
To the sag of chain of 10 rear support 16 of cassette.
Further, in order to keep the measuring device 20 of automatic detecting cassette support sag of chain of the present invention easy to remove, the
The bottom of one column 21 and the second column 22 is additionally provided with movable pulley 217,227.
In order to which the information sensed to detection sensor 215 and distance measuring sensor 216 is handled, and convenient for being filled to driving
It sets 24 to be controlled, detection sensor 215 and distance measuring sensor 216 are believed by data line and a signal processing and display device 25
Number connection, driving device 24 are connect by data line with 26 signal of a drive set controller.It is to be appreciated that signal processing and
Display device 25 and drive set controller 26 can be two devices independent, can also be realized simultaneously by a device
The function of above-mentioned two device.In the present embodiment, signal processing and display device 25 and drive set controller 26 close two and are
One, it is a computer, corresponding software is installed in the computer, the work of driving device 24 can be controlled, and can
It, and can with according to the sag of chain of the signal monitoring of detection sensor 215 and distance measuring sensor 216 and record 10 rear support 16 of cassette
More intuitively to observe the sag of chain measured by the display of computer.
Specifically, when the 20 points of inspection cassettes of measuring device for needing the automatic detecting cassette support sag of chain using the present embodiment
When the sag of chain of 10 rear supports 16: first measuring device 20 being pushed at cassette 10, is located at the first column 21 and the second column 22
The two sides of cassette 10, and adjust mistake of the measuring device 20 in the position of 10 width direction of cassette, in adjustment 20 position of measuring device
The signal reception state that detection sensor 215 is observed in journey, when detection sensor 215 is just become by the state that reception obtains signal
When just switching to OFF state by ON state for the state of the state for not receiving signal, the i.e. reception of detection sensor 215 signal,
Show that the location of detection sensor 215 is just directed at the root or free end of 10 rear support 16 of cassette, measuring device 20
It is adjusted in place in the position of 10 width direction of cassette；Then, it is controlled using drive set controller 26 and is lowered in driving device 24
The position of detection sensor 215 on whole first column 21, when the light or signal of the sending of some detection sensor 215 are just right
The rear support 16 for the cassette 10 answered is blocked, i.e., the state that the detection sensor 215 receives signal just switchs to OFF shape by ON state
When state, show the position that the position that the detection sensor 215 is presently in just is presently in corresponding 10 rear support 16 of cassette
Horizontalization is neat, and therefore, the height that the detection sensor 215 that signal processing and display device 25 record at this time is presently in is pair
The height that the root or free end for 10 rear support 16 of cassette answered are presently in, the pre-set card of system is highly subtracted using this
(i.e. corresponding 10 rear support 16 of cassette is without locating for sagging its free end before or root for the calibrated altitude of 10 rear support 16 of casket
Highly), the sag of chain of 10 rear support of cassette, 16 root, free end can be obtained.According to the method, in available cassette 10
The sag of chain of all 16 roots of rear support, free end, and the sag of chain data of all 16 free ends of rear support or root are carried out
Summarize output (as shown in Figure 2), and can the sag of chain periodically to the rear support 16 in cassette 10 carry out inspection, by recording every time
10 rear support of cassette, 16 sag of chain data analysis, carry out sag of chain exceed early warning (as shown in Figure 3).
Second embodiment
The measuring device 30 of the automatic detecting cassette support sag of chain of the present embodiment and the automatic detecting card of first embodiment
Casket supports the measuring device 20 of sag of chain essentially identical, and difference essentially consists in the structure of the second column 32.
As shown in figure 4, in the present embodiment, the structure of the second column 32 and the first column 31 is essentially identical, and this implementation
First column 31 of example is identical with the structure of the first column 21 of first embodiment.Specifically, the first of the present embodiment is vertical
Column 31 also include can along the short transverse of the first column 31 slide slide bar 311 (claiming the first slide bar herein), be set to the first column
Sliding rail 312 and raised line (claiming the first sliding rail and the first raised line herein), the tooth set on 311 bottom of slide bar between 31 and slide bar 311
Item 313 (claiming the first rack gear herein), several detection sensors 315 on the surface of the second column 32 of direction of slide bar 311
The downward distance measuring sensor 316 of (claiming the first detection sensor herein) and transmitting terminal set on 311 lower part of slide bar.It needs
Bright, in the present embodiment, the detection sensor 315 on the first column 31 can only have the function for sending light or signal
Energy.
It corresponds, second column 32 of the present embodiment includes the slide bar that can be slided along the short transverse of the second column 32
321 (claiming the second slide bar herein), the sliding rail (not shown) between the second column 32 and slide bar 321 and raised line (claim herein
Two sliding rails and the second raised line), set on the rack gear 323 (claiming the second rack gear herein) of 321 bottom of slide bar and set on the court of slide bar 321
Several detection sensors 325 (claiming the second detection sensor herein) on the surface of the first column 32.In the present embodiment, if
Can only have the function of receiving light or signal in the detection sensor 325 on the second column 32.
In addition, in the present embodiment, lateral strut 33 is connected between the first column 31 and the bottom of the second column 32, and with
The gear 314,324 (claiming first gear, second gear herein) and coupled driving device that rack gear 313,323 matches
34 are set on lateral strut 33, in the present embodiment, the tool of driving device 34 there are two output shaft, two output shafts respectively with it is corresponding
First gear 314 be connected with second gear 324, thus allow a driving device 34 simultaneously the edge of driving slider 311 and 321
The short transverse of first column 31 and the second column 32 is slided upward or downward.
It is propped up after needing 30 points of inspection cassettes 10 of measuring device using the automatic detecting cassette support sag of chain of the present embodiment
When the sag of chain of support 16, first measuring device 30 is pushed at cassette 10, passes through lateral strut 33 by 10 bottom of cassette, and makes first
Column 31 and the second column 32 are located at the two sides of cassette 10, then, adjustment measuring device 30 in the position of 10 width direction of cassette,
The location of the first detection sensor and the second detection sensor is set just to be directed at free end or the root of 10 rear support 16 of cassette
Portion then adjusts the first detection sensor and the second detection sensor in the first column using about 26 drive set controller
31 and the second height on column 32, the light or signal issued when some first detection sensor is just by corresponding cassette 10
Rear support 16 is blocked, i.e., when the state that corresponding second detection sensor receives signal just switchs to OFF state by ON state, table
Just work as with corresponding 10 rear support 16 of cassette the position that the bright first detection sensor and the second detection sensor are presently in
The location of preceding concordant, the height that signal processing and display device 25 record at this time is corresponding 10 rear support 16 of cassette
The height that free end or root are presently in, the standard that pre-set 10 rear support 16 of cassette of system is highly subtracted using this are high
Degree (i.e. 10 rear support 16 of cassette is without height locating for sagging its free end before or root), is propped up after the cassette 10 can be obtained
Support the sag of chain of 16 free ends or root.According to the method, all 16 free ends of rear support or root in available cassette 10
Sag of chain, and the sag of chain data of all 16 free ends of rear support or root are carried out to summarize output, and can be periodically to cassette
The sag of chain of 10 rear supports 16 carries out an inspection, by the analysis of 10 rear support of cassette, the 16 sag of chain data recorded every time, carries out
Sag of chain exceeds early warning.
It should be noted that after the measuring device of automatic detecting cassette support sag of chain of the invention cannot be only used for measurement
The sag of chain of support 16 can be used for measuring the sag of chain of collateral support 15, when measuring the sag of chain of collateral support 15, only need pair
The placement location of the measuring device of automatic detecting cassette support sag of chain is adaptively adjusted.
In conclusion in the measuring device using automatic detecting cassette support sag of chain of the invention under cassette support
When vertical amount carries out inspection, measuring device need to only be moved at cassette, the regular point of sag of chain is supported to cassette according to scheduled process
Inspection, it is not necessary that cassette is taken out its laying bracket during inspection, and due to during inspection without touching cassette,
There is no need to be cleaned after the completion of inspection to cassette, to simplify the process of inspection operation and the time of cost；Also,
Due to measuring device of the invention can measure cassette support sag of chain specific value, therefore, it is possible to the data measured into
Row analysis, the sag of chain for carrying out cassette support exceeds early warning, convenient replacement in time or maintenance cassette, and can correspondingly reduce striker
Probability.
The above described is only a preferred embodiment of the present invention, be not intended to limit the present invention in any form, though
So the present invention has been disclosed as a preferred embodiment, and however, it is not intended to limit the invention, any technology people for being familiar with this profession
Member, without departing from the scope of the present invention, when the technology contents using the disclosure above make a little change or modification
It is right according to the technical essence of the invention for the equivalent embodiment of equivalent variations, but without departing from the technical solutions of the present invention
Any simple modification, equivalent change and modification made by above embodiments, all of which are still within the scope of the technical scheme of the invention.
Claims (8)
1. a kind of measuring device of automatic detecting cassette support sag of chain, which is characterized in that it includes that first be oppositely arranged stands
At least one is equipped with the slide bar slided along longitudinal direction for column and the second column, first column and second column, with
And distance measuring sensor and several detection sensors on the slide bar, the detection sensor are used in several detections
The sag of chain of perception cassette support, the distance measuring sensor are used in several detections when the light that sensor issues is blocked
The sag of chain that measurement cassette supports when the light of sensor is blocked by cassette support, the distance measuring sensor and detection sensing
Device is connect with a signal processing and display device signal, and the signal processing and display device are used for according to the detection sensor
The light of transmitting judges whether the light that the detection sensor issues is blocked by cassette support, and the distance measuring sensor is used for
The light that the detection sensor issues measures the cassette support locating height when being blocked by cassette support, at the signal
Reason and display device are used to calculate the sag of chain of cassette support, the measurement according to the locating height of the cassette support measured
Device further includes driving device and the drive set controller that connect with the driving device signal, and the driving device exists
The slide bar is driven to move up and down under the control of the drive set controller along corresponding column.
2. the measuring device of automatic detecting cassette support sag of chain according to claim 1, it is characterised in that: the slide bar
It is set on first column with several detection sensors, and several detection sensors have the transmitting of light simultaneously
And receive capabilities, second column are equipped with the reflecting surface that can reflect the light that several detection sensors issue.
3. the measuring device of automatic detecting cassette support sag of chain according to claim 2, it is characterised in that: the reflection
Face is formed directly on second column or is formed on the reflecting plate of second column.
4. the measuring device of automatic detecting cassette support sag of chain according to claim 1, it is characterised in that: the slide bar
It is respectively arranged on first column and second column with several detection sensors, several detection sensor packets
It includes to be set on first column and there are several first detection sensors of light emission function and be set to described second and stand
On column and with light receiver function several second detection sensors.
5. the measuring device of automatic detecting cassette support sag of chain according to claim 1, it is characterised in that: described several
Detection sensor is equally spaced along the short transverse of corresponding column, and the distance between adjacent detection sensor is equal to adjacent cassette branch
Support the distance between root.
6. the measuring device of automatic detecting cassette support sag of chain according to claim 1, it is characterised in that: the slide bar
It is equipped with rack gear, the measuring device further includes gear cooperating with the rack, the gear and the driving device machine
Tool connection.
7. the measuring device of automatic detecting cassette support sag of chain according to claim 1, it is characterised in that: described first
The slide bar is equipped on column and second column, the slide bar is equipped with rack gear, and the rack gear is driven by gear and one
The output axis connection of dynamic device, the driving device are set to the lateral strut connected between first column and second column
On.
8. the measuring device of automatic detecting cassette support sag of chain according to claim 1, it is characterised in that: the slide bar
It is sheathed on corresponding column periphery, offers sliding rail on one of the slide bar and corresponding column, the slide bar is stood with corresponding
Column it is wherein another on be formed with the raised line matched with the sliding rail.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710277166.1A CN106949841B (en) | 2017-04-25 | 2017-04-25 | The measuring device of automatic detecting cassette support sag of chain |
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| CN201710277166.1A CN106949841B (en) | 2017-04-25 | 2017-04-25 | The measuring device of automatic detecting cassette support sag of chain |
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| CN106949841A CN106949841A (en) | 2017-07-14 |
| CN106949841B true CN106949841B (en) | 2019-08-30 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107479060B (en) * | 2017-08-17 | 2019-09-27 | 京东方科技集团股份有限公司 | Cassette cleaning equipment |
| CN108253892A (en) * | 2017-12-30 | 2018-07-06 | 南京陶特思软件科技有限公司 | Detect the measuring device of silicon chip sag of chain |
| CN112362004B (en) * | 2020-11-05 | 2022-12-23 | 惠科股份有限公司 | Cassette detection device and method, and substrate processing production line |
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| CN106441189A (en) * | 2016-09-22 | 2017-02-22 | 东旭科技集团有限公司 | Glass substrate sag measuring device and glass substrate sag measuring method |
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| CN106949841A (en) | 2017-07-14 |
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Application publication date: 20170714 Assignee: Yungu (Gu'an) Technology Co., Ltd.|Bazhou Yungu Electronic Technology Co., Ltd.|Kunshan Institute of technology new flat panel display technology center Co., Ltd Assignor: Kunshan Guo Xian Photoelectric Co., Ltd. Contract record no.: X2019990000157 Denomination of invention: Automatic point inspection cartridge support sag amount measurement device Granted publication date: 20190830 License type: Common License Record date: 20191031 |
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Effective date of registration: 20191206 Address after: No. 2 Xiangshan Avenue, Yongning Street, Zengcheng District, Guangzhou, Guangdong province (the core of Zengcheng economic and Technological Development Zone) Patentee after: Guangzhou Guoxian Technology Co., Ltd Address before: 215300, No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou, 4 Patentee before: Kunshan Guo Xian Photoelectric Co., Ltd. |